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Reflection imaging with a helium zone plate microscope 用氦区平板显微镜进行反射成像
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-03-25 DOI: 10.1016/j.ultramic.2024.113961
Ranveig Flatabø , Sabrina D. Eder , Thomas Reisinger , Gianangelo Bracco , Peter Baltzer , Björn Samelin , Bodil Holst

Neutral helium atom microscopy is a novel microscopy technique which offers strictly surface-sensitive, non-destructive imaging. Several experiments have been published in recent years where images are obtained by scanning a helium beam spot across a surface and recording the variation in scattered intensity at a fixed total scattering angle θSD and fixed incident angle θi relative to the overall surface normal. These experiments used a spot obtained by collimating the beam (referred to as helium pinhole microscopy). Alternatively, a beam spot can be created by focusing the beam with an atom optical element. However up till now imaging with a focused helium beam has only been demonstrated in transmission (using a zone plate). Here we present the first reflection images obtained with a focused helium beam (also using a zone plate). Images are obtained with a spot size (FWHM) down to 4.7μm ±0.5μm, and we demonstrate focusing down to a spot size of about 1μm. Furthermore, we present experiments measuring the scattering distribution from a focused helium beam spot. The experiments are done by varying the incoming beam angle θi while keeping the beam-detector angle θSD and the point where the beam spot hits the surface fixed - in essence, a microscopy scale realization of a standard helium atom scattering experiment. Our experiments are done using an electron bombardment detector with adjustable signal accumulation, developed particularly for helium microscopy.

中性氦原子显微镜是一种新型显微镜技术,可提供严格的表面敏感、非破坏性成像。近年来发表了一些实验,通过扫描表面上的氦光束光斑,记录相对于整个表面法线的固定总散射角θSD和固定入射角θi的散射强度变化,从而获得图像。这些实验使用通过准直光束获得的光斑(称为氦针孔显微镜)。另外,也可以通过原子光学元件聚焦光束来产生光斑。不过,迄今为止,聚焦氦光束的成像只在透射(使用区域板)情况下进行过演示。在此,我们首次展示了利用聚焦氦光束(同样使用区域板)获得的反射图像。获得的图像光斑尺寸(FWHM)小至 4.7μm ±0.5μm,我们还演示了聚焦后的光斑尺寸小至约 1μm。此外,我们还介绍了测量聚焦氦光束光斑散射分布的实验。实验是通过改变射入光束的角度θi来完成的,同时保持光束-探测器角度θSD和光束光斑撞击表面的点固定不变--实质上,这是标准氦原子散射实验在显微镜尺度上的实现。我们的实验使用的是专门为氦显微镜开发的可调节信号累积的电子轰击探测器。
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引用次数: 0
Isolated scan unit and scanning tunneling microscope for stable imaging in ultra-high magnetic fields 用于在超高磁场中稳定成像的隔离式扫描单元和扫描隧道显微镜
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-03-22 DOI: 10.1016/j.ultramic.2024.113960
Jihao Wang , Zihao Li , Kesen Zhao , Shuai Dong , Dan Wu , Wenjie Meng , Jing Zhang , Yubin Hou , Yalin Lu , Qingyou Lu

The high resolution of a scanning tunneling microscope (STM) relies on the stability of its scan unit. In this study, we present an isolated scan unit featuring non-magnetic design and ultra-high stability, as well as bidirectional movement capability. Different types of piezoelectric motors can be incorporated into the scan unit to create a highly stable STM. The standalone structure of scan unit ensures a stable atomic imaging process by decreasing noise generated by motor. The non-magnetic design makes the scan unit work stable in high magnetic field conditions. Moreover, we have successfully constructed a novel STM based on the isolated scan unit, in which two inertial piezoelectric motors act as the coarse approach actuators. The exceptional performance of homebuilt STM is proved by the high-resolution atomic images and dI/dV spectrums on NbSe2 surface at varying temperatures, as well as the raw-data images of graphite obtained at ultra-high magnetic fields of 23 T. According to the literature research, no STM has previously reported the atomic image at extreme conditions of 2 K low temperature and 23 T ultra-high magnetic field. Additionally, we present the ultra-low drift rates between the tip and sample at varying temperatures, as well as when raising the magnetic fields from 0 T to 23 T, indicating the ultra-high stability of the STM in high magnetic field conditions. The outstanding performance of our stable STM hold great potential for investigating the materials in ultra-high magnetic fields.

扫描隧道显微镜(STM)的高分辨率取决于其扫描单元的稳定性。在这项研究中,我们提出了一种具有非磁性设计和超高稳定性以及双向移动能力的隔离式扫描单元。不同类型的压电电机可以集成到扫描单元中,从而制造出高度稳定的 STM。扫描单元的独立结构可降低电机产生的噪音,从而确保原子成像过程的稳定性。非磁性设计使扫描单元在高磁场条件下也能稳定工作。此外,我们还成功地构建了一种基于隔离式扫描单元的新型 STM,其中两个惯性压电电机充当粗准执行器。我们在不同温度下获得了 NbSe2 表面的高分辨率原子图像和 dI/dV 光谱,并在 23 T 超高磁场条件下获得了石墨的原始数据图像,这些都证明了自制 STM 的卓越性能。此外,我们还展示了在不同温度下以及将磁场从 0 T 提高到 23 T 时针尖与样品之间的超低漂移率,这表明 STM 在高磁场条件下具有超高稳定性。我们稳定的 STM 的出色性能为研究超高磁场中的材料提供了巨大的潜力。
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引用次数: 0
Nano1D: An accurate computer vision software for analysis and segmentation of low-dimensional nanostructures Nano1D:用于分析和分割低维纳米结构的精确计算机视觉软件
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-03-10 DOI: 10.1016/j.ultramic.2024.113949
Ehsan Moradpur-Tari , Sergei Vlassov , Sven Oras , Mart Ernits , Elyad Damerchi , Boris Polyakov , Andreas Kyritsakis , Veronika Zadin

Nanoparticles in microscopy images are usually analyzed qualitatively or manually and there is a need for autonomous quantitative analysis of these objects. In this paper, we present a physics-based computational model for accurate segmentation and geometrical analysis of one-dimensional deformable overlapping objects from microscopy images. This model, named Nano1D, has four steps of preprocessing, segmentation, separating overlapped objects and geometrical measurements. The model is tested on SEM images of Ag and Au nanowire taken from different microscopes, and thermally fragmented Ag nanowires transformed into nanoparticles with different lengths, diameters, and population densities. It successfully segments and analyzes their geometrical characteristics including lengths and average diameter. The function of the algorithm is not undermined by the size, number, density, orientation and overlapping of objects in images. The main strength of the model is shown to be its ability to segment and analyze overlapping objects successfully with more than 99 % accuracy, while current machine learning and computational models suffer from inaccuracy and inability to segment overlapping objects. Benefiting from a graphical user interface, Nano1D can analyze 1D nanoparticles including nanowires, nanotubes, nanorods in addition to other 1D features of microstructures like microcracks, dislocations etc.

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引用次数: 0
Measuring scattering distributions in scanning helium microscopy 在扫描氦显微镜中测量散射分布
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-03-07 DOI: 10.1016/j.ultramic.2024.113951
C.J. Hatchwell , M. Bergin , B. Carr , M.G. Barr , A. Fahy , P.C. Dastoor

A scanning helium microscope typically utilises a thermal energy helium atom beam, with an energy and wavelength (¡100 meV, 0.05 nm) particularly sensitive to surface structure. An angular detector stage for a scanning helium microscope is presented that facilitates the in-situ measurement of scattering distributions from a sample. We begin by demonstrating typical elastic and inelastic scattering from ordered surfaces. We then go on to show the role of topography in diffuse scattering from disordered surfaces, observing deviations from simple cosine scattering. In total, these studies demonstrate the wealth of information that is encoded into the scattering distributions obtained with the technique.

扫描氦显微镜通常使用热能氦原子束,其能量和波长(¡100 meV,∼0.05 nm)对表面结构特别敏感。本文介绍了一种用于扫描氦显微镜的角度探测器平台,可方便地对样品的散射分布进行现场测量。我们首先展示了有序表面的典型弹性和非弹性散射。接着,我们展示了形貌在无序表面漫散射中的作用,观察到与简单余弦散射的偏差。总之,这些研究展示了利用该技术获得的散射分布所包含的丰富信息。
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引用次数: 0
An in-situ magnetising holder achieving 1.5 T in-plane field in 200 kV transmission electron microscope 在 200 kV 透射电子显微镜中实现 1.5 T 平面磁场的原位磁化支架
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-03-06 DOI: 10.1016/j.ultramic.2024.113950
Tian Bai , Xin Sun , Jiazhuan Qin , Fei Li , Qiang Gao , Weixing Xia , Renjie Chen , Aru Yan , Wei Li

A strong in-plane magnetic field is required for Lorentz transmission electron microscopy (LTEM) to observe the evolution of the magnetic domain structure of materials with high coercivity, particularly for research on rare-earth permanent magnets. However, the maximum field of the present in-situ magnetising holder applied in 200-kV or 300-kV TEM does not exceed 0.1 T. In this study, the reason for the low field was analysed, and the field strength was significantly elevated by reducing the field application area of the field generator. From finite element method calculations and experimental measurements, a 1.5 T in-plane field was achieved by our new holder in a 200-kV TEM, and images with good quality could still be obtained. Using the newly developed holder, the magnetisation process of hot-pressed NdFeB magnets was observed. The in-situ magnetising holder can be used in research on a wide variety of magnetic materials.

洛伦兹透射电子显微镜(LTEM)需要强大的面内磁场来观察高矫顽力材料磁畴结构的演变,特别是在稀土永磁研究中。然而,目前在 200 千伏或 300 千伏 TEM 中应用的原位磁化支架的最大磁场不超过 0.1 T。本研究分析了磁场过低的原因,并通过减小磁场发生器的磁场应用面积显著提高了磁场强度。通过有限元法计算和实验测量,我们的新支架在 200 千伏的 TEM 中实现了 1.5 T 的面内磁场,而且仍能获得质量良好的图像。使用新开发的支架,观察了热压钕铁硼磁体的磁化过程。这种原位磁化支架可用于多种磁性材料的研究。
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引用次数: 0
The characterisation of dental enamel using transmission Kikuchi diffraction in the scanning electron microscope combined with dynamic template matching 在扫描电子显微镜中使用透射菊池衍射法结合动态模板匹配分析牙釉质的特征
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-02-24 DOI: 10.1016/j.ultramic.2024.113940
Patrick Trimby , Mohammed Al-Mosawi , Maisoon Al-Jawad , Stuart Micklethwaite , Zabeada Aslam , Aimo Winkelmann , Sandra Piazolo

The remarkable physical properties of dental enamel can be largely attributed to the structure of the hydroxyapatite (HAp) crystallites on the sub-micrometre scale. Characterising the HAp microstructure is challenging, due to the nanoscale of individual crystallites and practical challenges associated with HAp examination using electron microscopy techniques. Conventional methods for enamel characterisation include imaging using transmission electron microscopy (TEM) or specialised beamline techniques, such as polarisation-dependent imaging contrast (PIC). These provide useful information at the necessary spatial resolution but are not able to measure the full crystallographic orientation of the HAp crystallites. Here we demonstrate the effectiveness of enamel analyses using transmission Kikuchi diffraction (TKD) in the scanning electron microscope, coupled with newly-developed pattern matching methods. The pattern matching approach, using dynamic template matching coupled with subsequent orientation refinement, enables robust indexing of even poor-quality TKD patterns, resulting in significantly improved data quality compared to conventional diffraction pattern indexing methods. The potential of this method for the analysis of nanocrystalline enamel structures is demonstrated by the characterisation of a human enamel TEM sample and the subsequent comparison of the results to high resolution TEM imaging. The TKD – pattern matching approach measures the full HAp crystallographic orientation enabling a quantitative measurement of not just the c-axis orientations, but also the extent of any rotation of the crystal lattice about the c-axis, between and within grains. Results presented here show how this additional information highlights potentially significant aspects of the HAp crystallite structure, including intra-crystallite distortion and the presence of multiple high angle boundaries between adjacent crystallites with rotations about the c-axis. These and other observations enable a more rigorous understanding of the relationship between HAp structures and the physical properties of dental enamel.

牙釉质卓越的物理特性在很大程度上归因于亚微米级的羟基磷灰石(HAp)结晶结构。由于单个结晶的尺寸达到了纳米级,而且使用电子显微镜技术检测 HAp 存在实际困难,因此表征 HAp 的微观结构非常具有挑战性。珐琅质表征的传统方法包括使用透射电子显微镜(TEM)成像或专门的光束线技术,如偏振相关成像对比(PIC)。这些方法可提供必要空间分辨率的有用信息,但无法测量 HAp 晶体的全部晶体学取向。在这里,我们展示了利用扫描电子显微镜中的透射菊池衍射(TKD)和新开发的模式匹配方法进行珐琅质分析的有效性。这种模式匹配方法采用动态模板匹配和随后的取向细化,即使是质量较差的 TKD 模式也能进行稳健的索引,与传统的衍射模式索引方法相比,数据质量有了显著提高。通过对人体珐琅质 TEM 样品进行表征,并将结果与高分辨率 TEM 成像进行比较,证明了这种方法在分析纳米晶珐琅质结构方面的潜力。TKD - 图案匹配方法可测量整个 HAp 晶体取向,不仅能定量测量 c 轴取向,还能测量晶粒之间和晶粒内部晶格围绕 c 轴旋转的程度。本文介绍的结果显示了这些附加信息如何凸显出 HAp 晶粒结构的潜在重要方面,包括晶粒内部畸变以及相邻晶粒之间存在多个围绕 c 轴旋转的高角度边界。通过这些观察和其他观察,我们可以更深入地了解 HAp 结构与牙釉质物理性质之间的关系。
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引用次数: 0
Weld-free mounting of lamellae for electrical biasing operando TEM 用于电偏压操作型 TEM 的无焊接安装薄片
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-02-21 DOI: 10.1016/j.ultramic.2024.113939
Oscar Recalde-Benitez , Yevheniy Pivak , Tianshu Jiang , Robert Winkler , Alexander Zintler , Esmaeil Adabifiroozjaei , Philipp Komissinskiy , Lambert Alff , William A. Hubbard , H. Hugo Perez-Garza , Leopoldo Molina-Luna

Recent advances in microelectromechanical systems (MEMS)-based substrates and sample holders for in situ transmission electron microscopy (TEM) are currently enabling exciting new opportunities for the nanoscale investigation of materials and devices. The ability to perform electrical testing while simultaneously capturing the wide spectrum of signals detectable in a TEM, including structural, chemical, and even electronic contrast, represents a significant milestone in the realm of nanoelectronics. In situ studies hold particular promise for the development of Metal-Insulator-Metal (MIM) devices for use in next-generation computing. However, achieving successful device operation in the TEM typically necessitates meticulous sample preparation involving focused ion beam (FIB) systems. Conducting contamination introduced during the FIB thinning process and subsequent attachment of the sample onto a MEMS-based chip remains a formidable challenge. This article delineates an improved FIB-based sample preparation methodology that results in good electrical connectivity and operational functionality across various MIM devices. To exemplify the efficacy of the sample preparation technique, we demonstrate preparation of a clean cross section extracted from a Au/Pt/BaSrTiO3/SrMoO3 tunable capacitor (varactor). The FIB-prepared TEM lamella mounted on a MEMS-based chip showed current levels in the tens of picoamperes range at 0.1 V. Furthermore, the electric response and current density of the TEM lamella device closely align with macro-scale devices. These samples exhibit comparable current densities to their macro-sized counterparts thus validating the sample preparation process and confirming device connectivity. The simultaneous operation and TEM characterization of electronic devices enabled by this process enables direct correlation between device structure and function, which could prove pivotal in the development of new MIM systems.

基于微机电系统(MEMS)的原位透射电子显微镜(TEM)基底和样品架的最新进展为材料和器件的纳米级研究带来了令人兴奋的新机遇。在进行电气测试的同时,还能捕捉 TEM 中可检测到的各种信号,包括结构、化学甚至电子对比,这是纳米电子学领域的一个重要里程碑。原位研究为开发用于下一代计算的金属-绝缘体-金属(MIM)器件带来了特别的希望。然而,要在 TEM 中成功实现器件操作,通常需要使用聚焦离子束 (FIB) 系统进行细致的样品制备。在 FIB 薄化过程中引入的传导污染以及随后将样品附着到基于 MEMS 的芯片上,仍然是一项艰巨的挑战。本文介绍了一种改进的基于 FIB 的样品制备方法,该方法可在各种 MIM 器件上实现良好的电气连接和操作功能。为了体现样品制备技术的功效,我们演示了从 Au/Pt/BaSrTiO3/SrMoO3 可调电容器(变容器)中提取的清洁横截面的制备。FIB 制备的 TEM 片安装在基于 MEMS 的芯片上,在 0.1 V 电压下显示出几十皮安的电流水平。此外,TEM薄片器件的电响应和电流密度与宏观尺度器件非常接近。这些样品的电流密度与宏观尺寸的样品相当,从而验证了样品制备过程并确认了器件的连接性。该工艺可同时对电子器件进行操作和 TEM 表征,从而实现器件结构与功能之间的直接关联,这在新型 MIM 系统的开发中将起到关键作用。
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引用次数: 0
Element specific atom counting for heterogeneous nanostructures: Combining multiple ADF STEM images for simultaneous thickness and composition determination 用于异质纳米结构的特定元素原子计数:结合多幅 ADF STEM 图像同时测定厚度和成分
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-02-19 DOI: 10.1016/j.ultramic.2024.113941
D.G. Şentürk , A. De Backer , S. Van Aert

In this paper, a methodology is presented to count the number of atoms in heterogeneous nanoparticles based on the combination of multiple annular dark field scanning transmission electron microscopy (ADF STEM) images. The different non-overlapping annular detector collection regions are selected based on the principles of optimal statistical experiment design for the atom-counting problem. To count the number of atoms, the total intensities of scattered electrons for each atomic column, the so-called scattering cross-sections, are simultaneously compared with simulated library values for the different detector regions by minimising the squared differences. The performance of the method is evaluated for simulated Ni@Pt and Au@Ag core–shell nanoparticles. Our approach turns out to be a dose efficient alternative for the investigation of beam-sensitive heterogeneous materials as compared to the combination of ADF STEM and energy dispersive X-ray spectroscopy.

本文介绍了一种基于多个环形暗场扫描透射电子显微镜(ADF STEM)图像组合的异质纳米粒子原子数量计数方法。根据原子计数问题的最优统计实验设计原则,选择了不同的非重叠环形探测器采集区域。为了计算原子数量,通过最小化平方差,同时将每个原子列的散射电子总强度(即所谓的散射截面)与不同探测器区域的模拟库值进行比较。在模拟 Ni@Pt 和 Au@Ag 核壳纳米粒子时,对该方法的性能进行了评估。结果表明,与 ADF STEM 和能量色散 X 射线光谱法相比,我们的方法是研究对光束敏感的异质材料的一种剂量效率高的替代方法。
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引用次数: 0
Fast detection of micro-objects using scanning electrochemical microscopy based on visual recognition and machine learning 利用基于视觉识别和机器学习的扫描电化学显微镜快速检测微小物体
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-02-15 DOI: 10.1016/j.ultramic.2024.113937
Vadimas Ivinskij , Antanas Zinovicius , Andrius Dzedzickis , Jurga Subaciute-Zemaitiene , Juste Rozene , Vytautas Bucinskas , Eugenijus Macerauskas , Sonata Tolvaisiene , Inga Morkvenaite-Vilkonciene

Scanning electrochemical microscopy (SECM) is a scanning probe microscope with an ultramicroelectrode (UME) as a probe. The technique is advantageous in the characterization of the electrochemical properties of surfaces. However, the limitations, such as slow imaging and many functions depending on the user, only allow us to use some of the possibilities. Therefore, we applied visual recognition and machine learning to detect micro-objects from the image and determine their electrochemical activity. The reconstruction of the image from several approach curves allows it to scan faster and detect active areas of the sample. Therefore, the scanning time and presence of the user is diminished. An automated scanning electrochemical microscope with visual recognition has been developed using commercially available modules, relatively low-cost components, design, software solutions proven in other fields, and an original control and data fusion algorithm.

扫描电化学显微镜(SECM)是一种以超微电极(UME)为探针的扫描探针显微镜。该技术在表征表面电化学特性方面具有优势。然而,由于成像速度慢、功能多寡取决于用户等限制,我们只能使用其中的部分功能。因此,我们应用视觉识别和机器学习从图像中检测微小物体,并确定其电化学活性。通过几条方法曲线重建图像,可以更快地扫描和检测样品的活性区域。因此,扫描时间和用户在场时间都减少了。我们利用市场上可买到的模块、成本相对较低的组件、设计、在其他领域得到验证的软件解决方案以及独创的控制和数据融合算法,开发出了具有视觉识别功能的自动扫描电化学显微镜。
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引用次数: 0
Framework of compressive sensing and data compression for 4D-STEM 用于 4D-STEM 的压缩传感和数据压缩框架
IF 2.2 3区 工程技术 Q1 Physics and Astronomy Pub Date : 2024-02-10 DOI: 10.1016/j.ultramic.2024.113938
Hsu-Chih Ni , Renliang Yuan , Jiong Zhang , Jian-Min Zuo

Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive materials. However, the field of view of 4D-STEM is relatively small, which in absence of live processing is limited by the data size required for storage. Furthermore, the rectilinear scan approach currently employed in 4D-STEM places a resolution- and signal-dependent dose limit for the study of beam sensitive materials. Improving 4D-STEM data and dose efficiency, by keeping the data size manageable while limiting the amount of electron dose, is thus critical for broader applications. Here we introduce a general method for reconstructing 4D-STEM data with subsampling in both real and reciprocal spaces at high fidelity. The approach is first tested on the subsampled datasets created from a full 4D-STEM dataset, and then demonstrated experimentally using random scan in real-space. The same reconstruction algorithm can also be used for compression of 4D-STEM datasets, leading to a large reduction (100 times or more) in data size, while retaining the fine features of 4D-STEM imaging, for crystalline samples.

四维扫描透射电子显微镜(4D-STEM)是一种功能强大的技术,可在多个长度尺度上对材料进行高分辨率和高精度表征,包括对光束敏感材料的表征。然而,4D-STEM 的视场相对较小,在没有实时处理的情况下,会受到存储所需数据量的限制。此外,4D-STEM 目前采用的直线扫描方法在研究光束敏感材料时会受到分辨率和信号剂量的限制。因此,提高 4D-STEM 数据和剂量效率,在限制电子剂量的同时保持数据大小可控,对于更广泛的应用至关重要。在此,我们介绍了一种在实空间和倒易空间中通过子采样高保真地重建 4D-STEM 数据的通用方法。该方法首先在从完整 4D-STEM 数据集创建的子采样数据集上进行了测试,然后使用实空间随机扫描进行了实验演示。同样的重建算法也可用于压缩 4D-STEM 数据集,从而在保留晶体样品 4D-STEM 成像精细特征的同时,将数据大小大幅缩小(100 倍或更多)。
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引用次数: 0
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Ultramicroscopy
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