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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Micro diffuser-type movement inversion sorter for high-efficient sperm sorting 微型扩散式运动反转分选机,用于高效精子分选
Yu-Nan Lin, Peng-Chun Chen, R. Wu, L. Pan, F. Tseng
In this study, we propose a microfluidic device with a diffuser type chamber to differentiate the sperm velocity by gradually lowering down the flow speed in diffuser by gradually increasing the width of the channel. When the sperms' moving speed match the flow speed, the sperms tend to have the ability to flow against the stream, thus separating the sperms at different specific positions along the diffuser according to their motility becomes gentle and fast. Most of the motile sperm will stay in the expanding area and the non-motile sperms will drift to outlet. Different from the previous study we proposed in IEEE NEMS, 2012 , here we have three improvements: (1) Sperms can be separated in more detailed quality level. (2) Sperm will be more activated by passing through a dumb bell area than by the traditional methods. (3) The space in the device can accumulate large amount of sperms (~millions).
在本研究中,我们提出了一种带有扩散器式腔室的微流体装置,通过逐渐增加通道宽度来降低扩散器内的流速,从而区分精子速度。当精子的运动速度与水流速度相匹配时,精子往往具有逆流的能力,因此沿着扩散器将精子根据其运动性分离在不同的特定位置,变得平缓而快速。大部分活动的精子会留在扩大的区域,而非活动的精子会漂向出口。与之前我们在IEEE NEMS, 2012中提出的研究不同,这里我们有三个改进:(1)精子可以在更详细的质量水平上分离。精子通过哑铃区比传统方法更容易被激活。(3)装置内的空间可积聚大量精子(~数百万)。
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引用次数: 6
Sol-gel fiber-optic absorbance sensor for groundwater contaminants 地下水污染物溶胶-凝胶光纤吸收传感器
G. Slaughter, Y. Xin
An evanescent wave fiber optic sensor for the detection of groundwater contaminants is developed. A 62.5 μm fiber core, 15 mm in length, was chemically etched and coated with 20 μm porous silica medium using sol-gel dip-coating method. This lower-refractive index medium causes the light beam to be transmitted by total reflection and the resulting evanescent wave produces a net flow of energy across the reflecting surface in the surrounding medium where it interacts with the surrounding environment. The power intensity of the solgel modified fiber is measured in the 1540 to 1600 nm spectral range. Various amounts of pure hexane and ethanol were used to examine the response of the sensor. A remarkable influence of the absorption of the evanescent waves in the sol-gel modified fiber for hexane and ethanol was observed.
研制了一种用于地下水污染物检测的倏逝波光纤传感器。采用溶胶-凝胶浸渍法,对长度为15 mm、长度为62.5 μm的光纤芯进行化学蚀刻,并涂覆20 μm多孔二氧化硅介质。这种低折射率介质使光束通过全反射传输,由此产生的倏逝波在与周围环境相互作用的周围介质中产生穿过反射表面的净能量流。在1540 ~ 1600nm光谱范围内测量了溶胶改性光纤的功率强度。使用不同量的纯己烷和乙醇来检测传感器的响应。观察到溶胶-凝胶改性纤维对己烷和乙醇的倏逝波吸收有显著的影响。
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引用次数: 2
A multi-channel test system for calibration of MEMS barometric pressure sensors 用于MEMS气压传感器校准的多通道测试系统
Lou Wenzhong, Ding Xuran, Hong Rongsen
For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.
MEMS传感器具有体积小、功耗低、精度高等优点,在许多领域得到了广泛的应用,特别是在高空气象监测中,将使用带有MEMS气压传感器的无线电探空仪来采集气压数据。因此,如何对此类MEMS传感器进行有效的标定具有重要的价值。本文报道了一种基于创新测试系统的多个MEMS气压传感器同时校准的方法。使用该系统,最多可同时校准8个传感器。利用BMP085对该系统进行了测试,结果表明该系统可靠有效。
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引用次数: 1
SF6 plasma etching and profile evolution of silicon in microplasma reactor 微等离子体反应器中硅的SF6等离子体刻蚀及轮廓演变
Wang Hai, Li Han, Zhou Xuan, Wang Zhan, Wen Li
Microplasma has been applied widely in micro- and nano-device fabrication. The etching performance and profile evolution are crucial for realization of Scanning Plasma Etching (SPE). In this work, silicon etching in SPE with microplasma reactor will be discussed through multi-fluid plasma model integrated with Monte Carlo model. The relationship between etching rate and tip-sample distance is discussed. The evolution of etched silicon profile is also investigated through simulation of feature diameter and etching depth with the time. The result of simulation will provide a foundation for optimization of operative conditions of SPE.
微等离子体在微纳米器件制造中有着广泛的应用。蚀刻性能和轮廓演变是实现扫描等离子体蚀刻(SPE)的关键。本文将多流体等离子体模型与蒙特卡罗模型相结合,讨论微等离子体反应器在SPE中蚀刻硅的过程。讨论了刻蚀速率与尖端样品距离的关系。通过模拟特征直径和刻蚀深度随时间的变化,研究了刻蚀硅轮廓的演变。模拟结果将为优化固相萃取的操作条件提供依据。
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引用次数: 0
Surface property study of different patterning sapphire structures by ICP-RIE ICP-RIE对不同图型蓝宝石结构表面性能的研究
Chun-Ming Chang, M. Shiao, D. Chiang, Mao-Jung Huang, C. Yang, W. Hsueh
In this paper, we demonstrate and compare the formation of ordered etching masks for submicron patterned sapphire through use of the nanosphere lithography and nanoimprint lithography methods. Both NSL and NIL were applied to produce the submicron honeycomb network and cone protrusion array structure on the sapphire surface as etching masks. The sequent ICP-RIE technique was applied to further etch the sapphire under the mask. Two types of submicron pattern were obtained on the substrate surface after the etching processes were completed. One type of substrate was the submicron hole array structure and another type was the cone array structure. The working pressure had a considerable effect on the shape geometry and etching rate. The contact angles of the untreated substrate and two differing patterned sapphire substrates were measured and compared. From the contact angle measurement results, we concluded that the protruded contact area dominated the hydrophobic or hydrophilic property.
在本文中,我们演示并比较了使用纳米球光刻和纳米压印光刻方法形成亚微米图案蓝宝石的有序蚀刻掩模。利用NSL和NIL在蓝宝石表面制备了亚微米蜂窝网络和锥形突出阵列结构作为蚀刻掩模。随后应用ICP-RIE技术在掩膜下进一步蚀刻蓝宝石。蚀刻完成后,在衬底表面得到了两种类型的亚微米图案。一种是亚微米孔阵列结构,另一种是锥阵列结构。工作压力对形状几何和刻蚀速率有较大的影响。测量和比较了未经处理的衬底和两种不同图案的蓝宝石衬底的接触角。从接触角测量结果来看,突出的接触面积决定了材料的疏水性或亲水性。
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引用次数: 0
Analysis of electromechanical interface model for liquid floated micro-gyroscope 液浮式微陀螺仪机电接口模型分析
M. Ren, Xiaowei Liu, Wen Zuo, Z. Mao
This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance of gyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, the model of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error of transfer characteristics.
提出了一种液浮式微陀螺仪的机电界面模型,该模型可以分析陀螺仪的传感电容和电阻。利用电路仿真软件对其影响进行了分析和仿真。分析结果表明,合理的接口电路可以有效地消除这些寄生电容的影响,提高信噪比。为了保证高分辨率,利用ANSOFT软件对液浮微陀螺仪进行了建模。结果显示了传感器的传递特性和传递特性的非线性误差。
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引用次数: 0
Nanotextured chitosan surfaces for studying cell behaviors 纳米壳聚糖表面用于研究细胞行为
Chung-Yao Yang, Chun-Yen Sung, J. Yeh
This paper describes an easy method to fabricate nanoscale features on chitosan membranes from a silicon mold through using a combination of solution casting and etching process. Three different molecular weight chitosan powders were used to evaluate the topography of nanoscale features after molding process. The Young's modulus of three different molecular weight (120, 185 and 250 kDa) are almost the same in air with a value about 6 GPa and in medium with a value about 5 MPa. The size of the nanotexture is 250 nm in width and 200 nm in depth. Human breast cancer cells MCF-7 and HIG-82 fibroblasts were cultured on patterned nanotextured chitosan surfaces and both cells can be patterned on specific regions. The results exhibited the cells preferred to adhere on flat chitosan surfaces than on nanotextured chitosan surfaces. This nanotextured chitosan surfaces could be used for controlling cell development in bio-relevant applications, such biomedical devices, biology and tissue engineering.
本文介绍了一种采用溶液铸造和蚀刻相结合的方法,在硅模上制备壳聚糖膜的纳米级特征。用三种不同分子量的壳聚糖粉末对成型后的形貌进行了表征。三种不同分子量的杨氏模量(120、185和250 kDa)在空气中的杨氏模量约为6 GPa,在介质中的杨氏模量约为5 MPa。纳米织构的宽度为250 nm,深度为200 nm。将人乳腺癌细胞MCF-7和high -82成纤维细胞培养在纳米纹理壳聚糖表面,两种细胞都能在特定区域形成图案。结果表明,细胞更倾向于粘附在平面壳聚糖表面,而不是纳米结构的壳聚糖表面。这种纳米壳聚糖表面可用于生物医学设备、生物学和组织工程等生物相关领域的细胞发育控制。
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引用次数: 1
Monitoring the disease activity via the antibody-antigen recognition in paper 通过纸上抗体-抗原识别监测疾病活动
Hsi-Kai Wang, Cheng-Han Tsai, Chung-Tao Tang, Pi-Chun Li, J. Leou, Yin-Liang Tang, H. Hsieh, Han‐Chung Wu, Chao-Min Cheng
Dengue fever is one of the acute flavivrus-borne infectious diseases caused by dengue virus with four serotypes. To date, there are no efficient diagnostic tools available for monitoring the disease activity of dengue fever. It is needed to develop a diagnostic device with the characteristics of inexpensiveness, ease-to-use and robustness for the detection of dengue fever. In this study, we have developed an ELISA-based diagnostic device prepared via wax printing method through using filter paper. The antigens that we targeted to quantify in the buffer system were both non-structural protein 1 with the detection limit of about 100 pg/mL and envelope protein with the diluted virus culture soup of about 100 times of serotype 2 dengue virus (only 2 μL sample). We believe that this study would provide insight on the development of in-vitro diagnostic devices for dengue fever and various diseases in the different divisions of medicine.
登革热是由登革热病毒引起的急性黄病毒传播传染病之一,有四种血清型。迄今为止,没有有效的诊断工具可用于监测登革热的疾病活动。需要研制一种价格低廉、使用方便、坚固耐用的登革热检测设备。在本研究中,我们开发了一种基于elisa的诊断装置,该装置是通过滤纸通过蜡印法制备的。我们在缓冲系统中定量的抗原为非结构蛋白1(检测限约为100 pg/mL)和包膜蛋白(约为2型登革热病毒的100倍稀释病毒培养汤(仅2 μL样品)。我们相信,这项研究将为登革热和不同医学部门的各种疾病的体外诊断设备的发展提供见解。
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引用次数: 2
Micro/nano structure written via sheath gas assisted EHD jet 通过鞘气辅助EHD射流写入微/纳米结构
Guangqi He, G. Zheng, Jianyi Zheng, Yihong Lin, Jin Wei, Haiyan Liu, Bin Wang, Daoheng Sun
Laminar sheath gas is introduced into the Electrohydrodynamic Direct-Write (EDW) to promote the stability of charged jet and deposition precision of printed micro/nano structure. A novel EDW spinneret with sheath gas is designed to fabricate fine 1D micro/nano structure under lower applied voltage. The laminar sheath gas restricts the whipping motion of charged jet as well as decreases the required voltage. With the help of stretch force stems from sheath gas, the initiation voltage and sustaining voltage of EDW can be decreased obviously; the average diameter of micro/nano structure can be decreased from 21.58μm to 505.58nm. Different patterns can be also obtained by adjusting the moving speed of the collector in a sheath gas cases. Therefore, it can be concluded that provides a unique way for the precision deposition and integration of EDW micro/nano structure with in the micro/nanosystems.
将层流鞘层气体引入电流体直写(EDW)中,提高了带电射流的稳定性和打印微纳结构的沉积精度。设计了一种新型的带护套气的EDW喷丝板,可在较低的施加电压下制备精细的一维微纳结构。层流鞘层气体限制了带电射流的振荡运动,降低了所需电压。利用鞘气产生的拉伸力,可以明显降低电火花放电的起始电压和维持电压;微纳结构的平均直径从21.58μm减小到505.58nm。通过调节集热器在鞘气箱中的移动速度,也可以得到不同的图案。因此,可以得出结论,为微纳米系统中EDW微纳结构的精密沉积和集成提供了一条独特的途径。
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引用次数: 3
Development of a piezoelectric polyvinylidene fluoride polymer-based sensor patch for simultaneous heartbeat and respiration monitoring 基于聚偏氟乙烯聚合物的压电传感器贴片的研制,用于同时监测心跳和呼吸
Yi-Yuan Chiu, Wan-Ying Lin, Hsin-Yao Wang, Song-Bin Huang, Min-Hsien Wu
This study reports a piezoelectric polyvinylidene fluoride (PVDF) polymer-based sensor patch for simultaneous heartbeat and respiration detections. The principle is based on the piezoelectric sensing mechanism to detect the pulsatile vibrations, and periodical deformations on the chest wall of human body during heartbeats and respirations, respectively. In this study, the sensor patch with a structurally curved PVDF film was designed, and fabricated. The role of the curved structure designed to enhance detection signals, and the capability of the sensor to faithfully detect the heartbeats and respirations were experimentally evaluated. Results revealed that the sensor was proved to be able to generate the heartbeat and respiration signals which were in concordance with those based on a commercial electrocardiogram (ECG), and respiratory effort transducer, respectively. As a whole, this study has developed a PVDF-based sensor patch which was capable of monitoring the heartbeats and respirations with high fidelity. Other distinctive features include its small size, light weight, ease of use, low cost, and portability. All these make it a promising sensing device to monitor heartbeats and respirations either in medical centers, or home care units.
本研究报道了一种基于聚偏氟乙烯(PVDF)聚合物的压电传感器贴片,用于同时检测心跳和呼吸。其原理是基于压电传感机构,分别检测心跳和呼吸时人体胸壁的脉动振动和周期性变形。在本研究中,设计并制作了具有结构弯曲的PVDF薄膜的传感器贴片。实验评估了弯曲结构增强检测信号的作用,以及传感器忠实检测心跳和呼吸的能力。结果表明,该传感器能够产生与商用心电图(ECG)和呼吸力传感器一致的心跳和呼吸信号。总的来说,本研究开发了一种基于pvdf的传感器贴片,能够高保真地监测心跳和呼吸。其他独特的特点包括体积小、重量轻、使用方便、成本低和便携性好。所有这些都使它成为一种很有前途的传感设备,可以在医疗中心或家庭护理单位监测心跳和呼吸。
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引用次数: 10
期刊
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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