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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.最新文献

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Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensor arrays 纳米传感器阵列中垂直排列碳纳米管的无催化剂和低温生长
H. Pham, C. D. de Boer, P. Sarro
In this paper we present a new technique to vertically grow aligned carbon nanotubes (CNTs) on nanosize pore anodic aluminum oxide (AAO) templates on a Si substrate. The CNTs are grown using methane in an RF PECVD system at only 400/spl deg/C without using a transition metal catalyst. The AAO templates are prepared by a two-step anodizing process in oxalic acid at room temperature. The influence of preparation conditions, such as temperature, electrolyte, applied voltage and anodization time on the density, diameter, length and the shape of the pores is investigated. The diameter of the pores of AAO film varies from 30 nm to 70 nm. The average diameter and length of CNTs are approximately 40 nm and 1 /spl mu/m respectively. This low temperature, IC-compatible process is very attractive as it allows integration of CNT devices with on-chip electronics.
本文提出了一种在硅衬底上纳米孔阳极氧化铝(AAO)模板上垂直生长排列碳纳米管的新技术。在不使用过渡金属催化剂的情况下,使用甲烷在RF PECVD系统中生长,温度仅为400/spl℃。在草酸中采用两步阳极氧化法制备了AAO模板。考察了制备温度、电解液、外加电压和阳极氧化时间等条件对微孔密度、直径、长度和形状的影响。AAO膜的孔直径在30 ~ 70 nm之间。CNTs的平均直径和长度分别约为40 nm和1 /spl mu/m。这种低温、集成电路兼容的工艺非常有吸引力,因为它允许碳纳米管器件与片上电子器件集成。
{"title":"Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensor arrays","authors":"H. Pham, C. D. de Boer, P. Sarro","doi":"10.1109/SENSOR.2005.1496368","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496368","url":null,"abstract":"In this paper we present a new technique to vertically grow aligned carbon nanotubes (CNTs) on nanosize pore anodic aluminum oxide (AAO) templates on a Si substrate. The CNTs are grown using methane in an RF PECVD system at only 400/spl deg/C without using a transition metal catalyst. The AAO templates are prepared by a two-step anodizing process in oxalic acid at room temperature. The influence of preparation conditions, such as temperature, electrolyte, applied voltage and anodization time on the density, diameter, length and the shape of the pores is investigated. The diameter of the pores of AAO film varies from 30 nm to 70 nm. The average diameter and length of CNTs are approximately 40 nm and 1 /spl mu/m respectively. This low temperature, IC-compatible process is very attractive as it allows integration of CNT devices with on-chip electronics.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"32 1","pages":"97-100 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88861921","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High aspect ratio nano-structures (HARNS) for photonic MEMS based on vertical DBR architecture 基于垂直DBR结构的光子MEMS高纵横比纳米结构(HARNS
F. Marty, B. Saadany, T. Bourouina, Y. Mita, T. Shibata
High aspect ratio nano-structures (HARNS), having an aspect ratio of up to 107, were fabricated by DRIE (deep reactive ion etching). Sidewall surface roughness was reduced to a level less than 20 nm peak-to-valley. These technological advances are applied to photonic MEMS based on in-plane, free-space propagation of light. As an illustration, a Fabry-Perot cavity is presented. It uses vertical distributed Bragg reflectors (DBRs), which consist of thin silicon walls separated by small air gaps, the widths being an even multiple of quarter wavelengths of light in silicon and in air, respectively.
采用深度反应离子刻蚀法制备了高纵横比纳米结构(HARNS),其纵横比高达107。侧壁表面粗糙度降低到峰谷差小于20 nm的水平。这些技术进步被应用于光在平面内自由空间传播的光子MEMS。作为一个例子,给出了一个法布里-珀罗腔。它使用垂直分布布拉格反射器(DBRs),它由由小气隙分隔的薄硅壁组成,宽度分别是硅和空气中光波长的四分之一的偶数倍。
{"title":"High aspect ratio nano-structures (HARNS) for photonic MEMS based on vertical DBR architecture","authors":"F. Marty, B. Saadany, T. Bourouina, Y. Mita, T. Shibata","doi":"10.1109/SENSOR.2005.1496436","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496436","url":null,"abstract":"High aspect ratio nano-structures (HARNS), having an aspect ratio of up to 107, were fabricated by DRIE (deep reactive ion etching). Sidewall surface roughness was reduced to a level less than 20 nm peak-to-valley. These technological advances are applied to photonic MEMS based on in-plane, free-space propagation of light. As an illustration, a Fabry-Perot cavity is presented. It uses vertical distributed Bragg reflectors (DBRs), which consist of thin silicon walls separated by small air gaps, the widths being an even multiple of quarter wavelengths of light in silicon and in air, respectively.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"36 1","pages":"384-387 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88933974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
A piezoelectric micro-actuator with three dimensional structure and its micro-fabrication 三维结构压电微驱动器及其微加工
P. Gao, K. Yao, Xiaosong Tang, Xujiang He, S. Shannigrahi, Y. Lou, Jian Zhang, K. Okada
Piezoelectric micro-actuators and motors are promising for applications in various servo control systems, with the potential to provide ultra-precise positioning and compensation. A micro-actuator, which is configured with an "H-shaped" cavity and a pair of high-aspect-ratio parallel beams, was designed. The micro-actuator with its three dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate materials processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro-machining, wafer bonding, and integration of piezoelectric thin films. The performance of the obtained micro-actuator samples was evaluated. The results demonstrate that a combination of silicon micro-fabrication and piezoelectric thin films is a viable approach to developing miniaturized piezoelectric devices with a complex structure.
压电微致动器和电机在各种伺服控制系统中具有应用前景,具有提供超精确定位和补偿的潜力。设计了一种“h”型腔和一对高纵横比平行光束的微致动器。微作动器具有三维结构,能够提供面内柔性和面外刚度。为制作压电微致动器原型设计了合适的材料加工和批量微加工方案,包括硅微加工、晶圆键合和压电薄膜集成。对所得微致动器样品的性能进行了评价。结果表明,硅微加工与压电薄膜相结合是开发具有复杂结构的微型化压电器件的可行途径。
{"title":"A piezoelectric micro-actuator with three dimensional structure and its micro-fabrication","authors":"P. Gao, K. Yao, Xiaosong Tang, Xujiang He, S. Shannigrahi, Y. Lou, Jian Zhang, K. Okada","doi":"10.1109/SENSOR.2005.1496516","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496516","url":null,"abstract":"Piezoelectric micro-actuators and motors are promising for applications in various servo control systems, with the potential to provide ultra-precise positioning and compensation. A micro-actuator, which is configured with an \"H-shaped\" cavity and a pair of high-aspect-ratio parallel beams, was designed. The micro-actuator with its three dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate materials processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro-machining, wafer bonding, and integration of piezoelectric thin films. The performance of the obtained micro-actuator samples was evaluated. The results demonstrate that a combination of silicon micro-fabrication and piezoelectric thin films is a viable approach to developing miniaturized piezoelectric devices with a complex structure.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"458 1","pages":"713-716 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83030163","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Magnetic, out-of-plane, totaly integrated bistable /spl mu/-actuator 磁性,面外,全集成双稳态/spl mu/-驱动器
H. Rostaing, J. Štěpánek, O. Cugat, C. Dieppedale, J. Delamare
Magnets are gradually appearing in the world of microactuators and power MEMS, particularly for applications such as microswitches. This article is devoted to the design, simulation and prototyping of a microactuator with high vertical displacement, based on integrated permanent magnets. Its main characteristics are: high displacement (in excess of 100 /spl mu/m), low switching time (300 /spl mu/s for 100 /spl mu/m) and bistability. The pulsed current for commutation is optimized for the lowest possible energy per pulse (minimum of 15 /spl mu/J). The main innovation of this design is that the moving part has no mechanical connection and is guided by magnetic levitation. This article is about the problems involved in the design (bistability, dynamic study, thermal study) and prototyping of our /spl mu/-actuator.
磁体逐渐出现在微致动器和功率MEMS领域,特别是用于微开关等应用。本文研究了一种基于集成永磁体的高垂直位移微驱动器的设计、仿真和原型制作。其主要特点是:排水量大(大于100 /spl mu/m),开关时间短(100 /spl mu/m开关时间为300 /spl mu/s),双稳性好。用于整流的脉冲电流被优化为尽可能低的每脉冲能量(最小15 /spl mu/J)。本设计的主要创新点是运动部分无机械连接,采用磁悬浮引导。本文介绍了我们的/spl mu/-驱动器的设计(双稳性、动力学研究、热研究)和原型设计中涉及的问题。
{"title":"Magnetic, out-of-plane, totaly integrated bistable /spl mu/-actuator","authors":"H. Rostaing, J. Štěpánek, O. Cugat, C. Dieppedale, J. Delamare","doi":"10.1109/SENSOR.2005.1497335","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497335","url":null,"abstract":"Magnets are gradually appearing in the world of microactuators and power MEMS, particularly for applications such as microswitches. This article is devoted to the design, simulation and prototyping of a microactuator with high vertical displacement, based on integrated permanent magnets. Its main characteristics are: high displacement (in excess of 100 /spl mu/m), low switching time (300 /spl mu/s for 100 /spl mu/m) and bistability. The pulsed current for commutation is optimized for the lowest possible energy per pulse (minimum of 15 /spl mu/J). The main innovation of this design is that the moving part has no mechanical connection and is guided by magnetic levitation. This article is about the problems involved in the design (bistability, dynamic study, thermal study) and prototyping of our /spl mu/-actuator.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"44 1","pages":"1366-1370 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83714216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
High pressure electroosmotic pump packed with uniform silica nanospheres 高压电渗透泵填充均匀的二氧化硅纳米球
Y. Takemori, S. Horiike, T. Nishimoto, H. Nakanishi, T. Yoshida
We report a novel electroosmotic pump fabricated on a plastic chip. Electroosmosis is one of electrokinetic phenomena and used as a precise liquid handling technique in some microfluidic devices. Electric double layer (EDL) between a channel wall and an electrolyte plays an important role in producing electroosmotic flow. When the net charge of EDL migrates, it carries the rest of the electrolyte due to the shear viscosity. The use of parallel narrow channels is a pathway to the more effective electroosmotic pumps since we can increase the net charge of EDL. We fabricated a plastic chip that confined uniform silica nanospheres within the channel, and tested its performance. We obtained the maximum flow rate 0.47 /spl mu/L/min and the maximum pressure 72 kPa when applied 3 kV to the electroosmotic pump.
我们报道了一种新型的塑料芯片电渗透泵。电渗透是一种电动力学现象,在一些微流体装置中被用作精确的液体处理技术。通道壁与电解质之间的双电层(EDL)在产生电渗透流动中起着重要作用。当EDL的净电荷迁移时,由于剪切粘度,它携带剩余的电解质。平行窄通道的使用是更有效的电渗透泵的途径,因为我们可以增加EDL的净电荷。我们制作了一个塑料芯片,将均匀的二氧化硅纳米球限制在通道内,并测试了它的性能。施加3 kV电渗泵时,最大流量为0.47 /spl mu/L/min,最大压力为72 kPa。
{"title":"High pressure electroosmotic pump packed with uniform silica nanospheres","authors":"Y. Takemori, S. Horiike, T. Nishimoto, H. Nakanishi, T. Yoshida","doi":"10.1109/SENSOR.2005.1497386","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497386","url":null,"abstract":"We report a novel electroosmotic pump fabricated on a plastic chip. Electroosmosis is one of electrokinetic phenomena and used as a precise liquid handling technique in some microfluidic devices. Electric double layer (EDL) between a channel wall and an electrolyte plays an important role in producing electroosmotic flow. When the net charge of EDL migrates, it carries the rest of the electrolyte due to the shear viscosity. The use of parallel narrow channels is a pathway to the more effective electroosmotic pumps since we can increase the net charge of EDL. We fabricated a plastic chip that confined uniform silica nanospheres within the channel, and tested its performance. We obtained the maximum flow rate 0.47 /spl mu/L/min and the maximum pressure 72 kPa when applied 3 kV to the electroosmotic pump.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"14 1","pages":"1573-1576 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79202936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Local in-situ hydrophilic treatment of micro-channels using surface discharge 表面放电微通道局部原位亲水处理
M. Gunji, H. Nakanishi, M. Washizu
In this paper, we describe a new method of local hydrophilic treatment of polymer micro-channel using surface discharge generated by a micro-electrode array. The method uses a pair of interdigitating electrodes embedded beneath a hydrophobic polymer (e.g. PDMS) micro-channel. When RF voltage is applied to the electrodes, surface discharge occurs inside the channel, and its inside surface is modified to be hydrophilic. Because the diffusion length of the generated plasma is only a few tens of micrometers, the treatment is local and selective. By using such a hydrophobic/hydrophilic patterning method, a droplet dispenser is developed. A straight PDMS channel having a side branch at the middle is fabricated, and the hydrophilic treatment is applied to the straight part. Due to capillary force, water solution fed from one end of the channel fills the entire straight channel, and when air is fed from the side, the liquid is divided into two parts, one ejected from the outlet. The ejection releases the pressure, and the channel is refilled, ready for the next ejection. The process produces a series of droplets, whose volume is precisely determined by the volume of the hydrophilic channel.
本文介绍了一种利用微电极阵列产生的表面放电对聚合物微通道进行局部亲水性处理的新方法。该方法使用一对交叉电极嵌入在疏水性聚合物(例如PDMS)微通道下。当对电极施加射频电压时,沟道内部发生表面放电,其内表面被修饰为亲水性。由于产生的等离子体的扩散长度只有几十微米,所以处理是局部的和选择性的。利用这种疏水/亲水性图图化方法,研制了液滴分配器。制造在中间具有侧分支的直PDMS通道,并对直部分进行亲水性处理。由于毛细力的作用,从通道一端进料的水溶液充满整个直通道,当从一侧进料时,液体被分成两部分,一部分从出口喷出。弹射释放压力,通道被重新填充,为下一次弹射做好准备。这个过程产生一系列的液滴,其体积精确地取决于亲水通道的体积。
{"title":"Local in-situ hydrophilic treatment of micro-channels using surface discharge","authors":"M. Gunji, H. Nakanishi, M. Washizu","doi":"10.1109/SENSOR.2005.1497290","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497290","url":null,"abstract":"In this paper, we describe a new method of local hydrophilic treatment of polymer micro-channel using surface discharge generated by a micro-electrode array. The method uses a pair of interdigitating electrodes embedded beneath a hydrophobic polymer (e.g. PDMS) micro-channel. When RF voltage is applied to the electrodes, surface discharge occurs inside the channel, and its inside surface is modified to be hydrophilic. Because the diffusion length of the generated plasma is only a few tens of micrometers, the treatment is local and selective. By using such a hydrophobic/hydrophilic patterning method, a droplet dispenser is developed. A straight PDMS channel having a side branch at the middle is fabricated, and the hydrophilic treatment is applied to the straight part. Due to capillary force, water solution fed from one end of the channel fills the entire straight channel, and when air is fed from the side, the liquid is divided into two parts, one ejected from the outlet. The ejection releases the pressure, and the channel is refilled, ready for the next ejection. The process produces a series of droplets, whose volume is precisely determined by the volume of the hydrophilic channel.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"101 1","pages":"1187-1190 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83339902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
H/sub 2//air self-breathing micro PEM fuel cell stacks with MEMS fabrication technology 采用MEMS制造技术的H/sub / 2/空气自呼吸微型PEM燃料电池堆
Cong Chen, Tao Wang, P. Dong, Xigui Zhang, Jufeng Li, D. Zheng, B. Xia, Xinxin Li
Presented is a H/sub 2//air self-breathing miniature proton exchange membrane fuel cell (/spl mu/PEMFC) stack. MEMS fabrication technology is used to complete both the single fuel cell and the stack of six cells electrically connected in series. The single-sided self-breathing /spl mu/PEMFC stack with planar-layout configuration is realized for convenience of portable applications. In addition, the /spl mu/PEMFC stack meets the requirement of miniaturized low cost mass fabrication. The characterization results show specific power as high as 0.21W/cm/sup 3/, with which the MEMS /spl mu/PEMFC stack is promising to be applied as a new generation of miniaturized hydrogen power source.
提出了一种H/sub / 2//空气自呼吸微型质子交换膜燃料电池(/spl mu/PEMFC)堆。MEMS制造技术用于完成单个燃料电池和串联电连接的六个电池堆叠。为方便便携式应用,实现了平面布局的单面自呼吸/spl mu/PEMFC堆叠。此外,/spl mu/PEMFC堆栈满足小型化低成本批量制造的要求。表征结果表明,比功率高达0.21W/cm/sup 3/, MEMS /spl mu/PEMFC堆叠有望作为新一代小型化氢电源应用。
{"title":"H/sub 2//air self-breathing micro PEM fuel cell stacks with MEMS fabrication technology","authors":"Cong Chen, Tao Wang, P. Dong, Xigui Zhang, Jufeng Li, D. Zheng, B. Xia, Xinxin Li","doi":"10.1109/SENSOR.2005.1496447","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496447","url":null,"abstract":"Presented is a H/sub 2//air self-breathing miniature proton exchange membrane fuel cell (/spl mu/PEMFC) stack. MEMS fabrication technology is used to complete both the single fuel cell and the stack of six cells electrically connected in series. The single-sided self-breathing /spl mu/PEMFC stack with planar-layout configuration is realized for convenience of portable applications. In addition, the /spl mu/PEMFC stack meets the requirement of miniaturized low cost mass fabrication. The characterization results show specific power as high as 0.21W/cm/sup 3/, with which the MEMS /spl mu/PEMFC stack is promising to be applied as a new generation of miniaturized hydrogen power source.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"124 1","pages":"433-436 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88618829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Realization of millimeter-wave planar antennas on PDMS 毫米波平面天线在PDMS上的实现
N. Tiercelin, P. Coquet, R. Sauleau, V. Senez, H. Fujita
The authors presented here, for the very first time, the use of PDMS as a new substrate for the realization of millimeter wave planar antennas. The aimed frequency range is the 60GHz band. Two configurations have been studied. First, PDMS was used directly as a dielectric material. Then, the radiating element was supported on a PDMS membrane over an air cavity. The design of these antennas was first presented with the method of moments (MoM) and the finite-difference time-domain (FDTD) technique, and then the technological process is described. The two antenna types have been experimentally characterized: the input impedance and radiation pattern measurements show a good agreement with the theoretical results, which confirms the validity of the developed technological process.
作者在这里首次介绍了PDMS作为实现毫米波平面天线的新衬底的使用。目标频率范围为60GHz频段。研究了两种构型。首先,PDMS被直接用作介电材料。然后,将辐射元件支撑在空气腔上方的PDMS膜上。首先用矩量法(MoM)和时域有限差分(FDTD)技术介绍了这些天线的设计,然后介绍了设计过程。对两种类型的天线进行了实验表征,输入阻抗和辐射方向图测量结果与理论结果吻合较好,证实了所开发工艺流程的有效性。
{"title":"Realization of millimeter-wave planar antennas on PDMS","authors":"N. Tiercelin, P. Coquet, R. Sauleau, V. Senez, H. Fujita","doi":"10.1109/SENSOR.2005.1497492","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497492","url":null,"abstract":"The authors presented here, for the very first time, the use of PDMS as a new substrate for the realization of millimeter wave planar antennas. The aimed frequency range is the 60GHz band. Two configurations have been studied. First, PDMS was used directly as a dielectric material. Then, the radiating element was supported on a PDMS membrane over an air cavity. The design of these antennas was first presented with the method of moments (MoM) and the finite-difference time-domain (FDTD) technique, and then the technological process is described. The two antenna types have been experimentally characterized: the input impedance and radiation pattern measurements show a good agreement with the theoretical results, which confirms the validity of the developed technological process.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"33 1","pages":"1994-1997 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89382792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Wireless thermal micro-ablation of skin for transdermal drug delivery 用于经皮给药的皮肤无线热微消融
Jin-Woo Park, Jung-Hwan Park, Y. Yoon, Y. Joung, Seong-O Choi, M. Prausnitz, M. Allen
This paper presents design, fabrication, and experimental results of a wireless induction heating system for generating micron-scale pores in the skin by thermal micro-ablation to dramatically increase skin permeability to drugs, while maintaining the patient-friendliness of conventional transdermal patches. The micro-heating element arrays have been fabricated using electrodeposition of nickel on a SU8 patterned structure. The heating element arrays have been characterized by applying wireless AC magnetic excitation using a coil, and applied to an in-vitro skin ablation experiment. The experiment has confirmed that fabricated micro-heating elements are able to generate heat sufficient to induce localized micro-ablation in human skin.
本文介绍了一种无线感应加热系统的设计、制造和实验结果,该系统通过热微消融在皮肤上产生微米级毛孔,以显着增加皮肤对药物的渗透性,同时保持传统透皮贴片的患者友好性。微加热元件阵列采用电沉积镍在SU8图像化结构上。该加热元件阵列采用线圈进行无线交流磁激励,并应用于体外皮肤消融实验。实验证实,制备的微加热元件能够产生足够的热量,诱导人体皮肤局部微消融。
{"title":"Wireless thermal micro-ablation of skin for transdermal drug delivery","authors":"Jin-Woo Park, Jung-Hwan Park, Y. Yoon, Y. Joung, Seong-O Choi, M. Prausnitz, M. Allen","doi":"10.1109/SENSOR.2005.1497303","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497303","url":null,"abstract":"This paper presents design, fabrication, and experimental results of a wireless induction heating system for generating micron-scale pores in the skin by thermal micro-ablation to dramatically increase skin permeability to drugs, while maintaining the patient-friendliness of conventional transdermal patches. The micro-heating element arrays have been fabricated using electrodeposition of nickel on a SU8 patterned structure. The heating element arrays have been characterized by applying wireless AC magnetic excitation using a coil, and applied to an in-vitro skin ablation experiment. The experiment has confirmed that fabricated micro-heating elements are able to generate heat sufficient to induce localized micro-ablation in human skin.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"73 1","pages":"1238-1241 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88148973","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
RF smart-sensor for venous ulcer treatment 用于静脉溃疡治疗的射频智能传感器
M. Meiners, M. Sussenguth, W. Missal, T. Schary, W. Benecke, W. Lang, M. Stucker
Specialised stockings and bandages are utilised for compression therapy in venous ulcer treatment. A successful therapy depends on an optimal fit of those stockings and bandages. In many cases treatment is not optimal because the patients are not able to properly apply stockings or bandages or because the pressure gradient of the synthetic fibre degrades over time. Currently, afflicted people have no tools to manage their treatment besides regularly visiting dermatology clinics. An approach for a biotelemetry pressure sensing system is presented. It is designed to be an easy-to-use and reliable measurement technique that allows patients to monitor and control their therapy. This will increases their compliance, which is admired by dermatologists.
专门的长袜和绷带用于静脉溃疡的压迫治疗。一个成功的治疗取决于这些丝袜和绷带的最佳配合。在许多情况下,治疗不是最佳的,因为患者不能正确地使用长袜或绷带,或者因为合成纤维的压力梯度随着时间的推移而退化。目前,受折磨的人除了定期去皮肤科诊所外,没有任何工具来管理他们的治疗。提出了一种生物遥测压力传感系统的实现方法。它被设计成一种易于使用和可靠的测量技术,允许患者监测和控制他们的治疗。这将增加他们的依从性,这是皮肤科医生所钦佩的。
{"title":"RF smart-sensor for venous ulcer treatment","authors":"M. Meiners, M. Sussenguth, W. Missal, T. Schary, W. Benecke, W. Lang, M. Stucker","doi":"10.1109/SENSOR.2005.1496452","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496452","url":null,"abstract":"Specialised stockings and bandages are utilised for compression therapy in venous ulcer treatment. A successful therapy depends on an optimal fit of those stockings and bandages. In many cases treatment is not optimal because the patients are not able to properly apply stockings or bandages or because the pressure gradient of the synthetic fibre degrades over time. Currently, afflicted people have no tools to manage their treatment besides regularly visiting dermatology clinics. An approach for a biotelemetry pressure sensing system is presented. It is designed to be an easy-to-use and reliable measurement technique that allows patients to monitor and control their therapy. This will increases their compliance, which is admired by dermatologists.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"1 1","pages":"453-456 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89460110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
期刊
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
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