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Development of a 100 MHz scan controller for the electron microscope 电子显微镜100mhz扫描控制器的研制
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-30 DOI: 10.1016/j.ultramic.2025.114292
Ovidiu Cretu, Koji Kimoto
We report on the development of a new 100 MHz high-speed scan controller for the electron microscope, using programmable hardware. By using a spiral scan pattern in order to work around the limitations of the scan coils, we show that this controller is able to acquire undistorted images with a frame time of 0.9 ms. The controller’s scan signal and timing control is used to optimize regular (sawtooth) scanning, in order to reduce image distortions at high speeds. Finally, we implement a dose-driven acquisition method, which lowers the required dose and optimizes its distribution, while maintaining the contrast mechanism of the detector.
本文报道了一种采用可编程硬件的新型100 MHz电子显微镜高速扫描控制器的开发。通过使用螺旋扫描模式来绕过扫描线圈的限制,我们表明该控制器能够以0.9 ms的帧时间获取未扭曲的图像。控制器的扫描信号和定时控制用于优化规则(锯齿)扫描,以减少高速下的图像畸变。最后,我们实现了一种剂量驱动的获取方法,该方法在保持探测器对比度机制的同时,降低了所需剂量并优化了其分布。
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引用次数: 0
Direct observation of meta-stable magnetization states in Fe/W(110) nanostructures Fe/W(110)纳米结构亚稳定磁化态的直接观察
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-29 DOI: 10.1016/j.ultramic.2025.114280
Lei Yu , Weishi Wan , Xiaodong Yang , Meng Li , Takanori Koshikawa , Masahiko Suzuki , Tsuneo Yasue , Xiuguang Jin , Yoshikazu Takeda , Rudolf M. Tromp , Yaowen Liu , Hans-Joachim Elmers , Wen-Xin Tang
Magnetic structures down to the nanometer scale have drawn increasing attention due to their fundamental interests and potential applications. In general, the magnetic structure of a system tends to stay in the state with the lowest energy as different interactions compete with each other. Here we report the direct observation of a meta-stable Omega state with double vortices of the same circularity in a nanoscale Fe island on a W(110) substrate. The process indicates that this metastable state is formed by two isolated islands merging during annealing, while keeping their original vortex state. Micromagnetic simulations confirm the possibility of this metastable state.
纳米尺度的磁性结构由于其基本的研究价值和潜在的应用前景而受到越来越多的关注。一般来说,当不同的相互作用相互竞争时,系统的磁性结构倾向于保持在能量最低的状态。在这里,我们报告了在W(110)衬底上的纳米级铁岛中具有相同圆度的双涡的亚稳定Omega态的直接观察。该过程表明,该亚稳态是由两个孤岛在退火过程中合并形成的,同时保持了它们原有的涡旋状态。微磁模拟证实了这种亚稳态的可能性。
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引用次数: 0
Fast tapping mode atomic force microscopy based on fuzzy PI controller 基于模糊PI控制器的快攻模原子力显微镜
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-26 DOI: 10.1016/j.ultramic.2025.114281
Lijia Ji , Renjie Gui , Jinbo Chen , Xuhui Zhang , Gengliang Chen
Atomic Force Microscopy (AFM), as a scanning probe microscopy technique, has been extensively utilized for nanoscale structural characterization, mechanical property quantification, and in-situ electromagnetic field measurements with high spatial resolution. However, the primary limitations hindering the widespread application of AFM include its relatively low scanning velocity, intricate parameter optimization requirements, and the necessity for highly skilled operators to achieve optimal imaging resolution. In this paper, a novel fuzzy amplitude-modulated PI (Proportional-Integral) control methodology is proposed for AFM adaptive control systems, incorporating dynamically adjusted proportional and integral gain parameters to effectively mitigate measurement inaccuracies. Experimental characterization demonstrates that the proposed fuzzy control scheme effectively confines amplitude error to approximately 60 pm under operational conditions of 10 Hz scan rate and 40 μm scan size. This methodology establishes a systematic framework for optimizing parameter configuration in AFM, while simultaneously addressing the critical challenge of achieving high-speed performance in scanning probe microscopy applications.
原子力显微镜(AFM)作为一种扫描探针显微技术,已广泛应用于纳米尺度结构表征、力学性能量化和高空间分辨率的现场电磁场测量。然而,阻碍AFM广泛应用的主要限制包括其相对较低的扫描速度,复杂的参数优化要求,以及需要高技能的操作人员才能实现最佳成像分辨率。本文提出了一种用于AFM自适应控制系统的模糊调幅PI(比例积分)控制方法,该方法结合动态调节的比例和积分增益参数,有效地减轻了测量误差。实验表征表明,在扫描频率为10 Hz、扫描尺寸为40 μm的情况下,模糊控制能有效地将振幅误差控制在60 pm左右。该方法建立了优化AFM参数配置的系统框架,同时解决了在扫描探针显微镜应用中实现高速性能的关键挑战。
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引用次数: 0
Sensitivity of multislice electron ptychography to point defects: A case study in SiC 多层电子平面摄影对点缺陷的灵敏度:以碳化硅为例
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-24 DOI: 10.1016/j.ultramic.2025.114282
Aaditya Bhat, Colin Gilgenbach, Junghwa Kim, Michael Xu, Menglin Zhu, James M. LeBeau
Here, we evaluate multislice electron ptychography as a tool for depth-resolved atomic-resolution characterization of point defects, using silicon carbide as a case study. Through multislice electron scattering simulations and multislice ptychographic reconstructions, we investigate the phase contrast arising from individual silicon vacancies, antisite defects, and a wide range of substitutional transition metal dopants (VSi to WSi), as well as their potential detectability. Simulating defect types, positions, and microscope conditions, we show that isolated point defects can be located within a unit cell along the sample’s depth. The influence of electron energy, dose, defocus, and convergence semi-angle is also explored to determine their role in governing defect contrast. These results guide experiments aimed at analyzing point defects using multislice electron ptychography.
在这里,我们以碳化硅为例,评估了多层电子平面摄影作为深度分辨原子分辨率表征点缺陷的工具。通过多层电子散射模拟和多层平面重建,我们研究了由单个硅空位、反位缺陷和广泛的取代过渡金属掺杂剂(VSi到WSi)引起的相衬,以及它们的潜在可探测性。模拟缺陷类型、位置和显微镜条件,我们显示孤立的点缺陷可以沿着样品的深度定位在一个单元胞内。还探讨了电子能量、剂量、离焦和会聚半角的影响,以确定它们在控制缺陷对比度中的作用。这些结果指导了用多层电子平面摄影技术分析点缺陷的实验。
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引用次数: 0
On the Edge: In situ Kelvin probe AFM on InP nanowire arrays 边缘:在InP纳米线阵列上的原位开尔文探针AFM。
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-24 DOI: 10.1016/j.ultramic.2025.114284
Austin Irish , Lukas Hrachowina , David Alcer , Magnus Borgström , Rainer Timm
Surface physics play an outsized role in nanostructured electronic devices such as solar cells. Semiconductor nanowires are perfect candidates for advanced solar cells due to their outstanding light absorption properties and their flexibility in axially stacking materials of different doping and band gap. Due to nanowire geometry, however, their surfaces dominate device performance and at the same time are challenging to investigate. Kelvin probe force microscopy (KPFM), an atomic force microscopy (AFM)-based method, provides a unique structural and electrical characterization even in unconventional 3D geometries. We demonstrate a high-resolution, non-destructive AFM technique for directly measuring nanowires within an array and still on their growth substrate. This in situ approach ensures measurement integrity and relevance while preserving the structures for subsequent measurement and processing. When compared with electron beam-induced current, cross-sectional KPFM is both more surface sensitive and less destructive. Utilizing such a cross-sectional approach facilitates rapid and comprehensive characterization of nanoelectronic surfaces.
表面物理在太阳能电池等纳米结构电子器件中发挥着巨大的作用。半导体纳米线具有优异的光吸收性能和在不同掺杂和带隙的轴向堆叠材料中的灵活性,是先进太阳能电池的理想候选者。然而,由于纳米线的几何形状,它们的表面决定了器件的性能,同时也具有挑战性。开尔文探针力显微镜(KPFM)是一种基于原子力显微镜(AFM)的方法,即使在非常规的3D几何形状中也能提供独特的结构和电学表征。我们展示了一种高分辨率,非破坏性的原子力显微镜技术,用于直接测量阵列内的纳米线,并且仍然在其生长衬底上。这种原位方法确保了测量的完整性和相关性,同时保留了后续测量和处理的结构。与电子束感应电流相比,截面KPFM具有更高的表面敏感性和更小的破坏性。利用这种横截面方法有助于纳米电子表面的快速和全面表征。
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引用次数: 0
Neural field enhanced phase retrieval of atomic-scale structural dynamics in radiation sensitive materials 辐射敏感材料原子尺度结构动力学的神经场增强相位反演
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-24 DOI: 10.1016/j.ultramic.2025.114283
Yang Liu , Hongsheng Shi , Siyuan Shen , Yuan Lu , Shuchen Zhang , Jingyi Yu , Yi Yu
Atomic-scale imaging of radiation-sensitive materials has been a challenge for both materials science and life science. While low-dose transmission electron microscopy (TEM) is particularly useful for minimizing the radiation damage, the noisy images with poor resolution make it extremely difficult for the purpose of fine structure analysis. Here, this work presents a phase retrieval method to achieve high-quality atomic-scale imaging of radiation-sensitive materials under low-dose TEM conditions. By integrating neural fields (NF) with traditional exit wave reconstruction (EWR), it is able to reveal atomic details from limited low-dose experimental data. Taking the radiation-sensitive organic–inorganic hybrid halide perovskite CH3NH3PbI3 (MAPbI3) as an example, the EWR-NF method demonstrates superior performance in reconstructing the pristine atomic structure using as few as just three low-dose images, which is beyond the limits of conventional methods. In this manner, EWR-NF enables higher temporal resolution to reveal intermediate states during irradiation-induced decomposition. An example of stacking of MAPbI3 with its as-decomposed product is shown. EWR-NF offers a promising tool for atomic-level structure analysis of sensitive halide perovskites and understanding irradiation-induced structure changes, with implications for a wide range of applications in materials science and beyond.
辐射敏感材料的原子尺度成像一直是材料科学和生命科学面临的挑战。虽然低剂量透射电子显微镜(TEM)在最大限度地减少辐射损伤方面特别有用,但低分辨率的噪声图像使精细结构分析变得极其困难。本文提出了一种在低剂量透射电镜条件下实现高质量辐射敏感材料原子尺度成像的相位检索方法。通过将神经场(NF)与传统的出口波重建(EWR)相结合,可以从有限的低剂量实验数据中揭示原子细节。以辐射敏感型有机-无机杂化卤化物钙钛矿CH3NH3PbI3 (MAPbI3)为例,EWR-NF方法在只需三张低剂量图像即可重建原始原子结构方面表现出优越的性能,这超出了传统方法的限制。通过这种方式,EWR-NF能够提供更高的时间分辨率来揭示辐射诱导分解期间的中间状态。给出了MAPbI3与其分解产物的叠加示例。EWR-NF为敏感卤化物钙钛矿的原子水平结构分析和理解辐照引起的结构变化提供了一个有前途的工具,在材料科学和其他领域具有广泛的应用前景。
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引用次数: 0
Secondary electron topographical contrast formation in scanning transmission electron microscopy 扫描透射电子显微镜中二次电子地形对比的形成
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-11 DOI: 10.1016/j.ultramic.2025.114278
Evgenii Vlasov, Wouter Heyvaert, Tom Stoops, Sandra Van Aert, Johan Verbeeck, Sara Bals
Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast interpretation of such images remains empirical due to complex interactions of emitted SE with the magnetic field in the objective field of TEM. Here, we propose an analytical physical model that takes into account the physics of SE emission and interaction of the emitted SEs with magnetic field. This enables more reliable image interpretation and potentially lay the foundation for novel 3D surface reconstruction algorithms.
二次电子(SE)成像通过提供表面敏感的伪三维地形信息,为传统的扫描透射电子显微镜(STEM)提供了强大的补充能力。然而,由于在TEM的目标场中发射的SE与磁场的复杂相互作用,这种图像的对比解释仍然是经验的。在这里,我们提出了一个考虑SE发射物理和发射的SE与磁场相互作用的解析物理模型。这可以实现更可靠的图像解释,并可能为新的3D表面重建算法奠定基础。
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引用次数: 0
Reflected and transmitted secondary electron images of thin Si3N4 window Si3N4薄窗的反射和透射二次电子图像。
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-09 DOI: 10.1016/j.ultramic.2025.114277
Yanli Li , Yichen Ping , Yue Wu , Yao Liu , Huibin Zhao , Li Han
Reflected and transmitted secondary electron images of Si3N4 window are obtained in scanning electron microscopy (SEM) by using SEM and scanning transmission electron microscopy (STEM) holders. The figure of Si3N4 window becomes distinguishable as the accelerating voltage increases. However, the brightness of Si3N4 window relative to the surroundings in images for SEM and STEM holders is completely opposite. It changes from dark to bright, which means the number of detected secondary electron increases. The difference of the two kinds of image is caused by the fact that secondary electrons emitted from the bottom surface can also be detected when using STEM holder. The images are consistent with Monte Carlo simulation results. Image figures are sensitive to accelerating voltages and sample thicknesses. Therefore, more characteristics of thin sample could be analyzed via combining the two kinds of image.
利用扫描电子显微镜(SEM)和扫描透射电子显微镜(STEM)支架在扫描电子显微镜(SEM)下获得了Si3N4窗口的反射和透射二次电子图像。随着加速电压的增加,氮化硅窗口的图形变得清晰。然而,SEM和STEM持有者的图像中Si3N4窗口相对于周围环境的亮度完全相反。它由暗变亮,这意味着检测到的二次电子数量增加。两种图像的差异是由于使用STEM支架时也可以检测到从底面发射的二次电子。所得图像与蒙特卡罗模拟结果吻合较好。图像数据对加速电压和样品厚度敏感。因此,通过两种图像的结合,可以分析薄样品的更多特征。
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引用次数: 0
Evaluation of electron threshold energy for predicting radiation damage in transmission electron microscopy 透射电镜中预测辐射损伤的电子阈值能的评价。
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-09 DOI: 10.1016/j.ultramic.2025.114279
Yupeng Yin , Ruiqi Zhan , Yufeng Du , Chi Xu , Somei Ohnuki , Farong Wan , Wentuo Han
The electron threshold energy (Et) of a material is a critical parameter for anyone conducting research using transmission electron microscopy (TEM). For studies involving irradiation damage, the electron beam energy must exceed the material’s Et to enable in-situ electron irradiation experiments. In contrast, for researchers focused on microstructural characterization, it is essential to ensure that the beam energy remains below Et to avoid electron-beam-induced radiation damage, which could compromise the accuracy and reliability of the TEM analysis. This study revisits the commonly used formula for calculating Et, originally cited in the textbook by Williams and Carter, and identifies significant discrepancies when compared with experimental observations and the original formulation. A corrected formula is proposed and applied to compute Et values for 81 elements using their minimum displacement energies (Ed min). The results are presented in a periodic-table-based diagram, providing practical reference for selecting appropriate TEM accelerating voltages to either induce or avoid irradiation damage.
材料的电子阈值能(Et)对于任何使用透射电子显微镜(TEM)进行研究的人来说都是一个关键参数。对于涉及辐照损伤的研究,电子束能量必须超过材料的Et才能进行原位电子辐照实验。相比之下,对于专注于微观结构表征的研究人员来说,确保光束能量保持在Et以下是必不可少的,以避免电子束引起的辐射损伤,这可能会影响TEM分析的准确性和可靠性。本研究重新审视了Williams和Carter在教科书中最初引用的计算Et的常用公式,并与实验观察和原始公式进行了比较,发现了显著的差异。提出了一个修正公式,并应用于用最小位移能(edmin)计算81个元素的Et值。结果以周期表的形式给出,为选择合适的瞬变电磁法加速电压以诱导或避免辐照损伤提供了实用参考。
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引用次数: 0
Development of precession Lorentz transmission electron microscopy 进动洛伦兹透射电镜的发展
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2025-11-08 DOI: 10.1016/j.ultramic.2025.114276
Shunsuke Hayashi , Dongxue Han , Hidenori Tsuji , Kyoko Ishizaka , Asuka Nakamura
Lorentz transmission electron microscopy (LTEM) is a powerful tool for high-resolution imaging of magnetic textures, including their dynamics under external stimuli and ultrafast nonequilibrium conditions. However, magnetic imaging is often hindered by non-magnetic diffraction contrast arising from inhomogeneous sample deformation or a non-parallel electron beam. In this study, we develop a precession LTEM system that can suppress diffraction contrast by changing the incident angle of the electron beam relative to the sample in a precessional manner. By comparing LTEM images acquired at different precession angles (θ), we show that diffraction contrast is significantly reduced with increasing θ. However, large θ values lead to an undesired broadening of the magnetic contrast, highlighting the importance of optimizing θ. Furthermore, defocus-dependent measurements reveal that magnetic contrast is particularly improved at small defocus values. These findings demonstrate the potential of precession LTEM as a powerful technique for studying magnetic dynamics.
洛伦兹透射电子显微镜(LTEM)是研究磁性织构在外部刺激和超快非平衡条件下动力学的高分辨率成像工具。然而,由于非均匀样品变形或非平行电子束引起的非磁性衍射对比,往往阻碍了磁成像。在本研究中,我们开发了一种进动LTEM系统,该系统可以通过以进动方式改变电子束相对于样品的入射角来抑制衍射对比。通过比较在不同进动角(θ)下获得的tem图像,我们发现随着θ的增大,衍射对比度明显降低。然而,较大的θ值会导致磁对比度的不希望的扩大,突出了优化θ的重要性。此外,离焦相关的测量表明,在小离焦值下,磁对比度得到了特别的提高。这些发现证明了进动LTEM作为研究磁动力学的一种强有力的技术的潜力。
{"title":"Development of precession Lorentz transmission electron microscopy","authors":"Shunsuke Hayashi ,&nbsp;Dongxue Han ,&nbsp;Hidenori Tsuji ,&nbsp;Kyoko Ishizaka ,&nbsp;Asuka Nakamura","doi":"10.1016/j.ultramic.2025.114276","DOIUrl":"10.1016/j.ultramic.2025.114276","url":null,"abstract":"<div><div>Lorentz transmission electron microscopy (LTEM) is a powerful tool for high-resolution imaging of magnetic textures, including their dynamics under external stimuli and ultrafast nonequilibrium conditions. However, magnetic imaging is often hindered by non-magnetic diffraction contrast arising from inhomogeneous sample deformation or a non-parallel electron beam. In this study, we develop a precession LTEM system that can suppress diffraction contrast by changing the incident angle of the electron beam relative to the sample in a precessional manner. By comparing LTEM images acquired at different precession angles (<span><math><mi>θ</mi></math></span>), we show that diffraction contrast is significantly reduced with increasing <span><math><mi>θ</mi></math></span>. However, large <span><math><mi>θ</mi></math></span> values lead to an undesired broadening of the magnetic contrast, highlighting the importance of optimizing <span><math><mi>θ</mi></math></span>. Furthermore, defocus-dependent measurements reveal that magnetic contrast is particularly improved at small defocus values. These findings demonstrate the potential of precession LTEM as a powerful technique for studying magnetic dynamics.</div></div>","PeriodicalId":23439,"journal":{"name":"Ultramicroscopy","volume":"280 ","pages":"Article 114276"},"PeriodicalIF":2.0,"publicationDate":"2025-11-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145518128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Ultramicroscopy
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