Pub Date : 2013-07-18DOI: 10.1109/NEMS.2013.6559726
Qinglong Yu, Changsheng Zhang, Hongbo Zhu, Miao Zhang, Yongjin Wang
In this paper, we propose novel planar subwavelength non-periodic high contrast gratings (HCGs) with excellent focusing abilities due to their phase-matched structures. Rigorous coupled-wave analysis (RCWA) method and finite-element method (FEM) are performed to investigate the nonperiodic HCG structures for either focusing reflector or lens at the wavelength of 1.55μm. The structure with focusing ability is optimized to simultaneously meet the phase-matched conditions of the reflectors and lenses. When the grating bars material is silicon, the HCG serves as focusing reflector, and the HCG with the grating bars of GaN has transmission focusing ability. Both reflector and lens have large numerical aperture (NA), high diffraction efficiency and excellent focusing ability. These HCG structures are promising for designing and fabricating photonic devices that require focusing components, especially for silicon and III-nitride integrated photonic devices.
{"title":"Focusing reflector and lens with non-periodic phase-matched subwavelength high contrast grating","authors":"Qinglong Yu, Changsheng Zhang, Hongbo Zhu, Miao Zhang, Yongjin Wang","doi":"10.1109/NEMS.2013.6559726","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559726","url":null,"abstract":"In this paper, we propose novel planar subwavelength non-periodic high contrast gratings (HCGs) with excellent focusing abilities due to their phase-matched structures. Rigorous coupled-wave analysis (RCWA) method and finite-element method (FEM) are performed to investigate the nonperiodic HCG structures for either focusing reflector or lens at the wavelength of 1.55μm. The structure with focusing ability is optimized to simultaneously meet the phase-matched conditions of the reflectors and lenses. When the grating bars material is silicon, the HCG serves as focusing reflector, and the HCG with the grating bars of GaN has transmission focusing ability. Both reflector and lens have large numerical aperture (NA), high diffraction efficiency and excellent focusing ability. These HCG structures are promising for designing and fabricating photonic devices that require focusing components, especially for silicon and III-nitride integrated photonic devices.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130493281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-07-18DOI: 10.1109/NEMS.2013.6559953
Huilan Liu, Heming Yao, Lishuang Feng
Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling, reconstruction technology is researched and the simulation results show the feasibility of the method. Error analysis is made for searching the influence of modulation frequency, sampling frequency and reflector vibration frequency. Verification experiment is made to check the accuracy of the system with appropriate parameters. It provides a displacement and vibration measurement method for MEMS elements.
{"title":"A nanometer-resolution displacement measurement system based on laser feedback interferometry","authors":"Huilan Liu, Heming Yao, Lishuang Feng","doi":"10.1109/NEMS.2013.6559953","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559953","url":null,"abstract":"Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system is demonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling, reconstruction technology is researched and the simulation results show the feasibility of the method. Error analysis is made for searching the influence of modulation frequency, sampling frequency and reflector vibration frequency. Verification experiment is made to check the accuracy of the system with appropriate parameters. It provides a displacement and vibration measurement method for MEMS elements.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125274858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559750
C. Y. Lim, Y. Lam
This paper presents a numerical study on the impingement and spreading of a micro-sized droplet on a nonhomogenous solid surface. Based on the phase field method, the numerical model was implemented with finite element method (FEM). Dynamic contact angle, which is dependent on the droplet contact line velocity, was applied at the contact surface based on Blake's model and hydrodynamic model. A novel scheme to specify the contact line velocity based on the phasefield function gradient at the interfacial region has been implemented. Numerical results show that a high wettability difference between two surfaces confines the spreading of an impinging micro-sized droplet. Surface wettability patterning can be applied to control the deposition and spreading of a jetted droplet to produce accurate micro-sized features in electronic circuits.
{"title":"Simulation of impingement and spreading of micro-droplet on non-homogeneous solid surface","authors":"C. Y. Lim, Y. Lam","doi":"10.1109/NEMS.2013.6559750","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559750","url":null,"abstract":"This paper presents a numerical study on the impingement and spreading of a micro-sized droplet on a nonhomogenous solid surface. Based on the phase field method, the numerical model was implemented with finite element method (FEM). Dynamic contact angle, which is dependent on the droplet contact line velocity, was applied at the contact surface based on Blake's model and hydrodynamic model. A novel scheme to specify the contact line velocity based on the phasefield function gradient at the interfacial region has been implemented. Numerical results show that a high wettability difference between two surfaces confines the spreading of an impinging micro-sized droplet. Surface wettability patterning can be applied to control the deposition and spreading of a jetted droplet to produce accurate micro-sized features in electronic circuits.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115649129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559779
Qingyi Wang, Weiping Chen, Liang Yin, Xiaowei Liu, He Zhang
This paper analyzed the factor of bias drift of quartz vibratory gyroscope, proposed the method of improving bias stability of quartz vibratory gyroscope and designed an interface ASIC of quartz vibratory gyroscope. The bias instability is generated by characteristic of noise in the detecting circuit and the quantity of the driving single in the exciting circuit. We propose a sine-wave exciting circuit which has lower phase noise than the traditional exciting approach. An operational amplifier with low noise and offset voltage temperature coefficient is designed to decrease the bias instability. The interface ASIC integrated on a 5×4.4 mm2 chip with 0.5 μm CMOS process has 40mW power supply, 18nV/Hz1/2 equivalent input noise density, and 0.8°/hour root Allan variance.
{"title":"An interface ASIC of quartz vibratory gyroscope with 0.8°/hour root Allan variance","authors":"Qingyi Wang, Weiping Chen, Liang Yin, Xiaowei Liu, He Zhang","doi":"10.1109/NEMS.2013.6559779","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559779","url":null,"abstract":"This paper analyzed the factor of bias drift of quartz vibratory gyroscope, proposed the method of improving bias stability of quartz vibratory gyroscope and designed an interface ASIC of quartz vibratory gyroscope. The bias instability is generated by characteristic of noise in the detecting circuit and the quantity of the driving single in the exciting circuit. We propose a sine-wave exciting circuit which has lower phase noise than the traditional exciting approach. An operational amplifier with low noise and offset voltage temperature coefficient is designed to decrease the bias instability. The interface ASIC integrated on a 5×4.4 mm2 chip with 0.5 μm CMOS process has 40mW power supply, 18nV/Hz1/2 equivalent input noise density, and 0.8°/hour root Allan variance.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121145426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559864
R. Roth, K. Cobry, G. Lenk, P. Woias
The heat transfer in silicon microchannels with integrated inline and staggered pin fin arrays is evaluated at clearance-to-diameter ratios of 0.5-0.77 in the laminar flow regime. The channels have a small width, leading to a significant influence of the channel walls on fluid flow and heat transfer. Their influence is considered when measuring the temperature distribution along the channel length and the average heat transfer. For this purpose platinum thermistors are integrated directly into the channel structures, which are released from the silicon substrate and made freestanding via deep reactive ion etching (DRIE) and selective dicing. The measurements show that a significant portion of the fluid flows below the pin fins in the clearance bypass region. Heat transfer correlations are developed with a new functional form that considers the strong influence of the clearance-to-diameter ratio on overall heat transfer.
{"title":"Micro process engineering of freestanding silicon fluidic channels with integrated platinum thermistors for obtaining heat transfer correlations","authors":"R. Roth, K. Cobry, G. Lenk, P. Woias","doi":"10.1109/NEMS.2013.6559864","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559864","url":null,"abstract":"The heat transfer in silicon microchannels with integrated inline and staggered pin fin arrays is evaluated at clearance-to-diameter ratios of 0.5-0.77 in the laminar flow regime. The channels have a small width, leading to a significant influence of the channel walls on fluid flow and heat transfer. Their influence is considered when measuring the temperature distribution along the channel length and the average heat transfer. For this purpose platinum thermistors are integrated directly into the channel structures, which are released from the silicon substrate and made freestanding via deep reactive ion etching (DRIE) and selective dicing. The measurements show that a significant portion of the fluid flows below the pin fins in the clearance bypass region. Heat transfer correlations are developed with a new functional form that considers the strong influence of the clearance-to-diameter ratio on overall heat transfer.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121243174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method. The results showed that the resonant frequency varied almost linearly with the temperature over the range of 45 °C to 120 °C, and the sensitivity and the nonlinear error were about -1931.6ppm/°C (or -21.2 kHz /°C) and 1.33% respectively when the CMUT working at the first order vibration mode with a bias voltage of 22.05V. It was demonstrated that the first order vibration mode had a higher sensitivity than the other three higher modes and the sensitivity could be adjusted by the bias voltage.
{"title":"Capacitive micromachined ultrasonic transducer as a resonant temperature sensor","authors":"Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang, Yulong Zhao, Zhuangde Jiang","doi":"10.1109/NEMS.2013.6559912","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559912","url":null,"abstract":"The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method. The results showed that the resonant frequency varied almost linearly with the temperature over the range of 45 °C to 120 °C, and the sensitivity and the nonlinear error were about -1931.6ppm/°C (or -21.2 kHz /°C) and 1.33% respectively when the CMUT working at the first order vibration mode with a bias voltage of 22.05V. It was demonstrated that the first order vibration mode had a higher sensitivity than the other three higher modes and the sensitivity could be adjusted by the bias voltage.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126054576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559705
Jian Lu, Takahisa Sagawa, Lulu Zhang, H. Takagi, Dong F. Wang, T. Itoh, R. Maeda
MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, the sensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our recent developed piezoelectric MEMS resonators, including cantilever actuated by PZT and detected by piezoresistive gauge, beam resonator actuated by PZT and detected by electrostatic sensor, disk/ring resonator actuated and detected by PZT, for the pursuit of high Q-factor, high resonant frequency, and better device sensitivity. The performance of each device was evaluated and investigated. The advantageous and weaknesses of above devices were discussed for application as bio-chemical sensors.
{"title":"Piezoelectric MEMS devices and its application as bio-chemical sensors","authors":"Jian Lu, Takahisa Sagawa, Lulu Zhang, H. Takagi, Dong F. Wang, T. Itoh, R. Maeda","doi":"10.1109/NEMS.2013.6559705","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559705","url":null,"abstract":"MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, the sensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our recent developed piezoelectric MEMS resonators, including cantilever actuated by PZT and detected by piezoresistive gauge, beam resonator actuated by PZT and detected by electrostatic sensor, disk/ring resonator actuated and detected by PZT, for the pursuit of high Q-factor, high resonant frequency, and better device sensitivity. The performance of each device was evaluated and investigated. The advantageous and weaknesses of above devices were discussed for application as bio-chemical sensors.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125324034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559929
Wei Tang, Y. Chen, Jiaqing Zhao, S. Chen, L. Feng, X. Guo
In the paper, we have demonstrated a simple but effective method to inkjet print fine Ag conductive lines with improved resolution on polymeric films. This is achieved by forming an ultra-flat polymeric film and modifying its surface energy. As a result, narrow Ag lines (<; 50 μm) and short gaps (~10 μm) were successfully achieved using optimized printing parameters. Meanwhile these formed Ag lines show fine morphology, smooth surface and high electrical conductivity. The improved resolution is attributed to the reduced spreading of ink droplets on the surface modified substrate. This method shows the potential of directly producing high-resolution electrodes for printed electronics applications.
{"title":"Inkjet printing narrow fine Ag lines on surface modified polymeric films","authors":"Wei Tang, Y. Chen, Jiaqing Zhao, S. Chen, L. Feng, X. Guo","doi":"10.1109/NEMS.2013.6559929","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559929","url":null,"abstract":"In the paper, we have demonstrated a simple but effective method to inkjet print fine Ag conductive lines with improved resolution on polymeric films. This is achieved by forming an ultra-flat polymeric film and modifying its surface energy. As a result, narrow Ag lines (<; 50 μm) and short gaps (~10 μm) were successfully achieved using optimized printing parameters. Meanwhile these formed Ag lines show fine morphology, smooth surface and high electrical conductivity. The improved resolution is attributed to the reduced spreading of ink droplets on the surface modified substrate. This method shows the potential of directly producing high-resolution electrodes for printed electronics applications.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116234709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559847
S. Hu, H. Cui, Kun He, Z. Hou, Peng Chen, D. Xiao, Xuezhong Wu
This paper presents a novel method of structural trimming to reduce the mode coupling error with the focus on micro-gyroscopes. A UV nanosecond laser was used to remove materials with determined size at certain point on the vibratory structure of the micro-gyroscope. The peak-peak voltage of the mode coupling error signal of the gyroscope prototype studied in this paper could be reduced from 3.52V to 0.082V. Furthermore, the zero-velocity output of the same gyroscope prototype was decreased from 244mV to 14mV after coarse trimming and fine trimming. Demonstrated theoretically and experimentally, this structural trimming by UV nanosecond laser is an effective way to reduce mode coupling error for improving the microgyroscope performance.
{"title":"A method of structural trimming to reduce mode coupling error for micro-gyroscopes","authors":"S. Hu, H. Cui, Kun He, Z. Hou, Peng Chen, D. Xiao, Xuezhong Wu","doi":"10.1109/NEMS.2013.6559847","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559847","url":null,"abstract":"This paper presents a novel method of structural trimming to reduce the mode coupling error with the focus on micro-gyroscopes. A UV nanosecond laser was used to remove materials with determined size at certain point on the vibratory structure of the micro-gyroscope. The peak-peak voltage of the mode coupling error signal of the gyroscope prototype studied in this paper could be reduced from 3.52V to 0.082V. Furthermore, the zero-velocity output of the same gyroscope prototype was decreased from 244mV to 14mV after coarse trimming and fine trimming. Demonstrated theoretically and experimentally, this structural trimming by UV nanosecond laser is an effective way to reduce mode coupling error for improving the microgyroscope performance.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122857205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559867
M. Ghadami, H. Shagoshtasbi, M. Mahjoob, Yi-Kuen Lee
This paper describes a comparative study of two feedback control methods for a microfluidic electroporation (EP) system. The regulation of the transmembrane voltage (Vm) and nano-electropore radius (r) of HeLa cells on a micro EP chip was achieved using a linear Proportional-Integral-Derivative (PID) Controller and also Model Predictive Controller (MPC) based on the critical electric field for single-cell EP. Numerical simulations of static and dynamic responses of the two critical states, Vm and r, shows that feedback control can improve the cell viability and EP efficiency compared to open-loop (OL) system. The benefits and limitations of these two control methods for EP and possible future works have also been discussed.
{"title":"Comparative study of PID control and model predictive control for a microfluidic electroporation system","authors":"M. Ghadami, H. Shagoshtasbi, M. Mahjoob, Yi-Kuen Lee","doi":"10.1109/NEMS.2013.6559867","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559867","url":null,"abstract":"This paper describes a comparative study of two feedback control methods for a microfluidic electroporation (EP) system. The regulation of the transmembrane voltage (Vm) and nano-electropore radius (r) of HeLa cells on a micro EP chip was achieved using a linear Proportional-Integral-Derivative (PID) Controller and also Model Predictive Controller (MPC) based on the critical electric field for single-cell EP. Numerical simulations of static and dynamic responses of the two critical states, Vm and r, shows that feedback control can improve the cell viability and EP efficiency compared to open-loop (OL) system. The benefits and limitations of these two control methods for EP and possible future works have also been discussed.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114519064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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