Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559772
Shengwei Xu, Nansen Lin, Dalei Wang, Wenjing Yu, W. Shi, Tingjun Jiang, Xinxia Cai
This paper presents a 64-channel Dual Mode Neural Signal Recording System (DMNSRS) for detection of neuroeletrical and neurochemical signals. The DMNSRS comprises neurochemical recording module with current resolution of 1 pA and neuroelectricity recording module with voltage resolution of 0.3 μV. The two modules can work synchronously without mutual interference. In a global cerebral ischemia experiment, using Multi-Electrode Arrays (MEA) as neurobiological electrode and a single-walled carbon nanotube (SWNT)-modified glassy carbon electrode as neurochemical working electrode, the neuroelectrical and neurochemical signals are synchronously recorded by the DMNSRS in the Sprague-Dawley (SD) rat cortex.
{"title":"A Dual Mode Neural Signal Recording System for synchronous neuroeletrical and neurochemical detection","authors":"Shengwei Xu, Nansen Lin, Dalei Wang, Wenjing Yu, W. Shi, Tingjun Jiang, Xinxia Cai","doi":"10.1109/NEMS.2013.6559772","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559772","url":null,"abstract":"This paper presents a 64-channel Dual Mode Neural Signal Recording System (DMNSRS) for detection of neuroeletrical and neurochemical signals. The DMNSRS comprises neurochemical recording module with current resolution of 1 pA and neuroelectricity recording module with voltage resolution of 0.3 μV. The two modules can work synchronously without mutual interference. In a global cerebral ischemia experiment, using Multi-Electrode Arrays (MEA) as neurobiological electrode and a single-walled carbon nanotube (SWNT)-modified glassy carbon electrode as neurochemical working electrode, the neuroelectrical and neurochemical signals are synchronously recorded by the DMNSRS in the Sprague-Dawley (SD) rat cortex.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121599959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559870
Byeungleul Lee, Jinwoo Jeong, Chanseob Cho, Jinseok Kim, Bonghwan Kim, H. Kim, K. Chun
We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the noninvasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the PDMS package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively.
{"title":"Cantilever arrayed blood pressure sensor for arterial applanation tonometry","authors":"Byeungleul Lee, Jinwoo Jeong, Chanseob Cho, Jinseok Kim, Bonghwan Kim, H. Kim, K. Chun","doi":"10.1109/NEMS.2013.6559870","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559870","url":null,"abstract":"We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the noninvasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the PDMS package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122137005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559881
S. Yan, Xiao-Qian Wang, Kezhen Ma, An-fu Zhang, C. Xue, Wendong Zhang
Using CO2 laser metal method process the top of erbium-doped tapered fiber, which formed by stretching a standard optical fiber (SMF-125) while heating it with a hydrogen flame. The top of tapered fiber formed erbium-doped microsphere cavity with higher spherical by its surface tension when heating is stopped. The size of erbium-doped microsphere is 21μm. The position of erbium-doped microsphere is accurately adjusted between the pump power and monochromatic spectrometer so that it can be easily excited by 980 nm and 1480 nm infrared light. Excited erbium ions produce energy level transition and a number of sharp transmission spectrums are observed around the center wavelength of 1550nm. It expanded the spectrum wide and proved the frequency selection role of micro-cavity. Further analysis of the experimental results, we obtained the quality factor Q=4.4×108 through calculating the transmission spectrum which is consistent with the theoretical value largely.
{"title":"Fabrication and analysis optical microsphere cavity based on high Q erbium-doped","authors":"S. Yan, Xiao-Qian Wang, Kezhen Ma, An-fu Zhang, C. Xue, Wendong Zhang","doi":"10.1109/NEMS.2013.6559881","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559881","url":null,"abstract":"Using CO2 laser metal method process the top of erbium-doped tapered fiber, which formed by stretching a standard optical fiber (SMF-125) while heating it with a hydrogen flame. The top of tapered fiber formed erbium-doped microsphere cavity with higher spherical by its surface tension when heating is stopped. The size of erbium-doped microsphere is 21μm. The position of erbium-doped microsphere is accurately adjusted between the pump power and monochromatic spectrometer so that it can be easily excited by 980 nm and 1480 nm infrared light. Excited erbium ions produce energy level transition and a number of sharp transmission spectrums are observed around the center wavelength of 1550nm. It expanded the spectrum wide and proved the frequency selection role of micro-cavity. Further analysis of the experimental results, we obtained the quality factor Q=4.4×108 through calculating the transmission spectrum which is consistent with the theoretical value largely.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121413463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559708
Yiqiang Fan, Huawei Li, Ying Yi, I. Foulds
This research presents a novel rapid prototyping method for paper-based flexible microfluidic devices. The microchannels were fabricated using laser ablation on a piece of plastic paper (permanent paper), the dimensions of the microchannels was carefully studied for various laser powers and scanning speeds. After laser ablation of the microchannels on the plastic paper, a transparent poly (methyl methacrylate)(PMMA) film was thermally bonded to the plastic paper to enclose the channels. After connection of tubing, the device was ready to use. An example microfluidic device (droplet generator) was also fabricated using this technique. Due to the flexibility of the fabricated device, this technique can be used to fabricate 3D microfluidic devices. The fabrication process was simple and rapid without any requirement of cleanroom facilities.
{"title":"Low-cost rapid prototyping of flexible plastic paper based microfluidic devices","authors":"Yiqiang Fan, Huawei Li, Ying Yi, I. Foulds","doi":"10.1109/NEMS.2013.6559708","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559708","url":null,"abstract":"This research presents a novel rapid prototyping method for paper-based flexible microfluidic devices. The microchannels were fabricated using laser ablation on a piece of plastic paper (permanent paper), the dimensions of the microchannels was carefully studied for various laser powers and scanning speeds. After laser ablation of the microchannels on the plastic paper, a transparent poly (methyl methacrylate)(PMMA) film was thermally bonded to the plastic paper to enclose the channels. After connection of tubing, the device was ready to use. An example microfluidic device (droplet generator) was also fabricated using this technique. Due to the flexibility of the fabricated device, this technique can be used to fabricate 3D microfluidic devices. The fabrication process was simple and rapid without any requirement of cleanroom facilities.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114080131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559815
C. Zhuo, H. Dong, L. Xuan
To avoid the broadening of Zeeman resonances of the vector atomic magnetometer working in an unshielded environment, the rapid and accurate magnetic compensation is necessary. A three dimensional mini spherical compensating system is presented, which can be used together with a chip-scale atomic magnetometer to realize an ultra-high precision field measurement. Based on the field gradient method, parameters are optimized to obtain a uniformity of 10-3 over the region of one half radius with a good tolerance on dimensional variations. A prototype applied in the single laser beam scheme has been built and the experimental results demonstrate the validity of the design.
{"title":"Three dimensional compensation spherical coils for compact atomic magnetometers","authors":"C. Zhuo, H. Dong, L. Xuan","doi":"10.1109/NEMS.2013.6559815","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559815","url":null,"abstract":"To avoid the broadening of Zeeman resonances of the vector atomic magnetometer working in an unshielded environment, the rapid and accurate magnetic compensation is necessary. A three dimensional mini spherical compensating system is presented, which can be used together with a chip-scale atomic magnetometer to realize an ultra-high precision field measurement. Based on the field gradient method, parameters are optimized to obtain a uniformity of 10-3 over the region of one half radius with a good tolerance on dimensional variations. A prototype applied in the single laser beam scheme has been built and the experimental results demonstrate the validity of the design.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122554468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559893
Jianbin Su, D. Xiao, Xuezhong Wu, Zhihua Chen, Z. Hou
This paper presents the detailed analysis and preliminary design and experiment for close-loop self-compensation of the coupling error for silicon micromachined gyroscope. A closed-loop feedback control technology is adopted, which uses electrostatic force to counteract the change of coupling stiffness. The electrostatic force is generated by the detection variation of coupling error. Comparing with the open-loop detection, the experimental results indicated evidently that the proposed method can effectively decrease the value of the coupling error, increase its stability by 38 times, while the scale factor of the microgyroscope remains unchanged.
{"title":"Close-loop self-compensation of the coupling error for silicon micromachined gyroscope","authors":"Jianbin Su, D. Xiao, Xuezhong Wu, Zhihua Chen, Z. Hou","doi":"10.1109/NEMS.2013.6559893","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559893","url":null,"abstract":"This paper presents the detailed analysis and preliminary design and experiment for close-loop self-compensation of the coupling error for silicon micromachined gyroscope. A closed-loop feedback control technology is adopted, which uses electrostatic force to counteract the change of coupling stiffness. The electrostatic force is generated by the detection variation of coupling error. Comparing with the open-loop detection, the experimental results indicated evidently that the proposed method can effectively decrease the value of the coupling error, increase its stability by 38 times, while the scale factor of the microgyroscope remains unchanged.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"186 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122595910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559869
C. Baek, Litao Yao, S. Seo, Hwa-Min Kim, D. Pyo, Pyo-Hwan Hong, Jung-Hwa Oh, D. Kong, Chanseob Cho, Jong-Hyun Lee, In-Yong Eom, Bonghwan Kim
We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness factor and root mean square roughness ranged from 2.47 to 2.6 and from 0.25 μm to 0.4 μm, respectively. The contact angle of a water droplet on the surface was greater than 150°; moreover, this angle was maintained for over 7 weeks. This observation implies that extremely low wettability is achievable on superhydrophobic surfaces.
{"title":"Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon","authors":"C. Baek, Litao Yao, S. Seo, Hwa-Min Kim, D. Pyo, Pyo-Hwan Hong, Jung-Hwa Oh, D. Kong, Chanseob Cho, Jong-Hyun Lee, In-Yong Eom, Bonghwan Kim","doi":"10.1109/NEMS.2013.6559869","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559869","url":null,"abstract":"We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness factor and root mean square roughness ranged from 2.47 to 2.6 and from 0.25 μm to 0.4 μm, respectively. The contact angle of a water droplet on the surface was greater than 150°; moreover, this angle was maintained for over 7 weeks. This observation implies that extremely low wettability is achievable on superhydrophobic surfaces.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"5 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122601344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559801
S. Lin, C. C. Lin, D. Lin, C. Chuang
Laser additive manufacturing technology is very attractive for industry applications due to the characterizations of rapid manufacture, flexible parameters select, customize, and complex 3D object fabricate. In this article, an EOS M-type direct metal laser sintering (DMLS) system was used to manufacture for customized hip implant with an IPG fiber laser. The part building process takes place inside an enclosed chamber filled with argon gas to minimize oxidation powdered material. We are successful design and producing an implant of imitation bone microstructure in titanium alloy. From the SEM analysis image, an approximately 100% dense surface has be observed. The mainly composition of selective laser additive manufacturing product are acicular structure of alpha-phase titanium. X-ray diffraction patterns also are observed the alpha-phase and beta-phase mixture. This customized hip implant is used to clinical application for replacement the golden retriever's femoral head, and it get good results. Imitation bone structure can promote the biocompatible of titanium material and bone.
{"title":"Laser additive manufacturing technology in titanium 64 implant of microstructure fabrication and analysis","authors":"S. Lin, C. C. Lin, D. Lin, C. Chuang","doi":"10.1109/NEMS.2013.6559801","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559801","url":null,"abstract":"Laser additive manufacturing technology is very attractive for industry applications due to the characterizations of rapid manufacture, flexible parameters select, customize, and complex 3D object fabricate. In this article, an EOS M-type direct metal laser sintering (DMLS) system was used to manufacture for customized hip implant with an IPG fiber laser. The part building process takes place inside an enclosed chamber filled with argon gas to minimize oxidation powdered material. We are successful design and producing an implant of imitation bone microstructure in titanium alloy. From the SEM analysis image, an approximately 100% dense surface has be observed. The mainly composition of selective laser additive manufacturing product are acicular structure of alpha-phase titanium. X-ray diffraction patterns also are observed the alpha-phase and beta-phase mixture. This customized hip implant is used to clinical application for replacement the golden retriever's femoral head, and it get good results. Imitation bone structure can promote the biocompatible of titanium material and bone.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125676412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559823
D. Kumar, Anomitra Banerjee, S. Swaminathan, Mustafa Mahesri
In this paper, we study the Posterior Semicircular Canal of the Peripheral Vestibular system containing moving Otoconia (Calcium Carbonate crystals) which leads to the condition of Benign Paroxysmal Positional Vertigo (BPPV). Using the governing equations of the affected semicircular canal we develop a novel MEMS device to mimic the pathophysiological condition wherein the kinocilia structure is modeled using PZT-2 micro-cantilever placed at various positions in the device to sense the position of the otoconia. The deflection produces a voltage of 0.416 mV indicating the proximity of the particles. Using this information we describe a functional block of this device that aids in treating BPPV via an audio assisted Canalith Repositioning Procedure (CRP).
{"title":"MEMS modeling of the Posterior Semicircular Canal for treating Benign Paroxysmal Positional Vertigo","authors":"D. Kumar, Anomitra Banerjee, S. Swaminathan, Mustafa Mahesri","doi":"10.1109/NEMS.2013.6559823","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559823","url":null,"abstract":"In this paper, we study the Posterior Semicircular Canal of the Peripheral Vestibular system containing moving Otoconia (Calcium Carbonate crystals) which leads to the condition of Benign Paroxysmal Positional Vertigo (BPPV). Using the governing equations of the affected semicircular canal we develop a novel MEMS device to mimic the pathophysiological condition wherein the kinocilia structure is modeled using PZT-2 micro-cantilever placed at various positions in the device to sense the position of the otoconia. The deflection produces a voltage of 0.416 mV indicating the proximity of the particles. Using this information we describe a functional block of this device that aids in treating BPPV via an audio assisted Canalith Repositioning Procedure (CRP).","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"13 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120845048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559833
Liangliang Xu, T. Shi, S. Xi, Hu Long, Shiyuan Liu, Zirong Tang
This paper presents an innovative technique of integrating silica nanowires to photoresist-derived carbon microelectromechanical systems (C-MEMS) on silicon substrate. The silica nanowires were synthesized through thermal treatment in a tube furnace at 1200 °C under a gaseous environment of N2 and H2. The stiff morphology and radicalized distribution around carbon posts of nanowires was observed, which was different from much of the previous studies. High-temperature annealing and meticulous-controlled pyrolying atmosphere could be the causes of the formation of unusual SiO2/C-MEMS integrated structures.
{"title":"Metal-catalyst free integration of SiO2 nanowires into carbon MEMS","authors":"Liangliang Xu, T. Shi, S. Xi, Hu Long, Shiyuan Liu, Zirong Tang","doi":"10.1109/NEMS.2013.6559833","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559833","url":null,"abstract":"This paper presents an innovative technique of integrating silica nanowires to photoresist-derived carbon microelectromechanical systems (C-MEMS) on silicon substrate. The silica nanowires were synthesized through thermal treatment in a tube furnace at 1200 °C under a gaseous environment of N2 and H2. The stiff morphology and radicalized distribution around carbon posts of nanowires was observed, which was different from much of the previous studies. High-temperature annealing and meticulous-controlled pyrolying atmosphere could be the causes of the formation of unusual SiO2/C-MEMS integrated structures.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127837316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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