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Autoencoder latent space sensitivity to material structure in convergent-beam low energy electron diffraction 汇聚束低能电子衍射中自动编码器潜空间对材料结构的敏感性
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-08-06 DOI: 10.1016/j.ultramic.2024.114021

The convergent-beam low energy electron diffraction technique has been proposed as a novel method to gather local structural and electronic information from crystalline surfaces during low-energy electron microscopy. However, the approach suffers from high complexity of the resulting diffraction patterns. We show that Convolutional Autoencoders trained on CBLEED patterns achieve a highly structured latent space. The latent space is then used to estimate structural parameters with sub-angstrom accuracy. The low complexity of the neural networks enables real time application of the approach during experiments with low latency.

汇聚束低能电子衍射技术是在低能电子显微镜下收集晶体表面局部结构和电子信息的一种新方法。然而,这种方法所产生的衍射图样复杂度较高。我们的研究表明,在 CBLEED 图案上训练的卷积自动编码器可以获得高度结构化的潜在空间。然后利用潜空间以亚埃级精度估算结构参数。神经网络的低复杂性使该方法能够在低延迟实验中实时应用。
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引用次数: 0
The effect of the acceleration voltage on the quality of structure determination by 3D-electron diffraction 加速电压对三维电子衍射结构测定质量的影响
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-08-05 DOI: 10.1016/j.ultramic.2024.114022

Nowadays, 3D Electron Diffraction (3DED) is widely used for the structure determination of sub-micron-sized particles. In this work, we investigate the influence of the acceleration voltage on the quality of 3DED datasets acquired on BaTiO3 nanoparticles. Datasets were acquired using a wide range of beam energies, from common, high acceleration voltages (300 kV and 200 kV) to medium (120 kV and 80 kV) and low acceleration voltages (60 kV and 30 kV). It was observed that, in the integration process, Rint increases as the beam energy is reduced, which is mainly due to the increased dynamical scattering. Nevertheless, the structure was solved successfully in all cases. The structure refinement was comparable for all beam energies with small deficiencies such as negative atomic displacements for the heaviest atom in the structure, barium. Including extinction correction in the refinement noticeably improved the model for low acceleration voltages, probably due to higher beam absorption in these cases. Dynamical refinement, however, shows superior results for higher acceleration voltages, since the dynamical refinement calculations currently ignore inelastic scattering effects.

如今,三维电子衍射(3DED)被广泛用于亚微米级颗粒的结构测定。在这项工作中,我们研究了加速电压对 BaTiO3 纳米粒子三维电子衍射数据集质量的影响。数据集是在广泛的光束能量范围内获得的,从常见的高加速电压(300 kV 和 200 kV)到中等加速电压(120 kV 和 80 kV)和低加速电压(60 kV 和 30 kV)。据观察,在积分过程中,Rint 会随着光束能量的降低而增加,这主要是由于动态散射的增加。尽管如此,在所有情况下都成功地解决了结构问题。所有光束能量下的结构细化结果都相当,只是存在一些小的缺陷,例如结构中最重的原子钡的原子位移为负值。在细化过程中加入消光校正明显改善了低加速电压下的模型,这可能是由于在这些情况下光束吸收较多。然而,由于动态细化计算目前忽略了非弹性散射效应,因此动态细化在较高加速电压下显示出更优越的结果。
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引用次数: 0
Optimization of three-dimensional electron diffuse scattering data acquisition 优化三维电子漫散射数据采集。
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-08-02 DOI: 10.1016/j.ultramic.2024.114023

The diffraction patterns of crystalline materials with local order contain sharp Bragg reflections as well as highly structured diffuse scattering. In this study, we quantitatively show how the diffuse scattering in three-dimensional electron diffraction (3D ED) data is influenced by various parameters, including the data acquisition mode, the detector type and the use of an energy filter. We found that diffuse scattering data used for quantitative analysis are preferably acquired in selected area electron diffraction (SAED) mode using a CCD and an energy filter. In this study, we also show that the diffuse scattering in 3D ED data can be obtained with a quality comparable to that from single-crystal X-ray diffraction. As electron diffraction requires much smaller crystal sizes than X-ray diffraction, this opens up the possibility to investigate the local structure of many technologically relevant materials for which no crystals large enough for single-crystal X-ray diffraction are available.

具有局部有序性的晶体材料的衍射图样包含尖锐的布拉格反射以及高度结构化的漫散射。在本研究中,我们定量展示了三维电子衍射(3D ED)数据中的漫散射如何受到各种参数的影响,包括数据采集模式、探测器类型和能量滤波器的使用。我们发现,用于定量分析的漫散射数据最好使用 CCD 和能量滤波器在选区电子衍射(SAED)模式下获取。在这项研究中,我们还发现三维电子衍射数据中的漫散射数据质量可与单晶 X 射线衍射数据相媲美。由于电子衍射所需的晶体尺寸比 X 射线衍射小得多,这就为研究许多技术相关材料的局部结构提供了可能,因为这些材料没有足够大的晶体来进行单晶 X 射线衍射。
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引用次数: 0
Probing the interaction range of electron beam-induced etching in STEM by a non-contact electron beam 用非接触电子束探测 STEM 中电子束诱导蚀刻的相互作用范围
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-07-25 DOI: 10.1016/j.ultramic.2024.114019

Beside its main purpose as a high-end tool in material analysis reaching the atomic scale for structure, chemical and electronic properties, aberration-corrected scanning transmission electron microscopy (STEM) is increasingly used as a tool to manipulate materials down to that very same scale. In order to obtain exact and reproducible results, it is essential to consider the interaction processes and interaction ranges between the electron beam and the involved materials. Here, we show in situ that electron beam-induced etching in a low-pressure oxygen atmosphere can extend up to a distance of several nm away from the Ångström-size electron beam, usually used for probing the sample. This relatively long-range interaction is related to beam tails and inelastic scattering involved in the etching process. To suppress the influence of surface diffusion, we measure the etching effect indirectly on isolated nm-sized holes in a 2 nm thin amorphous carbon foil that is commonly used as sample support in STEM. During our experiments, the electron beam is placed inside the nanoholes so that most electrons cannot directly participate in the etching process. We characterize the etching process from measuring etching rates at multiple nanoholes with different distances between the hole edge and the electron beam.

像差校正扫描透射电子显微镜(STEM)的主要用途是分析原子尺度的材料结构、化学和电子特性,除此之外,它还越来越多地被用作操作相同尺度材料的工具。为了获得精确且可重复的结果,必须考虑电子束与相关材料之间的相互作用过程和相互作用范围。在这里,我们现场展示了在低压氧气环境中电子束诱导的蚀刻可以延伸到距离通常用于探测样品的Ångström尺寸电子束数纳米的距离。这种相对较远的相互作用与蚀刻过程中涉及的束尾和非弹性散射有关。为了抑制表面扩散的影响,我们间接测量了 2 nm 薄无定形碳箔上孤立的 nm 大小孔的蚀刻效应。在实验过程中,电子束被置于纳米孔内,因此大部分电子无法直接参与刻蚀过程。我们通过测量孔边缘与电子束之间不同距离的多个纳米孔的蚀刻速率来描述蚀刻过程。
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引用次数: 0
Investigation of thermal effects of laser micromachining for APT and TEM specimen preparation: A modeling and experimental study 用于制备 APT 和 TEM 试样的激光微加工热效应研究:建模与实验研究
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-07-22 DOI: 10.1016/j.ultramic.2024.114009

Laser micromachining can serve as a coarse machining step during sample preparation for high-resolution characterization methods leading to swift sample preparation. However, selecting the right laser parameters is crucial to minimize the heat-affected zone, which can potentially compromise the microstructure of the specimen. This study focuses on evaluating the size of heat-affected zone in laser annular milling, aiming to ascertain a minimal scan diameter that safeguards the inner region of micropillars against thermal damage. A computational model based on the finite element method was utilized to simulate the laser heating process. To validate the simulation results, a picosecond pulsed laser is then used to machine the micropillars of Al and Si. The laser-machined samples were subjected to surface and microstructural analysis using Scanning Electron Microscope (SEM) and Electron Backscatter Diffraction (EBSD) scans. The length of heat affected zone obtained from simulations was approximately 6 μm for silicon and 12 μm for aluminum. The diameter of micropillars formed with laser machining was 10 μm for silicon 26 μm for aluminum. The core of the pillars was preserved with less than one degree of microstructural misorientations making it suitable for further processing for preparing specimens for techniques like APT and TEM. For silicon micropillars, the preserved central region has a diameter of 6 μm and for aluminum its around 20–24 μm. Additionally, the study determines the minimum scan diameter that can be achieved using the given laser machining setup across a range of common materials.

激光微加工可作为样品制备过程中的粗加工步骤,用于高分辨率表征方法,从而快速制备样品。然而,选择正确的激光参数对于最大限度地减少热影响区至关重要,因为热影响区可能会损害试样的微观结构。本研究的重点是评估激光环形铣削中热影响区的大小,旨在确定一个最小扫描直径,以保护微柱内部区域免受热损伤。利用基于有限元法的计算模型模拟了激光加热过程。为了验证模拟结果,随后使用皮秒脉冲激光加工铝和硅微柱。使用扫描电子显微镜(SEM)和电子背散射衍射(EBSD)扫描对激光加工的样品进行表面和微观结构分析。模拟得到的热影响区长度硅约为 6 μm,铝约为 12 μm。用激光加工形成的微柱直径硅为 10 μm ,铝为 26 μm。微柱的核心被保留下来,微观结构错位小于 1 度,因此适合进一步加工,为 APT 和 TEM 等技术制备试样。对于硅微柱来说,保留的中心区域直径为 6 μm,而对于铝来说,直径约为 20-24 μm。此外,该研究还确定了在一系列常见材料中使用特定激光加工设置所能达到的最小扫描直径。
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引用次数: 0
Characterization of structure and mixing in nanoparticle hetero-aggregates using convolutional neural networks: 3D-reconstruction versus 2D-projection 利用卷积神经网络表征纳米粒子异质聚集体的结构和混合情况:三维重建与二维投影
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-07-20 DOI: 10.1016/j.ultramic.2024.114020

Structural and chemical characterization of nanomaterials provides important information for understanding their functional properties. Nanomaterials with characteristic structure sizes in the nanometer range can be characterized by scanning transmission electron microscopy (STEM). In conventional STEM, two-dimensional (2D) projection images of the samples are acquired, information about the third dimension is lost. This drawback can be overcome by STEM tomography, where the three-dimensional (3D) structure is reconstructed from a series of projection images acquired using various projection directions. However, 3D measurements are expensive with respect to acquisition and evaluation time. Furthermore, the method is hardly applicable to beam-sensitive materials, i.e. samples that degrade under the electron beam. For this reason, it is desirable to know whether sufficient information on structural and chemical information can be extracted from 2D-projection measurements. In the present work, a comparison between 3D-reconstruction and 2D-projection characterization of structure and mixing in nanoparticle hetero-aggregates is provided. To this end, convolutional neural networks are trained in 2D and 3D to extract particle positions and material types from the simulated or experimental measurement. Results are used to evaluate structure, particle size distributions, hetero-aggregate compositions and mixing of particles quantitatively and to find an answer to the question, whether an expensive 3D characterization is required for this material system for future characterizations.

纳米材料的结构和化学特性为了解其功能特性提供了重要信息。扫描透射电子显微镜(STEM)可对结构尺寸在纳米范围内的纳米材料进行表征。传统的 STEM 是获取样品的二维(2D)投影图像,因此会丢失三维信息。STEM 层析技术可以克服这一缺点,即从一系列使用不同投影方向获取的投影图像中重建三维(3D)结构。然而,三维测量在采集和评估时间上都很昂贵。此外,这种方法很难适用于对光束敏感的材料,即在电子束作用下会发生退化的样品。因此,我们希望了解是否能从二维投影测量中提取足够的结构和化学信息。本研究比较了三维重建和二维投影对纳米粒子异质聚集体结构和混合情况的描述。为此,对卷积神经网络进行了二维和三维训练,以从模拟或实验测量中提取粒子位置和材料类型。研究结果用于定量评估颗粒的结构、粒度分布、异质聚集体成分和混合情况,并为今后是否需要对这种材料系统进行昂贵的三维表征找到答案。
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引用次数: 0
Calibrating cryogenic temperature of TEM specimens using EELS 利用 EELS 标定 TEM 试样的低温温度
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-07-08 DOI: 10.1016/j.ultramic.2024.114008

Cryogenic Scanning/Transmission Electron Microscopy has been established as a leading method to image sensitive biological samples and is now becoming a powerful tool to understand materials' behavior at low temperatures. However, achieving precise local temperature calibration at low temperatures remains a challenge, which is especially crucial for studying phase transitions and emergent physical properties in quantum materials. In this study, we employ electron energy loss spectroscopy (EELS) to measure local cryogenic specimen temperatures. We use the temperature-dependent characteristics of aluminum's bulk plasmon peak in EEL spectra, which shifts due to changes in electron density caused by thermal expansion and contraction. We successfully demonstrate the versatility of this method by calibrating different liquid nitrogen cooling holders in various microscopes, regardless of whether a monochromated or non-monochromated electron beam is used. Temperature discrepancies between the actual temperature and the setpoint temperatures are identified across a range from room temperature to 100 K. This work demonstrates the importance of temperature calibrations at intermediate temperatures and presents a straightforward, robust method for calibrating local temperatures of cryogenically-cooled specimens in electron microscopes.

低温扫描/透射电子显微镜已成为对敏感生物样品进行成像的主要方法,现在正成为了解材料低温行为的有力工具。然而,在低温下实现精确的局部温度校准仍然是一项挑战,这对于研究量子材料的相变和新出现的物理性质尤为重要。在本研究中,我们采用电子能量损失光谱(EELS)来测量局部低温试样温度。我们利用 EEL 光谱中铝的体等离子体峰随温度变化的特性,该特性会因热膨胀和收缩引起的电子密度变化而移动。通过校准各种显微镜中的不同液氮冷却支架,我们成功证明了这种方法的通用性,无论使用的是单色还是非单色电子束。这项工作证明了在中间温度下进行温度校准的重要性,并提出了校准电子显微镜中低温冷却试样局部温度的简单、可靠的方法。
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引用次数: 0
Elastic strain mapping of plastically deformed materials by TEM 利用 TEM 绘制塑性变形材料的弹性应变图
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-07-07 DOI: 10.1016/j.ultramic.2024.114010
Arthur Després , Salomé Parent , Muriel Véron , Edgar F. Rauch , Anne Joulain , Hadi Bahsoun , Christophe Tromas

A method for mapping elastic strains by TEM in plastically deformed materials is presented. A characteristic feature of plastically deformed materials, which cannot be handled by standard strain measurement method, is the presence of orientation gradients. To circumvent this issue, we couple orientation and strain maps obtained from scanning precession electron diffraction datasets. More specifically, orientation gradients are taken into account by 1) identifying the diffraction spot positions in a reference pattern, 2) measuring the disorientation between the diffraction patterns in the map and the reference pattern, 3) rotating the coordinate system following the measured disorientation at each position in the map, 4) calculating strains in the rotated coordinate system. At present, only azimuthal rotations of the crystal are handled. The method is illustrated on a Cr2AlC monocrystal micropilar deformed in near simple flexion during a nanomechanical test. After plastic deformation, the sample contains dislocations arranged in pile-ups and walls. The strain-field around each dislocation is consistent with theory, and a clear difference is observed between the strain fields around pile-ups and walls. It is further remarked that strain maps allow for the orientation of the Burgers vector to be identified. Since the loading undergone by the sample is known, this also allows for the position of the dislocation sources to be estimated. Perspectives for the study of deformed materials are finally discussed.

本文介绍了一种利用 TEM 测绘塑性变形材料弹性应变的方法。标准应变测量方法无法处理塑性变形材料的一个特征,即存在取向梯度。为了解决这个问题,我们将从扫描前驱电子衍射数据集中获得的取向图和应变图结合起来。更具体地说,考虑方位梯度的方法是:1)确定参考图案中的衍射光点位置;2)测量图中衍射图案与参考图案之间的方位偏差;3)根据图中每个位置测得的方位偏差旋转坐标系;4)计算旋转坐标系中的应变。目前只处理晶体的方位旋转。在纳米力学测试过程中,该方法在一个近似简单弯曲变形的 Cr2AlC 单晶微柱上进行了说明。塑性变形后,样品中的位错呈堆积和壁状排列。每个位错周围的应变场与理论相一致,并且观察到堆积和墙壁周围的应变场存在明显差异。此外,应变图还能确定伯格斯矢量的方向。由于样品所承受的载荷是已知的,因此还可以估计位错源的位置。最后讨论了研究变形材料的前景。
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引用次数: 0
Robust methodology for the EBSD local misorientation analysis of surface cold work 表面冷加工 EBSD 局部错向分析的稳健方法学
IF 2.1 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-06-27 DOI: 10.1016/j.ultramic.2024.114007

The amount of cold work induced by a surface hardening technique and the depth to which it is produced within a metallic material are both important parameters within the field of surface engineering. In this paper a methodology of establishing reliable estimates of the depth and magnitude of cold work in surface hardened nickel-based superalloy single crystals from a dataset (map) of electron backscattered diffraction images through the analysis of local misorientations is described in detail. The impact of varying a number of acquisition parameters within the scanning electron microscope and the impact of the various post-acquisition analysis parameters on the outcome of the analysis are both described and discussed in detail. The Python script used to perform this analysis is published in full. The principles and processes underlying this methodology, as well as the published script, can be readily adapted for the analysis of datasets of electron backscattered diffraction images from other surface hardening techniques and other surface-hardened materials.

表面硬化技术引起的冷加工量以及在金属材料中产生冷加工的深度都是表面工程领域的重要参数。本文详细介绍了一种通过分析局部错位,从电子反向散射衍射图像数据集(图)中对表面硬化镍基超合金单晶冷加工深度和规模进行可靠估算的方法。详细描述和讨论了改变扫描电子显微镜中的一些采集参数的影响,以及各种采集后分析参数对分析结果的影响。用于执行该分析的 Python 脚本全文公布。该方法的基本原理和过程以及已发布的脚本可随时用于分析其他表面硬化技术和其他表面硬化材料的电子反向散射衍射图像数据集。
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引用次数: 0
Angular momentum transfer from swift electrons to non-spherical nanoparticles within the dipolar approximation 在双极近似条件下从快速电子到非球形纳米粒子的角动量传递
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-06-11 DOI: 10.1016/j.ultramic.2024.114005
Jorge Luis Briseño-Gómez , Atzin López-Tercero , José Ángel Castellanos-Reyes , Alejandro Reyes-Coronado

In this work, we study the angular momentum transfer from a single swift electron to non-spherical metallic nanoparticles, specifically investigating spheroidal and polyhedral (Platonic Solids) shapes. While previous research has predominantly focused on spherical nanoparticles, our work expands the knowledge by exploring various geometries. Employing classical electrodynamics and the small particle limit, we calculate the angular momentum transfer by integrating the spectral density, ensuring causality through Fourier-transform analysis. Our findings demonstrate that prolate spheroidal nanoparticles exhibit a single blueshifted plasmonic resonance, compared to spherical nanoparticles of equivalent volume, resulting in lower angular momentum transfer. Conversely, oblate nanoparticles display two resonances — one blueshifted and one redshifted — resulting in a higher angular momentum transfer than their spherical counterparts. Additionally, Platonic Solids with fewer faces exhibit significant redshifts in plasmonic resonances, leading to higher angular momentum transfer due to edge effects. We also observe resonances and angular momentum transfers with similar characteristics in specific pairs of Platonic Solids, known as duals. These results highlight promising applications, particularly in electron tweezers technology.

在这项工作中,我们研究了从单个快速电子到非球形金属纳米粒子的角动量传递,特别是研究了球形和多面体(柏拉图实体)形状。以往的研究主要集中在球形纳米粒子上,而我们的研究则通过探索各种几何形状来扩展知识。利用经典电动力学和小粒子极限,我们通过积分谱密度计算角动量传递,并通过傅立叶变换分析确保因果关系。我们的研究结果表明,与同等体积的球形纳米粒子相比,长球形纳米粒子表现出单一的蓝移质子共振,从而导致较低的角动量传递。相反,扁球形纳米粒子显示出两个共振--一个蓝移,一个红移--导致角动量传递高于球形纳米粒子。此外,面数较少的柏拉图固体在质子共振中表现出明显的红移,从而在边缘效应的作用下产生更高的角动量传递。我们还在特定的柏拉图固体对(称为对偶)中观察到具有类似特征的共振和角动量传递。这些结果凸显了其广阔的应用前景,尤其是在电子镊子技术方面。
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引用次数: 0
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