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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Affect of binder on mechanical and physical characterization of titanium dioxide based varistor 粘结剂对二氧化钛基压敏电阻力学和物理性能的影响
S. Gholizadehsangesaraki, S. Begum, M. Nainar, Z. Kothandapani
Development of high performance titanium dioxide (TiO2) based varistor materials demands binders to improve its physical properties which will ultimately enhance its electrical performances. The material used for ceramic based varistor should exhibit good mechanical properties. As for desired mechanical properties, porosity should be minimal, high fired density, high sintered strength and small average grain size are desired. In this paper effect of PVA (binder) on TiO2 was investigated and its influence on physical, mechanical and microstructure was observed. The binder was added during ball milling and then followed by the shaping and sintering process. The samples were characterized by evaluating fired density, hardness, compressive strength and microstructure. Our studies revealed that varistor disc with higher density, hardness and strength can be produced with the use of binder.
高性能二氧化钛(TiO2)基压敏电阻材料的发展需要粘合剂来改善其物理性能,从而最终提高其电性能。用于陶瓷基压敏电阻的材料应具有良好的机械性能。至于期望的力学性能,孔隙率应最小,烧结密度高,烧结强度高,平均晶粒尺寸小。本文研究了聚乙烯醇(粘结剂)对TiO2的作用,观察了其对TiO2的物理、力学和微观结构的影响。在球磨过程中加入粘结剂,然后进行成型和烧结。通过烧结密度、硬度、抗压强度和显微组织对样品进行表征。我们的研究表明,使用粘合剂可以生产具有更高密度、硬度和强度的压敏电阻盘。
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引用次数: 1
Die attach capability on ultra thin wafer thickness for power semiconductor 功率半导体超薄晶圆上的贴片能力
Z. Abdullah, L. Vigneswaran, A. Ang, G. Yuan
In the fast- paced semiconductor industry the need for package solution arises in order to cope with emerging miniaturization trend. As wafer thickness decreases to 100 μm and below, manufacturing challenges arise. Ultra-thin wafers are less stable and more vulnerable to stresses, and the die can be prone to breaking and warping not only during grinding but also at subsequent processing steps.Thinner dies will be able to perform faster heat dissipation to the Cu leadframe to improve the Rth and at the same time will be able to improve the Rdson performance. An effort to assemble an Ultra Thin Dies has been made at die bonding using soft solder, solder paste and also Au Sn Diffusion Soldering. This paper discusses the process optimization and challenges being done at die bond process by using multi needles and peel and ramp concept in order to pick and place such a thin dies in the range of chip thickness less than 60 um . Challenges such as die warpage has been minimized by optimizing the impact of vacuum suction during pick and place on the ultra thin wafer since thin die is very flexible and will be very much influence by the vacuum suction force. The other key parameter is the design of the collect vacuum holes which induced the suction force across the chip surface and will influence its stability during pick and place. The two concepts of pick and place using multi needles and peel and ramp have its own advantages and disadvantages. The experiments conducted revealed the capability of the multi needles and peel and ramp and for stable production both concept works in certain chip sizes with its own process limitation. A feasibility study on ultra thin wafer thickness during pick up and assembly process shows the concept used at die bonding can reduces the stress impact exerted on the chip during pick and place with a proper design of die bonding collet, reduction of die warpage and effect of vacuum suction during pick up process. However in order to achieve a stable production a lot of efforts still need to be done and it involves process optimization , die bonding equipment control and front end wafer technology side.
在快节奏的半导体工业中,为了应对新兴的小型化趋势,对封装解决方案的需求日益增加。当晶圆厚度减小到100 μm及以下时,制造挑战就出现了。超薄晶圆不太稳定,更容易受到应力的影响,而且不仅在磨削过程中,而且在随后的加工步骤中,模具容易断裂和翘曲。更薄的模具将能够更快地散热到Cu引线框架,以改善Rth,同时将能够提高Rdson性能。在使用软焊锡,锡膏和Au - Sn扩散焊接的模具粘接中,努力组装超薄模具。本文讨论了在模具粘合过程中使用多针、剥离和斜坡概念进行的工艺优化和挑战,以便在芯片厚度小于60 um的范围内挑选和放置这样的薄模具。由于超薄晶圆片在拾取和放置过程中非常灵活,并且受到真空吸力的很大影响,因此通过优化真空吸力的影响,可以最大限度地减少模具翘曲等挑战。另一个关键参数是收集真空孔的设计,收集真空孔的设计会引起整个切屑表面的吸力,并将影响其在拾取和放置过程中的稳定性。多针采摘放置和剥离坡道两种概念各有优缺点。所进行的实验揭示了多针、剥离和斜坡的能力,以及稳定生产的能力,这两个概念都适用于某些芯片尺寸,但有其自身的工艺限制。通过对超薄晶圆夹装过程的可行性研究表明,通过合理设计粘接夹头、减少模具翘曲和真空吸力的作用,采用超薄晶圆夹装概念可以减小晶圆夹装过程中对晶圆的应力冲击。然而,为了实现稳定的生产,仍然需要做很多努力,包括工艺优化,模具粘接设备控制和前端晶圆技术方面。
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引用次数: 23
Current and future manufacturing test solution strategies - iNEMI Boundary-scan and Built in Self Test (BIST) technology integration for future standardization 当前和未来的制造测试解决方案策略- iNEMI边界扫描和内置自检(BIST)技术集成,以实现未来的标准化
Z. Conroy, J. Balangue, P. B. Geiger, S. Butkovich
Product cost and revenue trends are not consistent with the cost of Test, Inspection and Measurement (TIM) technologies. Specifically, while Moore's Law has applied to the silicon in the product, it does not apply to the overall cost of test of the resulting higher-functionality, desirably lower-cost product. Higher performance and lower cost test equipment, while also desirable, are not enough to solve the gap between the cost of increasing requirements for test/inspection coverage and price that customers are willing to pay for the product. Product design solutions (testability features) that facilitate lower cost test solutions while keeping adequate test coverage, must be explored. Test methodology and strategy need to be reconsidered. Increasing product complexity and reduced test point access are driving a desire to increase use of technologies such as Boundary-Scan and BIST (Built-In-Self-Test) to improve test coverage. The International Electronics Manufacturing Initiative (iNEMI) has two ongoing projects investigating the gaps and ultimately driving for industry changes in the deployment of those technologies. This paper presents the results from those two projects. The first portion of the paper introduces the outputs from the iNEMI Boundary-scan project team, which reviewed current available test methods and strategy for testing the external memory devices and analyzed the gaps and opportunities. The second portion of the paper discusses the opportunity of BIST technology for board level testing and the needs for standardization. The two projects clarify the requirements needed for the existing boundary-scan IEEE1149.1 standard and other industry standards to bridge the gap for lack of test point access and improved testability of products.
产品成本和收益趋势与测试、检验和测量(TIM)技术的成本不一致。具体来说,虽然摩尔定律适用于产品中的硅,但它并不适用于由此产生的更高功能、更低成本产品的测试总成本。更高的性能和更低的成本的测试设备,虽然也是可取的,但不足以解决不断增加的测试/检验覆盖要求的成本与客户愿意为产品支付的价格之间的差距。必须探索产品设计解决方案(可测试性特性),以促进低成本的测试解决方案,同时保持足够的测试覆盖率。测试方法和策略需要重新考虑。不断增加的产品复杂性和减少的测试点访问促使人们希望增加诸如边界扫描和BIST(内置自检)等技术的使用,以提高测试覆盖率。国际电子制造倡议(iNEMI)有两个正在进行的项目,调查这些差距,并最终推动这些技术部署的行业变革。本文介绍了这两个项目的结果。本文的第一部分介绍了iNEMI边界扫描项目团队的成果,该团队回顾了当前可用的测试外部存储设备的测试方法和策略,并分析了差距和机会。论文的第二部分讨论了BIST技术在板级测试中的机遇和标准化的需求。这两个项目明确了现有边界扫描IEEE1149.1标准和其他行业标准所需的要求,以弥补缺乏测试点访问和提高产品可测试性的差距。
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引用次数: 0
Thermal analysis of embedded chip 嵌入式芯片的热分析
Lee Pik San, Ong Kang Eu, I. Azid
Embedded structure of chip has created issues of thermo-mechanical reliability which is a great concern in electronic industries nowadays. Embedded structure that consists of components with different Coefficient of Thermal expansion (CTE) may lead to failure because of the heat dissipations performance and CTE mismatch. Therefore, in this paper, finite element analysis is carried out using ABAQUS to investigate the effect of chip thickness and substrate on failure under one cycle of thermal cycling load. Modified Coffin-Manson relation is used to predict fatigue life of copper trace which has the highest Von Mises stress in the model. Thermo-mechanical reliability is determined by comparing fatigue life of the models. Reliability of embedded chip is higher if the fatigue life is longer. It was found that greater thickness of silicon chip will lead to lower fatigue life and less reliable. Besides, higher difference of CTE between substrate materials and copper trace has lower fatigue life. However, thermal conductivity of the substrate material has to be taken into consideration because it can improve heat dissipations performance and this improves reliability of embedded chip.
芯片的嵌入式结构产生了热机械可靠性问题,这是当今电子工业非常关注的问题。由不同热膨胀系数的部件组成的嵌入式结构,由于散热性能与热膨胀系数不匹配,可能会导致嵌入式结构失效。因此,本文采用ABAQUS进行有限元分析,研究了在一次热循环载荷作用下,芯片厚度和衬底对失效的影响。采用修正Coffin-Manson关系预测模型中Von Mises应力最高的铜的疲劳寿命。通过比较模型的疲劳寿命来确定热机械可靠性。疲劳寿命越长,嵌入式芯片的可靠性越高。结果表明,硅片厚度越大,疲劳寿命越短,可靠性越差。此外,基材与铜的CTE差异越大,疲劳寿命越低。然而,必须考虑衬底材料的导热性,因为它可以改善散热性能,从而提高嵌入式芯片的可靠性。
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引用次数: 3
High reliability high melting mixed lead-free BiAgX solder paste system 高可靠性高熔点混合无铅BiAgX焊膏系统
HongWen Zhang, N. Lee
In the current work, a mixed powder BiAgX solder paste system with the melting temperature above 260°C and comparable, or better, reliability to the high lead-containing solders has been studied. The mixed powder solder paste system is composed of a high-melting first alloy solder powder as a majority and the additive solder powder as a minority. The additive solder is designed to react preferentially with various surface finish materials before, or together with, the melting of the majority solder to form a controllable IMC layer. The IMC layer of the mixed powder system is controllable by the species and quantity of the additive solder, and it is observed to be insensitive to thermal aging and thermal cycling in current tests, while the high lead-containing solders show a considerable increase in IMC layer thickness. Both micron-sized Ag-rich particles and AgSn phases along the Bi colony boundaries in the joints have been observed. The exposed Ag-rich particles and the surrounding stepwise pattern in the Bi matrix on the fracture surface indicate that these Ag-rich particles constrain the dislocation movement in Bi matrix, and thus enhance the strength and the ductility of the joint.
在目前的工作中,研究了一种混合粉末BiAgX锡膏体系,其熔化温度高于260℃,可靠性可与高含铅焊料媲美或更好。混合粉末焊锡膏体系由高熔点第一合金焊锡粉为多数,添加剂焊锡粉为少数组成。添加焊料被设计成在大多数焊料熔化之前或与各种表面处理材料优先反应,以形成可控的IMC层。混合粉末体系的IMC层厚度可由添加焊料的种类和数量控制,且对热老化和热循环不敏感,而高含铅焊料的IMC层厚度显著增加。在节理中沿Bi晶界观察到微米级的富银颗粒和银锡相。断口表面Bi基体中暴露的富银颗粒及其周围呈阶梯状分布,表明这些富银颗粒约束了Bi基体中的位错运动,从而提高了接头的强度和延性。
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引用次数: 6
Highlights of iNEMI 2013 technology roadmaps iNEMI 2013技术路线图的亮点
B. Pfahl, H. Fu, C. Richardson
iNEMI (International Electronics Manufacturing Initiative) has been creating and exploiting technology roadmaps for the electronics industry for 20 years. It has become recognized as an important tool for defining the “state of the art” in the electronics industry as well as identifying emerging and disruptive technologies. It also includes keys to developing future iNEMI projects and setting industry R&D priorities over the next 10 years. The roadmap is updated every two years with global participation from the industry. The 2013 version of iNEMI roadmap will be released to the public in March 2013. This paper provides a preview of the electronics industry paradigm shifts and the key technology developments and issues. It focuses on the Organic Packaging and Organic PCB Roadmaps, and on the Gap Analysis Process and Resulting iNEMI Actions.
iNEMI(国际电子制造倡议)已经为电子工业创建和开发了20年的技术路线图。它已被公认为定义电子行业“最新技术”以及识别新兴和颠覆性技术的重要工具。它还包括开发未来iNEMI项目和确定未来10年行业研发重点的关键。该路线图每两年更新一次,由全球行业参与。2013年版iNEMI路线图将于2013年3月向公众发布。本文提供了电子工业的范式转变和关键技术的发展和问题的预览。它侧重于有机封装和有机PCB路线图,以及差距分析过程和由此产生的iNEMI行动。
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引用次数: 5
An investigation on Cu wire bond corrosion and mitigation technique for automotive reliability 汽车可靠性铜焊丝腐蚀及缓解技术研究
C. Tai, H. Y. Lim, C. H. Teo, P. J. A. Swee
The increase of gold price had pushed industrial to develop copper wire in order to stay competitive. However, copper is not precious material like gold, there are numerous challenges in bonding & reliability risk associated with stringent automotive reliability requirements. Corrosion associated with copper wire bonding is considered one of the hard to solve reliability risk as the occurrence is in very low ppm and there was no specific pattern observed on the corroded bondpad location. This paper is focusing on the copper wire interconnect with Aluminum pad corrosion in humidity test including autoclave and temperature humidity bias test.
黄金价格的上涨促使工业界为了保持竞争力而开发铜线。然而,铜不像黄金那样珍贵,在严格的汽车可靠性要求下,在粘合和可靠性风险方面存在许多挑战。由于铜线连接的腐蚀发生率非常低,并且在腐蚀的连接板位置没有观察到特定的模式,因此被认为是难以解决的可靠性风险之一。本文主要研究了铜线互连铝板在高压灭菌器和温度湿度偏置试验中的腐蚀问题。
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引用次数: 4
Physical characterization of Titanium Dioxide based varistor materials doped with Cobalt Oxide 掺杂氧化钴的二氧化钛基压敏电阻材料的物理特性
Z. Kothandapani, Shahida Begum, M. Nainar, S. Gholizadeh, Wong Menn Yee
TiO2 varistor material acts as surge arrestors against transient voltages in electrical and electronic equipments. However, the enhancement of properties as a surge protector is very much dependent on the types of dopants being used. Not only that, the microstructure and enhanced mechanical characteristics is anticipated to improve the surge characteristics. In this investigation, the effect of Cobalt Oxide (Co3O4) on Titanium Dioxide (TiO2) was investigated. The percent of dopant was varied at various levels and the prepared samples were characterized by evaluating the physical properties like green density, fired density, sintered strength, axial and radial shrinkage, average grain size and microstructure. A comparison between doped and undoped TiO2 was also made. The physical, mechanical and microstructure were improved for doped TiO2 samples and it was highest for the samples prepared from powder with 98.5% TiO2.1.5% Co3O4 and sintered at 1350°C.
二氧化钛压敏电阻材料在电气和电子设备中作为暂态电压的避雷器。然而,作为电涌保护器的性能的增强很大程度上取决于所使用的掺杂剂的类型。不仅如此,微观结构和增强的力学特性有望改善喘振特性。本文研究了氧化钴(Co3O4)对二氧化钛(TiO2)的影响。对制备的样品进行了生坯密度、烧结密度、烧结强度、轴向和径向收缩率、平均晶粒尺寸和显微组织等物理性能的表征。并对掺杂和未掺杂的TiO2进行了比较。掺杂TiO2的样品的物理、力学和微观结构都得到了改善,其中以TiO2.1.5% Co3O4含量为98.5%的粉末在1350℃下烧结制备的样品的物理、力学和微观结构得到了最大的改善。
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引用次数: 0
Material & process challenges for tire pressure monitoring sensor (TPMS) packaging 胎压监测传感器(TPMS)包装的材料和工艺挑战
Yan-Shan Ng, E. S. Cabatbat, L. Guirit
In packaging MEMS pressure sensor applications such as tire pressure sensors, silicone gels are widely used due to its unique characteristics in meeting specific automotive requirements. The device requires low stress die adhesive to protect the sensor dies from any mechanical stress during field application. Since the sensing device is directly mounted into the wheel's rim, another critical requirement is to withstand the centrifugal force while the tire is rotating at high speed as well as be able to withstand any harsh chemicals which the tire may be exposed to. The device must also withstand the harsh changes in environmental temperature which can go over 100degC in summer and far below zero in winter. The silicone gels selected to suit these requirements were found to have various assembly packaging as well as reliability challenges. This paper discusses the material and process challenges associated with the application of these gels. Comprehensive studies and process characterization were conducted to address these challenges.
在轮胎压力传感器等封装MEMS压力传感器应用中,硅凝胶因其在满足特定汽车要求方面的独特特性而被广泛使用。该设备需要低应力模具粘合剂,以保护传感器模具在现场应用过程中免受任何机械应力的影响。由于传感装置直接安装在车轮的轮辋,另一个关键的要求是承受离心力,而轮胎在高速旋转,以及能够承受任何苛刻的化学品,轮胎可能会暴露。该设备还必须承受环境温度的剧烈变化,夏季可超过100摄氏度,冬季远低于零度。为满足这些要求而选择的硅凝胶被发现具有各种组装封装以及可靠性挑战。本文讨论了与这些凝胶应用相关的材料和工艺挑战。为了应对这些挑战,进行了全面的研究和工艺表征。
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引用次数: 1
High performance and reliable TO package 高性能可靠的TO封装
L. Sim, Yong Wae Chet
The development of new TO package towards package miniaturization trend for improving cost performance while enhancing product performance to low ohmic resistance and high current capability had brought challenges into the design for manufacturability and reliability. An innovation of TO package, TO Leadless (TOLL), enables Infineon to maintain technology leadership in Power Semiconductors and competitiveness of business in offering latest product technologies and solutions for Automotive application. The design of TOLL increased the power density and it has large die pad area for power chip size maximization and low profile lead structure for short wire bond looping are greatly contributing to low ohmic resistance and high current capability. The Automotive MOSFET product characterization showed TOLL performed ohmic resistance (Ron) lower and current rating higher than D2PAK. The lead post design of TOLL for power and logic interconnects provides compatibility for broad range of power semiconductors family such as MOSFET, high current PROFET, Power PROFET, Connect FET, NovalithIC, Complimentary MOS, SiC JFET and others. The unique design of TOLL also enables economies of scale in manufacturing and avoids additional cost for conversion at mold tool and test contactor in handling difference products. Throughout development of TOLL, an invention “intrusion mold edge” design was patented and implemented in TOLL for production handling enhancement. As TOLL design is optimized to a low profile leadframe and molded body package for power enhancement, die attach interconnects reliability performance had become a great challenge. The optimization of die attach process did not demonstrate improvement of solder fatigue stress after temperature cycling of reliability test. The die attach solder fatigue due to thermal-mechanical stress, package and chip mechanical designs were characterized to determine the most effective approach to enhance the reliability performance. The innovation is to introduce appropriate chip thickness to minimize the thermal-mechanical stress. As a result, TOLL achieved a high performance and reliable package while maintaining the cost effectiveness.
新型TO封装朝着封装小型化的方向发展,以提高成本效益,同时将产品性能提高到低欧姆电阻和大电流能力,这对设计的可制造性和可靠性提出了挑战。创新的TO封装,TO无铅封装(TOLL),使英飞凌能够在功率半导体领域保持技术领先地位,并在为汽车应用提供最新产品技术和解决方案方面保持业务竞争力。TOLL的设计提高了功率密度,并具有较大的晶片面积以实现功率芯片尺寸最大化,以及低轮廓引线结构以实现短线键合环路,从而大大提高了低欧姆电阻和高电流能力。汽车MOSFET产品表征表明,TOLL具有比D2PAK更低的欧姆电阻(Ron)和更高的电流额定值。用于电源和逻辑互连的前端设计为广泛的功率半导体家族提供兼容性,例如MOSFET,高电流PROFET, power PROFET, Connect FET, NovalithIC, Complimentary MOS, SiC JFET等。TOLL的独特设计还实现了制造中的规模经济,并避免了在处理不同产品时在模具和测试接触器上进行转换的额外成本。在TOLL的发展过程中,一项发明“入侵模具边缘”设计获得了专利,并在TOLL中实施,以增强生产处理能力。由于为了提高功率,TOLL的设计被优化为采用低轮廓引线框架和模制车身封装,因此对模接互连的可靠性性能提出了很大的挑战。在可靠性试验温度循环后,焊料的疲劳应力并没有得到改善。对热机械应力引起的焊点疲劳、封装和芯片的机械设计进行了分析,以确定提高可靠性性能的最有效方法。创新之处在于引入合适的切屑厚度以最小化热机械应力。因此,TOLL在保持成本效益的同时实现了高性能和可靠的封装。
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引用次数: 3
期刊
2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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