This paper presents a two-degree-of-freedom (2-DOF) miniature ultrasonic motor that outputs 2-DOF linear motion by using only a hollow rectangular metal block. The motion in the horizontal x direction was realized through the L1-B2xoz mode formed by coupling the first-order longitudinal (L1) vibration and the second-order bending (B2xoz) vibration. Moreover, the motion in the horizontal y direction was realized through the B2xoy-B2xoz mode formed by coupling the second-order bending (B2xoz) vibration and the second-order bending (B2xoy) vibration. An ultrasonic motor was designed, and its 2-DOF driving principle was analyzed. Then, the motor was simulated and analyzed to verify the described principle. Finally, the prototype of the ultrasonic motor with 3.8 × 4.2 × 14.5 mm dimensions and its experimental test device were fabricated, and the output characteristics of the motor were tested. Results show that at a voltage of 90 Vpp and a driving frequency of 104 kHz, the maximum no-load speeds of the motor in the horizontal x and y directions are 40.13 and 80.63 mm/s, respectively. Moreover, the maximum output forces in the horizontal and vertical directions are 0.9 and 1.55 N, respectively. The simulation and experimental results verify the feasibility of the proposed 2-DOF ultrasonic motor.
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