Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559791
Tina He, R. Yang, S. Rajgopal, S. Bhunia, M. Mehregany, P. Feng
We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateral configuration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature up to T 500oC in ambient air with enhanced control over the distributed electrostatic actuation force, and also enable recovery from stiction at contact. We have experimentally demonstrated multiple switching cycles of these nanomechanical switches with different actuation control schemes, and active release from stiction by exploiting a repulsive mechanism. In combination with modeling of cantilever deflection, the experiments help reveal the coupled electromechanical behavior of the device when making contact during switching operations, and suggest possible correlation between the switch degradation observed over cycles and the elastic deformation of nanocantilevers.
{"title":"Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches","authors":"Tina He, R. Yang, S. Rajgopal, S. Bhunia, M. Mehregany, P. Feng","doi":"10.1109/NEMS.2013.6559791","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559791","url":null,"abstract":"We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateral configuration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature up to T 500oC in ambient air with enhanced control over the distributed electrostatic actuation force, and also enable recovery from stiction at contact. We have experimentally demonstrated multiple switching cycles of these nanomechanical switches with different actuation control schemes, and active release from stiction by exploiting a repulsive mechanism. In combination with modeling of cantilever deflection, the experiments help reveal the coupled electromechanical behavior of the device when making contact during switching operations, and suggest possible correlation between the switch degradation observed over cycles and the elastic deformation of nanocantilevers.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"155 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117212098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559772
Shengwei Xu, Nansen Lin, Dalei Wang, Wenjing Yu, W. Shi, Tingjun Jiang, Xinxia Cai
This paper presents a 64-channel Dual Mode Neural Signal Recording System (DMNSRS) for detection of neuroeletrical and neurochemical signals. The DMNSRS comprises neurochemical recording module with current resolution of 1 pA and neuroelectricity recording module with voltage resolution of 0.3 μV. The two modules can work synchronously without mutual interference. In a global cerebral ischemia experiment, using Multi-Electrode Arrays (MEA) as neurobiological electrode and a single-walled carbon nanotube (SWNT)-modified glassy carbon electrode as neurochemical working electrode, the neuroelectrical and neurochemical signals are synchronously recorded by the DMNSRS in the Sprague-Dawley (SD) rat cortex.
{"title":"A Dual Mode Neural Signal Recording System for synchronous neuroeletrical and neurochemical detection","authors":"Shengwei Xu, Nansen Lin, Dalei Wang, Wenjing Yu, W. Shi, Tingjun Jiang, Xinxia Cai","doi":"10.1109/NEMS.2013.6559772","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559772","url":null,"abstract":"This paper presents a 64-channel Dual Mode Neural Signal Recording System (DMNSRS) for detection of neuroeletrical and neurochemical signals. The DMNSRS comprises neurochemical recording module with current resolution of 1 pA and neuroelectricity recording module with voltage resolution of 0.3 μV. The two modules can work synchronously without mutual interference. In a global cerebral ischemia experiment, using Multi-Electrode Arrays (MEA) as neurobiological electrode and a single-walled carbon nanotube (SWNT)-modified glassy carbon electrode as neurochemical working electrode, the neuroelectrical and neurochemical signals are synchronously recorded by the DMNSRS in the Sprague-Dawley (SD) rat cortex.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121599959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559920
H. Al-Mumen, F. Rao, Lixin Dong, Wen Li
This paper reported a technique for tuning graphene semiconductor properties by introducing nanoholes into single- and few-layer graphene films. A simple nanofabrication technique has been demonstrated for making periodic nanoholes on pristine graphene in a mask-free and time-efficient manner via direct e-beam writing which was done by simply scanning the graphene area that is covered with EBL resist and then etching the scanned area by oxygen plasma. Parameters of e-beam lithography (EBL) (acceleration voltage, beam current, EBL resist thickness, and scanning area) were fine-tuned to optimize the dimensions of the nanomesh. Finally, Graphene field effect transistors were fabricated and characterized experimentally.
{"title":"Tunable graphene nanomesh semiconductor: Design, fabrication, and characterization","authors":"H. Al-Mumen, F. Rao, Lixin Dong, Wen Li","doi":"10.1109/NEMS.2013.6559920","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559920","url":null,"abstract":"This paper reported a technique for tuning graphene semiconductor properties by introducing nanoholes into single- and few-layer graphene films. A simple nanofabrication technique has been demonstrated for making periodic nanoholes on pristine graphene in a mask-free and time-efficient manner via direct e-beam writing which was done by simply scanning the graphene area that is covered with EBL resist and then etching the scanned area by oxygen plasma. Parameters of e-beam lithography (EBL) (acceleration voltage, beam current, EBL resist thickness, and scanning area) were fine-tuned to optimize the dimensions of the nanomesh. Finally, Graphene field effect transistors were fabricated and characterized experimentally.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116135163","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559939
Xiu-Qin Wang, Jianning Ding, N. Yuan, G. Cheng, Yuanyuan Zhu, B. Kan
Nanoscale ZnO/Al2O3 multilayers were prepared on Silicon substrates by atomic layer deposition (ALD) method at 200°C. To understand the size effect of ZnO nanoscale layers on hardness, the mechanical properties of the ZnO/Al2O3 multilayers were investigated using nano-indentation technique. As the bilayer period decreases from 60 to 2 nm, the micro-structures of ZnO layers changed from polycrystalline to amorphous. In the bilayer period interval of 60 to 6 nm, the variation of hardness versus bilayer period is similar to Hall-Patch relation, with maximum hardness and elastic modulus of ~10.69GPa and ~138.1GPa, respectively. However when the bilayer period is smaller than 6 nm, the nanolaminates became softer than the single ZnO film.
{"title":"Mechanical property of nanoscale ZnO/Al2O3 multilayers: An investigation by nano-indentation","authors":"Xiu-Qin Wang, Jianning Ding, N. Yuan, G. Cheng, Yuanyuan Zhu, B. Kan","doi":"10.1109/NEMS.2013.6559939","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559939","url":null,"abstract":"Nanoscale ZnO/Al2O3 multilayers were prepared on Silicon substrates by atomic layer deposition (ALD) method at 200°C. To understand the size effect of ZnO nanoscale layers on hardness, the mechanical properties of the ZnO/Al2O3 multilayers were investigated using nano-indentation technique. As the bilayer period decreases from 60 to 2 nm, the micro-structures of ZnO layers changed from polycrystalline to amorphous. In the bilayer period interval of 60 to 6 nm, the variation of hardness versus bilayer period is similar to Hall-Patch relation, with maximum hardness and elastic modulus of ~10.69GPa and ~138.1GPa, respectively. However when the bilayer period is smaller than 6 nm, the nanolaminates became softer than the single ZnO film.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115553302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559762
R. Yamamoto, K. Sueyoshi, K. Otsuka
Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140oC, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.
{"title":"Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding","authors":"R. Yamamoto, K. Sueyoshi, K. Otsuka","doi":"10.1109/NEMS.2013.6559762","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559762","url":null,"abstract":"Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140<sup>o</sup>C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115182425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559881
S. Yan, Xiao-Qian Wang, Kezhen Ma, An-fu Zhang, C. Xue, Wendong Zhang
Using CO2 laser metal method process the top of erbium-doped tapered fiber, which formed by stretching a standard optical fiber (SMF-125) while heating it with a hydrogen flame. The top of tapered fiber formed erbium-doped microsphere cavity with higher spherical by its surface tension when heating is stopped. The size of erbium-doped microsphere is 21μm. The position of erbium-doped microsphere is accurately adjusted between the pump power and monochromatic spectrometer so that it can be easily excited by 980 nm and 1480 nm infrared light. Excited erbium ions produce energy level transition and a number of sharp transmission spectrums are observed around the center wavelength of 1550nm. It expanded the spectrum wide and proved the frequency selection role of micro-cavity. Further analysis of the experimental results, we obtained the quality factor Q=4.4×108 through calculating the transmission spectrum which is consistent with the theoretical value largely.
{"title":"Fabrication and analysis optical microsphere cavity based on high Q erbium-doped","authors":"S. Yan, Xiao-Qian Wang, Kezhen Ma, An-fu Zhang, C. Xue, Wendong Zhang","doi":"10.1109/NEMS.2013.6559881","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559881","url":null,"abstract":"Using CO2 laser metal method process the top of erbium-doped tapered fiber, which formed by stretching a standard optical fiber (SMF-125) while heating it with a hydrogen flame. The top of tapered fiber formed erbium-doped microsphere cavity with higher spherical by its surface tension when heating is stopped. The size of erbium-doped microsphere is 21μm. The position of erbium-doped microsphere is accurately adjusted between the pump power and monochromatic spectrometer so that it can be easily excited by 980 nm and 1480 nm infrared light. Excited erbium ions produce energy level transition and a number of sharp transmission spectrums are observed around the center wavelength of 1550nm. It expanded the spectrum wide and proved the frequency selection role of micro-cavity. Further analysis of the experimental results, we obtained the quality factor Q=4.4×108 through calculating the transmission spectrum which is consistent with the theoretical value largely.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121413463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559737
Linsen Chen, D. Pu, Jin Hu, Y. Ye, P. Zhu
Micro/nano structures are involved in MEMS/NEMS, SPs sensors, and optical devices with kinetic optical effects, which cannot be mixture fabricated on curved surface by conventional lithography for the frozen processing in the vertical direction. In this letter, a hybrid-lithography system for micro/nano structures is proposed, which mainly consists of a spatial light modulator (SLM), binary phase light modulator (PLM) and UV optical head equipped with position sensor. It is the SLM and PLM as well as auto-optical focusing (AOF) and Z-correction that make micro/nano hybrid fabrication on bended surface available. The proposed system could automatically focus on the photoresist surface with accuracy of 0.3 μm in Z-direction and achieve minimum feature size of 100 nm at 351 nm lithography wavelength. The obtained maximum speed of 2400 mm2/min is the fastest one in the world, when the system flying exposes with 3D navigation under the beam-tiled-flash-patterning (BTFP) scan mode.
{"title":"Hybrid lithography system for MEMS/NEMS","authors":"Linsen Chen, D. Pu, Jin Hu, Y. Ye, P. Zhu","doi":"10.1109/NEMS.2013.6559737","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559737","url":null,"abstract":"Micro/nano structures are involved in MEMS/NEMS, SPs sensors, and optical devices with kinetic optical effects, which cannot be mixture fabricated on curved surface by conventional lithography for the frozen processing in the vertical direction. In this letter, a hybrid-lithography system for micro/nano structures is proposed, which mainly consists of a spatial light modulator (SLM), binary phase light modulator (PLM) and UV optical head equipped with position sensor. It is the SLM and PLM as well as auto-optical focusing (AOF) and Z-correction that make micro/nano hybrid fabrication on bended surface available. The proposed system could automatically focus on the photoresist surface with accuracy of 0.3 μm in Z-direction and achieve minimum feature size of 100 nm at 351 nm lithography wavelength. The obtained maximum speed of 2400 mm2/min is the fastest one in the world, when the system flying exposes with 3D navigation under the beam-tiled-flash-patterning (BTFP) scan mode.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"205 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123258710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559924
Yuxian Liu, Chunhua He, Dachuan Liu, Zhenchuan Yang, G. Yan
A novel digital closed-loop driver is presented for a micromechanical vibratory gyroscope in this paper. Coordinated rotation digital computer algorithm is applied to generate the sine and cosine signals for driving and demodulation processing. Meanwhile, automatic gain control and phase-locked loop are adopted to maintain a constant velocity of the drive mode and guarantee the gyroscope working in the resonant mode. All the control methods are implemented in FPGA device. Experimental results demonstrate that the stability of the amplitude of the drive velocity is about 18ppm, which verifies the effectiveness and accuracy of the digital closed loop for the drive mode. The scale factor, nonlinearity and bias instability of the gyroscope with closed loop controlled sense mode are measured to be 18.5mV/deg/s, 0.088% and 19.4deg/h, respectively.
{"title":"Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm","authors":"Yuxian Liu, Chunhua He, Dachuan Liu, Zhenchuan Yang, G. Yan","doi":"10.1109/NEMS.2013.6559924","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559924","url":null,"abstract":"A novel digital closed-loop driver is presented for a micromechanical vibratory gyroscope in this paper. Coordinated rotation digital computer algorithm is applied to generate the sine and cosine signals for driving and demodulation processing. Meanwhile, automatic gain control and phase-locked loop are adopted to maintain a constant velocity of the drive mode and guarantee the gyroscope working in the resonant mode. All the control methods are implemented in FPGA device. Experimental results demonstrate that the stability of the amplitude of the drive velocity is about 18ppm, which verifies the effectiveness and accuracy of the digital closed loop for the drive mode. The scale factor, nonlinearity and bias instability of the gyroscope with closed loop controlled sense mode are measured to be 18.5mV/deg/s, 0.088% and 19.4deg/h, respectively.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123497054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559823
D. Kumar, Anomitra Banerjee, S. Swaminathan, Mustafa Mahesri
In this paper, we study the Posterior Semicircular Canal of the Peripheral Vestibular system containing moving Otoconia (Calcium Carbonate crystals) which leads to the condition of Benign Paroxysmal Positional Vertigo (BPPV). Using the governing equations of the affected semicircular canal we develop a novel MEMS device to mimic the pathophysiological condition wherein the kinocilia structure is modeled using PZT-2 micro-cantilever placed at various positions in the device to sense the position of the otoconia. The deflection produces a voltage of 0.416 mV indicating the proximity of the particles. Using this information we describe a functional block of this device that aids in treating BPPV via an audio assisted Canalith Repositioning Procedure (CRP).
{"title":"MEMS modeling of the Posterior Semicircular Canal for treating Benign Paroxysmal Positional Vertigo","authors":"D. Kumar, Anomitra Banerjee, S. Swaminathan, Mustafa Mahesri","doi":"10.1109/NEMS.2013.6559823","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559823","url":null,"abstract":"In this paper, we study the Posterior Semicircular Canal of the Peripheral Vestibular system containing moving Otoconia (Calcium Carbonate crystals) which leads to the condition of Benign Paroxysmal Positional Vertigo (BPPV). Using the governing equations of the affected semicircular canal we develop a novel MEMS device to mimic the pathophysiological condition wherein the kinocilia structure is modeled using PZT-2 micro-cantilever placed at various positions in the device to sense the position of the otoconia. The deflection produces a voltage of 0.416 mV indicating the proximity of the particles. Using this information we describe a functional block of this device that aids in treating BPPV via an audio assisted Canalith Repositioning Procedure (CRP).","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"13 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120845048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559804
Yuh-Chung Hu, Cheng-Tao Ho, P. Chang
This paper proposes a flexible proximity sensor fabricated by resembling print screen. The sensor unit is composed of a polyvinylidene fluoride (PVDF) layer sandwiched in between topand bottom-electrode layers which are made of conductive silver ink. The sensing mechanism bases on the pyroelectricity of the PVDF layer. The aforesaid sandwiched sensor units are sprayed simultaneously on a flexible polyimide (PI) substrate layer by layer to form a sensor key-panel. The resembling print screen process is very low-cost. The prototype demonstrates that it is sensitive to human fingers, and therefore one of its applications is becoming for a flexible non-contact proximity key-panel for the user interface of instruments or machines. It may also be applied to proximity sensing or thermal radiation sensing. The proposed flexible proximity key-panel is also suitable for massive roll-to-roll process.
{"title":"Flexible proximity key-panel","authors":"Yuh-Chung Hu, Cheng-Tao Ho, P. Chang","doi":"10.1109/NEMS.2013.6559804","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559804","url":null,"abstract":"This paper proposes a flexible proximity sensor fabricated by resembling print screen. The sensor unit is composed of a polyvinylidene fluoride (PVDF) layer sandwiched in between topand bottom-electrode layers which are made of conductive silver ink. The sensing mechanism bases on the pyroelectricity of the PVDF layer. The aforesaid sandwiched sensor units are sprayed simultaneously on a flexible polyimide (PI) substrate layer by layer to form a sensor key-panel. The resembling print screen process is very low-cost. The prototype demonstrates that it is sensitive to human fingers, and therefore one of its applications is becoming for a flexible non-contact proximity key-panel for the user interface of instruments or machines. It may also be applied to proximity sensing or thermal radiation sensing. The proposed flexible proximity key-panel is also suitable for massive roll-to-roll process.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130409648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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