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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications 一种基于范德华力的非易失性存储器双稳态硅纳米纳米机电开关
B. Soon, N. Singh, J. Tsai, Chengkuo Lee
We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application.
我们提出了一种硅纳米鳍(Si-NF),它可以通过两个接触面之间的静电力双向驱动。开关能够利用范德华力保持其接触,使Si-NF保持在任何一端而没有保持偏差,从而显示出双稳定的滞后行为。测量的拉入电压VPI和VRESET分别为10V和-12V,确认开关可以通过对电极复位。由于开关在两种稳定状态之间切换,因此它可以成为非易失性内存(NVM)应用程序的理想设备。
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引用次数: 2
Ice Fishing Micro channels with sub-micron pores 带有亚微米孔的冰钓微通道
J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai
We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young's pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.
本文报道了一种具有控制开口的微流体装置,用于从外部进入微通道内的流体。通过在起始层开孔上沉积受控的聚对二甲苯层来控制开孔的减小直径。通过改变聚对二甲苯的种类和厚度,可以控制其孔径和表面疏水性。由于孔隙附近液体的表面张力引起的拉普拉斯-杨氏压力,可以对内部流体加压而不泄漏出孔隙。
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引用次数: 2
Bend waveguide with broad bandwidth and high transmission efficiency based on air-hole photonic crystal 基于空穴光子晶体的宽带高传输效率弯曲波导
Xiaoyuan Ren, Lishuang Feng, Zhili Lin
As one of the most competitive materials of the integrated optics, photonic crystals (PCs) have been investigated for more than 20 years since its conception was proposed. In this work, we established a novel structure of the bend waveguide which is composed of photonic crystal (PC) with triangular lattice of air-holes. By optimizing the bend structures, not only the transmission bandwidth of the whole waveguide is greatly improved, but also the transmission efficiency is enhanced. The transmission efficiencies of the wavelengths between 1504nm and 1586nm can reach more than 80%. The highest transmission efficiency 95% can be obtained for the wavelength of 1553nm. By simulating the transmission of the optimized bend waveguide, the light wave whose wavelength is 1553nm can propagate effectively.
光子晶体作为集成光学领域最具竞争力的材料之一,自提出以来,人们对其进行了20多年的研究。在本工作中,我们建立了一种新型的弯曲波导结构,它是由具有三角形气孔晶格的光子晶体组成的。通过对弯曲结构的优化,不仅大大提高了整个波导的传输带宽,而且提高了传输效率。在1504nm ~ 1586nm波段的传输效率可达80%以上。波长为1553nm时,传输效率最高,达到95%。通过模拟优化后的弯曲波导的传输,可以有效地传输波长为1553nm的光波。
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引用次数: 0
Low frequency vibration energy harvesting from human motion using IPMC cantilever with electromagnectic transduction 利用带电磁转导的IPMC悬臂梁收集人体运动中的低频振动能量
K. Aw, Siva V. Praneeth
This research aims as a proof of concept for a vibration energy harvester using human motion as the energy source. Human motion consists of burst of low frequency vibrational kinetic energy. The high acceleration burst is usually 1. 5 to 2 g when the foot strikes the ground and an ionic polymer metallic composite (IPMC) can be used to harvest this energy via two methods. The first method is via the bending of the IPMC causing the mobile cations to move and produces an output voltage pulse, hence capacitive transduction. Secondly, the IPMC in a beam form that resonate at the low vibration frequency due to its relatively low Young's modulus can scavenge additional secondary energy via external electromagnetic transduction to supplement the primary harvested energy via the IPMC capacitive transduction.
本研究旨在验证利用人体运动作为能量来源的振动能量采集器的概念。人体运动是由低频振动动能的爆发构成的。高加速度爆发通常为1。当脚着地时产生5到2克的能量,离子聚合物金属复合材料(IPMC)可以通过两种方法来收集这种能量。第一种方法是通过IPMC的弯曲导致移动阳离子移动并产生输出电压脉冲,因此是电容转导。其次,由于其相对较低的杨氏模量,波束形式的IPMC在低振动频率下产生共振,可以通过外部电磁转导清除额外的二次能量,以补充通过IPMC电容转导收集的一次能量。
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引用次数: 4
Effect of RF sputtering parameters on PZT crystal growth 射频溅射参数对PZT晶体生长的影响
Miao Yu, T. Giffney, K. Aw, Haixia Zhang
Lead zirconate titanate(PZT) due to its large polarization, large dielectric constant and good piezoelectric performance has become popular in a wide range of applications in MEMS field. The prevailing technique for PZT deposition is sol-gel method, but the stability of solution and repeated coating can't be precisely controlled. Sputtering technique is used in this work for its relatively simple fabrication process, uniform thickness. In this work, PZT films are sputtered on Pt/Ti/SiO2/Si substrate prior to annealing. PZT preferential orientation is highly depend on the sputtering parameters. X-ray diffraction(XRD) analysis has been performed to compare the crystal growth. TiO2 seed layer is also introduced in this work.
锆钛酸铅(PZT)由于具有大极化、大介电常数和良好的压电性能,在MEMS领域得到了广泛的应用。溶胶-凝胶法是沉积PZT的主流技术,但溶液的稳定性和重复镀膜不能精确控制。采用溅射技术制作工艺简单,厚度均匀。在这项工作中,PZT薄膜在退火前溅射在Pt/Ti/SiO2/Si衬底上。PZT的择优取向高度依赖于溅射参数。用x射线衍射(XRD)分析了晶体的生长情况。本文还引入了TiO2种子层。
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引用次数: 2
Label-free separation and sorting of human monocytes and T-cells by electrowetting and dielectrophoresis 人单核细胞和t细胞的电润湿和介质电泳无标记分离和分选
Cheng-Yeh Huang, M. Chiang, S. Fan, A. Ghaemmaghami, W. Hsu
We report a label-free separation and sorting approach based on electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP) to manipulate human monocyte (THP-1) and T-cell (Jurkat) lines in droplets without any impact on cell viability. In addition to separating cells, this device provides a platform to study cell-cell interactions and migration before the separation.
我们报道了一种基于电介质上电润湿(EWOD)和介电电泳(DEP)的无标记分离和分选方法,可以在液滴中操纵人类单核细胞(THP-1)和t细胞(Jurkat)系,而不影响细胞活力。除了分离细胞外,该装置还提供了一个平台来研究分离前细胞间的相互作用和迁移。
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引用次数: 1
Graphene as dry adhesive interacting with semiconductor substrates 石墨烯作为干胶粘剂与半导体衬底相互作用
Jun Sun, T. Xu, Feng Xu, Xiao Xie, Litao Sun
Here we show by molecular dynamics that graphene could be utilized as dry adhesive interacting with semiconductor substrates. Various potential semiconductor substrates are introduced and present similar results. This work opens up a new prospect for the applications of graphene and would be valuable for the scientific studies of adhesion at nanoscale.
在这里,我们通过分子动力学表明石墨烯可以用作与半导体衬底相互作用的干粘合剂。介绍了各种潜在的半导体衬底,并给出了类似的结果。这项工作为石墨烯的应用开辟了新的前景,对纳米尺度粘附的科学研究具有重要价值。
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引用次数: 0
Fabrication of copper nanowires by eelectrodeposition uusing anodic aluminum oxide template 阳极氧化铝模板电沉积制备铜纳米线
C. Chung, C. Yang, M. Liao, S. Li
In this paper, effects of potential and output mode on copper nanowire arrays via porous anodic aluminum oxide template by electrochemical deposition method have been investigated. The copper nanowire arrays were fabricated using electrochemical deposition in 0.2 M CuSO4 by different potential modes including direct current (DC) and pulse. The nanostructure, morphology, chemical composition and phase of copper nanowire arrays were examined by scanning electron microscopy and grazing incidence X-ray diffraction. The results indicated that the copper nanowire arrays deposited by pulse mode revealed high aspect ratio despite high potential while that at higher DC potential was rather short due to the hydrogen generation in reduction reaction. The short duty cycle of 50% in pulse deposition can release the produced hydrogen for good nanowires formation.
本文采用电化学沉积方法,研究了电位和输出模式对多孔阳极氧化铝模板上铜纳米线阵列的影响。以0.2 M CuSO4为基体,采用直流和脉冲两种电位模式制备了铜纳米线阵列。采用扫描电镜和掠入射x射线衍射对铜纳米线阵列的纳米结构、形貌、化学成分和物相进行了表征。结果表明,脉冲方式沉积的铜纳米线阵列在高电位下呈现出较高的纵横比,而在高直流电位下,由于还原反应产生氢,纵横比较短。脉冲沉积的占空比较短,为50%,可以释放产生的氢,形成良好的纳米线。
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引用次数: 0
Fluid dynamics analysis of magnetically actuated ciliated nano/micro structures for flow mixing and propulsion applications 用于流体混合和推进应用的磁驱动纤毛纳米/微结构的流体动力学分析
Cheng-Yi Lin, Chia-Yun Chen, Y. Hu, Chia-Yuan Chen
A series of cilium-like micro structures with magnetic particles embedded were fabricated for precise flow manipulation through the magnetically driven control. A hydrodynamic analysis was performed to elucidate the underlying interaction between ciliated structures and the induced flow fields. To fabricate ciliated structures, the micromachining method together with a casting process was employed. These ciliated structures were actuated in a homogeneous magnetic field generated by an in-house magnetic coil system for various beating cycles inside a microchannel. Three representative signal waveforms were created to mimic the beating nature of cilia for different flow actuating functions, such as micromixing and micropropulsion. To investigate the flow structures of induced flow fields quantitatively, a numerical modeling method using Fluid-Structure-Interaction module was performed. In addition, a micro-particle image velocimetry (μPIV) experiment was conducted to characterize the nonreciprocal movement of ciliated structures for the quantification of hydrodynamic efficiency. By means of the presented analysis paradigms, a new flow manipulation strategy will be suggested to transport/agitate flows efficiently in microfluidics.
通过磁驱动控制,制备了一系列嵌入磁性颗粒的纤毛状微结构,实现了对流体的精确控制。为了阐明纤毛结构与诱导流场之间潜在的相互作用,进行了水动力学分析。为了制造纤毛状结构,采用了微加工和铸造相结合的方法。这些纤毛结构在由内部磁线圈系统产生的均匀磁场中被驱动,在微通道内进行各种跳动循环。创建了三个具有代表性的信号波形来模拟纤毛的跳动性质,以实现不同的流体驱动功能,如微混合和微推进。为了定量研究诱导流场的流动结构,采用流固耦合模块对诱导流场进行了数值模拟。此外,还利用微粒子图像测速(μPIV)实验表征了纤毛结构的非互反运动,从而量化了水动力效率。利用所提出的分析范式,将提出一种新的流动控制策略,以有效地输送/搅拌微流体中的流动。
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引用次数: 6
Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes Al2O3/W异质结构纳米孔膜:从原生到可调纳米流体二极管
Songmei Wu, F. Wildhaber, A. Bertsch, J. Brugger, P. Renaud
We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typical membrane is 100×100 μm2 in size with pore density of ~20/μm2. The nanopores are 26 nm in diameter and 400 nm in length. Owing to the opposite surface charge states of Al2O3 (positive) and W (negative with native oxide), the membrane exhibits clear rectification of ion current in electrolyte solutions. After thermal heating at 350°C for 2 hrs, approximately 10 nm WOx grows on the surface of W, forming a conformal and dense dielectric layer. The W layer allows the application of an electrical field to further modulate the ionic transport through the nanopores with low gate potentials and ultra low gate leakage current. We have demonstrated the control of rectifying factor from 2 to 11. Our experimental findings have a valuable potential for controllable high throughput molecular separation and chemical processors.
我们在这里提出了Al2O3/W异质结构纳米孔膜,其功能是天然的和电场可调的纳米流体二极管。典型的膜尺寸为100×100 μm2,孔密度为~20/μm2。纳米孔直径为26 nm,长度为400 nm。由于Al2O3(正)和W(带天然氧化物的负)的表面电荷状态相反,膜在电解质溶液中表现出明显的离子电流整流。在350℃下加热2小时后,W表面生长出约10 nm的WOx,形成共形致密的介电层。W层允许应用电场进一步调节离子通过具有低栅极电位和超低栅极泄漏电流的纳米孔的传输。我们演示了整流因子从2到11的控制。我们的实验结果在可控高通量分子分离和化学处理方面具有宝贵的潜力。
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引用次数: 1
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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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