Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942970
Hang Yao, X. Jia, Bo Wang, B. Guo
Lithium-ion battery is the main energy source widely used in many fields. Therefore, it is particularly essential for estimating the health of lithium-ion battery accurately, especially in important fields such as aerospace, rail transit and satellite. For lithium-ion battery, the battery capacity is a health index (HI) that best reflects its performance degradation. By estimating the battery capacity, the health status of the lithium-ion battery can be clearly identified. However, there are technical barriers to the direct measurement of battery capacity in engineering, and many characteristics and capacities of lithium-ion batteries have abrupt changes, so that it is difficult to calculate the battery capacity accurately by formula calculation. In this paper, a new method of genetic programming combined model is proposed, which can calculate the capacity of lithium-ion battery by formulating multiple monitored features with a certain precision. Therefore, the functional relationship between multiple features and HI is well measured, which lays a good foundation for the subsequent life prediction of battery.
{"title":"A new method for estimating lithium-ion battery capacity using genetic programming combined model","authors":"Hang Yao, X. Jia, Bo Wang, B. Guo","doi":"10.1109/phm-qingdao46334.2019.8942970","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942970","url":null,"abstract":"Lithium-ion battery is the main energy source widely used in many fields. Therefore, it is particularly essential for estimating the health of lithium-ion battery accurately, especially in important fields such as aerospace, rail transit and satellite. For lithium-ion battery, the battery capacity is a health index (HI) that best reflects its performance degradation. By estimating the battery capacity, the health status of the lithium-ion battery can be clearly identified. However, there are technical barriers to the direct measurement of battery capacity in engineering, and many characteristics and capacities of lithium-ion batteries have abrupt changes, so that it is difficult to calculate the battery capacity accurately by formula calculation. In this paper, a new method of genetic programming combined model is proposed, which can calculate the capacity of lithium-ion battery by formulating multiple monitored features with a certain precision. Therefore, the functional relationship between multiple features and HI is well measured, which lays a good foundation for the subsequent life prediction of battery.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130610761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8943034
Wanglong Zhan, Du Siyuan, Yue Guo-dong, Z. Huimin
The spindle system will vibrate due to mass unbalance during high speed operation, which will affect the machining accuracy. In order to compensate the dynamic balance quality of unbalanced vibration, spindle dynamic balance processing can be carried out. In the process of dynamic balance processing, the extraction of unbalanced vibration signal is the key to affect the balance quality. The vibration signal extraction experiment of high-speed spindle was carried out by using all-phase FFT method. The vibration signal extracted by the all-phase FFT method is taken as the input of the influence coefficient method, and the amplitude of vibration is obviously reduced, and the balance precision reaches 65.21%. Compared with the cross-correlation method, the unbalanced vibration is effectively suppressed. The results show that the all-phase FFT method has the characteristics of stability and high balance precision, and can be applied to the vibration signal extraction of high-speed spindle and the vibration signal extraction of rotary subclass.
{"title":"Experimental Study on Unbalanced Vibration Signal of High Speed Spindle Based on All Phase Fast Fourier Transform","authors":"Wanglong Zhan, Du Siyuan, Yue Guo-dong, Z. Huimin","doi":"10.1109/phm-qingdao46334.2019.8943034","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8943034","url":null,"abstract":"The spindle system will vibrate due to mass unbalance during high speed operation, which will affect the machining accuracy. In order to compensate the dynamic balance quality of unbalanced vibration, spindle dynamic balance processing can be carried out. In the process of dynamic balance processing, the extraction of unbalanced vibration signal is the key to affect the balance quality. The vibration signal extraction experiment of high-speed spindle was carried out by using all-phase FFT method. The vibration signal extracted by the all-phase FFT method is taken as the input of the influence coefficient method, and the amplitude of vibration is obviously reduced, and the balance precision reaches 65.21%. Compared with the cross-correlation method, the unbalanced vibration is effectively suppressed. The results show that the all-phase FFT method has the characteristics of stability and high balance precision, and can be applied to the vibration signal extraction of high-speed spindle and the vibration signal extraction of rotary subclass.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116644863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942843
Zhenteng Xu, Cheng Cheng, Yanjun Li
During the flight, the aircraft acquires the airspeed and altitude from the data collected by the pitot tube. Therefore, the static pressure source error of the pitot tube has a very large influence on the accuracy of the collected data. In order to correct the static source error, the static source error correction model was established based on Matlab & Simulink. Neural network and interpolation are used to build the error correction model. Firstly, the modified model collects the interface data of the atmospheric data computer (ADC), then it uses the neural network to make a preliminary forecast of the data, and displays the forecast results. Finally, the forecast results are modified by the cubic spline interpolation method, and the final modified results are output. This paper validates the model from both theory and practice, and proves that it can be used to correct the static source error.
{"title":"Static Source Error Correction Model Based on MATLAB and Simulink","authors":"Zhenteng Xu, Cheng Cheng, Yanjun Li","doi":"10.1109/phm-qingdao46334.2019.8942843","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942843","url":null,"abstract":"During the flight, the aircraft acquires the airspeed and altitude from the data collected by the pitot tube. Therefore, the static pressure source error of the pitot tube has a very large influence on the accuracy of the collected data. In order to correct the static source error, the static source error correction model was established based on Matlab & Simulink. Neural network and interpolation are used to build the error correction model. Firstly, the modified model collects the interface data of the atmospheric data computer (ADC), then it uses the neural network to make a preliminary forecast of the data, and displays the forecast results. Finally, the forecast results are modified by the cubic spline interpolation method, and the final modified results are output. This paper validates the model from both theory and practice, and proves that it can be used to correct the static source error.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131560178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942946
J. Mi, Xinyuan Wang, Yuhua Cheng, Songyi Zhang
Because of the measurement error and impact of other external factors, the experimentally measured fault information of rotary machinery equipment is with randomness and uncertainty. The diagnosis result gotten with uncertain information will not be accurate. Multi-source information fusion and fault identification based on cloud model and D-S evidence theory is studied in this paper. The rough set theory is used to screen and reduce the multiple fault attribute, then get the fewest fault features which also satisfy the diagnosis. The multi-source information are fused by the calculation of cloud parameters and evidence theory. At last, two kinds of rolling bearing fault databases from experiments are performed, and the diagnosis results have proved the validity and feasibility of the proposed method.
{"title":"Multi-Source Uncertain Information Fusion Method for Fault Diagnosis Based on Evidence Theory","authors":"J. Mi, Xinyuan Wang, Yuhua Cheng, Songyi Zhang","doi":"10.1109/phm-qingdao46334.2019.8942946","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942946","url":null,"abstract":"Because of the measurement error and impact of other external factors, the experimentally measured fault information of rotary machinery equipment is with randomness and uncertainty. The diagnosis result gotten with uncertain information will not be accurate. Multi-source information fusion and fault identification based on cloud model and D-S evidence theory is studied in this paper. The rough set theory is used to screen and reduce the multiple fault attribute, then get the fewest fault features which also satisfy the diagnosis. The multi-source information are fused by the calculation of cloud parameters and evidence theory. At last, two kinds of rolling bearing fault databases from experiments are performed, and the diagnosis results have proved the validity and feasibility of the proposed method.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"101 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132640522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942940
Li Zhang, Zhiqian Lu, Shufeng Zhang, J. Tao
Because of machining tolerance as well as wear, joint clearances are inevitable in multibody systems. It can seriously degrade the dynamic performance of connected parts and significantly increase the operating noise. Most of previous studies about clearance joints were conducted on planar multibody systems, but actually the relative motion of journal and bearing includes radial and axial component. Therefore, the wear of joint is also three-dimensional. The influence of different spatial clearances on the dynamic response of multibody system is studied with a four-bar mechanism as the research object. In addition, in the ABAQUS/Standard environment, wear behavior of three-dimensional clearance joint is simulated and the spatial shape of contact surface after wear is obtained.
{"title":"Dynamic Behavior of Four-bar Mechanism with Three-dimensional Clearance and Wear","authors":"Li Zhang, Zhiqian Lu, Shufeng Zhang, J. Tao","doi":"10.1109/phm-qingdao46334.2019.8942940","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942940","url":null,"abstract":"Because of machining tolerance as well as wear, joint clearances are inevitable in multibody systems. It can seriously degrade the dynamic performance of connected parts and significantly increase the operating noise. Most of previous studies about clearance joints were conducted on planar multibody systems, but actually the relative motion of journal and bearing includes radial and axial component. Therefore, the wear of joint is also three-dimensional. The influence of different spatial clearances on the dynamic response of multibody system is studied with a four-bar mechanism as the research object. In addition, in the ABAQUS/Standard environment, wear behavior of three-dimensional clearance joint is simulated and the spatial shape of contact surface after wear is obtained.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131740705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Electrolytic capacitor is widely selected as output capacitor in DC-DC converter, while it has limited reliability. Monitoring the equivalent series resistance (ESR) is an effective method to diagnostic the output capacitor. In this paper, an online monitoring scheme of ESR is present for discontinuous conduction mode (DCM) Buck converters. Based on the output ripple voltage, the model of ESR is established. By sampling the output ripple voltage, the ESR is calculated using the sampled values. The proposed method reduces the current measurement and avoids the change of converter topology. The simulation and experimental results verify the effectiveness of the method.
{"title":"An Online Monitoring Scheme of Output Capacitor’s ESR for DCM Buck","authors":"Xiaoxin Duan, Jian Zou, Dengyun Lei, B. Hou, Liwei Wang, Yun Huang","doi":"10.1109/phm-qingdao46334.2019.8942990","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942990","url":null,"abstract":"Electrolytic capacitor is widely selected as output capacitor in DC-DC converter, while it has limited reliability. Monitoring the equivalent series resistance (ESR) is an effective method to diagnostic the output capacitor. In this paper, an online monitoring scheme of ESR is present for discontinuous conduction mode (DCM) Buck converters. Based on the output ripple voltage, the model of ESR is established. By sampling the output ripple voltage, the ESR is calculated using the sampled values. The proposed method reduces the current measurement and avoids the change of converter topology. The simulation and experimental results verify the effectiveness of the method.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131744026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942927
Xiaoyu Zhang, Lin Yue
Different from the operational modal analysis (OMA), the order based modal analysis (OBMA) is based on periodic sweep to obtain the dynamic behaviors of machinery. Therefore, its applicable condition is that the mechanical system generates periodic excitation force during the operational process. Due to the imbalance and misalignment of the rotating mechanical, it generates periodic excitation force whose frequency is proportional to the rotational speed during revolution. This paper utilizes OBMA to identify the resonances from the simulated signal with crossing order and white noise. First, the Vold-Kalman filter based order tracking (VK) method is utilized to extract harmonic response known as engine orders. Finally, the least-squares complex frequency-domain estimation method (PolyMAX) is applied to identify the resonance frequency, damping and modal shapes. Especially, two modes whose natural frequencies are close are successfully separated.
{"title":"Order Based Modal Analysis Using Vold-Kalman Filter","authors":"Xiaoyu Zhang, Lin Yue","doi":"10.1109/phm-qingdao46334.2019.8942927","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942927","url":null,"abstract":"Different from the operational modal analysis (OMA), the order based modal analysis (OBMA) is based on periodic sweep to obtain the dynamic behaviors of machinery. Therefore, its applicable condition is that the mechanical system generates periodic excitation force during the operational process. Due to the imbalance and misalignment of the rotating mechanical, it generates periodic excitation force whose frequency is proportional to the rotational speed during revolution. This paper utilizes OBMA to identify the resonances from the simulated signal with crossing order and white noise. First, the Vold-Kalman filter based order tracking (VK) method is utilized to extract harmonic response known as engine orders. Finally, the least-squares complex frequency-domain estimation method (PolyMAX) is applied to identify the resonance frequency, damping and modal shapes. Especially, two modes whose natural frequencies are close are successfully separated.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131965270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/phm-qingdao46334.2019.8942968
Hui Zeng, Zhinong Li, Zewen Zhou
The running time and the convergence between traditional parallel factor trilinear alternating least squares algorithm (TALS) algorithm and complex parallel factor (COMFAC) algorithm is compared by the experiment. The experiment result shows that both methods can obtain good separation performance. However, the traditional parallel factor separation algorithm has the higher complexity and the slower convergence. The complex parallel factor analysis can improve the convergence of the the traditional parallel factor analysis. The solution of complex parallel factor is usually very close to the least squares solution with only a few iterations.
{"title":"Comparative Study of Complex Parallel Factor Analysis and Parallel Factor Analysis","authors":"Hui Zeng, Zhinong Li, Zewen Zhou","doi":"10.1109/phm-qingdao46334.2019.8942968","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942968","url":null,"abstract":"The running time and the convergence between traditional parallel factor trilinear alternating least squares algorithm (TALS) algorithm and complex parallel factor (COMFAC) algorithm is compared by the experiment. The experiment result shows that both methods can obtain good separation performance. However, the traditional parallel factor separation algorithm has the higher complexity and the slower convergence. The complex parallel factor analysis can improve the convergence of the the traditional parallel factor analysis. The solution of complex parallel factor is usually very close to the least squares solution with only a few iterations.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134646265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
According to the characteristics of the large transmission ratio of the helicopter main reducer in the future, the research on the characteristic distribution of the planetary gear train of the helicopter main reducer is carried out. Because of the characteristics that the heavy load condition in helicopter main reducer’s running and the changeable running state and complex and harsh climatic conditions and the increasing heat of the flow field in the reducer, by the way, the large transmission ratio increases the uncertainty of the planetary gear train operation analysis at the same time, the probability of causing a failure is greater; Especially the complex and variable structure of the helicopter which has large transmission ratio main reducer makes the analysis difficulty further. For ensuring the safety and enhancing the reliability of the helicopter, this paper make a comparative analysis of the time domain characteristics of the state signals under the multi-operating condition between the normal planetary gear and planetary gears with different degrees of failure, to explore the distribution regularity of the fault characteristics of the helicopter main reducer, so as to realize the research on fault diagnosis of helicopter large transmission ratio planetary gear.
{"title":"Fault Characteristics Analysis of Planetary Gear of Helicopter Main Reducer","authors":"Liang Cao, Yubin Xia, Yong Shen, Jinglin Wang, Tianmin Shan, Zeli Lin","doi":"10.1109/phm-qingdao46334.2019.8942930","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942930","url":null,"abstract":"According to the characteristics of the large transmission ratio of the helicopter main reducer in the future, the research on the characteristic distribution of the planetary gear train of the helicopter main reducer is carried out. Because of the characteristics that the heavy load condition in helicopter main reducer’s running and the changeable running state and complex and harsh climatic conditions and the increasing heat of the flow field in the reducer, by the way, the large transmission ratio increases the uncertainty of the planetary gear train operation analysis at the same time, the probability of causing a failure is greater; Especially the complex and variable structure of the helicopter which has large transmission ratio main reducer makes the analysis difficulty further. For ensuring the safety and enhancing the reliability of the helicopter, this paper make a comparative analysis of the time domain characteristics of the state signals under the multi-operating condition between the normal planetary gear and planetary gears with different degrees of failure, to explore the distribution regularity of the fault characteristics of the helicopter main reducer, so as to realize the research on fault diagnosis of helicopter large transmission ratio planetary gear.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"263 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133928727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Three-dimensional integrated packaging technology is recognized as the fourth generation packaging technology with the hope of breaking Moore's law. And through silicon via(TSV) technology is the key of three-dimensional packaging technology. In order to study the thermal-mechanical reliability of TSV structure, the finite element method was used to simulate the equivalent stress and deformation of TSV with different TSV size, aspect ratio, pitch and structure. The distribution of equivalent stress and deformation was obtained. The simulation results showed that the increase of TSV size would lead to the increase of equivalent stress and deformation, the aspect ratio of TSV would only affect deformation, and the increase of TSV pitch would lead to the decrease of equivalent stress and the increase of deformation. In addition, TSV filled with parylene was analyzed in this paper. The stress could be effectively released by increasing the size of parylene.
{"title":"Research on TSV Thermal-mechanical Reliability Based on Finite Element Analysis","authors":"Fangchao Huang, Zhengwei Fan, Xun Chen, Yao Liu, Shufeng Zhang, Yashun Wang, Yu Jiang","doi":"10.1109/phm-qingdao46334.2019.8942816","DOIUrl":"https://doi.org/10.1109/phm-qingdao46334.2019.8942816","url":null,"abstract":"Three-dimensional integrated packaging technology is recognized as the fourth generation packaging technology with the hope of breaking Moore's law. And through silicon via(TSV) technology is the key of three-dimensional packaging technology. In order to study the thermal-mechanical reliability of TSV structure, the finite element method was used to simulate the equivalent stress and deformation of TSV with different TSV size, aspect ratio, pitch and structure. The distribution of equivalent stress and deformation was obtained. The simulation results showed that the increase of TSV size would lead to the increase of equivalent stress and deformation, the aspect ratio of TSV would only affect deformation, and the increase of TSV pitch would lead to the decrease of equivalent stress and the increase of deformation. In addition, TSV filled with parylene was analyzed in this paper. The stress could be effectively released by increasing the size of parylene.","PeriodicalId":259179,"journal":{"name":"2019 Prognostics and System Health Management Conference (PHM-Qingdao)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122947415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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