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Development of a 100 MHz scan controller for the electron microscope 电子显微镜100mhz扫描控制器的研制
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-11-30 DOI: 10.1016/j.ultramic.2025.114292
Ovidiu Cretu, Koji Kimoto
We report on the development of a new 100 MHz high-speed scan controller for the electron microscope, using programmable hardware. By using a spiral scan pattern in order to work around the limitations of the scan coils, we show that this controller is able to acquire undistorted images with a frame time of 0.9 ms. The controller’s scan signal and timing control is used to optimize regular (sawtooth) scanning, in order to reduce image distortions at high speeds. Finally, we implement a dose-driven acquisition method, which lowers the required dose and optimizes its distribution, while maintaining the contrast mechanism of the detector.
本文报道了一种采用可编程硬件的新型100 MHz电子显微镜高速扫描控制器的开发。通过使用螺旋扫描模式来绕过扫描线圈的限制,我们表明该控制器能够以0.9 ms的帧时间获取未扭曲的图像。控制器的扫描信号和定时控制用于优化规则(锯齿)扫描,以减少高速下的图像畸变。最后,我们实现了一种剂量驱动的获取方法,该方法在保持探测器对比度机制的同时,降低了所需剂量并优化了其分布。
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引用次数: 0
Energy-resolved EBSD using a monolithic direct electron detector 使用单片直接电子探测器的能量分辨EBSD
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-12-18 DOI: 10.1016/j.ultramic.2025.114301
Nicolò M. Della Ventura , Kalani Moore , McLean P. Echlin , Matthew R. Begley , Tresa M. Pollock , Marc De Graef , Daniel S. Gianola
Accurate quantification of the energy distribution of backscattered electrons (BSEs) contributing to electron backscatter diffraction (EBSD) patterns remains as an active challenge. This study introduces an energy-resolved EBSD methodology based on a monolithic active pixel sensor direct electron detector and an electron-counting algorithm to enable the energy quantification of individual BSEs, providing direct measurements of electron energy spectra within diffraction patterns. Following detector calibration of the detector signal as a function of primary beam energy, measurements using a 12 keV primary beam on Si(100) reveal a broad BSE energy distribution across the diffraction pattern, extending down to 3 keV. Furthermore, an angular dependence in the weighted average BSE energy is observed, closely matching predictions from Monte Carlo simulations. Pixel-resolved energy maps reveal subtle modulations at Kikuchi band edges, offering insights into the backscattering process. By applying energy filtering within spectral windows as narrow as 2 keV centered on the primary beam energy, significant enhancement in pattern clarity and high-frequency detail is observed. Notably, BSEs in the 9–10 keV range dominate Kikuchi pattern formation, while BSEs in the 2–8 keV range, despite having undergone substantial energy loss, still produce Kikuchi patterns. By enabling energy determination at the single-electron level, this approach introduces a versatile tool-set for expanding the quantitative capabilities of EBSD, thereby offering the potential to deepen the understanding of diffraction contrast mechanisms and to advance the precision of crystallographic measurements.
准确量化后向散射电子(bse)的能量分布对电子后向散射衍射(EBSD)的影响仍然是一个积极的挑战。本研究介绍了一种基于单片有源像素传感器直接电子探测器和电子计数算法的能量分辨EBSD方法,以实现单个bse的能量量化,提供衍射模式内电子能谱的直接测量。在探测器校准了探测器信号作为主光束能量的函数之后,在Si(100)上使用12 keV主光束进行测量,揭示了整个衍射图案上广泛的BSE能量分布,延伸至3 keV。此外,观察到加权平均BSE能量的角度依赖性,与蒙特卡罗模拟的预测密切匹配。像素分辨率的能量图揭示了菊池带边缘的微妙调制,提供了对后向散射过程的见解。以主光束能量为中心,在窄至2 keV的光谱窗内进行能量滤波,可以显著提高图像清晰度和高频细节。值得注意的是,9-10 keV范围内的bse主导了菊地模式的形成,而2-8 keV范围内的bse尽管经历了大量的能量损失,仍然产生菊地模式。通过在单电子水平上进行能量测定,该方法引入了一套通用的工具集,用于扩展EBSD的定量能力,从而有可能加深对衍射对比机制的理解,并提高晶体学测量的精度。
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引用次数: 0
Performance evaluation of deep-ultraviolet laser-assisted Invizo 6000 and near-ultraviolet laser-assisted LEAP 5000 for a range of material systems 深紫外激光辅助Invizo 6000和近紫外激光辅助LEAP 5000在一系列材料系统中的性能评估
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-12-07 DOI: 10.1016/j.ultramic.2025.114296
Chang-Gi Lee , Byeong-Gyu Chae , I-Jun Ro , Kyuseon Jang , Nak-Kyoon Kim , Jae-Pyoung Ahn , Eric Woods , Jaemin Ahn , Seong Yong Park , Baptiste Gault , Se-Ho Kim
Atom probe tomography (APT) enables near-atomic-scale, three-dimensional elemental mapping through controlled field evaporation of surface atoms, triggered by the combined application of a DC voltage with either voltage or laser pulses. As selected laser wavelengths in atom probes transitioned from near-infrared (1050–1064 nm) toward shorter wavelengths, such as green (532 nm) and near-ultraviolet (NUV 355 nm), the quality of data improved and the range of analyzable materials expanded significantly. Recently, a new commercial atom probe (Invizo 6000) employing a deep ultraviolet (DUV) laser wavelength of 257.5 nm has been introduced. Invizo 6000 incorporates several new design elements, such as dual laser beam, einzel lens, and flat counter electrode. However, despite these substantial design modifications, systematic studies comparing its performance with conventional local electrode atom probe (LEAP) systems across different classes of materials remain scarce. In this study, various materials, including metals and oxides, were examined using commercial LEAP 5000 and Invizo 6000. The quality of the data obtained from both instruments was systematically evaluated using four key metrics: background levels, detection events, ion detection histograms, and mass-resolving power. Additionally, applying a thin coating to the prepared APT specimens was found to enhance data quality.
原子探针断层扫描(APT)通过控制表面原子的场蒸发,通过直流电压与电压或激光脉冲的联合应用触发,实现了近原子尺度的三维元素映射。随着原子探针中选择的激光波长从近红外(1050-1064 nm)向较短波(如绿光(532 nm)和近紫外(NUV 355nm)过渡,数据质量得到了提高,可分析材料的范围也显著扩大。最近,一种新的商用原子探针(Invizo 6000)采用深紫外(DUV)激光波长为257.5 nm已经推出。Invizo 6000集成了几个新的设计元素,如双激光束,因泽尔透镜,和平对电极。然而,尽管有这些实质性的设计修改,将其性能与传统的局部电极原子探针(LEAP)系统在不同类别的材料上进行比较的系统研究仍然很少。在这项研究中,使用商用LEAP 5000和Invizo 6000检查了各种材料,包括金属和氧化物。从这两种仪器获得的数据质量使用四个关键指标进行系统评估:背景水平、检测事件、离子检测直方图和质量分辨能力。此外,在制备的APT标本上涂上一层薄涂层可以提高数据质量。
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引用次数: 0
Direct observation of meta-stable magnetization states in Fe/W(110) nanostructures Fe/W(110)纳米结构亚稳定磁化态的直接观察
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-11-29 DOI: 10.1016/j.ultramic.2025.114280
Lei Yu , Weishi Wan , Xiaodong Yang , Meng Li , Takanori Koshikawa , Masahiko Suzuki , Tsuneo Yasue , Xiuguang Jin , Yoshikazu Takeda , Rudolf M. Tromp , Yaowen Liu , Hans-Joachim Elmers , Wen-Xin Tang
Magnetic structures down to the nanometer scale have drawn increasing attention due to their fundamental interests and potential applications. In general, the magnetic structure of a system tends to stay in the state with the lowest energy as different interactions compete with each other. Here we report the direct observation of a meta-stable Omega state with double vortices of the same circularity in a nanoscale Fe island on a W(110) substrate. The process indicates that this metastable state is formed by two isolated islands merging during annealing, while keeping their original vortex state. Micromagnetic simulations confirm the possibility of this metastable state.
纳米尺度的磁性结构由于其基本的研究价值和潜在的应用前景而受到越来越多的关注。一般来说,当不同的相互作用相互竞争时,系统的磁性结构倾向于保持在能量最低的状态。在这里,我们报告了在W(110)衬底上的纳米级铁岛中具有相同圆度的双涡的亚稳定Omega态的直接观察。该过程表明,该亚稳态是由两个孤岛在退火过程中合并形成的,同时保持了它们原有的涡旋状态。微磁模拟证实了这种亚稳态的可能性。
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引用次数: 0
Fast tapping mode atomic force microscopy based on fuzzy PI controller 基于模糊PI控制器的快攻模原子力显微镜
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-11-26 DOI: 10.1016/j.ultramic.2025.114281
Lijia Ji , Renjie Gui , Jinbo Chen , Xuhui Zhang , Gengliang Chen
Atomic Force Microscopy (AFM), as a scanning probe microscopy technique, has been extensively utilized for nanoscale structural characterization, mechanical property quantification, and in-situ electromagnetic field measurements with high spatial resolution. However, the primary limitations hindering the widespread application of AFM include its relatively low scanning velocity, intricate parameter optimization requirements, and the necessity for highly skilled operators to achieve optimal imaging resolution. In this paper, a novel fuzzy amplitude-modulated PI (Proportional-Integral) control methodology is proposed for AFM adaptive control systems, incorporating dynamically adjusted proportional and integral gain parameters to effectively mitigate measurement inaccuracies. Experimental characterization demonstrates that the proposed fuzzy control scheme effectively confines amplitude error to approximately 60 pm under operational conditions of 10 Hz scan rate and 40 μm scan size. This methodology establishes a systematic framework for optimizing parameter configuration in AFM, while simultaneously addressing the critical challenge of achieving high-speed performance in scanning probe microscopy applications.
原子力显微镜(AFM)作为一种扫描探针显微技术,已广泛应用于纳米尺度结构表征、力学性能量化和高空间分辨率的现场电磁场测量。然而,阻碍AFM广泛应用的主要限制包括其相对较低的扫描速度,复杂的参数优化要求,以及需要高技能的操作人员才能实现最佳成像分辨率。本文提出了一种用于AFM自适应控制系统的模糊调幅PI(比例积分)控制方法,该方法结合动态调节的比例和积分增益参数,有效地减轻了测量误差。实验表征表明,在扫描频率为10 Hz、扫描尺寸为40 μm的情况下,模糊控制能有效地将振幅误差控制在60 pm左右。该方法建立了优化AFM参数配置的系统框架,同时解决了在扫描探针显微镜应用中实现高速性能的关键挑战。
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引用次数: 0
Basic considerations in the design of an electrostatic electron monochromator 静电电子单色仪设计的基本考虑。
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-12-09 DOI: 10.1016/j.ultramic.2025.114297
M.J. Adriaans, J.P. Hoogenboom, A. Mohammadi-Gheidari
Monochromators are essential components in electron microscopy and spectroscopy for improving spatial and energy resolution. Their use in scanning electron microscopes (SEMs), however, remains limited due to high cost and operational complexity. Using a thin-deflector analysis of a homogeneous electrostatic deflector, we show that conventional monochromators exhibit extreme sensitivity to power-supply drift and mechanical imperfections. Meeting these stringent tolerances typically requires additional correction elements, which further increase system complexity and cost.
We demonstrate that fringe-field deflectors are inherently less sensitive to these limitations. Based on this insight, we propose a simple and cost-effective monochromator architecture relying solely on fringe fields. The design achieves optimal energy resolution by incorporating short-range deceleration lenses surrounding the main deflector, eliminating the need for auxiliary correction elements. Such a fully electrostatic configuration is compatible with MEMS fabrication, offering a compact, robust, and accessible pathway for high-performance energy filtering in SEMs.
单色器是电子显微镜和光谱学中提高空间和能量分辨率的重要组成部分。然而,由于高成本和操作复杂性,它们在扫描电子显微镜(sem)中的应用仍然有限。使用均匀静电偏转器的薄偏转器分析,我们表明传统的单色器对电源漂移和机械缺陷表现出极端的敏感性。满足这些严格的公差通常需要额外的校正元件,这进一步增加了系统的复杂性和成本。我们证明,条纹场偏转器本质上对这些限制不太敏感。基于这一见解,我们提出了一种简单且具有成本效益的单色仪架构,仅依赖于边缘场。该设计通过在主偏转器周围结合短距离减速透镜来实现最佳的能量分辨率,从而消除了对辅助校正元件的需求。这种完全静电的配置与MEMS制造兼容,为MEMS中的高性能能量滤波提供了紧凑,坚固和可访问的途径。
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引用次数: 0
On the Edge: In situ Kelvin probe AFM on InP nanowire arrays 边缘:在InP纳米线阵列上的原位开尔文探针AFM。
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-11-24 DOI: 10.1016/j.ultramic.2025.114284
Austin Irish , Lukas Hrachowina , David Alcer , Magnus Borgström , Rainer Timm
Surface physics play an outsized role in nanostructured electronic devices such as solar cells. Semiconductor nanowires are perfect candidates for advanced solar cells due to their outstanding light absorption properties and their flexibility in axially stacking materials of different doping and band gap. Due to nanowire geometry, however, their surfaces dominate device performance and at the same time are challenging to investigate. Kelvin probe force microscopy (KPFM), an atomic force microscopy (AFM)-based method, provides a unique structural and electrical characterization even in unconventional 3D geometries. We demonstrate a high-resolution, non-destructive AFM technique for directly measuring nanowires within an array and still on their growth substrate. This in situ approach ensures measurement integrity and relevance while preserving the structures for subsequent measurement and processing. When compared with electron beam-induced current, cross-sectional KPFM is both more surface sensitive and less destructive. Utilizing such a cross-sectional approach facilitates rapid and comprehensive characterization of nanoelectronic surfaces.
表面物理在太阳能电池等纳米结构电子器件中发挥着巨大的作用。半导体纳米线具有优异的光吸收性能和在不同掺杂和带隙的轴向堆叠材料中的灵活性,是先进太阳能电池的理想候选者。然而,由于纳米线的几何形状,它们的表面决定了器件的性能,同时也具有挑战性。开尔文探针力显微镜(KPFM)是一种基于原子力显微镜(AFM)的方法,即使在非常规的3D几何形状中也能提供独特的结构和电学表征。我们展示了一种高分辨率,非破坏性的原子力显微镜技术,用于直接测量阵列内的纳米线,并且仍然在其生长衬底上。这种原位方法确保了测量的完整性和相关性,同时保留了后续测量和处理的结构。与电子束感应电流相比,截面KPFM具有更高的表面敏感性和更小的破坏性。利用这种横截面方法有助于纳米电子表面的快速和全面表征。
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引用次数: 0
Differentiation of distinct single atoms via multi‑defocus fusion method 通过多离焦聚变方法区分不同的单个原子
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-12-07 DOI: 10.1016/j.ultramic.2025.114300
Yangfan Li , Yue Pan , Xincheng Lei , Weiwei Chen , Yang Shen , Mengshu Ge , Xiaozhi Liu , Dong Su
High-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) is a vital tool for characterizing single-atom catalysts (SACs). However, reliable elemental identification of different atoms remains challenging because the signal intensity of HAADF depends strongly on defocus and other imaging parameters, potentially ruining the Z-contrast of atoms at different depths. In this work, we investigated the influence of the vertical position of atoms (defocus), support thickness, interatomic height, convergence, and collection angles via multi-slice simulations on a model system of Fe/Pt atoms on amorphous carbon supports. Our calculation shows that at a convergence angle of 28 mrad, a defocus of 8.5 nm can cause Fe and Pt atoms to be indistinguishable. At a larger convergence angle, this critical indistinguishable defocus can be even shorter. To address this limitation, we propose a Multi-Defocus Fusion (MDF) method, retrieving the Z-contrast from serial images from multiple defocus. Experimental validation on a Fe/Pt SAC sample confirms the effectiveness of MDF, yielding clearly separated intensity histograms corresponding to Fe and Pt atoms. This work presents a robust, easy-to-implement strategy for accurate single-atom identification, offering valuable guidance for the accelerated screening and rational design of high-performance SACs.
高角环形暗场扫描透射电镜(HAADF-STEM)是表征单原子催化剂(SACs)的重要工具。然而,由于HAADF的信号强度在很大程度上取决于离焦和其他成像参数,可能会破坏不同深度原子的z -对比度,因此对不同原子的元素进行可靠的识别仍然具有挑战性。在这项工作中,我们研究了原子的垂直位置(离焦),支撑厚度,原子间高度,会聚和收集角的影响,通过多片模拟在非晶碳支撑上的Fe/Pt原子模型系统。我们的计算表明,在28mrad的会聚角下,8.5 nm的离焦会导致Fe和Pt原子无法区分。在较大的会聚角下,这种临界的难以区分的离焦可以更短。为了解决这一限制,我们提出了一种多离焦融合(MDF)方法,从多个离焦的序列图像中检索z -对比度。在Fe/Pt SAC样品上的实验验证证实了MDF的有效性,得到了Fe和Pt原子对应的清晰分离的强度直方图。这项工作提出了一个强大的、易于实现的精确单原子识别策略,为加速筛选和合理设计高性能sac提供了有价值的指导。
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引用次数: 0
Assessing the electric field sensitivity measured by pixelated differential phase contrast imaging in vacuum both in the absence of external fields and under field-bound conditions 评估在没有外场和场边界条件下真空中像素化差相衬成像测量的电场灵敏度
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-03-01 Epub Date: 2025-12-25 DOI: 10.1016/j.ultramic.2025.114307
Pierpaolo Ranieri , Reinis Ignatans , Victor Boureau , Vasiliki Tileli
Pixelated differential phase contrast (DPC) is a four-dimensional scanning transmission electron microscopy (4D-STEM) technique in which the position of the transmitted beam is tracked to reconstruct the electromagnetic fields of a sample. Although it can provide (semi-) quantitative information for a range of different applications, the measurements are greatly affected by the microscope’s optical and acquisition settings in terms of sensitivity, accuracy, and spatial resolution, particularly when measuring weak electric fields. Herein, we focus on the nano-beam 4D-STEM configuration and systematically study the way in which all the parameters typically selected by users for pixelated-DPC experiments influence the lowest achievable electric field sensitivity. First, we define the metric by which the sensitivity is assessed, discussing the optimal ranges for parameters including convergence semi-angle, electron dose, and camera length in absence of external field, while also evaluating the effect of the scanning system. Next, the sensitivity and its error are assessed under field-bound conditions, realized by a coplanar capacitor that allows the position of the transmitted beam to be shifted controllably using an external bias. Comparison of the experimental results with finite element method calculations yields quantitative information about the accuracy that can be attained for these measurements, while the effects of microscope drift and sample charging are also discussed. Our findings provide a platform for the quantitative assessment of weak electric fields as calculated by pixelated-DPC experiments, while highlighting the challenges associated with these measurements.
像素化差相对比(DPC)是一种四维扫描透射电子显微镜(4D-STEM)技术,通过跟踪透射光束的位置来重建样品的电磁场。虽然它可以为一系列不同的应用提供(半)定量信息,但在灵敏度、精度和空间分辨率方面,测量结果受到显微镜光学和采集设置的极大影响,特别是在测量弱电场时。本文以纳米束4D-STEM结构为研究对象,系统地研究了像素化dpc实验中用户通常选择的所有参数对可实现的最低电场灵敏度的影响。首先,我们定义了评估灵敏度的度量,讨论了在没有外场的情况下,会聚半角、电子剂量和相机长度等参数的最佳范围,同时还评估了扫描系统的效果。接下来,在场界条件下评估灵敏度及其误差,通过共面电容器实现,该共面电容器允许使用外部偏压可控地移动发射光束的位置。将实验结果与有限元法计算结果进行比较,可以获得有关这些测量精度的定量信息,同时还讨论了显微镜漂移和样品充电的影响。我们的研究结果为通过像素化dpc实验计算的弱电场的定量评估提供了一个平台,同时强调了与这些测量相关的挑战。
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引用次数: 0
Secondary electron topographical contrast formation in scanning transmission electron microscopy 扫描透射电子显微镜中二次电子地形对比的形成
IF 2 3区 工程技术 Q2 MICROSCOPY Pub Date : 2026-02-01 Epub Date: 2025-11-11 DOI: 10.1016/j.ultramic.2025.114278
Evgenii Vlasov, Wouter Heyvaert, Tom Stoops, Sandra Van Aert, Johan Verbeeck, Sara Bals
Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast interpretation of such images remains empirical due to complex interactions of emitted SE with the magnetic field in the objective field of TEM. Here, we propose an analytical physical model that takes into account the physics of SE emission and interaction of the emitted SEs with magnetic field. This enables more reliable image interpretation and potentially lay the foundation for novel 3D surface reconstruction algorithms.
二次电子(SE)成像通过提供表面敏感的伪三维地形信息,为传统的扫描透射电子显微镜(STEM)提供了强大的补充能力。然而,由于在TEM的目标场中发射的SE与磁场的复杂相互作用,这种图像的对比解释仍然是经验的。在这里,我们提出了一个考虑SE发射物理和发射的SE与磁场相互作用的解析物理模型。这可以实现更可靠的图像解释,并可能为新的3D表面重建算法奠定基础。
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引用次数: 0
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Ultramicroscopy
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