Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559876
C. Dou, Heng Yang, Y. Wu, X. Li, Y. Wang
This paper reports a transfer process of silicon stress and Pt temperature sensors for versatile requirements. Based on a 3μm thick BCB adhesive layer, a 1.6 mm × 1.6 mm donor chip with stress and temperature sensors, which are fabricated on the silicon-on-insulator wafer using standard MEMS process, is bonded on a target wafer. After the bottom silicon layer and the insulator SiO2 layer of the donor chip are etched by XeF2 gas and RIE technique, only about 0.2μm thick top sensor layer and 0.7μm thick aluminum layer used as conducting wires and pads are transferred onto the target wafer for the measurement of its in-plane stresses. Through the transfer process of stress and temperature sensors, the in-plane stresses of the target wafer caused by the fabrication processes or the package processes can be measured.
本文报道了一种满足多用途要求的硅应力和铂温度传感器的传递过程。在3μm厚的BCB粘接层的基础上，采用标准MEMS工艺在绝缘体硅晶圆上制备了带有应力和温度传感器的1.6 mm × 1.6 mm给体芯片，并将其粘接在目标晶圆上。利用XeF2气体和RIE技术蚀刻给晶片的底部硅层和绝缘子SiO2层后，仅将约0.2μm厚的顶部传感器层和0.7μm厚的用作导线和衬垫的铝层转移到目标晶片上，用于测量其面内应力。通过应力和温度传感器的传递过程，可以测量由制造过程或封装过程引起的目标晶圆的面内应力。
{"title":"A transfer technique of stress sensors for versatile applications","authors":"C. Dou, Heng Yang, Y. Wu, X. Li, Y. Wang","doi":"10.1109/NEMS.2013.6559876","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559876","url":null,"abstract":"This paper reports a transfer process of silicon stress and Pt temperature sensors for versatile requirements. Based on a 3μm thick BCB adhesive layer, a 1.6 mm × 1.6 mm donor chip with stress and temperature sensors, which are fabricated on the silicon-on-insulator wafer using standard MEMS process, is bonded on a target wafer. After the bottom silicon layer and the insulator SiO2 layer of the donor chip are etched by XeF2 gas and RIE technique, only about 0.2μm thick top sensor layer and 0.7μm thick aluminum layer used as conducting wires and pads are transferred onto the target wafer for the measurement of its in-plane stresses. Through the transfer process of stress and temperature sensors, the in-plane stresses of the target wafer caused by the fabrication processes or the package processes can be measured.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122127871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559730
Ming-Zhi Yang, C. Dai
The ammonia microsensor is fabricated by the 0.35 μm complementary metal oxide semiconductor (CMOS) process. The sensor is composed of a sensitive film and polysilicon electrodes. Area of the ammonia microsensor is about 1 mm2. The sensitive film of the ammonia microsensor is zinc oxide prepared by hydrothermal method. The sensor requires a wet etching process to remove the sacrificial oxide layer and coats the zinc oxide sensitive film on the polysilicon electrodes after the CMOS process. The ammonia microsensor is resistive type. When the sensitive film absorbs or desorbs ammonia gas at room temperature, the sensitive film generates a change in resistance. Experimental results present that the sensitivity of the ammonia microsensor is about 12.6 Ω/ppm at room temperature.
{"title":"Fabrication of an ammonia microsensor based on zinc oxide","authors":"Ming-Zhi Yang, C. Dai","doi":"10.1109/NEMS.2013.6559730","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559730","url":null,"abstract":"The ammonia microsensor is fabricated by the 0.35 μm complementary metal oxide semiconductor (CMOS) process. The sensor is composed of a sensitive film and polysilicon electrodes. Area of the ammonia microsensor is about 1 mm2. The sensitive film of the ammonia microsensor is zinc oxide prepared by hydrothermal method. The sensor requires a wet etching process to remove the sacrificial oxide layer and coats the zinc oxide sensitive film on the polysilicon electrodes after the CMOS process. The ammonia microsensor is resistive type. When the sensitive film absorbs or desorbs ammonia gas at room temperature, the sensitive film generates a change in resistance. Experimental results present that the sensitivity of the ammonia microsensor is about 12.6 Ω/ppm at room temperature.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125773444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559813
L. Xuan, H. Dong, C. Zhuo
We have designed four sets of multi-layer nested magnetic shields. External diameters for the individual shielding layers range from 3.3 cm to 5.3 cm. The four sets of magnetic shields are tested by fluxgate magnetometer separately. The result of experiment is in excellent agreement with theoretical calculations. The four sets of multi-layer compact magnetic shields made of high-permeability material are compared. The largest shielding factor measured was 32.3 dB for a nested set of three cylinders (Set 2). The nested two spheres structure (Set 4) has the largest uniform region (12 mm). The nested one shell of sphere and one cylinder shell (Set 3) achieve the best trade-off between uniform region and shielding factor.
{"title":"Compact multi-layer magnetic shields for chip-scale atomic devices","authors":"L. Xuan, H. Dong, C. Zhuo","doi":"10.1109/NEMS.2013.6559813","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559813","url":null,"abstract":"We have designed four sets of multi-layer nested magnetic shields. External diameters for the individual shielding layers range from 3.3 cm to 5.3 cm. The four sets of magnetic shields are tested by fluxgate magnetometer separately. The result of experiment is in excellent agreement with theoretical calculations. The four sets of multi-layer compact magnetic shields made of high-permeability material are compared. The largest shielding factor measured was 32.3 dB for a nested set of three cylinders (Set 2). The nested two spheres structure (Set 4) has the largest uniform region (12 mm). The nested one shell of sphere and one cylinder shell (Set 3) achieve the best trade-off between uniform region and shielding factor.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124696777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559685
Chen-Shiun Chou, Yung-Chen Wu, Che-Hsin Lin
This paper presents a novel ultraviolet (UV) irradiation assisted nanostructured ZnO film for high performance oxygen sensing under a low working temperature. The UV irradiation greatly increases the number of the excited electrons to attract the high electron negativity molecule of oxygen. The response for detecting the oxidation gases can be achieved without using the high catalytic temperature. Nanorod ZnO structures with high exposing area are synthesized on a glass substrate with interdigital sensing electrodes utilizing the developed two-stage sol-gel and hydrothermal processes. An 80 mW LED with the emission wavelength of 370 nm is then used to enhance the sensing performance of the nanostructured ZnO film. Results indicate that the sensing performance of the nano ZnO oxygen sensor is greatly improved. The oxygen sensor can work at a low temperature of 50°C with the assist of UV exposure, which is much lower than the working temperature of typical solid state metal oxide sensors of around 350°C. The response of the UV-assisted ZnO film shows 4.66 times larger than the same film without UV exposure. The method developed in the present study provides a simple yet high performance method for oxygen sensing under low operation temperature.
{"title":"High performance oxygen sensor utilizing ultraviolet irradiation assisted ZnO nanorods under low operation temperature","authors":"Chen-Shiun Chou, Yung-Chen Wu, Che-Hsin Lin","doi":"10.1109/NEMS.2013.6559685","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559685","url":null,"abstract":"This paper presents a novel ultraviolet (UV) irradiation assisted nanostructured ZnO film for high performance oxygen sensing under a low working temperature. The UV irradiation greatly increases the number of the excited electrons to attract the high electron negativity molecule of oxygen. The response for detecting the oxidation gases can be achieved without using the high catalytic temperature. Nanorod ZnO structures with high exposing area are synthesized on a glass substrate with interdigital sensing electrodes utilizing the developed two-stage sol-gel and hydrothermal processes. An 80 mW LED with the emission wavelength of 370 nm is then used to enhance the sensing performance of the nanostructured ZnO film. Results indicate that the sensing performance of the nano ZnO oxygen sensor is greatly improved. The oxygen sensor can work at a low temperature of 50°C with the assist of UV exposure, which is much lower than the working temperature of typical solid state metal oxide sensors of around 350°C. The response of the UV-assisted ZnO film shows 4.66 times larger than the same film without UV exposure. The method developed in the present study provides a simple yet high performance method for oxygen sensing under low operation temperature.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128190295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559798
D. Cui, C. Xue, Chao Liu, Liping Wei, Yonghua Wang, Jun Liu
In the paper, Coupled-resonator-induced-transparency (CRIT) phenomenon in a novel integrated on-chip optical resonator system is experimentally demonstrated. The system is composed of a four-ring resonator with 20 μm diameter on silicon, whose spectrum has a narrow transparency peak with low group velocity. The CRIT effect is observed in the optical coupled-resonator due to the classical destructive interference. This system can be used to study the slow and fast light experiments because of its simplicity and flexibility. In this work, a CRIT resonance with a quality factor of 7.2×104 is demonstrated with the same cavity size and the power coupling of the system is 60%, which agree well with the theoretical analysis. The through and drop transmission spectra of the resonator are coincided well with each other.
{"title":"Induced-transparency in silicon-on-insulator based novel resonator systems","authors":"D. Cui, C. Xue, Chao Liu, Liping Wei, Yonghua Wang, Jun Liu","doi":"10.1109/NEMS.2013.6559798","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559798","url":null,"abstract":"In the paper, Coupled-resonator-induced-transparency (CRIT) phenomenon in a novel integrated on-chip optical resonator system is experimentally demonstrated. The system is composed of a four-ring resonator with 20 μm diameter on silicon, whose spectrum has a narrow transparency peak with low group velocity. The CRIT effect is observed in the optical coupled-resonator due to the classical destructive interference. This system can be used to study the slow and fast light experiments because of its simplicity and flexibility. In this work, a CRIT resonance with a quality factor of 7.2×104 is demonstrated with the same cavity size and the power coupling of the system is 60%, which agree well with the theoretical analysis. The through and drop transmission spectra of the resonator are coincided well with each other.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127525972","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559888
Jing Ji, K. Yin, Litao Sun
Here we introduce a facile hydrothermal synthesis for the controllable growth of cobalt oxide (Co3O4) nanoparticles onto graphene nanostructures. The Co3O4 particles were monodispersive with a grain size less than 10 nm and homogeneously anchored on graphene sheets. The effects of oxidants, reaction temperatures, and reaction times on the microstructures of final products were investigated, respectively. The obtained material was characterized by transmission electron microscopy (TEM) and high-resolution TEM (HRTEM).
{"title":"Controllable preparation and characterization of graphene-based cobalt oxide nanocomposites","authors":"Jing Ji, K. Yin, Litao Sun","doi":"10.1109/NEMS.2013.6559888","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559888","url":null,"abstract":"Here we introduce a facile hydrothermal synthesis for the controllable growth of cobalt oxide (Co3O4) nanoparticles onto graphene nanostructures. The Co3O4 particles were monodispersive with a grain size less than 10 nm and homogeneously anchored on graphene sheets. The effects of oxidants, reaction temperatures, and reaction times on the microstructures of final products were investigated, respectively. The obtained material was characterized by transmission electron microscopy (TEM) and high-resolution TEM (HRTEM).","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129992788","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559702
A. Isozaki, T. Kan, Kiyoshi Matsumoto, I. Shimoyama
We propose a measurement method of light transmittance of metamaterials by directly contacting the metamaterial on a Si photodiode. Our measurement method enables direct detection of not only the propagation wave component but also the evanescent wave component through the metamaterial. In this paper, we fabricated a layered metal-dielectric metamaterial composed of Ag/Al2O3 layers on the Si photodiode. The transmittance property of evanescent wave was measured. This result indicates that our measurement system detects evanescent wave transferred through the fabricated metamaterial.
{"title":"Measurement method of light transmittance of layered metal-dielectric metamaterial","authors":"A. Isozaki, T. Kan, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/NEMS.2013.6559702","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559702","url":null,"abstract":"We propose a measurement method of light transmittance of metamaterials by directly contacting the metamaterial on a Si photodiode. Our measurement method enables direct detection of not only the propagation wave component but also the evanescent wave component through the metamaterial. In this paper, we fabricated a layered metal-dielectric metamaterial composed of Ag/Al2O3 layers on the Si photodiode. The transmittance property of evanescent wave was measured. This result indicates that our measurement system detects evanescent wave transferred through the fabricated metamaterial.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130176091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559771
Ting Wu, Jingquan Liu, Shui-Dong Jiang, Bin Xu, Bin Yang, Hongying Zhu, Chunsheng Yang
NiCr (80/20 at.%) thin films were deposited on SiO2/Si substrates as a cryonetic heater by DC magnetron sputtering technique. After a series of annealing treatments under various conditions, the electrical properties and microstructure of the films were investigated. The crystallinity and composition of the films were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The films are changed from crystalline to amorphous phase after annealing at 250°C in nitrogen ambient and the annealing conditions have a significant effect on the resistivity and temperature coefficient of resistance (TCR) of the films. TCR of the samples annealed at 250°C for 9 minutes in N2 shows 9.23 ppm/K at 20K which is finally confirmed as the optimal result.
{"title":"Electrical properties of micro-heaters using sputtered NiCr thin film","authors":"Ting Wu, Jingquan Liu, Shui-Dong Jiang, Bin Xu, Bin Yang, Hongying Zhu, Chunsheng Yang","doi":"10.1109/NEMS.2013.6559771","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559771","url":null,"abstract":"NiCr (80/20 at.%) thin films were deposited on SiO2/Si substrates as a cryonetic heater by DC magnetron sputtering technique. After a series of annealing treatments under various conditions, the electrical properties and microstructure of the films were investigated. The crystallinity and composition of the films were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The films are changed from crystalline to amorphous phase after annealing at 250°C in nitrogen ambient and the annealing conditions have a significant effect on the resistivity and temperature coefficient of resistance (TCR) of the films. TCR of the samples annealed at 250°C for 9 minutes in N2 shows 9.23 ppm/K at 20K which is finally confirmed as the optimal result.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129112625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559699
Liguo Chen, Hai-hang Cui, Shaoqian Li
In microfluidic field, how to capture, manipulate and separate micro-particles suspended in liquid media has very important applications. Up to now, only seldom works focused on how to trap two particles with different sizes. In order to achieve this goal, a dielectrophoretic microfluidic chip was designed. The shape of electrode and flow channel was optimized; the electric field and the flow field were simulated. At last, the chip was fabricated to verify the design. The results show that the chip is able to realize the function of pairing two particles with different sizes.
{"title":"Study on trapping two particles with dielectrophoretic microfluidic chip","authors":"Liguo Chen, Hai-hang Cui, Shaoqian Li","doi":"10.1109/NEMS.2013.6559699","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559699","url":null,"abstract":"In microfluidic field, how to capture, manipulate and separate micro-particles suspended in liquid media has very important applications. Up to now, only seldom works focused on how to trap two particles with different sizes. In order to achieve this goal, a dielectrophoretic microfluidic chip was designed. The shape of electrode and flow channel was optimized; the electric field and the flow field were simulated. At last, the chip was fabricated to verify the design. The results show that the chip is able to realize the function of pairing two particles with different sizes.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128894929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559955
Wenbin Li, Cheng Wang, Wei Zhang, Weixiang Ye, Shun Huang, Zhao Yue, Guohua Liu
We had suggested a novel method for the synthesis of silver nanoparticles by suitable choice of materials and solvents. It was a green, straight forward method in an aqueous medium. Additionally, nontoxic reagents were used in the experiment and the process was environmentally friendly. This green approach needs three reagents (dextran, tollens' reagent, glucose) which come from renewable resources. The effects of the concentration of tollens' reagent on silver nanoparticles formation and storage stability were studied. The silver nanoparticles were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and UV-vis spectroscopy. The results indicated that the reaction parameters significantly affected the size, formation rate and distribution of the silver nanoparticles. This method is simple and economical therefore may be practical for large-scale synthesis.
{"title":"Fabrication of stable silver nanoparticles through a green approach","authors":"Wenbin Li, Cheng Wang, Wei Zhang, Weixiang Ye, Shun Huang, Zhao Yue, Guohua Liu","doi":"10.1109/NEMS.2013.6559955","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559955","url":null,"abstract":"We had suggested a novel method for the synthesis of silver nanoparticles by suitable choice of materials and solvents. It was a green, straight forward method in an aqueous medium. Additionally, nontoxic reagents were used in the experiment and the process was environmentally friendly. This green approach needs three reagents (dextran, tollens' reagent, glucose) which come from renewable resources. The effects of the concentration of tollens' reagent on silver nanoparticles formation and storage stability were studied. The silver nanoparticles were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and UV-vis spectroscopy. The results indicated that the reaction parameters significantly affected the size, formation rate and distribution of the silver nanoparticles. This method is simple and economical therefore may be practical for large-scale synthesis.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130554950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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