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2012 IEEE International SOI Conference (SOI)最新文献

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Gate length impact on UTBOX FBRAM devices 门长对UTBOX FBRAM设备的影响
Pub Date : 1900-01-01 DOI: 10.1109/SOI.2012.6404378
T. Nicoletti, S. Santos, J. Martino, M. Aoulaiche, A. Veloso, M. Jurczak, E. Simoen, C. Claeys
FBRAM on UTBOX SOI wafers, using the BJT with a positive back bias programming scheme, is studied versus the gate length. The optimized FBRAM parameters such as the sense margin and the retention time are shown as a function of the gate length. For longer L the back bias can be used to optimize the FBRAM performance, whereas for shorter L, hole generation amplification during the read operation by the bipolar junction transistor gain, inherent to SOI nMOSFET devices and used for the read is a limiting issue. Therefore, there is critical gate length to FBRAM scaling. To avoid FBRAM performance degradation, L should be longer than the critical length. Moreover, this work suggests that vertical devices, which allow longer L are more scalable.
在UTBOX SOI晶圆上,采用正反偏置编程方案,研究了FBRAM与栅极长度的关系。优化后的FBRAM参数如感测余量和保持时间是栅极长度的函数。对于较长的L,反向偏置可用于优化FBRAM性能,而对于较短的L,在读取操作期间由双极结晶体管增益产生的空穴放大是SOI nMOSFET器件固有的,用于读取是一个限制问题。因此,FBRAM缩放存在临界栅极长度。为了避免FBRAM性能下降,L应该大于临界长度。此外,这项工作表明,允许更长的L的垂直设备更具可扩展性。
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引用次数: 3
Biaxial + uniaxial stress effectiveness in tri-gate SOI nMOSFETs with variable fin dimensions 变翅片尺寸三栅极SOI nmosfet的双轴+单轴应力效应
Pub Date : 1900-01-01 DOI: 10.1109/SOI.2012.6404375
R. Buhler, P. Agopian, E. Simoen, C. Claeys, J. Martino
MuGFET devices show good gate-to-channel control, reducing short channel effects and increased current drive and their performance can be improved through implementation of mechanical stress in the silicon fin. In th is work we study the stress distribution and transconductance behavior in unstrained and biaxially + uniaxially strained tri-gate SOI nMOSFETs with different fin dimensions through electrical characterization of experimental devices and 3D process and device numerical simulation. Experimental results of standard and strained devices were used to validate the simulations. The bi+uni stress technique delivered enhanced maximum transconductance.
MuGFET器件具有良好的栅极到沟道控制,减少了短沟道效应,增加了电流驱动,并且通过在硅片中施加机械应力可以改善其性能。本文通过实验器件的电学表征和三维工艺及器件数值模拟,研究了不同翅片尺寸的非应变和双轴+单轴应变三栅极SOI nmosfet器件的应力分布和跨导行为。用标准装置和应变装置的实验结果验证了仿真的正确性。双+单应力技术增强了最大跨导。
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引用次数: 1
Experimental analog performance of pTFETs as a function of temperature ptfet的实验模拟性能随温度的变化
Pub Date : 1900-01-01 DOI: 10.1109/SOI.2012.6404383
P. Agopian, M. D. V. Martino, J. Martino, R. Rooyackers, D. Leonelli, C. Claeys
This paper presents an experimental study of the pTFET analog performance as a function of the temperature. It was observed that the gm improves with the temperature while the gD degrades. The gD degradation was the predominant effect which causes an AV reduction with temperature increase. However, independent of the temperature, comparing the pTFET and the pFinFET with the similar structure and same bias conditions, the first one presents a better analog performance in the temperature studied. The pTFET shows to be a good option for analog applications.
本文对pTFET模拟性能随温度的变化进行了实验研究。结果表明,随着温度的升高,gD降解,而gm提高。gD的降解是主要作用,导致AV随温度升高而降低。然而,在不考虑温度的情况下,比较具有相似结构和相同偏置条件的pTFET和pFinFET,前者在研究温度下具有更好的模拟性能。pTFET显示为模拟应用的一个很好的选择。
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引用次数: 4
Origin of wide retention distribution in 1T Floating Body RAM 1T浮体内存宽滞留分布的原因
Pub Date : 1900-01-01 DOI: 10.1109/SOI.2012.6404394
M. Aoulaiche, T. Nicoletti, A. Veloso, P. Roussel, E. Simoen, C. Claeys, G. Groeseneken, M. Jurczak
The variability of 1T FBRAM performances is investigated. The VG read window and the state "1" distribution are correlated with the number of holes injected during the write "1" related to the electric field in the S/D junctions. Besides, the origin of wide retention time distribution has been correlated with the distribution of G-R center in the Si band gap. Single defect with the Si midgap energy level can generate a leakage path affecting strongly the cell retention time. This can explain also wide retention distribution. Thight control of such defects poses extreme challange for the manufacturing of FBRAM.
研究了1T FBRAM性能的变异性。VG读窗口和状态“1”分布与写入“1”时注入的空穴数相关,这与S/D结中的电场有关。此外,宽保留时间分布的起源与硅带隙中G-R中心的分布有关。具有Si中隙能级的单个缺陷会产生泄漏路径,对电池保留时间有很大影响。这也可以解释为何留存率分布如此之广。这些缺陷的思想控制对FBRAM的制造提出了极大的挑战。
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引用次数: 7
期刊
2012 IEEE International SOI Conference (SOI)
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