Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497271
M. Grumann, L. Riegger, L. Pastewka, T. Brenner, R. Zengerle, J. Ducrée, T. Nann, J. Riegler, O. Ehlert, K. Mittenbuhler, G. Urban
This paper presents an optical concept for the read-out of a parallel, bead-based fluorescence immunoassay conducted on a lab-on-a-disk platform. The reusable part of the modular setup comprises a detection unit featuring a single LED as light source, two emission-filters, and a color CCD-camera as standard components together with a spinning drive as actuation unit. The miniaturized lab-on-a-disk is devised as a disposable. In the read-out process of the parallel assay, beads are first identified by the color of incorporated quantum dots (QDs). Next, the reaction-specific fluorescence signal is quantified with FluoSpheres-labeled detection anti-bodies. To enable a fast and automated read-out, suitable algorithms have been implemented in this work. Based on this concept, we successfully demonstrated a Hepatitis-A assay on our disk-based lab-on-a-chip.
{"title":"Parallelization of chip-based fluorescence immuno-assays with quantum-dot labeled beads","authors":"M. Grumann, L. Riegger, L. Pastewka, T. Brenner, R. Zengerle, J. Ducrée, T. Nann, J. Riegler, O. Ehlert, K. Mittenbuhler, G. Urban","doi":"10.1109/SENSOR.2005.1497271","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497271","url":null,"abstract":"This paper presents an optical concept for the read-out of a parallel, bead-based fluorescence immunoassay conducted on a lab-on-a-disk platform. The reusable part of the modular setup comprises a detection unit featuring a single LED as light source, two emission-filters, and a color CCD-camera as standard components together with a spinning drive as actuation unit. The miniaturized lab-on-a-disk is devised as a disposable. In the read-out process of the parallel assay, beads are first identified by the color of incorporated quantum dots (QDs). Next, the reaction-specific fluorescence signal is quantified with FluoSpheres-labeled detection anti-bodies. To enable a fast and automated read-out, suitable algorithms have been implemented in this work. Based on this concept, we successfully demonstrated a Hepatitis-A assay on our disk-based lab-on-a-chip.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"16 1","pages":"1114-1117 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73422692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497329
Christoph Friese, Hans Zappe
The combination of full-wafer bonding with a polymer technology for the fabrication of deformable micro-mirrors is presented. A self-supporting membrane mirror fabricated using SU-8 can be used for adaptive optical systems. Electrostatic actuation is used in combination with an electrode array beneath the membrane to deform the mirror. The mechanical properties of the SU-8 polymer are such that the forces required for deflection are reduced, thus increasing mirror flexibility and sensitivity, but the fabrication process is simple and potentially low cost. The described technology can also be used to produce other types of membrane devices such as pressure sensors, pumps or valves.
{"title":"Micro-mirror arrays for adaptive optics fabricated in polymer technology","authors":"Christoph Friese, Hans Zappe","doi":"10.1109/SENSOR.2005.1497329","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497329","url":null,"abstract":"The combination of full-wafer bonding with a polymer technology for the fabrication of deformable micro-mirrors is presented. A self-supporting membrane mirror fabricated using SU-8 can be used for adaptive optical systems. Electrostatic actuation is used in combination with an electrode array beneath the membrane to deform the mirror. The mechanical properties of the SU-8 polymer are such that the forces required for deflection are reduced, thus increasing mirror flexibility and sensitivity, but the fabrication process is simple and potentially low cost. The described technology can also be used to produce other types of membrane devices such as pressure sensors, pumps or valves.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"67 1","pages":"1342-1345 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79844286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496641
Jong-Man Kim, Sanghyo Lee, Jaehyoung Park, Jung-Mu Kim, C. Baek, Y. Kwon, Yong-Kweon Kim
In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performance has been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm/spl times/1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In the analog operating region of the capacitor, the center frequency could be tuned from 20.7 to 18 GHz, which means a tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With a bias voltage of 60 V, the membrane collapsed to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.
{"title":"Low loss K-band tunable bandpass filter using micromachined variable capacitors","authors":"Jong-Man Kim, Sanghyo Lee, Jaehyoung Park, Jung-Mu Kim, C. Baek, Y. Kwon, Yong-Kweon Kim","doi":"10.1109/SENSOR.2005.1496641","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496641","url":null,"abstract":"In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performance has been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm/spl times/1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In the analog operating region of the capacitor, the center frequency could be tuned from 20.7 to 18 GHz, which means a tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With a bias voltage of 60 V, the membrane collapsed to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"42 1","pages":"1071-1074 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82466175","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496454
Keisuke Hachisuka, Yusuke Terauchi, Yoshinori Kishi, T. Hirota, Ken Sasaki, H. Hosaka, K. Ito
Intrabody communication using the human body as the transmission medium enables wireless communication without emitting radio waves into the air. Empirical results on signal transmission gain in the frequency range from 1 to 1000 kHz have shown that the two-electrode model, in which only one of the two electrodes of the transmitter and receiver are attached to the human body, has greater gain than the four-electrode model, in which all four electrodes are attached to the human body. Calculated gains based on four-terminal circuit models of two different electrode arrangements agree with experimental results. The validity of the four-terminal circuit models in the MHz frequency band was investigated using a 10.7-MHz intrabody sine-wave transmitter and receiver fabricated for this purpose. The results also indicate that the two-electrode model is more suitable for high-speed intrabody communication devices than the four-electrode model.
{"title":"Simplified circuit modeling and fabrication of intrabody communication devices","authors":"Keisuke Hachisuka, Yusuke Terauchi, Yoshinori Kishi, T. Hirota, Ken Sasaki, H. Hosaka, K. Ito","doi":"10.1109/SENSOR.2005.1496454","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496454","url":null,"abstract":"Intrabody communication using the human body as the transmission medium enables wireless communication without emitting radio waves into the air. Empirical results on signal transmission gain in the frequency range from 1 to 1000 kHz have shown that the two-electrode model, in which only one of the two electrodes of the transmitter and receiver are attached to the human body, has greater gain than the four-electrode model, in which all four electrodes are attached to the human body. Calculated gains based on four-terminal circuit models of two different electrode arrangements agree with experimental results. The validity of the four-terminal circuit models in the MHz frequency band was investigated using a 10.7-MHz intrabody sine-wave transmitter and receiver fabricated for this purpose. The results also indicate that the two-electrode model is more suitable for high-speed intrabody communication devices than the four-electrode model.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"106 1","pages":"461-464 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76091272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496546
S. Nakao, T. Ando, M. Shikida, Kazuo Sato
We evaluated the fracture toughness of micron-sized single-crystal-silicon film at temperatures ranging from 293 K to 773 K by using an "on-chip" tensile testing method. We made a 1-/spl mu/m-long notch on one side of a thin film specimen using a focused ion beam (FIB) process. The fracture toughness was 1.29 MPam/sup 1/2/ at room temperature. It rapidly increased at 353 K, reaching almost double that at room temperature and then saturated at higher temperatures. A few specimens tested at 423 K and 573 K showed a non-linear relationship between stress and strain due to plastic deformation around the notch.
{"title":"Temperature-dependent fracture toughness of single-crystal-silicon film","authors":"S. Nakao, T. Ando, M. Shikida, Kazuo Sato","doi":"10.1109/SENSOR.2005.1496546","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496546","url":null,"abstract":"We evaluated the fracture toughness of micron-sized single-crystal-silicon film at temperatures ranging from 293 K to 773 K by using an \"on-chip\" tensile testing method. We made a 1-/spl mu/m-long notch on one side of a thin film specimen using a focused ion beam (FIB) process. The fracture toughness was 1.29 MPam/sup 1/2/ at room temperature. It rapidly increased at 353 K, reaching almost double that at room temperature and then saturated at higher temperatures. A few specimens tested at 423 K and 573 K showed a non-linear relationship between stress and strain due to plastic deformation around the notch.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"58 1","pages":"832-835 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87484976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.
{"title":"A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring","authors":"Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, J. Jiao, Heng Yang, Ying Zhang","doi":"10.1109/SENSOR.2005.1496373","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496373","url":null,"abstract":"A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"63 1","pages":"117-120 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87017600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496470
B. Diem, J. Barbe, F. de Crécy, S. Giroud, D. Renaud, H. Grange, J. Hammond, J. Vandemeer, R. Roop, B. Gogoi
A new technology has been developed that combines high aspect ratio SOI surface micromachining with polysilicon packaging and a new nitride anchor process with robust release etch manufacturing margin. Based on an accurate damping model, the thickness of the SOI layer was defined to achieve an overdamped mechanical response and high performance on a low g accelerometer. Over-damping is required to filter the noise from parasitic vibration in automotive applications. This technology was designed for low cost and high performance inertial sensors.
{"title":"Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensors","authors":"B. Diem, J. Barbe, F. de Crécy, S. Giroud, D. Renaud, H. Grange, J. Hammond, J. Vandemeer, R. Roop, B. Gogoi","doi":"10.1109/SENSOR.2005.1496470","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496470","url":null,"abstract":"A new technology has been developed that combines high aspect ratio SOI surface micromachining with polysilicon packaging and a new nitride anchor process with robust release etch manufacturing margin. Based on an accurate damping model, the thickness of the SOI layer was defined to achieve an overdamped mechanical response and high performance on a low g accelerometer. Over-damping is required to filter the noise from parasitic vibration in automotive applications. This technology was designed for low cost and high performance inertial sensors.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"40 1","pages":"527-530 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86234585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496490
A. Sathaye, A. Lal
We report on capacitive detection and single particle cytometry using rotating flexural plate modes of center-anchored surface micromachined polysilicon disk actuators. Current state-of-the-art cytometry systems are expensive and have bulky laser interrogation subsystems. Therefore, several efforts are underway to miniaturize these systems using microfluidic components such as microvalves and pumps (Chou, H. et al., Solid state sensors and actuators workshop, 1998). However, most of these systems require large off-chip pumps/valves, or high voltages for cell manipulation. We present an integrated system with pumping, trapping, and the ability to integrate one particle for a long time after trapping using a wide variety of surface sensors, all in a potentially battery powered format.
我们报告了电容检测和单颗粒细胞术使用中心锚定表面微机械多晶硅盘驱动器的旋转弯曲板模式。目前最先进的细胞术系统价格昂贵，并且具有体积庞大的激光询问子系统。因此，一些努力正在进行，以小型化这些系统使用微流体组件，如微阀和泵(Chou, H. et al.，固态传感器和执行器研讨会，1998)。然而，这些系统中的大多数需要大型片外泵/阀，或用于细胞操作的高电压。我们提出了一个集成系统，具有泵送、捕获和捕获一个粒子后长时间集成的能力，使用各种表面传感器，所有这些都可能是电池供电的形式。
{"title":"Particle cytometer utilizing rotating flexural plate modes and capacitive sensing","authors":"A. Sathaye, A. Lal","doi":"10.1109/SENSOR.2005.1496490","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496490","url":null,"abstract":"We report on capacitive detection and single particle cytometry using rotating flexural plate modes of center-anchored surface micromachined polysilicon disk actuators. Current state-of-the-art cytometry systems are expensive and have bulky laser interrogation subsystems. Therefore, several efforts are underway to miniaturize these systems using microfluidic components such as microvalves and pumps (Chou, H. et al., Solid state sensors and actuators workshop, 1998). However, most of these systems require large off-chip pumps/valves, or high voltages for cell manipulation. We present an integrated system with pumping, trapping, and the ability to integrate one particle for a long time after trapping using a wide variety of surface sensors, all in a potentially battery powered format.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"22 1","pages":"605-608 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83688149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497489
E. Yoon, K. Yun
This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is composed of an electrochemical sensor, a custom potentiostat module, and an RF module for wireless communication. Also, the authors presented monolithic MEMS VCOs integrated with high-Q MEMS inductors and MEMS transmission lines for low-power wireless transceiver applications. Phase noise of the proposed MEMS VCOs has been improved by more than 7 dBc/Hz compared with their CMOS counterparts at 1MHz offset from center frequencies of 5GHz and 13 GHz, respectively.
{"title":"Development of a wireless environmental sensor system and MEMS-based RF circuit components","authors":"E. Yoon, K. Yun","doi":"10.1109/SENSOR.2005.1497489","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497489","url":null,"abstract":"This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is composed of an electrochemical sensor, a custom potentiostat module, and an RF module for wireless communication. Also, the authors presented monolithic MEMS VCOs integrated with high-Q MEMS inductors and MEMS transmission lines for low-power wireless transceiver applications. Phase noise of the proposed MEMS VCOs has been improved by more than 7 dBc/Hz compared with their CMOS counterparts at 1MHz offset from center frequencies of 5GHz and 13 GHz, respectively.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"59 1","pages":"1981-1985 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83985130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496540
Yanying Feng, Zhaoying Zhou, Guibin Du, Junhua Zhu
Generally, the behavior of a micro droplet generator is related to its resonant frequency, near which the pressure wave in the liquid chamber reaches maximum amplitude. However, the pressure wave distributes differently under different frequencies, and this leads to the fact that not all nozzles produce droplet ejection in one operating cycle under a certain frequency. Those nozzles not working negatively affect those working well, and even make the device fail. We study numerically and experimentally the effect of nozzle layout on the droplet ejection of a droplet generator with arrayed nozzles. The experimental and numerically predicted results agree very well and prove that only increasing the number of nozzles may not enhance droplet generation, and the design of nozzle layout from the point of view of the pressure wave resonant mode is necessary for a nozzle array droplet generator.
{"title":"The frequency design of nozzles layout of the piezoelectrically actuated micro droplet generator based on a fluid-solid interaction modal analysis","authors":"Yanying Feng, Zhaoying Zhou, Guibin Du, Junhua Zhu","doi":"10.1109/SENSOR.2005.1496540","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496540","url":null,"abstract":"Generally, the behavior of a micro droplet generator is related to its resonant frequency, near which the pressure wave in the liquid chamber reaches maximum amplitude. However, the pressure wave distributes differently under different frequencies, and this leads to the fact that not all nozzles produce droplet ejection in one operating cycle under a certain frequency. Those nozzles not working negatively affect those working well, and even make the device fail. We study numerically and experimentally the effect of nozzle layout on the droplet ejection of a droplet generator with arrayed nozzles. The experimental and numerically predicted results agree very well and prove that only increasing the number of nozzles may not enhance droplet generation, and the design of nozzle layout from the point of view of the pressure wave resonant mode is necessary for a nozzle array droplet generator.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"4 1","pages":"808-811 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89057523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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