Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906551
J. Qiu, Jeffrey H. Lang, Alexander H. Slocum
This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally-clamped parallel beams that have a curved shape but no residual stress after fabrication. Modal analysis and FEA simulation of the beams are used to predict and design the bistable behavior, and they agree well. Micro-scale mechanisms are fabricated by DRIE and their test results agree well with the theoretical and numerical predictions.
{"title":"A centrally-clamped parallel-beam bistable MEMS mechanism","authors":"J. Qiu, Jeffrey H. Lang, Alexander H. Slocum","doi":"10.1109/MEMSYS.2001.906551","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906551","url":null,"abstract":"This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally-clamped parallel beams that have a curved shape but no residual stress after fabrication. Modal analysis and FEA simulation of the beams are used to predict and design the bistable behavior, and they agree well. Micro-scale mechanisms are fabricated by DRIE and their test results agree well with the theoretical and numerical predictions.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124887231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906556
C. Ho
Microfluidics is a collection of processes for moving bulk fluid mass or controlling the paths of selected embedded particles, cells or molecules, in flows. Length scale matching between the flow and the device is the key for efficient momentum and energy transfers of the desired fluid motions. MEMS enable us to handle minute amounts of fluid in the nano or pico liter range. With properly designed microfluidic devices, molecules can be directly manipulated by the flow patterns inside the device, which provides a pathway to exploit the nano world. Obviously, understanding of the molecular effects on flows becomes a crucial issue. In traditional fluid dynamics, the flow length scale is much larger than the molecular length scale. Continuum is the most common hypothesis for flow researches. In the case of micro/nano engineering system, we are in the transition regime between continuum and molecule dominated conditions. This feature brings us the challenges when exploring the science and developing the technology in micro/nano fluidics.
{"title":"Fluidics-the link between micro and nano sciences and technologies","authors":"C. Ho","doi":"10.1109/MEMSYS.2001.906556","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906556","url":null,"abstract":"Microfluidics is a collection of processes for moving bulk fluid mass or controlling the paths of selected embedded particles, cells or molecules, in flows. Length scale matching between the flow and the device is the key for efficient momentum and energy transfers of the desired fluid motions. MEMS enable us to handle minute amounts of fluid in the nano or pico liter range. With properly designed microfluidic devices, molecules can be directly manipulated by the flow patterns inside the device, which provides a pathway to exploit the nano world. Obviously, understanding of the molecular effects on flows becomes a crucial issue. In traditional fluid dynamics, the flow length scale is much larger than the molecular length scale. Continuum is the most common hypothesis for flow researches. In the case of micro/nano engineering system, we are in the transition regime between continuum and molecule dominated conditions. This feature brings us the challenges when exploring the science and developing the technology in micro/nano fluidics.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133070176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906567
J. Burger, H. Holland, E. Berenschot, J. Seppenwoolde, M. ter Brake, H. Gardeniers, M. Elwenspoek
This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.
{"title":"169 kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers","authors":"J. Burger, H. Holland, E. Berenschot, J. Seppenwoolde, M. ter Brake, H. Gardeniers, M. Elwenspoek","doi":"10.1109/MEMSYS.2001.906567","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906567","url":null,"abstract":"This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133373591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906542
Y. Yee, J. Bu, Man-Hyo Ha, Junghoon Choi, Hyun-Ah Oh, Sangshin Lee, H. Nam
An actuated micromirror having two-degree of freedom in rotational motion around the orthogonal axes is designed and fabricated. Suspended unimorph PZT actuators independently control the rotation of the micromirror along the two perpendicular axes. The PZT actuators located symmetrically around the axes of the actuation are mechanically isolated with each other during their operation by a gimbaled structure. The mechanical cross talk between each axis of actuation is well suppressed less than 7% due to the gimbals. The rotation angle /spl theta/ of the micromirror reaches 0.75/spl deg/ under the applied bias of 15 V while maintaining the profile of the reflected laser beam without significant degradation.
{"title":"Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics","authors":"Y. Yee, J. Bu, Man-Hyo Ha, Junghoon Choi, Hyun-Ah Oh, Sangshin Lee, H. Nam","doi":"10.1109/MEMSYS.2001.906542","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906542","url":null,"abstract":"An actuated micromirror having two-degree of freedom in rotational motion around the orthogonal axes is designed and fabricated. Suspended unimorph PZT actuators independently control the rotation of the micromirror along the two perpendicular axes. The PZT actuators located symmetrically around the axes of the actuation are mechanically isolated with each other during their operation by a gimbaled structure. The mechanical cross talk between each axis of actuation is well suppressed less than 7% due to the gimbals. The rotation angle /spl theta/ of the micromirror reaches 0.75/spl deg/ under the applied bias of 15 V while maintaining the profile of the reflected laser beam without significant degradation.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132399191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906475
P. Griss, P. Enoksson, G. Stemme
We fabricated and tested two types of microstructures for the mechanical attachment of chips to soft surfaces. The microstructures are barbed spikes etched in silicon using DRIE (Deep Reactive Ion Etching). The mechanical attachment of two types of barbed spike arrays was measured on nonbiological materials (Polyethylene foil, Aluminium foil and Parafilm/sup TM/) as well as on human skin. The maximum adhesion force was 1,36 N achieved by a 2/spl times/2 mm/sup 2/ chip containing 64 barbed spikes pressed in Polyethylene foil. Maximum adhesion in skin was 0,54 N. The shape of the two different barb types has significant influence on the detachment forces for nonbiological materials.
{"title":"Barbed spike arrays for mechanical chip attachment","authors":"P. Griss, P. Enoksson, G. Stemme","doi":"10.1109/MEMSYS.2001.906475","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906475","url":null,"abstract":"We fabricated and tested two types of microstructures for the mechanical attachment of chips to soft surfaces. The microstructures are barbed spikes etched in silicon using DRIE (Deep Reactive Ion Etching). The mechanical attachment of two types of barbed spike arrays was measured on nonbiological materials (Polyethylene foil, Aluminium foil and Parafilm/sup TM/) as well as on human skin. The maximum adhesion force was 1,36 N achieved by a 2/spl times/2 mm/sup 2/ chip containing 64 barbed spikes pressed in Polyethylene foil. Maximum adhesion in skin was 0,54 N. The shape of the two different barb types has significant influence on the detachment forces for nonbiological materials.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130915576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906573
Joon-Ho Kim, Byoung-Gyun Kim, E. Yoon, Chul‐Hi Han
A new micro biosensor has been proposed and fabricated for the measurement of glucose concentration in whole blood. The proposed micro biosensor has been monolithically integrated with enzymatic metal microelectrode array in a micromachined chamber attached to a microsyringe. The fabricated micro biosensor has a high sensitivity of 470 nA/cm/sup 2/.mM for detecting glucose levels in a wide linear range of 0/spl sim/50 mM in potassium phosphate buffer solution (pH7.0).
{"title":"A new monolithic micro biosensor for blood analysis","authors":"Joon-Ho Kim, Byoung-Gyun Kim, E. Yoon, Chul‐Hi Han","doi":"10.1109/MEMSYS.2001.906573","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906573","url":null,"abstract":"A new micro biosensor has been proposed and fabricated for the measurement of glucose concentration in whole blood. The proposed micro biosensor has been monolithically integrated with enzymatic metal microelectrode array in a micromachined chamber attached to a microsyringe. The fabricated micro biosensor has a high sensitivity of 470 nA/cm/sup 2/.mM for detecting glucose levels in a wide linear range of 0/spl sim/50 mM in potassium phosphate buffer solution (pH7.0).","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"225 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130814419","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906469
T. Kawai, K. Sawada, Y. Takeuchi
A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors' super-nano friction free machine.
利用自制的超纳米无摩擦机床，通过机械加工技术，引入了各种高精度的显微组织。
{"title":"Ultra-precision micro structuring by means of mechanical machining","authors":"T. Kawai, K. Sawada, Y. Takeuchi","doi":"10.1109/MEMSYS.2001.906469","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906469","url":null,"abstract":"A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors' super-nano friction free machine.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114606486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906478
H. Takagi, R. Maeda, T. Suga
A room-temperature wafer bonding method between dissimilar materials is developed. 4-inch Si wafers and 3 or 4-inch ceramic wafers are bonded in vacuum after surface sputter etching by Ar beam. Strong bonding equivalent to bulk material is achieved by room-temperature process. The method enables the bonding between dissimilar materials regardless the thermal expansion mismatch and crystal lattice mismatch. In addition, it also realizes very low damage bonding because it does not require any heating process and external load to force two specimens together.
{"title":"Wafer-scale room-temperature bonding between silicon and ceramic wafers by means of argon-beam surface activation","authors":"H. Takagi, R. Maeda, T. Suga","doi":"10.1109/MEMSYS.2001.906478","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906478","url":null,"abstract":"A room-temperature wafer bonding method between dissimilar materials is developed. 4-inch Si wafers and 3 or 4-inch ceramic wafers are bonded in vacuum after surface sputter etching by Ar beam. Strong bonding equivalent to bulk material is achieved by room-temperature process. The method enables the bonding between dissimilar materials regardless the thermal expansion mismatch and crystal lattice mismatch. In addition, it also realizes very low damage bonding because it does not require any heating process and external load to force two specimens together.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"146 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116511765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906578
H. Dirac, P. Gravesen
We here report on the realisation of all liquid optical waveguides (ALOW). To our knowledge this is the first report in the literature on this topic. ALOWs are fluidic structures with waveguiding properties. They are realised in flow channels or tubes under laminar flow conditions, i.e. at moderate Reynolds numbers. The ALOW consists of an annular flow of two liquids, where the centre core liquid has a higher refractive index than the surrounding cladding liquid. The main applications for ALOWs are in optical detection.
{"title":"Realisation and characterisation of all liquid optical waveguides","authors":"H. Dirac, P. Gravesen","doi":"10.1109/MEMSYS.2001.906578","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906578","url":null,"abstract":"We here report on the realisation of all liquid optical waveguides (ALOW). To our knowledge this is the first report in the literature on this topic. ALOWs are fluidic structures with waveguiding properties. They are realised in flow channels or tubes under laminar flow conditions, i.e. at moderate Reynolds numbers. The ALOW consists of an annular flow of two liquids, where the centre core liquid has a higher refractive index than the surrounding cladding liquid. The main applications for ALOWs are in optical detection.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117342897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-01-21DOI: 10.1109/MEMSYS.2001.906561
J. Thaysen, Rodolphe Marie, Anja Boisen
The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (/spl Delta/R/R)=4.6:10/sup -4/ (N/m)/sup -1/ and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.
{"title":"Cantilever-based bio-chemical sensor integrated in a microliquid handling system","authors":"J. Thaysen, Rodolphe Marie, Anja Boisen","doi":"10.1109/MEMSYS.2001.906561","DOIUrl":"https://doi.org/10.1109/MEMSYS.2001.906561","url":null,"abstract":"The cantilevers have integrated piezoresistive readout which, compared to optical readout, enables simple measurements on even non-transparent liquids, such as blood. First, we introduce a simple theory for using piezoresistive cantilevers as surface stress sensors. Then, the sensor fabrication based on conventional microfabrication is described and the sensor characterization is discussed. During the characterization we found a stress sensitivity of (/spl Delta/R/R)=4.6:10/sup -4/ (N/m)/sup -1/ and a minimum detectable surface stress change of 2.6 mN/m. Aqua regia etch of gold on top of the cantilevers has been monitored, and immobilization of single-stranded thiol modified DNA-oligos has been detected by the sensor. Finally, it is demonstrated that it is possible to analyze two samples simultaneously by utilizing the laminar flow in the microliquid handling system.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128168680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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