Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496647
K. Yamashita, W. Sun, K. Kakushima, H. Fujita, H. Toshiyoshi
We present the concept, fabrication, simulation, and experimental result of a field emission RF MEMS device based on SOI technology. The objective of this project is to enable RF filtering by means of a mechanical resonator. Current results include: (1) successful demonstration of the field emission effect on a reference device between silicon tips at /spl sim/5 /spl mu/m gap distance below 2/spl times/10/sup -8/ torr high vacuum environment; and (2) sacrificial release of the 2/sup nd/ generation device with integrated micro-oscillator.
{"title":"A lateral field-emission RF MEMS device [resonator filter applications]","authors":"K. Yamashita, W. Sun, K. Kakushima, H. Fujita, H. Toshiyoshi","doi":"10.1109/SENSOR.2005.1496647","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496647","url":null,"abstract":"We present the concept, fabrication, simulation, and experimental result of a field emission RF MEMS device based on SOI technology. The objective of this project is to enable RF filtering by means of a mechanical resonator. Current results include: (1) successful demonstration of the field emission effect on a reference device between silicon tips at /spl sim/5 /spl mu/m gap distance below 2/spl times/10/sup -8/ torr high vacuum environment; and (2) sacrificial release of the 2/sup nd/ generation device with integrated micro-oscillator.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"275 1","pages":"1096-1099 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75072584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497372
R. Liu, X.H. Wang, F. Tang, Y. Feng, Z. Zhou
We report here the design, fabrication and experiments of a hollow in-plane microneedle, with which a biosensor is integrated to extract interstitial fluid from skin for glucose measurement. The design of hollow in-plane microneedles leads to a simple fabrication process. Different from common methods for immobilizing enzyme, we use capillary force to immobilize enzyme on the surface of microelectrodes. The experimental results showed a good linearity for the characteristic curve of glucose concentration, when it varies from 0 to 500mg/dl with respect to current signal value. The sensitivity of 0.4238nA was obtained.
{"title":"An in-plane microneedles used for sampling and glucose analysis","authors":"R. Liu, X.H. Wang, F. Tang, Y. Feng, Z. Zhou","doi":"10.1109/SENSOR.2005.1497372","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497372","url":null,"abstract":"We report here the design, fabrication and experiments of a hollow in-plane microneedle, with which a biosensor is integrated to extract interstitial fluid from skin for glucose measurement. The design of hollow in-plane microneedles leads to a simple fabrication process. Different from common methods for immobilizing enzyme, we use capillary force to immobilize enzyme on the surface of microelectrodes. The experimental results showed a good linearity for the characteristic curve of glucose concentration, when it varies from 0 to 500mg/dl with respect to current signal value. The sensitivity of 0.4238nA was obtained.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"472 1","pages":"1517-1520 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75313722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497529
K. Mitsubayashi, Y. Hashimoto, T. Kon, T. Minamide, M. Taniguchi, H. Saito
An optical gas-sensor (bio-sniffer) for dimethyl sulfide (seaweed-odor substance) was constructed by immobilizing flavin-containing monooxygenase (FMO) to an oxygen-sensitive optical fiber. The sniffer was calibrated against gaseous DMS over the range of 10-100 ppm.
{"title":"Optical bio-sniffer (biochemical gas sensor) for dimethyl sulfide vapor","authors":"K. Mitsubayashi, Y. Hashimoto, T. Kon, T. Minamide, M. Taniguchi, H. Saito","doi":"10.1109/SENSOR.2005.1497529","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497529","url":null,"abstract":"An optical gas-sensor (bio-sniffer) for dimethyl sulfide (seaweed-odor substance) was constructed by immobilizing flavin-containing monooxygenase (FMO) to an oxygen-sensitive optical fiber. The sniffer was calibrated against gaseous DMS over the range of 10-100 ppm.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"234 1","pages":"2147-2150 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75748714","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497380
W. Satoh, H. Hosono, H. Suzuki
An integrated micro analysis system was fabricated using a microfluidic transport system driven by electrowetting and an air-gap ammonia sensor. The basic element in the system was a row of elongated gold working electrodes and a protruding polydimethylsiloxane (PDMS) structure which form an open channel structure. The wettability of the gold electrode was changed by applying a negative potential with respect to a Ag/AgCl electrode, and a solution introduced from an inlet was mobilized through the gap between the working electrode and the protruding structure. Also, a solution could be transported to any desired directions without using any valves. Furthermore, two solutions could be mixed based on the same principle. The open structure of the flow channel facilitated the integration of an air-gap ammonia sensor. Ammonia diffused from the mixing area was detected as the potential change of a pH-indicator electrode. The 90% response time was 45 s for 10 mM ammonia. The relation between the potential of the pH-indicator electrode and the logarithm of ammonia concentration was linear. Furthermore, a biosensing system was constructed by using immobilized urease or creatinine deiminase and the ammonia sensor. The concentration of urea and creatinine could be determined by measuring ammonia produced enzymatically from a sample solution. Linear calibration plot was obtained for urea concentrations down to 100 /spl mu/M and creatinine concentration down to 50 /spl mu/M.
{"title":"Integrated bio/chemical sensing system with a microfluidic transport module based on electrowetting","authors":"W. Satoh, H. Hosono, H. Suzuki","doi":"10.1109/SENSOR.2005.1497380","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497380","url":null,"abstract":"An integrated micro analysis system was fabricated using a microfluidic transport system driven by electrowetting and an air-gap ammonia sensor. The basic element in the system was a row of elongated gold working electrodes and a protruding polydimethylsiloxane (PDMS) structure which form an open channel structure. The wettability of the gold electrode was changed by applying a negative potential with respect to a Ag/AgCl electrode, and a solution introduced from an inlet was mobilized through the gap between the working electrode and the protruding structure. Also, a solution could be transported to any desired directions without using any valves. Furthermore, two solutions could be mixed based on the same principle. The open structure of the flow channel facilitated the integration of an air-gap ammonia sensor. Ammonia diffused from the mixing area was detected as the potential change of a pH-indicator electrode. The 90% response time was 45 s for 10 mM ammonia. The relation between the potential of the pH-indicator electrode and the logarithm of ammonia concentration was linear. Furthermore, a biosensing system was constructed by using immobilized urease or creatinine deiminase and the ammonia sensor. The concentration of urea and creatinine could be determined by measuring ammonia produced enzymatically from a sample solution. Linear calibration plot was obtained for urea concentrations down to 100 /spl mu/M and creatinine concentration down to 50 /spl mu/M.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"32 1","pages":"1549-1552 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74189618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497366
T. Hasada, M. Shikida, K. Sato
We previously proposed a novel process combining mechanical dicing and anisotropic wet etching for fabricating arrayed MEMS structures, and used it to make solid-type microneedle structures in drug delivery systems (Shikida et al., 2004). For this report, we further developed the fabrication process for embedding two types of flow channels in our microneedle structures. One type has a channel with an opening at the base of each needle, and the other type has a cored channel in the needle. The height and pitch of the needles were 120-550 /spl mu/m and 230-370 /spl mu/m, respectively. The new process does not include the expensive deep RIE process, and is applicable to disposable injection and extraction needles used in bio-medical applications.
我们之前提出了一种结合机械切割和各向异性湿法蚀刻来制造阵列MEMS结构的新工艺，并将其用于制造药物输送系统中的固体型微针结构(Shikida et al.， 2004)。在本报告中，我们进一步开发了在微针结构中嵌入两种流动通道的制造工艺。一种类型在每根针的基部具有开口的通道，而另一种类型在针中具有带芯的通道。针高为120 ~ 550 /亩/米，针距为230 ~ 370 /亩/米。新工艺不包括昂贵的深度RIE工艺，适用于生物医学应用中使用的一次性注射和提取针。
{"title":"Densely arrayed microneedles having flow channel fabricated by mechanical dicing and anisotropic wet etching of silicon","authors":"T. Hasada, M. Shikida, K. Sato","doi":"10.1109/SENSOR.2005.1497366","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497366","url":null,"abstract":"We previously proposed a novel process combining mechanical dicing and anisotropic wet etching for fabricating arrayed MEMS structures, and used it to make solid-type microneedle structures in drug delivery systems (Shikida et al., 2004). For this report, we further developed the fabrication process for embedding two types of flow channels in our microneedle structures. One type has a channel with an opening at the base of each needle, and the other type has a cored channel in the needle. The height and pitch of the needles were 120-550 /spl mu/m and 230-370 /spl mu/m, respectively. The new process does not include the expensive deep RIE process, and is applicable to disposable injection and extraction needles used in bio-medical applications.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"13 1","pages":"1493-1496 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73577133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497493
L. Fan, W. Huang, C. Cheng, P. Chu, H. Hao, C. Hsieh, S. H. Hsu, A. Chin, K. Hsueh, C. Lee, J. Chang, E. Liu, A. Huang, Chen-Fu Chien, A. Yeh, J. Chen, W. Wu, C. Lai
Nuclear magnetic (MR) resonance spectroscopy and imaging technique are powerful methods available for determining molecular structures and non-invasive 3D imaging. In the effort of developing a nanoMRI microsystem, the authors have designed, fabricated, assembled and did preliminary characterization of the nanoMRI probe. A multilayer high aspect ratio metal process has been developed for this project. NanoMRI probes are designed through multi-physics finite element 3D analysis, integrated using the high aspect ratio process, assembled, and the RF coils are matched and tuned to a 500MHz system. Due to the large magnetic field gradients and fast switching gradient coils, the high mass-sensitivity and additional orthogonal RF signal channels, special MR pulse sequencies (Lauterbur et al., 1992) can be developed for imaging and molecular structural analysis.
{"title":"Magnetic resonance microsystems for life science applications","authors":"L. Fan, W. Huang, C. Cheng, P. Chu, H. Hao, C. Hsieh, S. H. Hsu, A. Chin, K. Hsueh, C. Lee, J. Chang, E. Liu, A. Huang, Chen-Fu Chien, A. Yeh, J. Chen, W. Wu, C. Lai","doi":"10.1109/SENSOR.2005.1497493","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497493","url":null,"abstract":"Nuclear magnetic (MR) resonance spectroscopy and imaging technique are powerful methods available for determining molecular structures and non-invasive 3D imaging. In the effort of developing a nanoMRI microsystem, the authors have designed, fabricated, assembled and did preliminary characterization of the nanoMRI probe. A multilayer high aspect ratio metal process has been developed for this project. NanoMRI probes are designed through multi-physics finite element 3D analysis, integrated using the high aspect ratio process, assembled, and the RF coils are matched and tuned to a 500MHz system. Due to the large magnetic field gradients and fast switching gradient coils, the high mass-sensitivity and additional orthogonal RF signal channels, special MR pulse sequencies (Lauterbur et al., 1992) can be developed for imaging and molecular structural analysis.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"20 1","pages":"1998-2001 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73724261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496629
N. Chronis, M. Okandan, M. Baker, L. Lee
Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30/spl times/30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to /spl sim/200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.
{"title":"A 2-D translational pinhole formed by two orthogonally moving micro-slits","authors":"N. Chronis, M. Okandan, M. Baker, L. Lee","doi":"10.1109/SENSOR.2005.1496629","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496629","url":null,"abstract":"Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30/spl times/30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to /spl sim/200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"2013 1","pages":"1022-1025 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73794780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497399
F. Huang, C. Liao, Gwo-Bin Lee
The study presents a new fully-integrated microfluidic chip capable of performing reverse transcription polymerase chain reaction (RT-PCR) (Obeid et al., 2003), transportation of DNA/RNA samples, capillary electrophoresis (CE) separation and on-line detection. In the proposed device, dengue-2 RNA-virus was synthesized to complementary DNA (cDNA) and replicated using a RT-PCR module and then transported by a pneumatic micropump to CE sample reservoir. The cDNA samples were separated electrophoretically and detected by buried optical fibers. We have successfully demonstrated the detection of a RNA-virus using less time and less consumption of samples and reagents. The developed microfluidic chip could provide a powerful tool for fast disease diagnosis.
该研究提出了一种新的全集成微流控芯片，能够进行逆转录聚合酶链反应(RT-PCR) (Obeid et al.， 2003)， DNA/RNA样品运输，毛细管电泳(CE)分离和在线检测。在该装置中，将登革热-2 rna -病毒合成为互补DNA (cDNA)，并使用RT-PCR模块进行复制，然后通过气动微泵将其运送到CE样品库中。cDNA样品电泳分离，埋地光纤检测。我们已经成功地证明了用更少的时间和更少的样品和试剂的消耗来检测rna病毒。所研制的微流控芯片为疾病的快速诊断提供了有力的工具。
{"title":"A fully-integrated microfluidic chip for RNA-virus detection","authors":"F. Huang, C. Liao, Gwo-Bin Lee","doi":"10.1109/SENSOR.2005.1497399","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497399","url":null,"abstract":"The study presents a new fully-integrated microfluidic chip capable of performing reverse transcription polymerase chain reaction (RT-PCR) (Obeid et al., 2003), transportation of DNA/RNA samples, capillary electrophoresis (CE) separation and on-line detection. In the proposed device, dengue-2 RNA-virus was synthesized to complementary DNA (cDNA) and replicated using a RT-PCR module and then transported by a pneumatic micropump to CE sample reservoir. The cDNA samples were separated electrophoretically and detected by buried optical fibers. We have successfully demonstrated the detection of a RNA-virus using less time and less consumption of samples and reagents. The developed microfluidic chip could provide a powerful tool for fast disease diagnosis.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"49 1","pages":"1624-1627 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73837875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1496413
N. Korivi, Jin-Woo Choi
This paper presents the development and characterization of a microfabricated membraneless biofuel cell on a polymer microfluidic chip. The developed microscale biofuel cell utilizes glucose as fuel to generate bioelectric power and produces water as by-product. The developed biofuel cell exhibits a power output (power density up to 4.66 /spl mu/W/cm/sup 2/) which can be modulated by the electrode separation. The absence of a proton exchange membrane separating the anode and cathode chambers imparts high design flexibility to the developed biofuel cell. The biofuel cell has been tested for operation in physiological levels of pH and temperature, with both flowing and static fuel conditions. Due to its relatively wide range of operational temperature and stability in flowing fuel conditions, coupled with its harmless by-products and absence of any toxic reagents, renders it highly appropriate for applications in microfluidic, implantable, and portable systems.
{"title":"A microfabricated narrow gap biofuel cell with membraneless design flexibility","authors":"N. Korivi, Jin-Woo Choi","doi":"10.1109/SENSOR.2005.1496413","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496413","url":null,"abstract":"This paper presents the development and characterization of a microfabricated membraneless biofuel cell on a polymer microfluidic chip. The developed microscale biofuel cell utilizes glucose as fuel to generate bioelectric power and produces water as by-product. The developed biofuel cell exhibits a power output (power density up to 4.66 /spl mu/W/cm/sup 2/) which can be modulated by the electrode separation. The absence of a proton exchange membrane separating the anode and cathode chambers imparts high design flexibility to the developed biofuel cell. The biofuel cell has been tested for operation in physiological levels of pH and temperature, with both flowing and static fuel conditions. Due to its relatively wide range of operational temperature and stability in flowing fuel conditions, coupled with its harmless by-products and absence of any toxic reagents, renders it highly appropriate for applications in microfluidic, implantable, and portable systems.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"17 1","pages":"287-290 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79102032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497343
T. Knittel, G. Freitag, W. Widanarto, I. Eisele
Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.
{"title":"A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces","authors":"T. Knittel, G. Freitag, W. Widanarto, I. Eisele","doi":"10.1109/SENSOR.2005.1497343","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497343","url":null,"abstract":"Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"57 1","pages":"1400-1403 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85044116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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