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Wearable skin sensor using programmable interlocking of nanofibers 使用可编程互锁纳米纤维的可穿戴皮肤传感器
K. Suh, N. Jeon, Changhyun Pang
We presents a highly sensitive, flexible, multiplex strain gauge sensor by utilizing single active layer of nanoscale mechanical interlocking between high aspect-ratio Pt-coated polymeric nanofibers. The sandwich-assembled, interconnected nanofibers supported on thin polydimethylsiloxane (PDMS) layers displayed a specific strain gauge (GF) factors for multiplex sensing such as pressure, shear force, and torsion, measured from the change of electrical resistance as a function of applied compressive strain (≤5%). The assembled device was used to monitor continuous kinetic motion of a bouncing micro-droplet on a superhydrophobic surface and physical force of a heartbeat under different conditions. In order to enhance adaptability on exquisite human-skin, skin adhesive patches for in vitro diagnostic device are developed.
我们提出了一种高灵敏度、柔性、多路应变传感器,该传感器利用高纵横比pt涂层聚合物纳米纤维之间的单活性纳米级机械联锁层。在聚二甲基硅氧烷(PDMS)薄层上支撑的夹层组装、相互连接的纳米纤维显示出一种特定的应变计(GF)因子,用于多重传感,如压力、剪切力和扭转,通过电阻变化作为施加压缩应变的函数(≤5%)来测量。该装置用于监测微液滴在超疏水表面上的连续运动和不同条件下心跳的物理力。为了提高对人体细腻皮肤的适应性,研制了体外诊断设备用皮肤贴。
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引用次数: 4
First-principles study on the electro-mechanical coupling of the Si/Ge core-shell nanowires Si/Ge核壳纳米线机电耦合的第一性原理研究
Lei Li, S. Lei, Ruoyu Wang, Hong Yu, Qing‐An Huang
We have simulated the piezoresistance coefficients (Pie coefficients) in Si/Ge core-shell nanowires with a certain diameter and different thickness Ge-shell in the longitudinal direction on the basis of First-Principles calculations of models. Through calculations, it was found that the Pie coefficients of the nanowire constructed with an axis of Si atoms and three layers of Ge atoms outside (Si1Ge3 in Figure1) almost kept consistent with the GeNW as negative values. Under the compressive condition, the Pie coefficient of the Si2Ge2 can reach up to-21.20 × 10-11-1. However, when the Ge-shell was decreased to only one Ge-atom layer, the Pie coefficients varied from negative values to positive ones. We also obtained the pie coefficients of the SiNW: 9.46 x 10-11Pa-1 and 35.77 x 10-11Pa-1 respectively under compression and tension.
在模型第一性原理计算的基础上,模拟了具有一定直径和不同Ge壳厚度的Si/Ge核壳纳米线纵向上的压阻系数(Pie系数)。通过计算发现,以Si原子为轴,外面有三层Ge原子(图1中的Si1Ge3)构成的纳米线的Pie系数几乎与GeNW保持一致,为负值。在压缩条件下,Si2Ge2的饼系数可达21.20 × 10-11Pα-1。然而,当ge壳层减少到只有一个ge原子层时,Pie系数由负值变为正值。得到了压缩和拉伸作用下SiNW的饼系数分别为9.46 x 10-11Pa-1和35.77 x 10-11Pa-1。
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引用次数: 0
Mechanical characterization of nanowires by planar vibration sensor 基于平面振动传感器的纳米线力学特性研究
Lulu Zhang, Jian Lu, H. Takagi, R. Maeda
Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.
纳米线作为纳米级互连和电子和机电设备的移动元件引起了人们的极大兴趣。纳米力学性能的评价对新型纳米线器件的开发具有重要意义。最近,我们致力于开发一种简单的纳米力学测量方法,即使用平面内模压阻振动传感器,该传感器具有较少的工艺成本和封装困难。理论分析和仿真结果表明,该装置具有高灵敏度和多样性,有望用于评价金属或金属氧化物纳米线的力学性能。
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引用次数: 0
Design of detection electrode on contactless conductivity detection in capillary electrophoresis microchip 毛细管电泳微芯片中非接触电导率检测电极的设计
Haifeng Zhang, Xiaowei Liu, Xiaoshu Zhang, Rui Weng
Contactless conductivity detection has attained great attention in the last decade in capillary electrophoresis. But contactless conductivity detection is restricted by its sensitivity, how to improve detection sensitivity has become the key of contactless conductivity. In this paper a novel extended model for the detection cell consisting of a network of resistors and capacitors is proposed according to the structure of contactless conductivity detection. The effect of the detector geometry on the sensitivity of contactless conductivity is studied. By simulation, the optimal parameters are obtained. Sandwich electrode structure was established to improve the performance of the detector and minimize the stray capacitance between the electrodes. Using the optimal electrode structure, the two peaks corresponding to K+ and Mg2+ are clearly resolved with complete separation.
近十年来,非接触电导率检测在毛细管电泳中得到了广泛的关注。但非接触式电导率检测受其灵敏度的限制,如何提高检测灵敏度成为非接触式电导率检测的关键。本文根据非接触式电导率检测的结构,提出了一种由电阻和电容网络组成的检测单元的扩展模型。研究了探测器几何形状对非接触电导率灵敏度的影响。通过仿真,得到了最优参数。为了提高探测器的性能,减小电极间的杂散电容,建立了夹层电极结构。采用优化的电极结构,K+和Mg2+对应的两个峰被清晰地分辨出来,完全分离。
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引用次数: 0
A symmetrical hyperbolic formatted microchip for rapid optimization of electroporation 用于电穿孔快速优化的对称双曲格式微芯片
Mengxi Wu, Deyao Zhao, Hao Yan, Zicai Liang, Zhihong Li
We have developed a novel microchip aiming to rapidly optimize of electric parameters for electroporation. The electrodes were designed as symmetrical hyperbolic formatted to generate linearly decrescent electric field. Cells were cultured on the microchip for adherent electroporation and in-situ observation. Exhibited diversely in cell viability and transfection efficiency, three areas were observed obviously since the intensity of electric field was varied. Assisted by markers designed on electrodes, the location of optimal electroporation performance area and the corresponding range of electric field intensity were determined. Using the proposed electroporation chip, we obtained the optimal electric field spectrum for electroporation of HEK-293A cell line, that was about 0.75 ~ 1.25 × 105 V/m. The diversity of electroporation performance was evaluated by the dependence of cell viability and transfection efficiency on electric field intensity. With the guidance of reference electric field value, we designed a specific annular-interdigitated microchip to testify the electroporation characteristics. At last, we achieved excellent electroporation performance under the optimal conditions using self-made electroporation microchip.
我们开发了一种新型微芯片,旨在快速优化电穿孔的电参数。电极被设计成对称的双曲格式,以产生线性递减的电场。细胞在微芯片上培养,贴壁电穿孔和原位观察。在不同的电场强度下,细胞活力和转染效率表现出不同的变化,其中三个区域的变化较为明显。通过在电极上设计标记,确定最佳电穿孔性能区域的位置和相应的电场强度范围。利用所设计的电穿孔芯片,获得了HEK-293A细胞系电穿孔的最佳电场谱,约为0.75 ~ 1.25 × 105 V/m。通过细胞活力和转染效率对电场强度的依赖性来评价电穿孔性能的多样性。在参考电场值的指导下,我们设计了一个特定的环形交叉微芯片来验证电穿孔特性。最后,我们利用自制的电穿孔芯片在最佳条件下获得了优异的电穿孔性能。
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引用次数: 1
Transparent elastic capacitive pressure sensors based on silver nanowire electrodes 基于银纳米线电极的透明弹性电容压力传感器
C. Gu, S. Chen, Xiaojun Guo
Stretchable conductive films were produced by embedding silver nanowires onto the surface of biocompatible polydimethylsiloxane (PDMS) elastomeric membranes with low cost solution based processes. The films showed low sheet resistance (<;12Ω/□) and good transparency (40% at 550nm). By laminating two films together, transparent elastic capacitive pressure sensors were made, which present higher sensitivity to that using Al foil as the electrode. A higher concentration of silver nanowire solution was also shown to be able to improve the sensitivity.
采用低成本溶液工艺,将银纳米线嵌入生物相容性聚二甲基硅氧烷(PDMS)弹性体膜表面,制备了可拉伸导电薄膜。薄膜具有低片阻(<;12Ω/□)和良好的透明度(在550nm处为40%)。将两层薄膜层合制成透明弹性电容式压力传感器,其灵敏度高于以铝箔为电极的传感器。较高浓度的银纳米线溶液也能提高灵敏度。
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引用次数: 3
An experimental investigation of micro pulsating heat pipes 微脉动热管的实验研究
Kai-Shing Yang, Yu-Chi Cheng, M. Jeng, K. Chien, Jin‐Cherng Shyu
Si-based micro pulsating heat pipes (μPHP) charged with HFE-7100 were tested at several heating powers with two orientations, θ = 0° and 90°. The width of the channel is 0.8 mm in a μPHP having uniform channels, and 1.0 mm or 0.6 mm in the other μPHP. The depth of each channel is 0.25 mm. The overall size of each μPHP is 60 mm × 10 mm × 1.25 mm. Both visual observation and temperature response of the present μPHPs at various conditions were performed. The performance was compared between two μPHPs having either uniform channels or non-uniform channels at difference heating powers. Results showed that both μPHPs could not start the pulsating two-phase flow in the channel of μPHPs as the μPHPs were operated horizontally at heating power ranging from 1 W to 7 W, except when the μPHP having non-uniform channels was tested at heating power of 7 W. Unlike the failure start-up for horizontal arrangement of μPHPs, μPHPs with a vertical arrangement shows a significant start-up phenomenon for both μPHPs with uniform and non-uniform channels due to the assistance in the start-up of both μPHPs arising from gravity force.
对硅基微脉动热管(μPHP)在θ = 0°和90°两种加热功率下进行了充注HFE-7100的实验。在通道均匀的μPHP中通道宽度为0.8 mm,在另一种μPHP中通道宽度为1.0 mm或0.6 mm。每条通道深度为0.25 mm。每个μPHP的外形尺寸为60mm × 10mm × 1.25 mm。对所制备的μPHPs在不同条件下进行了目视观察和温度响应。比较了具有均匀通道和非均匀通道的两种μPHPs在不同加热功率下的性能。结果表明:除了通道不均匀的μPHP在加热功率为7 W时测试外,当加热功率为1 ~ 7 W时,两种μPHPs均不能在μPHPs通道内启动脉动两相流;与水平排列μPHPs的失败启动不同,竖直排列μPHPs对均匀和非均匀通道μPHPs都表现出明显的启动现象,这是由于重力对两种μPHPs的启动起到了辅助作用。
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引用次数: 26
Fabrication and thermal stability characterization of Ru electrode used for high power contact RF MEMS switch 大功率接触式射频MEMS开关用Ru电极的制备及热稳定性表征
Hongze Zhang, Zhihong Li
This paper presents the fabrication and thermal stability of the Ru electrode used for high power Ru-Au contact RF MEMS switch with microspring contact design. Here we develop a new process with bilayer lift-off and strain release layer to get the 3000 Å Ti/Au/Ru electrode with excellent smooth edge for high power handling and low loss. Furthermore, the thermal test at 400°C , 500°C and 600°C over 1 hour has been done. Investigation of the surface with SEM and EDX shows that the electrode has a good thermal stability at 400°C, which is proper for high power handling.
本文介绍了用于微弹簧触点设计的大功率Ru- au触点射频MEMS开关的Ru电极的制备及其热稳定性。本文提出了一种双层剥离和应变释放层的新工艺,以获得具有优异光滑边缘的3000 Å Ti/Au/Ru电极,具有高功率处理和低损耗。此外,在400°C, 500°C和600°C下进行了1小时的热测试。SEM和EDX分析表明,该电极在400℃时具有良好的热稳定性,适合大功率处理。
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引用次数: 0
Advances of CMOS-MEMS technology for resonator applications CMOS-MEMS技术在谐振器中的应用进展
Sheng-Shian Li
This paper reports on recent progress on high-Q integrated micromechanical resonators using “CMOS-MEMS technology” to enable monolithic integration of MEMS and CMOS. Specifically, we take advantage of IC and semiconductor strength in Taiwan to develop several CMOS-MEMS resonator platforms targeted for inherent integration of MEMS and circuitry towards single-chip implementation for timing reference and oscillator applications. In addition, performance enhancement in terms of motional impedance, power handling, linearity, thermal stability, frequency tunability, quality factor, and feedthrough level have been addressed.
本文报道了利用“CMOS-MEMS技术”实现MEMS和CMOS单片集成的高q集成微机械谐振器的最新进展。具体而言,我们利用台湾的集成电路和半导体实力开发了几个CMOS-MEMS谐振器平台,旨在将MEMS和电路固有集成,以实现时序参考和振荡器应用的单芯片实现。此外,在运动阻抗、功率处理、线性度、热稳定性、频率可调性、质量因子和馈通水平方面的性能增强也得到了解决。
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引用次数: 2
Observation of strong transverse magneto-optical Kerr effect on surface plasmonic gratings 表面等离子体光栅强横向磁光克尔效应的观察
N. P. Ling, K. Chou, C. T. Jhou, M. Lai, T. C. Chen, C. Lai, L. W. Wang, Gwo-Bin Lee, M. M. Lee
Strong transverse magneto-optical Kerr effect (TMOKE) on Au/Fe/Au surface plasmon (SP) gratings is demonstrated. Via the optimal design of this structure, the measured Kerr parameter is 0.03, which is 3 times larger than the maximal value ever reported on a plane magneto-optical SP substrate. Moreover, the Kerr parameter is very dispersive near the SP wavelength, which can be used for a high sensitive biosensor.
研究了Au/Fe/Au表面等离子体(SP)光栅的强横向磁光克尔效应(TMOKE)。通过对该结构的优化设计,测量到的Kerr参数为0.03,是平面磁光SP基板上所报道的最大值的3倍。此外,克尔参数在SP波长附近具有很好的色散性,可用于高灵敏度的生物传感器。
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引用次数: 1
期刊
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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