Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559872
Jun Sun, T. Xu, Feng Xu, Xiao Xie, Litao Sun
Here we show by molecular dynamics that graphene could be utilized as dry adhesive interacting with semiconductor substrates. Various potential semiconductor substrates are introduced and present similar results. This work opens up a new prospect for the applications of graphene and would be valuable for the scientific studies of adhesion at nanoscale.
{"title":"Graphene as dry adhesive interacting with semiconductor substrates","authors":"Jun Sun, T. Xu, Feng Xu, Xiao Xie, Litao Sun","doi":"10.1109/NEMS.2013.6559872","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559872","url":null,"abstract":"Here we show by molecular dynamics that graphene could be utilized as dry adhesive interacting with semiconductor substrates. Various potential semiconductor substrates are introduced and present similar results. This work opens up a new prospect for the applications of graphene and would be valuable for the scientific studies of adhesion at nanoscale.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133684207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559804
Yuh-Chung Hu, Cheng-Tao Ho, P. Chang
This paper proposes a flexible proximity sensor fabricated by resembling print screen. The sensor unit is composed of a polyvinylidene fluoride (PVDF) layer sandwiched in between topand bottom-electrode layers which are made of conductive silver ink. The sensing mechanism bases on the pyroelectricity of the PVDF layer. The aforesaid sandwiched sensor units are sprayed simultaneously on a flexible polyimide (PI) substrate layer by layer to form a sensor key-panel. The resembling print screen process is very low-cost. The prototype demonstrates that it is sensitive to human fingers, and therefore one of its applications is becoming for a flexible non-contact proximity key-panel for the user interface of instruments or machines. It may also be applied to proximity sensing or thermal radiation sensing. The proposed flexible proximity key-panel is also suitable for massive roll-to-roll process.
{"title":"Flexible proximity key-panel","authors":"Yuh-Chung Hu, Cheng-Tao Ho, P. Chang","doi":"10.1109/NEMS.2013.6559804","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559804","url":null,"abstract":"This paper proposes a flexible proximity sensor fabricated by resembling print screen. The sensor unit is composed of a polyvinylidene fluoride (PVDF) layer sandwiched in between topand bottom-electrode layers which are made of conductive silver ink. The sensing mechanism bases on the pyroelectricity of the PVDF layer. The aforesaid sandwiched sensor units are sprayed simultaneously on a flexible polyimide (PI) substrate layer by layer to form a sensor key-panel. The resembling print screen process is very low-cost. The prototype demonstrates that it is sensitive to human fingers, and therefore one of its applications is becoming for a flexible non-contact proximity key-panel for the user interface of instruments or machines. It may also be applied to proximity sensing or thermal radiation sensing. The proposed flexible proximity key-panel is also suitable for massive roll-to-roll process.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130409648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559791
Tina He, R. Yang, S. Rajgopal, S. Bhunia, M. Mehregany, P. Feng
We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateral configuration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature up to T 500oC in ambient air with enhanced control over the distributed electrostatic actuation force, and also enable recovery from stiction at contact. We have experimentally demonstrated multiple switching cycles of these nanomechanical switches with different actuation control schemes, and active release from stiction by exploiting a repulsive mechanism. In combination with modeling of cantilever deflection, the experiments help reveal the coupled electromechanical behavior of the device when making contact during switching operations, and suggest possible correlation between the switch degradation observed over cycles and the elastic deformation of nanocantilevers.
{"title":"Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches","authors":"Tina He, R. Yang, S. Rajgopal, S. Bhunia, M. Mehregany, P. Feng","doi":"10.1109/NEMS.2013.6559791","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559791","url":null,"abstract":"We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateral configuration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature up to T 500oC in ambient air with enhanced control over the distributed electrostatic actuation force, and also enable recovery from stiction at contact. We have experimentally demonstrated multiple switching cycles of these nanomechanical switches with different actuation control schemes, and active release from stiction by exploiting a repulsive mechanism. In combination with modeling of cantilever deflection, the experiments help reveal the coupled electromechanical behavior of the device when making contact during switching operations, and suggest possible correlation between the switch degradation observed over cycles and the elastic deformation of nanocantilevers.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"155 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117212098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559800
Cheng-Yi Lin, Chia-Yun Chen, Y. Hu, Chia-Yuan Chen
A series of cilium-like micro structures with magnetic particles embedded were fabricated for precise flow manipulation through the magnetically driven control. A hydrodynamic analysis was performed to elucidate the underlying interaction between ciliated structures and the induced flow fields. To fabricate ciliated structures, the micromachining method together with a casting process was employed. These ciliated structures were actuated in a homogeneous magnetic field generated by an in-house magnetic coil system for various beating cycles inside a microchannel. Three representative signal waveforms were created to mimic the beating nature of cilia for different flow actuating functions, such as micromixing and micropropulsion. To investigate the flow structures of induced flow fields quantitatively, a numerical modeling method using Fluid-Structure-Interaction module was performed. In addition, a micro-particle image velocimetry (μPIV) experiment was conducted to characterize the nonreciprocal movement of ciliated structures for the quantification of hydrodynamic efficiency. By means of the presented analysis paradigms, a new flow manipulation strategy will be suggested to transport/agitate flows efficiently in microfluidics.
{"title":"Fluid dynamics analysis of magnetically actuated ciliated nano/micro structures for flow mixing and propulsion applications","authors":"Cheng-Yi Lin, Chia-Yun Chen, Y. Hu, Chia-Yuan Chen","doi":"10.1109/NEMS.2013.6559800","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559800","url":null,"abstract":"A series of cilium-like micro structures with magnetic particles embedded were fabricated for precise flow manipulation through the magnetically driven control. A hydrodynamic analysis was performed to elucidate the underlying interaction between ciliated structures and the induced flow fields. To fabricate ciliated structures, the micromachining method together with a casting process was employed. These ciliated structures were actuated in a homogeneous magnetic field generated by an in-house magnetic coil system for various beating cycles inside a microchannel. Three representative signal waveforms were created to mimic the beating nature of cilia for different flow actuating functions, such as micromixing and micropropulsion. To investigate the flow structures of induced flow fields quantitatively, a numerical modeling method using Fluid-Structure-Interaction module was performed. In addition, a micro-particle image velocimetry (μPIV) experiment was conducted to characterize the nonreciprocal movement of ciliated structures for the quantification of hydrodynamic efficiency. By means of the presented analysis paradigms, a new flow manipulation strategy will be suggested to transport/agitate flows efficiently in microfluidics.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117253470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559851
Miao Yu, T. Giffney, K. Aw, Haixia Zhang
Lead zirconate titanate(PZT) due to its large polarization, large dielectric constant and good piezoelectric performance has become popular in a wide range of applications in MEMS field. The prevailing technique for PZT deposition is sol-gel method, but the stability of solution and repeated coating can't be precisely controlled. Sputtering technique is used in this work for its relatively simple fabrication process, uniform thickness. In this work, PZT films are sputtered on Pt/Ti/SiO2/Si substrate prior to annealing. PZT preferential orientation is highly depend on the sputtering parameters. X-ray diffraction(XRD) analysis has been performed to compare the crystal growth. TiO2 seed layer is also introduced in this work.
{"title":"Effect of RF sputtering parameters on PZT crystal growth","authors":"Miao Yu, T. Giffney, K. Aw, Haixia Zhang","doi":"10.1109/NEMS.2013.6559851","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559851","url":null,"abstract":"Lead zirconate titanate(PZT) due to its large polarization, large dielectric constant and good piezoelectric performance has become popular in a wide range of applications in MEMS field. The prevailing technique for PZT deposition is sol-gel method, but the stability of solution and repeated coating can't be precisely controlled. Sputtering technique is used in this work for its relatively simple fabrication process, uniform thickness. In this work, PZT films are sputtered on Pt/Ti/SiO2/Si substrate prior to annealing. PZT preferential orientation is highly depend on the sputtering parameters. X-ray diffraction(XRD) analysis has been performed to compare the crystal growth. TiO2 seed layer is also introduced in this work.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134345879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559863
Cheng-Yeh Huang, M. Chiang, S. Fan, A. Ghaemmaghami, W. Hsu
We report a label-free separation and sorting approach based on electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP) to manipulate human monocyte (THP-1) and T-cell (Jurkat) lines in droplets without any impact on cell viability. In addition to separating cells, this device provides a platform to study cell-cell interactions and migration before the separation.
{"title":"Label-free separation and sorting of human monocytes and T-cells by electrowetting and dielectrophoresis","authors":"Cheng-Yeh Huang, M. Chiang, S. Fan, A. Ghaemmaghami, W. Hsu","doi":"10.1109/NEMS.2013.6559863","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559863","url":null,"abstract":"We report a label-free separation and sorting approach based on electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP) to manipulate human monocyte (THP-1) and T-cell (Jurkat) lines in droplets without any impact on cell viability. In addition to separating cells, this device provides a platform to study cell-cell interactions and migration before the separation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134506805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559812
K. Aw, Siva V. Praneeth
This research aims as a proof of concept for a vibration energy harvester using human motion as the energy source. Human motion consists of burst of low frequency vibrational kinetic energy. The high acceleration burst is usually 1. 5 to 2 g when the foot strikes the ground and an ionic polymer metallic composite (IPMC) can be used to harvest this energy via two methods. The first method is via the bending of the IPMC causing the mobile cations to move and produces an output voltage pulse, hence capacitive transduction. Secondly, the IPMC in a beam form that resonate at the low vibration frequency due to its relatively low Young's modulus can scavenge additional secondary energy via external electromagnetic transduction to supplement the primary harvested energy via the IPMC capacitive transduction.
{"title":"Low frequency vibration energy harvesting from human motion using IPMC cantilever with electromagnectic transduction","authors":"K. Aw, Siva V. Praneeth","doi":"10.1109/NEMS.2013.6559812","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559812","url":null,"abstract":"This research aims as a proof of concept for a vibration energy harvester using human motion as the energy source. Human motion consists of burst of low frequency vibrational kinetic energy. The high acceleration burst is usually 1. 5 to 2 g when the foot strikes the ground and an ionic polymer metallic composite (IPMC) can be used to harvest this energy via two methods. The first method is via the bending of the IPMC causing the mobile cations to move and produces an output voltage pulse, hence capacitive transduction. Secondly, the IPMC in a beam form that resonate at the low vibration frequency due to its relatively low Young's modulus can scavenge additional secondary energy via external electromagnetic transduction to supplement the primary harvested energy via the IPMC capacitive transduction.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125632424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559907
C. Chung, C. Yang, M. Liao, S. Li
In this paper, effects of potential and output mode on copper nanowire arrays via porous anodic aluminum oxide template by electrochemical deposition method have been investigated. The copper nanowire arrays were fabricated using electrochemical deposition in 0.2 M CuSO4 by different potential modes including direct current (DC) and pulse. The nanostructure, morphology, chemical composition and phase of copper nanowire arrays were examined by scanning electron microscopy and grazing incidence X-ray diffraction. The results indicated that the copper nanowire arrays deposited by pulse mode revealed high aspect ratio despite high potential while that at higher DC potential was rather short due to the hydrogen generation in reduction reaction. The short duty cycle of 50% in pulse deposition can release the produced hydrogen for good nanowires formation.
本文采用电化学沉积方法，研究了电位和输出模式对多孔阳极氧化铝模板上铜纳米线阵列的影响。以0.2 M CuSO4为基体，采用直流和脉冲两种电位模式制备了铜纳米线阵列。采用扫描电镜和掠入射x射线衍射对铜纳米线阵列的纳米结构、形貌、化学成分和物相进行了表征。结果表明，脉冲方式沉积的铜纳米线阵列在高电位下呈现出较高的纵横比，而在高直流电位下，由于还原反应产生氢，纵横比较短。脉冲沉积的占空比较短，为50%，可以释放产生的氢，形成良好的纳米线。
{"title":"Fabrication of copper nanowires by eelectrodeposition uusing anodic aluminum oxide template","authors":"C. Chung, C. Yang, M. Liao, S. Li","doi":"10.1109/NEMS.2013.6559907","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559907","url":null,"abstract":"In this paper, effects of potential and output mode on copper nanowire arrays via porous anodic aluminum oxide template by electrochemical deposition method have been investigated. The copper nanowire arrays were fabricated using electrochemical deposition in 0.2 M CuSO4 by different potential modes including direct current (DC) and pulse. The nanostructure, morphology, chemical composition and phase of copper nanowire arrays were examined by scanning electron microscopy and grazing incidence X-ray diffraction. The results indicated that the copper nanowire arrays deposited by pulse mode revealed high aspect ratio despite high potential while that at higher DC potential was rather short due to the hydrogen generation in reduction reaction. The short duty cycle of 50% in pulse deposition can release the produced hydrogen for good nanowires formation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"174 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133868468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559916
M. T. Stamm, Andrew S. Trickey-Glassman, Linan Jiang, Y. Zohar
Receptor-ligand binding has been one of the more popular approaches to specifically targeting tumor cells. In this work, targeting efficiency was quantitatively characterized using silica particles functionalized with EpCAM antibodies and EpCAM-expressing BT-20 breast cancer cells. The effects of incubation time and particle concentration on the number of functionalized particles bound to target cells were experimentally investigated. The number of bound particles was found to increase with particle concentration, but not necessarily with incubation time. While particle desorption and cellular loss of binding affinity in time seem to be negligible, cell-particle-cell interaction was identified as the limiting mechanism for the number of particles bound to target cells. The current findings suggest that separation of a bound particle from a cell may be detrimental to cellular binding affinity.
{"title":"Quantitative characterization of specific targeting of tumor cells by antibody-functionalized particles","authors":"M. T. Stamm, Andrew S. Trickey-Glassman, Linan Jiang, Y. Zohar","doi":"10.1109/NEMS.2013.6559916","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559916","url":null,"abstract":"Receptor-ligand binding has been one of the more popular approaches to specifically targeting tumor cells. In this work, targeting efficiency was quantitatively characterized using silica particles functionalized with EpCAM antibodies and EpCAM-expressing BT-20 breast cancer cells. The effects of incubation time and particle concentration on the number of functionalized particles bound to target cells were experimentally investigated. The number of bound particles was found to increase with particle concentration, but not necessarily with incubation time. While particle desorption and cellular loss of binding affinity in time seem to be negligible, cell-particle-cell interaction was identified as the limiting mechanism for the number of particles bound to target cells. The current findings suggest that separation of a bound particle from a cell may be detrimental to cellular binding affinity.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122706000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-07DOI: 10.1109/NEMS.2013.6559918
L. Jacot-Descombes, M. Gullo, V. Cadarso, M. Mastrangeli, J. Brugger
The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.
{"title":"Polymeric hemispherical pico-liter micro cups fabricated by inkjet printing","authors":"L. Jacot-Descombes, M. Gullo, V. Cadarso, M. Mastrangeli, J. Brugger","doi":"10.1109/NEMS.2013.6559918","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559918","url":null,"abstract":"The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"258 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123967125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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