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Secondary-electron imaging of bulk crystalline specimens in an aberration corrected STEM 在畸变校正 STEM 中对块状晶体试样进行二次电子成像
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-04-10 DOI: 10.1016/j.ultramic.2024.113967
Sooyeon Hwang , Lijun Wu , Kim Kisslinger , Judith Yang , Ray Egerton , Yimei Zhu

Atomic-scale electron microscopy traditionally probes thin specimens, with thickness below 100 nm, and its feasibility for bulk samples has not been documented. In this study, we explore the practicality of scanning transmission electron microscope (STEM) imaging with secondary electrons (SE), using a silicon-wedge specimen having a maximum thickness of 18 μm. We find that the atomic structure is present in the entire thickness range of the SE images although the background intensity increases moderately with thickness. The consistent intensity of secondary electron (SE) images at atomic positions and the modest increase in background intensity observed in silicon suggest a limited contribution from SEs generated by backscattered electrons, a conclusion supported by our multislice calculations. We conclude that achieving atomic resolution in SE imaging for bulk specimens is indeed attainable using aberration-corrected STEM and an aberration-corrected scanning electron microscope (SEM) may have the capacity for atomic-level resolution, holding great promise for future strides in materials research.

原子尺度电子显微镜传统上用于探测厚度低于 100 纳米的薄型试样,其对大块试样的可行性尚未得到证实。在这项研究中,我们利用最大厚度为 18 μm 的硅楔试样,探索了利用二次电子(SE)进行扫描透射电子显微镜(STEM)成像的实用性。我们发现,虽然背景强度随厚度的增加而适度增加,但原子结构存在于 SE 图像的整个厚度范围内。在硅中观察到的原子位置上的二次电子(SE)图像强度一致,背景强度适度增加,这表明后向散射电子产生的 SE 的贡献有限,我们的多片计算也支持这一结论。我们的结论是,使用像差校正 STEM 确实可以实现大块试样 SE 成像的原子分辨率,而像差校正扫描电子显微镜 (SEM) 可能具有原子级分辨率的能力,这为未来材料研究的长足进步带来了巨大希望。
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引用次数: 0
High-resolution scanning tunneling microscope and its adaptation for local thermopower measurements in 2D materials 高分辨率扫描隧道显微镜及其在二维材料局部热功率测量中的应用
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-04-09 DOI: 10.1016/j.ultramic.2024.113963
Jose D. Bermúdez-Perez , Edwin Herrera-Vasco , Javier Casas-Salgado , Hector A. Castelblanco , Karen Vega-Bustos , Gabriel Cardenas-Chirivi , Oscar L. Herrera-Sandoval , Hermann Suderow , Paula Giraldo-Gallo , Jose Augusto Galvis

We present the design, fabrication and discuss the performance of a new combined high-resolution Scanning Tunneling and Thermopower Microscope (STM/SThEM). We also describe the development of the electronic control, the user interface, the vacuum system, and arrangements to reduce acoustical noise and vibrations. We demonstrate the microscope’s performance with atomic-resolution topographic images of highly oriented pyrolytic graphite (HOPG) and local thermopower measurements in the semimetal Bi2Te3. Our system offers a tool to investigate the relationship between electronic structure and thermoelectric properties at the nanoscale.

我们介绍了新型组合式高分辨率扫描隧道显微镜和热动力显微镜(STM/SThEM)的设计、制造和性能讨论。我们还介绍了电子控制、用户界面、真空系统的开发,以及减少声学噪音和振动的安排。我们通过高取向热解石墨 (HOPG) 的原子分辨率形貌图像和半金属 Bi2Te3 的局部热功率测量,展示了显微镜的性能。我们的系统为研究纳米尺度电子结构与热电特性之间的关系提供了一种工具。
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引用次数: 0
Adaptive under-sampling strategy for fast imaging in compressive sensing-based atomic force microscopy 基于压缩传感的原子力显微镜中快速成像的自适应欠采样策略
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-04-02 DOI: 10.1016/j.ultramic.2024.113964
Peng Cheng , Yingzi Li , Rui Lin , Yifan Hu , Xiaodong Gao , Jianqiang Qian , Wendong Sun , Quan Yuan

Compressive sensing (CS) can reconstruct the rest information almost without distortion by advanced computational algorithm, which significantly simplifies the process of atomic force microscope (AFM) scanning with high imaging quality. In common CS-AFM, the partial measurements randomly come from the whole region to be measured, which easily leads to detail loss and poor image quality in regions of interest (ROIs). Consequently, important microscopic phenomena are missed probably. In this paper, we developed an adaptive under-sampling strategy for CS-AFM to optimize the process of sampling. Under a certain under-sampling ratio, the weight coefficient of ROIs and regions of base (ROBs) were set to control the distribution of under-sampling points and corresponding measurement matrix. A series of simulations were completed to demonstrate the relationship between the weight coefficient of ROIs and image quality. After that, we verified the effectiveness of the method on our homemade AFM. Through a lot of simulations and experiments, we demonstrated how the proposed method optimized the sampling process of CS-AFM, which speeded up the process of AFM imaging with high quality.

压缩传感(Compressive sensing,CS)通过先进的计算算法几乎不失真地重建其余信息,从而大大简化了原子力显微镜(AFM)的扫描过程,并获得了较高的成像质量。在普通的 CS-AFM 中,部分测量值随机来自整个待测区域,这很容易导致感兴趣区域(ROI)的细节丢失和图像质量低下。因此,可能会错过重要的微观现象。本文开发了 CS-AFM 的自适应欠采样策略,以优化采样过程。在一定的欠采样率下,设置 ROI 和基底区域(ROB)的权重系数来控制欠采样点的分布和相应的测量矩阵。我们完成了一系列模拟,以证明 ROI 权重系数与图像质量之间的关系。之后,我们在自制的原子力显微镜上验证了该方法的有效性。通过大量的模拟和实验,我们证明了所提出的方法如何优化了 CS-AFM 的采样过程,从而加快了 AFM 高质量成像的进程。
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引用次数: 0
Reflection imaging with a helium zone plate microscope 用氦区平板显微镜进行反射成像
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-03-25 DOI: 10.1016/j.ultramic.2024.113961
Ranveig Flatabø , Sabrina D. Eder , Thomas Reisinger , Gianangelo Bracco , Peter Baltzer , Björn Samelin , Bodil Holst

Neutral helium atom microscopy is a novel microscopy technique which offers strictly surface-sensitive, non-destructive imaging. Several experiments have been published in recent years where images are obtained by scanning a helium beam spot across a surface and recording the variation in scattered intensity at a fixed total scattering angle θSD and fixed incident angle θi relative to the overall surface normal. These experiments used a spot obtained by collimating the beam (referred to as helium pinhole microscopy). Alternatively, a beam spot can be created by focusing the beam with an atom optical element. However up till now imaging with a focused helium beam has only been demonstrated in transmission (using a zone plate). Here we present the first reflection images obtained with a focused helium beam (also using a zone plate). Images are obtained with a spot size (FWHM) down to 4.7μm ±0.5μm, and we demonstrate focusing down to a spot size of about 1μm. Furthermore, we present experiments measuring the scattering distribution from a focused helium beam spot. The experiments are done by varying the incoming beam angle θi while keeping the beam-detector angle θSD and the point where the beam spot hits the surface fixed - in essence, a microscopy scale realization of a standard helium atom scattering experiment. Our experiments are done using an electron bombardment detector with adjustable signal accumulation, developed particularly for helium microscopy.

中性氦原子显微镜是一种新型显微镜技术,可提供严格的表面敏感、非破坏性成像。近年来发表了一些实验,通过扫描表面上的氦光束光斑,记录相对于整个表面法线的固定总散射角θSD和固定入射角θi的散射强度变化,从而获得图像。这些实验使用通过准直光束获得的光斑(称为氦针孔显微镜)。另外,也可以通过原子光学元件聚焦光束来产生光斑。不过,迄今为止,聚焦氦光束的成像只在透射(使用区域板)情况下进行过演示。在此,我们首次展示了利用聚焦氦光束(同样使用区域板)获得的反射图像。获得的图像光斑尺寸(FWHM)小至 4.7μm ±0.5μm,我们还演示了聚焦后的光斑尺寸小至约 1μm。此外,我们还介绍了测量聚焦氦光束光斑散射分布的实验。实验是通过改变射入光束的角度θi来完成的,同时保持光束-探测器角度θSD和光束光斑撞击表面的点固定不变--实质上,这是标准氦原子散射实验在显微镜尺度上的实现。我们的实验使用的是专门为氦显微镜开发的可调节信号累积的电子轰击探测器。
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引用次数: 0
Isolated scan unit and scanning tunneling microscope for stable imaging in ultra-high magnetic fields 用于在超高磁场中稳定成像的隔离式扫描单元和扫描隧道显微镜
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-03-22 DOI: 10.1016/j.ultramic.2024.113960
Jihao Wang , Zihao Li , Kesen Zhao , Shuai Dong , Dan Wu , Wenjie Meng , Jing Zhang , Yubin Hou , Yalin Lu , Qingyou Lu

The high resolution of a scanning tunneling microscope (STM) relies on the stability of its scan unit. In this study, we present an isolated scan unit featuring non-magnetic design and ultra-high stability, as well as bidirectional movement capability. Different types of piezoelectric motors can be incorporated into the scan unit to create a highly stable STM. The standalone structure of scan unit ensures a stable atomic imaging process by decreasing noise generated by motor. The non-magnetic design makes the scan unit work stable in high magnetic field conditions. Moreover, we have successfully constructed a novel STM based on the isolated scan unit, in which two inertial piezoelectric motors act as the coarse approach actuators. The exceptional performance of homebuilt STM is proved by the high-resolution atomic images and dI/dV spectrums on NbSe2 surface at varying temperatures, as well as the raw-data images of graphite obtained at ultra-high magnetic fields of 23 T. According to the literature research, no STM has previously reported the atomic image at extreme conditions of 2 K low temperature and 23 T ultra-high magnetic field. Additionally, we present the ultra-low drift rates between the tip and sample at varying temperatures, as well as when raising the magnetic fields from 0 T to 23 T, indicating the ultra-high stability of the STM in high magnetic field conditions. The outstanding performance of our stable STM hold great potential for investigating the materials in ultra-high magnetic fields.

扫描隧道显微镜(STM)的高分辨率取决于其扫描单元的稳定性。在这项研究中,我们提出了一种具有非磁性设计和超高稳定性以及双向移动能力的隔离式扫描单元。不同类型的压电电机可以集成到扫描单元中,从而制造出高度稳定的 STM。扫描单元的独立结构可降低电机产生的噪音,从而确保原子成像过程的稳定性。非磁性设计使扫描单元在高磁场条件下也能稳定工作。此外,我们还成功地构建了一种基于隔离式扫描单元的新型 STM,其中两个惯性压电电机充当粗准执行器。我们在不同温度下获得了 NbSe2 表面的高分辨率原子图像和 dI/dV 光谱,并在 23 T 超高磁场条件下获得了石墨的原始数据图像,这些都证明了自制 STM 的卓越性能。此外,我们还展示了在不同温度下以及将磁场从 0 T 提高到 23 T 时针尖与样品之间的超低漂移率,这表明 STM 在高磁场条件下具有超高稳定性。我们稳定的 STM 的出色性能为研究超高磁场中的材料提供了巨大的潜力。
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引用次数: 0
Nano1D: An accurate computer vision software for analysis and segmentation of low-dimensional nanostructures Nano1D:用于分析和分割低维纳米结构的精确计算机视觉软件
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-03-10 DOI: 10.1016/j.ultramic.2024.113949
Ehsan Moradpur-Tari , Sergei Vlassov , Sven Oras , Mart Ernits , Elyad Damerchi , Boris Polyakov , Andreas Kyritsakis , Veronika Zadin

Nanoparticles in microscopy images are usually analyzed qualitatively or manually and there is a need for autonomous quantitative analysis of these objects. In this paper, we present a physics-based computational model for accurate segmentation and geometrical analysis of one-dimensional deformable overlapping objects from microscopy images. This model, named Nano1D, has four steps of preprocessing, segmentation, separating overlapped objects and geometrical measurements. The model is tested on SEM images of Ag and Au nanowire taken from different microscopes, and thermally fragmented Ag nanowires transformed into nanoparticles with different lengths, diameters, and population densities. It successfully segments and analyzes their geometrical characteristics including lengths and average diameter. The function of the algorithm is not undermined by the size, number, density, orientation and overlapping of objects in images. The main strength of the model is shown to be its ability to segment and analyze overlapping objects successfully with more than 99 % accuracy, while current machine learning and computational models suffer from inaccuracy and inability to segment overlapping objects. Benefiting from a graphical user interface, Nano1D can analyze 1D nanoparticles including nanowires, nanotubes, nanorods in addition to other 1D features of microstructures like microcracks, dislocations etc.

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引用次数: 0
Measuring scattering distributions in scanning helium microscopy 在扫描氦显微镜中测量散射分布
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-03-07 DOI: 10.1016/j.ultramic.2024.113951
C.J. Hatchwell , M. Bergin , B. Carr , M.G. Barr , A. Fahy , P.C. Dastoor

A scanning helium microscope typically utilises a thermal energy helium atom beam, with an energy and wavelength (¡100 meV, 0.05 nm) particularly sensitive to surface structure. An angular detector stage for a scanning helium microscope is presented that facilitates the in-situ measurement of scattering distributions from a sample. We begin by demonstrating typical elastic and inelastic scattering from ordered surfaces. We then go on to show the role of topography in diffuse scattering from disordered surfaces, observing deviations from simple cosine scattering. In total, these studies demonstrate the wealth of information that is encoded into the scattering distributions obtained with the technique.

扫描氦显微镜通常使用热能氦原子束,其能量和波长(¡100 meV,∼0.05 nm)对表面结构特别敏感。本文介绍了一种用于扫描氦显微镜的角度探测器平台,可方便地对样品的散射分布进行现场测量。我们首先展示了有序表面的典型弹性和非弹性散射。接着,我们展示了形貌在无序表面漫散射中的作用,观察到与简单余弦散射的偏差。总之,这些研究展示了利用该技术获得的散射分布所包含的丰富信息。
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引用次数: 0
An in-situ magnetising holder achieving 1.5 T in-plane field in 200 kV transmission electron microscope 在 200 kV 透射电子显微镜中实现 1.5 T 平面磁场的原位磁化支架
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-03-06 DOI: 10.1016/j.ultramic.2024.113950
Tian Bai , Xin Sun , Jiazhuan Qin , Fei Li , Qiang Gao , Weixing Xia , Renjie Chen , Aru Yan , Wei Li

A strong in-plane magnetic field is required for Lorentz transmission electron microscopy (LTEM) to observe the evolution of the magnetic domain structure of materials with high coercivity, particularly for research on rare-earth permanent magnets. However, the maximum field of the present in-situ magnetising holder applied in 200-kV or 300-kV TEM does not exceed 0.1 T. In this study, the reason for the low field was analysed, and the field strength was significantly elevated by reducing the field application area of the field generator. From finite element method calculations and experimental measurements, a 1.5 T in-plane field was achieved by our new holder in a 200-kV TEM, and images with good quality could still be obtained. Using the newly developed holder, the magnetisation process of hot-pressed NdFeB magnets was observed. The in-situ magnetising holder can be used in research on a wide variety of magnetic materials.

洛伦兹透射电子显微镜(LTEM)需要强大的面内磁场来观察高矫顽力材料磁畴结构的演变,特别是在稀土永磁研究中。然而,目前在 200 千伏或 300 千伏 TEM 中应用的原位磁化支架的最大磁场不超过 0.1 T。本研究分析了磁场过低的原因,并通过减小磁场发生器的磁场应用面积显著提高了磁场强度。通过有限元法计算和实验测量,我们的新支架在 200 千伏的 TEM 中实现了 1.5 T 的面内磁场,而且仍能获得质量良好的图像。使用新开发的支架,观察了热压钕铁硼磁体的磁化过程。这种原位磁化支架可用于多种磁性材料的研究。
{"title":"An in-situ magnetising holder achieving 1.5 T in-plane field in 200 kV transmission electron microscope","authors":"Tian Bai ,&nbsp;Xin Sun ,&nbsp;Jiazhuan Qin ,&nbsp;Fei Li ,&nbsp;Qiang Gao ,&nbsp;Weixing Xia ,&nbsp;Renjie Chen ,&nbsp;Aru Yan ,&nbsp;Wei Li","doi":"10.1016/j.ultramic.2024.113950","DOIUrl":"10.1016/j.ultramic.2024.113950","url":null,"abstract":"<div><p>A strong in-plane magnetic field is required for Lorentz transmission electron microscopy (LTEM) to observe the evolution of the magnetic domain structure of materials with high coercivity, particularly for research on rare-earth permanent magnets. However, the maximum field of the present <em>in-situ</em> magnetising holder applied in 200-kV or 300-kV TEM does not exceed 0.1 T. In this study, the reason for the low field was analysed, and the field strength was significantly elevated by reducing the field application area of the field generator. From finite element method calculations and experimental measurements, a 1.5 T in-plane field was achieved by our new holder in a 200-kV TEM, and images with good quality could still be obtained. Using the newly developed holder, the magnetisation process of hot-pressed NdFeB magnets was observed. The <em>in-situ</em> magnetising holder can be used in research on a wide variety of magnetic materials.</p></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"260 ","pages":"Article 113950"},"PeriodicalIF":2.2,"publicationDate":"2024-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140074668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The characterisation of dental enamel using transmission Kikuchi diffraction in the scanning electron microscope combined with dynamic template matching 在扫描电子显微镜中使用透射菊池衍射法结合动态模板匹配分析牙釉质的特征
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-02-24 DOI: 10.1016/j.ultramic.2024.113940
Patrick Trimby , Mohammed Al-Mosawi , Maisoon Al-Jawad , Stuart Micklethwaite , Zabeada Aslam , Aimo Winkelmann , Sandra Piazolo

The remarkable physical properties of dental enamel can be largely attributed to the structure of the hydroxyapatite (HAp) crystallites on the sub-micrometre scale. Characterising the HAp microstructure is challenging, due to the nanoscale of individual crystallites and practical challenges associated with HAp examination using electron microscopy techniques. Conventional methods for enamel characterisation include imaging using transmission electron microscopy (TEM) or specialised beamline techniques, such as polarisation-dependent imaging contrast (PIC). These provide useful information at the necessary spatial resolution but are not able to measure the full crystallographic orientation of the HAp crystallites. Here we demonstrate the effectiveness of enamel analyses using transmission Kikuchi diffraction (TKD) in the scanning electron microscope, coupled with newly-developed pattern matching methods. The pattern matching approach, using dynamic template matching coupled with subsequent orientation refinement, enables robust indexing of even poor-quality TKD patterns, resulting in significantly improved data quality compared to conventional diffraction pattern indexing methods. The potential of this method for the analysis of nanocrystalline enamel structures is demonstrated by the characterisation of a human enamel TEM sample and the subsequent comparison of the results to high resolution TEM imaging. The TKD – pattern matching approach measures the full HAp crystallographic orientation enabling a quantitative measurement of not just the c-axis orientations, but also the extent of any rotation of the crystal lattice about the c-axis, between and within grains. Results presented here show how this additional information highlights potentially significant aspects of the HAp crystallite structure, including intra-crystallite distortion and the presence of multiple high angle boundaries between adjacent crystallites with rotations about the c-axis. These and other observations enable a more rigorous understanding of the relationship between HAp structures and the physical properties of dental enamel.

牙釉质卓越的物理特性在很大程度上归因于亚微米级的羟基磷灰石(HAp)结晶结构。由于单个结晶的尺寸达到了纳米级,而且使用电子显微镜技术检测 HAp 存在实际困难,因此表征 HAp 的微观结构非常具有挑战性。珐琅质表征的传统方法包括使用透射电子显微镜(TEM)成像或专门的光束线技术,如偏振相关成像对比(PIC)。这些方法可提供必要空间分辨率的有用信息,但无法测量 HAp 晶体的全部晶体学取向。在这里,我们展示了利用扫描电子显微镜中的透射菊池衍射(TKD)和新开发的模式匹配方法进行珐琅质分析的有效性。这种模式匹配方法采用动态模板匹配和随后的取向细化,即使是质量较差的 TKD 模式也能进行稳健的索引,与传统的衍射模式索引方法相比,数据质量有了显著提高。通过对人体珐琅质 TEM 样品进行表征,并将结果与高分辨率 TEM 成像进行比较,证明了这种方法在分析纳米晶珐琅质结构方面的潜力。TKD - 图案匹配方法可测量整个 HAp 晶体取向,不仅能定量测量 c 轴取向,还能测量晶粒之间和晶粒内部晶格围绕 c 轴旋转的程度。本文介绍的结果显示了这些附加信息如何凸显出 HAp 晶粒结构的潜在重要方面,包括晶粒内部畸变以及相邻晶粒之间存在多个围绕 c 轴旋转的高角度边界。通过这些观察和其他观察,我们可以更深入地了解 HAp 结构与牙釉质物理性质之间的关系。
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引用次数: 0
Weld-free mounting of lamellae for electrical biasing operando TEM 用于电偏压操作型 TEM 的无焊接安装薄片
IF 2.2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2024-02-21 DOI: 10.1016/j.ultramic.2024.113939
Oscar Recalde-Benitez , Yevheniy Pivak , Tianshu Jiang , Robert Winkler , Alexander Zintler , Esmaeil Adabifiroozjaei , Philipp Komissinskiy , Lambert Alff , William A. Hubbard , H. Hugo Perez-Garza , Leopoldo Molina-Luna

Recent advances in microelectromechanical systems (MEMS)-based substrates and sample holders for in situ transmission electron microscopy (TEM) are currently enabling exciting new opportunities for the nanoscale investigation of materials and devices. The ability to perform electrical testing while simultaneously capturing the wide spectrum of signals detectable in a TEM, including structural, chemical, and even electronic contrast, represents a significant milestone in the realm of nanoelectronics. In situ studies hold particular promise for the development of Metal-Insulator-Metal (MIM) devices for use in next-generation computing. However, achieving successful device operation in the TEM typically necessitates meticulous sample preparation involving focused ion beam (FIB) systems. Conducting contamination introduced during the FIB thinning process and subsequent attachment of the sample onto a MEMS-based chip remains a formidable challenge. This article delineates an improved FIB-based sample preparation methodology that results in good electrical connectivity and operational functionality across various MIM devices. To exemplify the efficacy of the sample preparation technique, we demonstrate preparation of a clean cross section extracted from a Au/Pt/BaSrTiO3/SrMoO3 tunable capacitor (varactor). The FIB-prepared TEM lamella mounted on a MEMS-based chip showed current levels in the tens of picoamperes range at 0.1 V. Furthermore, the electric response and current density of the TEM lamella device closely align with macro-scale devices. These samples exhibit comparable current densities to their macro-sized counterparts thus validating the sample preparation process and confirming device connectivity. The simultaneous operation and TEM characterization of electronic devices enabled by this process enables direct correlation between device structure and function, which could prove pivotal in the development of new MIM systems.

基于微机电系统(MEMS)的原位透射电子显微镜(TEM)基底和样品架的最新进展为材料和器件的纳米级研究带来了令人兴奋的新机遇。在进行电气测试的同时,还能捕捉 TEM 中可检测到的各种信号,包括结构、化学甚至电子对比,这是纳米电子学领域的一个重要里程碑。原位研究为开发用于下一代计算的金属-绝缘体-金属(MIM)器件带来了特别的希望。然而,要在 TEM 中成功实现器件操作,通常需要使用聚焦离子束 (FIB) 系统进行细致的样品制备。在 FIB 薄化过程中引入的传导污染以及随后将样品附着到基于 MEMS 的芯片上,仍然是一项艰巨的挑战。本文介绍了一种改进的基于 FIB 的样品制备方法,该方法可在各种 MIM 器件上实现良好的电气连接和操作功能。为了体现样品制备技术的功效,我们演示了从 Au/Pt/BaSrTiO3/SrMoO3 可调电容器(变容器)中提取的清洁横截面的制备。FIB 制备的 TEM 片安装在基于 MEMS 的芯片上,在 0.1 V 电压下显示出几十皮安的电流水平。此外,TEM薄片器件的电响应和电流密度与宏观尺度器件非常接近。这些样品的电流密度与宏观尺寸的样品相当,从而验证了样品制备过程并确认了器件的连接性。该工艺可同时对电子器件进行操作和 TEM 表征,从而实现器件结构与功能之间的直接关联,这在新型 MIM 系统的开发中将起到关键作用。
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引用次数: 0
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