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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Precision delay matching testing for gate driver ICs on IFLEX™ tester platform 在IFLEX™测试平台上进行栅极驱动ic的精密延迟匹配测试
B. Lai, R. Su
Green energy sources such as solar power, wind, and biomass ... are getting more attention especially after the nuclear crisis caused by earthquake in Mar. 2011 in Japan. The solar power has been considered to be the major contributor of the green energy. There are more than enough solar irradiations available to satisfy the world's energy demands. However the traditional photovoltaic (PV) systems suffer from various power losses, the performance shows average losses of about 20%-30% in electricity production. Some companies provide advance system architectures which can boost solar panel output power by up to 20%-25%. One of a key element of the system is the DC-DC converter [1]. Texas Instruments' high voltage gate driver ICs (HVIC) can be used as a DC-DC converter, half/full bridge applications or class-D audio amplifiers. There are challenges for the HVIC testing. First, the timing measurements for propagation delay matching in both buck and boost which need to be in nanoseconds range but the typical production automatic test equipment (ATE) specification of timing measurement unit (TMU) accuracy is approximate 2 nanoseconds (ns) and meanwhile, the output voltage of gate driver application can exceed 100 volts. Second, test time and multi-site testing have to be considered. In this paper, we have discussed the critical timing measurements and have successfully implemented the multi-site delay matching testing on IFLEXTM ATE platform with 100 picoseconds (ps) resolution while the boost is operating at 120V.
绿色能源,如太阳能、风能和生物质能……尤其在2011年3月日本地震引发的核危机之后,它们得到了越来越多的关注。太阳能一直被认为是绿色能源的主要贡献者。有足够多的太阳辐射可以满足世界的能源需求。而传统的光伏发电系统存在着各种各样的功率损耗,在发电过程中,其性能平均损耗在20%-30%左右。一些公司提供先进的系统架构,可以将太阳能电池板的输出功率提高20%-25%。该系统的关键元件之一是DC-DC变换器[1]。德州仪器的高压栅极驱动ic (HVIC)可以用作DC-DC转换器,半/全桥应用或d类音频放大器。HVIC检测存在挑战。首先,降压和升压传输延迟匹配的定时测量需要在纳秒范围内,但典型的生产自动测试设备(ATE)对定时测量单元(TMU)精度的规格约为2纳秒(ns),同时栅极驱动器应用的输出电压可超过100伏。其次,需要考虑测试时间和多站点测试。在本文中,我们讨论了关键时间测量,并成功地在IFLEXTM ATE平台上实现了100皮秒(ps)分辨率的多站点延迟匹配测试,同时升压工作在120V。
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引用次数: 0
Cu bonding development & challenges on NiPd bond pad 铜键合在NiPd焊盘上的发展及挑战
Y. C. Soh, C. C. Lim, T. Y. Hin, C. S. Teoh
Cu bonding continues to gain its popularity due to cheaper cost & better product performances. However, conventional bond pad structure such as Al, AlCu or AlSiCu pose higher risk of pad crater or lifted metal, as Cu bonded ball is 30% harder than Au bonded ball. Hence, this limits the progress of Cu bonding conversion for <;1μm pad thickness & sensitive BPOA (Bond Pad Over Active) devices. With the plan of speed up Cu bonding conversion, harder bond pad structure that made of NiPd stack was introduced to overcome such risks that encountered on conventional bond pad structure. This paper will discuss the development work to establish 1.0 mils Cu bonding process for NiPd bond pad on QFN package. Feasibility study stage includes NiPd stack plating thickness evaluation; CMP (Chemical Mechanical Polishing) bond pad topography impact on bondability; plasma cleaning evaluation on NiPd pad. Response surface methodology (RSM) was used as design of experiment (DOE) tools to analyze critical bonding characteristics & determine process window through prediction profiler & contour plot. Look Ahead Reliability (LAR) units were built to assess the reliability performances of Cu bonding on NiPd bond pad with standard stress tests such as MSL1, Autoclave, TMCL & HTOL. Zero reliability failure was reported on Cu bonding to NiPd pad upon completion of LAR. However ground bond broken weld was observed at TMCL. Existing ground bond loop distance from die edge was too short, causing steep looping profile & it was broken under thermo-mechanical stress. New design rule for loop distance from die edge will be studied to understand the shortest distance allowable for Cu wire. With all the thorough process assessments & design rule limitation understanding, qualification build could be arranged to qualify NiPd bond pad with Cu bonding. More products would be converted to NiPd bond pad for Cu bonding conversion once the new technology has been qualified.
由于更便宜的成本和更好的产品性能,铜键合继续受到欢迎。然而,传统的键合垫结构如Al、AlCu或AlSiCu,由于Cu键合球的硬度比Au键合球高30%,因此存在较高的垫坑或抬升金属的风险。因此,这限制了< 1μm焊板厚度和敏感BPOA (Bond pad Over Active)器件的Cu键合转换的进展。在加快铜键转换的计划下,引入了由NiPd堆制成的更硬的键垫结构,克服了传统键垫结构遇到的这些风险。本文将讨论建立QFN封装上NiPd键合垫1.0 mils铜键合工艺的开发工作。可行性研究阶段包括NiPd堆镀厚度评估;化学机械抛光(CMP)粘结垫形貌对粘结性的影响NiPd垫的等离子清洗评价。采用响应面法(RSM)作为实验设计(DOE)工具,通过预测剖面仪和等高线图分析键合关键特性并确定工艺窗口。建立了前瞻性可靠性(LAR)单元,通过MSL1、Autoclave、TMCL和HTOL等标准应力测试,评估NiPd键合垫上Cu键合的可靠性性能。据报道,在完成LAR后,铜与NiPd焊盘的粘合可靠性为零。然而,在TMCL上观察到接地键断焊缝。现有接地键环距模具边缘距离过短,导致环形陡,在热机械应力作用下断裂。研究环距模具边缘的新设计规则,以确定铜丝允许的最短距离。通过所有彻底的工艺评估和设计规则限制的理解,可以安排资格构建来对带有Cu键合的NiPd键合垫进行资格认证。一旦新技术合格,将有更多的产品转化为NiPd键垫进行铜键转换。
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引用次数: 0
iNEMI Pb-free alloy characterization project report: Thermal fatigue results for low and no-Ag alloys iNEMI无铅合金表征项目报告:低银和无银合金的热疲劳结果
G. Henshall, K. Sweatman, K. Howell, U. M. de Tino, J. Miremadi, R. Parker, R. Coyle, J. Smetana, J. Nguyen, Weiping Liu, R. Pandher, D. Daily, M. Currie, Tae-Kyu Lee, J. Silk, B. Jones, S. Tisdale, F. Hua, M. Osterman, T. Sack, P. Snugovsky, A. Syed, A. Allen, J. Arnold, D. Moore, G. Chang, E. Benedetto
Significant innovations in Pb-free solder alloy formulations are being driven by volume manufacturing and field experiences. As a result, the industry has seen an increase in the number of Pb-free solder alloy choices beyond the common near-eutectic Sn-Ag-Cu (SAC) alloys first established as replacements for Sn-37Pb. The increasing number of Pb-free alloys provides opportunities to address shortcomings of near-eutectic SAC, such as poor mechanical shock performance, but also introduces a variety of technical and logistical risks. Since 2008, the Pb-Free Alloy Characterization Program sponsored by the International Electronics Manufacturing Initiative (iNEMI) has been working to fill the gap in knowledge associated with thermal fatigue resistance of these new solder alloys. Results from the extensive experimental program are now becoming available and are being published through a series of publications (see References). This paper provides a summary of the overall iNEMI's program goals, the experimental structure, and the results and analysis of thermal cycling for low silver alloys, containing 1 wt.% or less Ag. Results indicated that there is a correlation between the characteristic life of short dwell thermal cycles and Ag content. Increase in the Ag content increased the characteristic life. Another important finding is that all low-and no-Ag alloys performed better than Sn-37Pb under the test conditions. Finally, as the stress levels increase during thermal cycling, the performance differences between the Pb-free alloys diminish, and their performance appears to be approaching that of Sn-37Pb.
大量生产和现场经验推动了无铅焊料合金配方的重大创新。因此,除了最初作为Sn-37Pb替代品的常见近共晶Sn-Ag-Cu (SAC)合金外,该行业的无铅焊料合金选择数量有所增加。越来越多的无铅合金为解决近共晶SAC的缺点(如机械冲击性能差)提供了机会,但也带来了各种技术和物流风险。自2008年以来,由国际电子制造倡议(iNEMI)赞助的无铅合金表征计划一直致力于填补与这些新型焊料合金的热疲劳抵抗性相关的知识空白。广泛的实验计划的结果现在可以获得,并正在通过一系列出版物发表(见参考文献)。本文概述了iNEMI的总体计划目标、实验结构以及含银量小于等于1%的低银合金的热循环结果和分析。结果表明,短停留热循环的特征寿命与银含量之间存在相关性。随着Ag含量的增加,合金的特征寿命增加。另一个重要的发现是,在测试条件下,所有低银和无银合金的性能都优于Sn-37Pb。最后,随着热循环过程中应力水平的增加,无pb合金的性能差异逐渐减小,逐渐接近Sn-37Pb合金的性能。
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引用次数: 3
Material characterisation of high thermally conductive die attach pastes for high power applications 用于大功率应用的高导热贴片浆料的材料特性
E. Chung, E. Erfe
For most high-power semiconductor device, the predominant heat dissipation path is through the die attach material. Hence, die attach material must possess excellent conductivity, both thermally and also electrically. Metal based solder alloys such as AuSi and AuSn possess these desired properties, but are relatively more expensive as compared to organic-based adhesives filled with conductive metals such as silver or other metal alloy. This paper discusses the various methodologies used during the material selection of high thermally conductive die attach dispense adhesives intended for power applications, focusing on Ag-filled and mixed-metal alloy adhesives. Carsem's own materials lab was utilized to perform thermal analyses, viscosity and electrical testing on different die attach dispense adhesives. After material characterisation, process characterisation was carried out in order to determine their dispensability and manufacturability. Candidate materials which exhibited good electrical and process characteristics were shortlisted for further evaluation in actual assembly. Finally, reliability testing was performed in order to assess the package reliability.
对于大多数高功率半导体器件,主要的散热途径是通过贴片材料。因此,贴片材料必须具有优异的导热性和导电性。金属基焊料合金(如AuSi和AuSn)具有这些期望的性能,但与填充导电金属(如银或其他金属合金)的有机基粘合剂相比,它们相对更昂贵。本文讨论了用于电力应用的高导热模贴点胶材料选择过程中使用的各种方法,重点是ag填充和混合金属合金粘合剂。Carsem自己的材料实验室被用来对不同的模贴点胶进行热分析、粘度和电气测试。在材料表征后,进行工艺表征,以确定其可有可无和可制造性。表现出良好的电气和工艺特性的候选材料被列入名单,以便在实际组装中进一步评估。最后进行了可靠性测试,以评估封装的可靠性。
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引用次数: 1
Low COO PVD solutions addressing 2.5D and 3D TSV packaging challenges 低COO PVD解决方案解决2.5D和3D TSV封装挑战
H. Auer, H. Hirscher, P. Desjardins, J. Weichart
As with any emerging technology, 2.5D and 3D IC TSV packaging integration brings new challenges. Amongst others, we will review thin wafer handling, organic passivation outgassing control, glue layers critical thermal management and TSV high aspect ratio barrier and seed layers deposition. We will then demonstrate how Oerlikon's PVD technology has managed to address each of these issues with manufacturing low COO solutions.
与任何新兴技术一样,2.5D和3D IC TSV封装集成带来了新的挑战。其中,我们将回顾薄晶圆处理,有机钝化除气控制,胶层临界热管理和TSV高宽高比屏障和种子层沉积。然后,我们将展示欧瑞康的PVD技术如何通过制造低COO解决方案来解决这些问题。
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引用次数: 2
Effect of die attach adhesive defects on the junction temperature uniformity of LED chips 晶片附著胶缺陷对LED晶片结温均匀性的影响
Mian Tao, S. Lee, M. Yuen, Guoqi Zhang, W. V. van Driel
In the literature, the junction temperature of a light-emitting diode (LED) has been considered having a uniform distribution over the whole chip. Such a perception is based on the assumption that the die attach adhesive (DAA) covers the whole bottom of the LED chip with a uniform thickness. However, in reality, there may be insufficient DAA during the chip mounting process. As a result, non-uniform junction temperature may be induced and hot spots could occur. Therefore, it is essential to investigate the effect of DAA on the creation of hot spots at the LED junction. In the present study, LED chips were mounted with various amounts of DAA on a leadframe designed for high power LED. A high resolution infra-red (IR) camera was used to measure the temperature on the surface of the LED chip. The obtained IR images were calibrated carefully in order to eliminate the influence from IR emissivity. Hot spots were observed at the junction areas where DAA was missing. Detailed analysis for illustrating the effect of DAA distribution on hot spots is presented and reasons for such a phenomenon are discussed.
在文献中,发光二极管(LED)的结温被认为在整个芯片上具有均匀分布。这种看法是基于这样一个假设,即贴片胶(DAA)以均匀的厚度覆盖LED芯片的整个底部。然而,在现实中,在芯片安装过程中可能存在DAA不足的情况。结果可能导致结温不均匀,产生热点。因此,有必要研究DAA对LED结处热点产生的影响。在本研究中,LED芯片与不同数量的DAA安装在为大功率LED设计的引线框架上。采用高分辨率红外摄像机对LED芯片表面温度进行测量。为了消除红外发射率的影响,对得到的红外图像进行了仔细的校正。在DAA缺失的交界处观察到热点。详细分析了DAA分布对热点的影响,并讨论了产生这种现象的原因。
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引用次数: 8
Characterization on ultra low loop Cu wire property and behavior 超低环路铜丝性能与行为的表征
M.N.M. Ching, L. Ying
The heat affected zone (HAZ) is the major concern during wire loop formation. Wire looping is a process that involves machine mechanical movement as well as wire physical bending. Commonly, in order to avoid failure caused by mechanical stresses, most of the wire loop process setup will tend to avoid the HAZ. There are several factors contributing towards the length of HAZ. A study done by Sun et. al. explains that the increase of electron flame off (EFO) time is proportional towards the increase of HAZ length. Ultra low loop introduced an extreme bending process on top of the copper ball bond at the HAZ area. Wire necking or fracture is the major concern due to the effect of folding, bending and compression of the wire. The main focus of this paper will discuss on the detail and thorough characterization of ultra low loop, as low as 40-50um height in 22um copper wire in terms of process capability & robustness, material property & behavior (e.g.: grain structure) as well as the mechanical property (e.g.: hardness & strength). Common analytical method and material preparation setup error will be discussed and explained to understand the reasons behind in the data variations obtained.
热影响区(HAZ)是线圈形成过程中主要关注的问题。线材绕圈是一个涉及机器机械运动和线材物理弯曲的过程。通常,为了避免机械应力引起的失效,大多数钢丝环工艺设置将倾向于避免热影响区。影响热影响区长度的因素有很多。Sun等人的研究表明,电子火焰熄灭(EFO)时间的增加与热影响区长度的增加成正比。超低环在HAZ区域的铜球键的顶部引入了极端弯曲工艺。由于线材的折叠、弯曲和压缩的影响,线材的缩颈或断裂是主要的问题。本文的主要重点将讨论超低环路的细节和全面特性,在22um铜线中低至40-50um高度,在工艺能力和坚固性,材料性能和行为(例如:晶粒结构)以及机械性能(例如:硬度和强度)方面。将讨论和解释常见的分析方法和材料制备设置误差,以了解所获得的数据变化背后的原因。
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引用次数: 0
The impact of stencil aperture design for next generation ultra-fine pitch printing 模板孔径设计对下一代超细间距印刷的影响
M. Whitmore, J. Schake, C. Ashmore
Miniaturisation is pushing the stencil printing process. As features become smaller, solder paste transfer efficiency is becoming more critical. In latest research work, actual paste deposit volumes and transfer efficiency have been monitored and compared for both square and round apertures with area ratio's ranging from 0.20 thru to 1.35. This covers apertures sizes of between 100 and 550 microns in a nominal 100 micron thick stencil foil. In addition, the effect of ultrasonically activated squeegees (ProActiv) has been assessed as part of the same experiment. A further comparison has also been made between type 4 and type 4.5 solder paste aswell. The data presented here will help provide guidelines for stencil aperture designs and strategies for ultra-fille pitch components such as 0.3CSP's.
小型化正在推动模板印刷工艺的发展。随着特征越来越小,锡膏转移效率变得越来越重要。在最新的研究工作中,对面积比为0.20 ~ 1.35的方形孔和圆形孔的膏体沉积体积和传递效率进行了监测和比较。这包括在标称100微米厚的模板箔上的孔径尺寸在100到550微米之间。此外,超声波激活刮刀(ProActiv)的效果也作为同一实验的一部分进行了评估。进一步的比较也作出了4型和4.5型锡膏之间以及。这里提供的数据将有助于为超填充螺距元件(如0.3 3csp)的模板孔径设计和策略提供指导。
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引用次数: 5
Effect of strain rate on tensile properties of miniature size lead-free alloys 应变速率对微型无铅合金拉伸性能的影响
Y. Toyama, I. Shohji
Tensile properties of several lead-free solder were investigated at a strain rate ranging from 2 × 10-3 s-1 to 2 × 102 s-1 at room temperature using micro-size specimens. Five kinds of lead-free solder which are Sn-3mass%Ag-0.5mass%Cu, Sn-0.7mass%Cu, Sn-5mass%Sb, Sn-8.5mass%Sb and Sn-13mass%Sb were prepared. Sn-37mass%Pb solder was also prepared as a comparison. Tensile strength increases with increasing the strain rate and is proportional to the logarithm of the strain rate. In Sn-3Ag-0.5Cu and Sn-37Pb solder, specimens were necked uniformly and dimple fracture mainly occurred. Tensile strength became relatively high in those solder. In Sn-0.7Cu, Sn-5Sb and Sn-8.5Sb solder, specimens were not necked uniformly and chisel point fracture was observed. Tensile strength of such solder became relatively low compared with those of Sn-3Ag-0.5Cu and Sn-37Pb solder. In Sn-13Sb solder, brittle fracture occurred and elongation decreased compared with other solder. For elongation, Sn-5Sb and Sn-8.5Sb solder showed an excellent value of approximately 90% at the maximum strain rate investigated.
采用微尺寸试样研究了几种无铅焊料在2 × 10-3 s-1 ~ 2 × 102 s-1应变速率下的室温拉伸性能。制备了Sn-3mass%Ag-0.5mass%Cu、Sn-0.7mass%Cu、Sn-5mass%Sb、Sn-8.5mass%Sb和Sn-13mass%Sb 5种无铅焊料。还制备了Sn-37mass%Pb焊料作为比较。拉伸强度随应变率的增加而增加,并与应变率的对数成正比。在Sn-3Ag-0.5Cu和Sn-37Pb钎料中,试样颈状均匀,以韧窝断裂为主。这些焊料的抗拉强度变得相对较高。在Sn-0.7Cu、Sn-5Sb和Sn-8.5Sb焊料中,试样颈部不均匀,出现凿点断裂。与Sn-3Ag-0.5Cu和Sn-37Pb钎料相比,该钎料的抗拉强度相对较低。Sn-13Sb焊料出现脆性断裂,伸长率下降。对于伸长率,Sn-5Sb和Sn-8.5Sb焊料在最大应变速率下显示出约90%的优异值。
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引用次数: 2
Three dimensional numerical prediction of epoxy flow during the underfill process in flip chip packaging 倒装封装中底填过程环氧树脂流动的三维数值预测
M. Majid, C. Khor, M. K. Abdullah, M. Z. Abdullah, W. Rahiman, A. Jappar, M. Aris
In the present paper, a 3D numerical prediction has been made to study the flip chip underfill process using the epoxy molding compound (EMC). The prediction considered the EMC filling behavior for the flow induced between the tiny gap of silicon die and substrate. Three different arrangements of the solder bump have been tested in this work. The EMC is treated as a generalized Newtonian fluid (GNF). The developed methodology combines the Kawamura and Kawahara technique, and the melt front volume tracking method to solve the two-phase flow field around the solder bumps. The Castro-Macosko rheology model with Arrhenius temperature dependence is adopted in the viscosity model. The predictions are made to investigate the filling patterns at several time intervals. The results show that the underfill process for solder bump with Type A gives minimum filling time and better filling yield. The effect of gap height between the plate and substrate on the underfill process also has been considered. The close agreement between prediction and experimental results from the previous work illustrates the applicability of the present numerical model.
本文采用三维数值预测的方法,研究了环氧模塑复合材料(EMC)在倒装芯片中的充填过程。该预测考虑了硅模与衬底之间微小间隙引起的电磁兼容填充行为。在这项工作中,测试了三种不同的焊料凸点布置。电磁兼容被视为广义牛顿流体(GNF)。所开发的方法结合了Kawamura和Kawahara技术,以及熔体前体积跟踪方法来求解焊点凸起周围的两相流场。粘度模型采用具有Arrhenius温度依赖性的Castro-Macosko流变模型。预测是为了研究在几个时间间隔内的填充模式。结果表明,A型凸点的下填充工艺具有最短的填充时间和较高的填充率。本文还考虑了板基间隙高度对下填过程的影响。预报结果与以往工作的实验结果非常吻合,说明了本文数值模型的适用性。
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引用次数: 3
期刊
2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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