首页 > 最新文献

1997 Proceedings 47th Electronic Components and Technology Conference最新文献

英文 中文
The MCM/MCP thermal characteristic and its circuit representations MCM/MCP热特性及其电路表示
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606185
Z. Yang, X. A. Wang, J. Ewanich
Expanded from the thermal characteristics of single chip packages, a matrix form thermal characteristic for MCM and MCPs is introduced in this paper. The validity of this characteristic is investigated through a few most commonly used MCM, MCP assembly configurations and mounting boards. A detail discussion is made on the relationship between the thermal characteristic, /spl theta/ matrix and its thermal circuit representation. In addition, two techniques are introduced to extract the equivalent thermal network from a given /spl theta/ matrix or directly from numerical modeling. The extracted thermal network is also tested by numerical examples and has proved to be accurate enough for higher system level applications.
本文从单芯片封装的热特性出发,介绍了MCM和mcp的矩阵热特性。通过几种最常用的MCM、MCP组装配置和安装板来研究这一特性的有效性。详细讨论了热特性/spl θ /矩阵与其热电路表示之间的关系。此外,介绍了从给定的/spl θ /矩阵或直接从数值模拟中提取等效热网络的两种技术。通过数值算例对所提取的热网络进行了验证,证明其精度足以满足更高系统级的应用。
{"title":"The MCM/MCP thermal characteristic and its circuit representations","authors":"Z. Yang, X. A. Wang, J. Ewanich","doi":"10.1109/ECTC.1997.606185","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606185","url":null,"abstract":"Expanded from the thermal characteristics of single chip packages, a matrix form thermal characteristic for MCM and MCPs is introduced in this paper. The validity of this characteristic is investigated through a few most commonly used MCM, MCP assembly configurations and mounting boards. A detail discussion is made on the relationship between the thermal characteristic, /spl theta/ matrix and its thermal circuit representation. In addition, two techniques are introduced to extract the equivalent thermal network from a given /spl theta/ matrix or directly from numerical modeling. The extracted thermal network is also tested by numerical examples and has proved to be accurate enough for higher system level applications.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"220 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123360179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optimization of shrinkage and expansion properties of epoxy encapsulants 环氧密封剂收缩膨胀性能的优化
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606268
J.C. Bolger
New resin and filler types now allow epoxy encapsulants to have higher filler loadings and lower expansion coefficients. Reducing encapsulant shrinkage in a wire bonded plastic package has the advantages of lower die stress and less warpage, but if shrinkage is too low, early corrosion failure may occur during humidity tests. To explain why, it has been proposed (1) that compression forces, due to encapsulant shrinkage, can prevent the water which is needed for corrosion from accumulating at the bond pad surface. The objective of this paper is to quantify this corrosion mechanism. The Nernst equation plus heat of adsorption data are used to predict that the minimum compression stress, normal to the bond pads, which is needed to prevent water accumulation and corrosion, should be at least 20 times the partial pressure of water vapor at the test temperature. For example, at 121/spl deg/C/30 psia, the compression stress from the encapsulant should be at least 600 psi. Shrinkage and expansion data, measured for 5 epoxy encapsulants and 7 epoxy and polyimide die attach adhesives, were used to calculate die stress for each adhesive-encapsulant combination. All 12 materials had low ionic extractables (C1/sup -/<20 ppm) but major differences had been found in failure times in pressure cooker tests. The corrosion results correlate with the calculated Z-axis stresses and support the prediction that the minimum stress should be /spl ges/20 P/sub w/. Die surface stresses depend on the adhesive, adhesive thickness, adhesive cure and die size as well as on the encapsulant.
新的树脂和填料类型现在允许环氧密封剂具有更高的填料负载和更低的膨胀系数。减少线焊塑料封装中封装剂的收缩率具有降低模具应力和减少翘曲的优点,但如果收缩率过低,在湿度测试中可能会出现早期腐蚀失效。为了解释其中的原因,有人提出(1)由于密封剂的收缩,压缩力可以防止腐蚀所需的水在粘结垫表面积聚。本文的目的是量化这种腐蚀机制。利用能斯特方程和吸附热数据预测,防止水积聚和腐蚀所需的键合焊盘正法向的最小压缩应力应至少是测试温度下水蒸气分压的20倍。例如,在121/spl℃/30 psia下,封装剂的压缩应力应至少为600 psi。采用5种环氧密封剂和7种环氧和聚酰亚胺模贴胶的收缩和膨胀数据,计算了每种胶粘剂-密封剂组合的模应力。所有12种材料的离子萃取物都很低(C1/sup -/<20 ppm),但在高压锅试验中发现的失效时间存在主要差异。腐蚀结果与计算的z轴应力相吻合,支持最小应力应为/spl / 20p /sub / w/的预测。模具表面应力取决于胶粘剂、胶粘剂厚度、胶粘剂固化和模具尺寸以及密封剂。
{"title":"Optimization of shrinkage and expansion properties of epoxy encapsulants","authors":"J.C. Bolger","doi":"10.1109/ECTC.1997.606268","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606268","url":null,"abstract":"New resin and filler types now allow epoxy encapsulants to have higher filler loadings and lower expansion coefficients. Reducing encapsulant shrinkage in a wire bonded plastic package has the advantages of lower die stress and less warpage, but if shrinkage is too low, early corrosion failure may occur during humidity tests. To explain why, it has been proposed (1) that compression forces, due to encapsulant shrinkage, can prevent the water which is needed for corrosion from accumulating at the bond pad surface. The objective of this paper is to quantify this corrosion mechanism. The Nernst equation plus heat of adsorption data are used to predict that the minimum compression stress, normal to the bond pads, which is needed to prevent water accumulation and corrosion, should be at least 20 times the partial pressure of water vapor at the test temperature. For example, at 121/spl deg/C/30 psia, the compression stress from the encapsulant should be at least 600 psi. Shrinkage and expansion data, measured for 5 epoxy encapsulants and 7 epoxy and polyimide die attach adhesives, were used to calculate die stress for each adhesive-encapsulant combination. All 12 materials had low ionic extractables (C1/sup -/<20 ppm) but major differences had been found in failure times in pressure cooker tests. The corrosion results correlate with the calculated Z-axis stresses and support the prediction that the minimum stress should be /spl ges/20 P/sub w/. Die surface stresses depend on the adhesive, adhesive thickness, adhesive cure and die size as well as on the encapsulant.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125994228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Stresses from flip-chip assembly and underfill; measurements with the ATC4.1 assembly test chip and analysis by finite element method 倒装芯片组装和下填的应力;采用ATC4.1组装测试芯片进行测量,并采用有限元法进行分析
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606158
D. Peterson, J. Sweet, S. Burchett, A. Hsia
We report the first measurements of in-situ flip-chip assembly mechanical stresses using a CMOS piezoresistive test chip repatterned with a fine pitch full area array. A special printed circuit board substrate was designed at Sandia and fabricated by the Hadco Corp. The flip-chip solder attach (FCA) and underfill was performed by a SEMATECH member company. The measured incremental stresses produced by the underfill are reported and discussed for several underfill materials used in this experiment. A FEM of a one-quarter section of the square assembly has been developed to compare with the measured as-assembled and underfill die surface stresses. The initial model utilized linear elastic constitutive models for the Si, solder, underfill, and PC board components. Detailed comparisons between theory and experiment are presented and discussed.
我们报告了使用带有细间距全面积阵列的CMOS压阻测试芯片对原位倒装芯片组装机械应力的首次测量。一种特殊的印刷电路板衬底由Sandia公司设计,并由Hadco公司制造,倒装芯片焊接(FCA)和下填由SEMATECH成员公司完成。本文报道并讨论了试验中使用的几种底填体材料所产生的测量增量应力。建立了方形组件四分之一截面的有限元方法,并与装配时和下填充模表面应力的测量结果进行了比较。初始模型利用了硅、焊料、衬底填充和PC板组件的线性弹性本构模型。并对理论与实验进行了详细的比较。
{"title":"Stresses from flip-chip assembly and underfill; measurements with the ATC4.1 assembly test chip and analysis by finite element method","authors":"D. Peterson, J. Sweet, S. Burchett, A. Hsia","doi":"10.1109/ECTC.1997.606158","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606158","url":null,"abstract":"We report the first measurements of in-situ flip-chip assembly mechanical stresses using a CMOS piezoresistive test chip repatterned with a fine pitch full area array. A special printed circuit board substrate was designed at Sandia and fabricated by the Hadco Corp. The flip-chip solder attach (FCA) and underfill was performed by a SEMATECH member company. The measured incremental stresses produced by the underfill are reported and discussed for several underfill materials used in this experiment. A FEM of a one-quarter section of the square assembly has been developed to compare with the measured as-assembled and underfill die surface stresses. The initial model utilized linear elastic constitutive models for the Si, solder, underfill, and PC board components. Detailed comparisons between theory and experiment are presented and discussed.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"2022 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121787758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 38
Fast time domain simulation in SPICE with frequency domain data 在SPICE中使用频域数据进行快速时域仿真
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606246
N. Chang, J C Lee, Barford, B. Troyanovsky
The capability of time domain simulation with frequency domain data exists in some time-domain simulators, but the computations can be time-consuming. We decrease this computational burden by exploiting S-parameter fitter and fast recursive convolution methods. With recursive convolution the frequencies at which the S-parameters are sampled may be spaced in any way. For example, a logarithmic frequency spacing allows S-parameters to be sampled over a broader band without increasing the number of frequencies measured. We use two different system identification techniques for extracting the closed-form equations describing measured or simulated S-parameter data. Lumped parameter systems are approximated as a rational polynomial modulated by a complex exponential. Distributed parameter systems are approximated by the sum of complex exponentials. The recursive convolution engine handles both forms. The HP SPICE circuit simulator has been extended to allow fast, recursive convolution methods to be employed for transient analysis. The resulting simulator is called SSpice v2. Significant speed-up in the simulation of several circuits have been achieved using this new technique compared to both the traditional approach in SPICE and our previous direct-convolution-based approach in SSpice v1. In this paper, we present the algorithms and applications of the simulator. Three applications are demonstrated in the paper which are MR head flex line modeling, chip-to-chip signal modeling on MCM, and on-chip inductor modeling.
一些时域仿真器虽然具备对频域数据进行时域仿真的能力,但计算量较大。我们利用s参数滤波和快速递归卷积方法来减少计算量。对于递归卷积,采样s参数的频率可以以任何方式间隔。例如,对数频率间隔允许在更宽的频带上采样s参数,而不会增加测量频率的数量。我们使用两种不同的系统识别技术来提取描述测量或模拟s参数数据的封闭形式方程。集总参数系统近似为一个由复指数调制的有理多项式。分布参数系统用复指数和近似。递归卷积引擎处理这两种形式。HP SPICE电路模拟器已经扩展到允许快速,递归卷积方法用于瞬态分析。生成的模拟器称为SSpice v2。与SPICE中的传统方法和我们之前在SPICE v1中基于直接卷积的方法相比,使用这种新技术在几个电路的模拟中实现了显着的加速。在本文中,我们介绍了模拟器的算法和应用。本文演示了磁流变磁头柔性线建模、MCM上的片对片信号建模和片上电感器建模三种应用。
{"title":"Fast time domain simulation in SPICE with frequency domain data","authors":"N. Chang, J C Lee, Barford, B. Troyanovsky","doi":"10.1109/ECTC.1997.606246","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606246","url":null,"abstract":"The capability of time domain simulation with frequency domain data exists in some time-domain simulators, but the computations can be time-consuming. We decrease this computational burden by exploiting S-parameter fitter and fast recursive convolution methods. With recursive convolution the frequencies at which the S-parameters are sampled may be spaced in any way. For example, a logarithmic frequency spacing allows S-parameters to be sampled over a broader band without increasing the number of frequencies measured. We use two different system identification techniques for extracting the closed-form equations describing measured or simulated S-parameter data. Lumped parameter systems are approximated as a rational polynomial modulated by a complex exponential. Distributed parameter systems are approximated by the sum of complex exponentials. The recursive convolution engine handles both forms. The HP SPICE circuit simulator has been extended to allow fast, recursive convolution methods to be employed for transient analysis. The resulting simulator is called SSpice v2. Significant speed-up in the simulation of several circuits have been achieved using this new technique compared to both the traditional approach in SPICE and our previous direct-convolution-based approach in SSpice v1. In this paper, we present the algorithms and applications of the simulator. Three applications are demonstrated in the paper which are MR head flex line modeling, chip-to-chip signal modeling on MCM, and on-chip inductor modeling.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122044860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Corrosion/migration study of flip chip underfill and ceramic overcoating 倒装片底填料和陶瓷覆层的腐蚀/迁移研究
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606274
R. Lachance, H. Lavoie, A. Montanari
Temperature, humidity and voltage (bias) represent a well-known combination of stress parameters that activate failure mechanisms and decrease reliability of microelectronic packages. The following work focuses mainly on the impact of such mechanisms on a high volume flip chip package at IBM. This package consists of a silicon flip chip on alumina with C4 enhancement underfill and a package overcoat The test conditions for HAST were 130 C, 85%RH and 5 V, while 85 C, 85% RH and 5 V were used for THB. In order to have a sampling most representative of manufacturing conditions, two IBM manufacturing sites were selected to both build and stress parts. Parts were selected from respective sites at a rate of 6 parts per week over a 6-month period. Results showed that the underfill and overcoating environment postpones the metal migration mechanism far beyond the product life cycle. The study also revealed that the Cr/Cu/Cr conductor lines and the Pb/Sn C4 structures were the regions most susceptible to migration. The acceleration factor of copper conductor migration between HAST and THB was 86 based on a visual inspection at 100X, yielding an activation energy (Ea) of 1.23 eV using the Arrhenius model. It was not possible to calculate the acceleration factor involving Pb/Sn sites, but electrical failures were found in HAST. The failure mechanism was Pb migration between C4 balls and the nearest Cr/Cu/Cr conductor line. It has also been identified that a C4 having a large void will fail earlier due to the bigger diameter. Based on a recent study (S. Peck), the average Ea in the microelectronics packaging industry has evolved from 0.79 eV some 10 years ago to about 0.9 eV today. In light of this, an Ea of 1.23 ev (copper migration) for an application with 50 microns cathode-to-anode is deemed very acceptable.
温度、湿度和电压(偏置)是众所周知的应力参数组合,它们会激活失效机制并降低微电子封装的可靠性。下面的工作主要集中在这种机制对IBM高容量倒装芯片封装的影响。该封装由氧化铝上的硅倒装芯片和C4增强底填料和封装涂层组成,HAST测试条件为130℃、85%RH和5 V, THB测试条件为85℃、85%RH和5 V。为了获得最能代表制造条件的抽样,选择了两个IBM制造站点来构建和强调部件。在6个月的时间里,以每周6个零件的速度从各自的地点选择零件。结果表明,下覆层环境对金属迁移机制的影响远远超出了产品的生命周期。研究还发现,Cr/Cu/Cr导体线和Pb/Sn C4结构是最容易发生迁移的区域。根据100倍的目测,铜导体在HAST和THB之间迁移的加速因子为86,使用Arrhenius模型得到的活化能(Ea)为1.23 eV。虽然无法计算涉及Pb/Sn位点的加速因子,但在HAST试验中发现了电气故障。破坏机制是Pb在C4球和最近的Cr/Cu/Cr导体线之间的迁移。研究还发现,由于直径较大,具有较大空隙的C4会更早失效。根据最近的一项研究(S. Peck),微电子封装行业的平均Ea已经从大约10年前的0.79 eV发展到今天的0.9 eV。鉴于此,对于阴极到阳极50微米的应用,1.23 ev(铜迁移)的Ea被认为是非常可接受的。
{"title":"Corrosion/migration study of flip chip underfill and ceramic overcoating","authors":"R. Lachance, H. Lavoie, A. Montanari","doi":"10.1109/ECTC.1997.606274","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606274","url":null,"abstract":"Temperature, humidity and voltage (bias) represent a well-known combination of stress parameters that activate failure mechanisms and decrease reliability of microelectronic packages. The following work focuses mainly on the impact of such mechanisms on a high volume flip chip package at IBM. This package consists of a silicon flip chip on alumina with C4 enhancement underfill and a package overcoat The test conditions for HAST were 130 C, 85%RH and 5 V, while 85 C, 85% RH and 5 V were used for THB. In order to have a sampling most representative of manufacturing conditions, two IBM manufacturing sites were selected to both build and stress parts. Parts were selected from respective sites at a rate of 6 parts per week over a 6-month period. Results showed that the underfill and overcoating environment postpones the metal migration mechanism far beyond the product life cycle. The study also revealed that the Cr/Cu/Cr conductor lines and the Pb/Sn C4 structures were the regions most susceptible to migration. The acceleration factor of copper conductor migration between HAST and THB was 86 based on a visual inspection at 100X, yielding an activation energy (Ea) of 1.23 eV using the Arrhenius model. It was not possible to calculate the acceleration factor involving Pb/Sn sites, but electrical failures were found in HAST. The failure mechanism was Pb migration between C4 balls and the nearest Cr/Cu/Cr conductor line. It has also been identified that a C4 having a large void will fail earlier due to the bigger diameter. Based on a recent study (S. Peck), the average Ea in the microelectronics packaging industry has evolved from 0.79 eV some 10 years ago to about 0.9 eV today. In light of this, an Ea of 1.23 ev (copper migration) for an application with 50 microns cathode-to-anode is deemed very acceptable.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"157 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126277898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
The development of repairable Au-Al solid phase diffusion flip-chip bonding 可修复的金铝固相扩散倒装键合的发展
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606153
A. Iida, Y. Kizaki, Y. Fukuda, M. Mori
The authors have developed a new repairable chip-on-glass (COG) bonding technique for liquid crystal display (LCD) panels. Gold (Au) bumps on an LSI chip were bonded directly to aluminum (Al) electrodes on a glass substrate by formation of Al-Au intermetallic compounds in the diffusion layer. The developed repairable bonding technique consists of two-level bonding process. First, the chip was bonded at 250/spl deg/C. Partial interconnection could be obtained at the local contact portions between the Au bump and the Al electrode. If the electrical connection failed, the bonded chip was removed. There was a distribution of the area formed Al-Au intermetallic compounds at local contact portions for 250/spl deg/C bonding. Some areas formed Al-Au intermetallic compounds of the Al electrode and were sometimes removed with the chip removal, with an underlying metal layer locally exposed at the surface. Then, a new chip was bonded on the same Al electrodes under the same conditions at 250/spl deg/C. After obtaining the electrical connection, the second bonding was done at 350/spl deg/C. An AlAu/sub 4/ intermetallic formation was obtained by this bonding in the diffusion layer. Reliability tests of second bonded samples were carried out and the contact resistance between the Au bumps and the Al electrodes was measured by the four-probe resistance measurement. In the case that the exposed area ratio of the underlying metal layer was less than 30% of bonding area for each Al electrode, a stable electrical connection was achieved for a high temperature storage test and a thermal shock test. Thus it was confirmed that a stable electrical connection had been obtained by the proposed repairable bonding process.
作者开发了一种新的可修复的液晶显示(LCD)面板的玻璃上芯片(COG)键合技术。通过在扩散层中形成Al-Au金属间化合物,将LSI芯片上的金(Au)凸点直接粘合到玻璃衬底上的铝(Al)电极上。所开发的可修复粘接技术由两级粘接工艺组成。首先,芯片在250/spl度/C下粘合。在Au凸点与Al电极的局部接触处可以获得部分互连。如果电气连接失败,则连接芯片被移除。250/spl℃键合时,局部接触部位形成的Al-Au金属间化合物面积分布明显。一些区域形成了Al电极的Al- au金属间化合物,有时随着芯片的去除而被去除,在表面局部暴露下的金属层。然后,在相同的条件下,在250/spl度/C下,在相同的Al电极上键合新的芯片。获得电气连接后,在350/spl度/C下进行第二次粘合。在扩散层中形成了AlAu/sub - 4/金属间化合物。对二次粘结试样进行了可靠性测试,并采用四探针电阻测量法测量了Au凸点与Al电极之间的接触电阻。在每个铝电极下伏金属层的暴露面积比小于键合面积的30%的情况下,实现了稳定的电气连接,以进行高温储存测试和热冲击测试。由此证实,通过所提出的可修复的粘接工艺获得了稳定的电气连接。
{"title":"The development of repairable Au-Al solid phase diffusion flip-chip bonding","authors":"A. Iida, Y. Kizaki, Y. Fukuda, M. Mori","doi":"10.1109/ECTC.1997.606153","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606153","url":null,"abstract":"The authors have developed a new repairable chip-on-glass (COG) bonding technique for liquid crystal display (LCD) panels. Gold (Au) bumps on an LSI chip were bonded directly to aluminum (Al) electrodes on a glass substrate by formation of Al-Au intermetallic compounds in the diffusion layer. The developed repairable bonding technique consists of two-level bonding process. First, the chip was bonded at 250/spl deg/C. Partial interconnection could be obtained at the local contact portions between the Au bump and the Al electrode. If the electrical connection failed, the bonded chip was removed. There was a distribution of the area formed Al-Au intermetallic compounds at local contact portions for 250/spl deg/C bonding. Some areas formed Al-Au intermetallic compounds of the Al electrode and were sometimes removed with the chip removal, with an underlying metal layer locally exposed at the surface. Then, a new chip was bonded on the same Al electrodes under the same conditions at 250/spl deg/C. After obtaining the electrical connection, the second bonding was done at 350/spl deg/C. An AlAu/sub 4/ intermetallic formation was obtained by this bonding in the diffusion layer. Reliability tests of second bonded samples were carried out and the contact resistance between the Au bumps and the Al electrodes was measured by the four-probe resistance measurement. In the case that the exposed area ratio of the underlying metal layer was less than 30% of bonding area for each Al electrode, a stable electrical connection was achieved for a high temperature storage test and a thermal shock test. Thus it was confirmed that a stable electrical connection had been obtained by the proposed repairable bonding process.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131785409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Flex on cap-solder paste bumping 挠曲盖-焊膏碰撞
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606177
P. Elenius
Soldered flip chips require the formation of a solder bump on the semiconductor device. Traditional solder deposition methods of evaporation and plating have limitations both from a cost structure as well as in capability to meet product requirements. Presented in this paper are the capabilities and reliability results of the FOC (Flex on Cap) solder paste bumping process developed by Delco Electronics and practiced by Flip Chip Technologies. This paper will describe the fine pitch capabilities, solder alloys, bump height uniformity, alloy control and reliability data for the FOC process. The ability of the solder paste process to meet the Pb free requirements of alpha particle sensitive devices and future environmental requirements will be discussed. The importance of the UBM (Under Bump Metallization) for reliable eutectic Pb/Sn and other high Sn content solders that are important for the DCA (Direct Chip Attach) market will be shown. The system level cost savings of having all the necessary solder present on the IC eliminating the deposition of solder on the board will be given. Examples will be provided on the cost of wafer bumping as related to both DCA applications and IC packaging.
焊接倒装芯片需要在半导体器件上形成一个焊料凸起。传统的蒸发和电镀焊锡沉积方法在成本结构和满足产品要求的能力方面都有局限性。本文介绍了Delco Electronics开发并由Flip Chip Technologies实施的FOC (Flex on Cap)焊膏碰撞工艺的性能和可靠性结果。本文将描述FOC工艺的细间距能力、焊料合金、凹凸高度均匀性、合金控制和可靠性数据。将讨论锡膏工艺满足α粒子敏感器件无铅要求和未来环境要求的能力。UBM(碰撞金属化)对于可靠的共晶Pb/Sn和其他高锡含量焊料的重要性,这对DCA(直接芯片连接)市场很重要。将所有必要的焊料都放在集成电路上,从而消除了焊料在电路板上的沉积,从而节省了系统级成本。我们将举例说明与DCA应用和IC封装相关的晶圆碰撞成本。
{"title":"Flex on cap-solder paste bumping","authors":"P. Elenius","doi":"10.1109/ECTC.1997.606177","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606177","url":null,"abstract":"Soldered flip chips require the formation of a solder bump on the semiconductor device. Traditional solder deposition methods of evaporation and plating have limitations both from a cost structure as well as in capability to meet product requirements. Presented in this paper are the capabilities and reliability results of the FOC (Flex on Cap) solder paste bumping process developed by Delco Electronics and practiced by Flip Chip Technologies. This paper will describe the fine pitch capabilities, solder alloys, bump height uniformity, alloy control and reliability data for the FOC process. The ability of the solder paste process to meet the Pb free requirements of alpha particle sensitive devices and future environmental requirements will be discussed. The importance of the UBM (Under Bump Metallization) for reliable eutectic Pb/Sn and other high Sn content solders that are important for the DCA (Direct Chip Attach) market will be shown. The system level cost savings of having all the necessary solder present on the IC eliminating the deposition of solder on the board will be given. Examples will be provided on the cost of wafer bumping as related to both DCA applications and IC packaging.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132682865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Modeling and experimental validation of interconnects with meshed power planes 网格动力平面互连的建模与实验验证
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606321
Y. Li, E.L. Bradawy, E.L. Sharawy, L. Polka, A. Madrid, J. Liao, D. Figueroa
This paper presents a Finite-Difference Time-Domain (FDTD) analysis of meshed power planes that exist in multilayer plastic packages. The structure is divided into unit cells, and the analysis is used to find an equivalent circuit. An ABCD matrix of a periodic meshed plane is derived based on the FDTD analysis of a unit cell. The Bloch impedance and characteristic equation are solved to find the line impedance. This combined electromagnetic and circuit solution optimizes the accuracy and computational efficiency of the analysis. Experimental validation using a plastic land grid array (PLGA) test coupon is used to determine the accuracy of the theoretical analysis. The test coupon consists of a meshed plane structure with traces running beneath both the solid and the gap areas of the plane. Time-domain reflectometry (TDR) is used to measure the effects of the plane geometry on the impedance and propagation characteristics of the trace.
本文对存在于多层塑料封装中的网格化功率平面进行时域有限差分分析。该结构被划分为单元格,并通过分析来寻找等效电路。基于单元格的时域有限差分分析,导出了周期网格平面的ABCD矩阵。求解布洛赫阻抗和特征方程,求出线路阻抗。这种结合了电磁和电路的解决方案优化了分析的准确性和计算效率。利用塑料地网阵列(PLGA)测试券进行实验验证,以确定理论分析的准确性。测试组件由网格平面结构组成,在平面的实心区域和间隙区域下方都有迹线。时域反射法(TDR)用于测量平面几何形状对走线阻抗和传播特性的影响。
{"title":"Modeling and experimental validation of interconnects with meshed power planes","authors":"Y. Li, E.L. Bradawy, E.L. Sharawy, L. Polka, A. Madrid, J. Liao, D. Figueroa","doi":"10.1109/ECTC.1997.606321","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606321","url":null,"abstract":"This paper presents a Finite-Difference Time-Domain (FDTD) analysis of meshed power planes that exist in multilayer plastic packages. The structure is divided into unit cells, and the analysis is used to find an equivalent circuit. An ABCD matrix of a periodic meshed plane is derived based on the FDTD analysis of a unit cell. The Bloch impedance and characteristic equation are solved to find the line impedance. This combined electromagnetic and circuit solution optimizes the accuracy and computational efficiency of the analysis. Experimental validation using a plastic land grid array (PLGA) test coupon is used to determine the accuracy of the theoretical analysis. The test coupon consists of a meshed plane structure with traces running beneath both the solid and the gap areas of the plane. Time-domain reflectometry (TDR) is used to measure the effects of the plane geometry on the impedance and propagation characteristics of the trace.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133361080","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Wire sweep control with mold compound formulations [plastic packaging] 用模具复合配方控制钢丝扫线[塑料包装]
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606147
L. Nguyen, J. Jackson, C. H. Teo, S. Chillara, C. Asanasavest, T. Burke, R. Walberg, R. Lo, P. Weiler, D. Ho, H. Rauhut
Twenty different epoxy compound formulations were evaluated to assess the moldability and the resulting wire sweep propensity in a manual gang-pot molding machine. Effects such as filler content, filler shape and size, hardener viscosity, catalyst level, resin type, and thixotropic index were considered. Results obtained on a 160-lead PQFP with wire lengths up to 160 mils helped reduce the selection down to 5 formulations, which were then tested in a fully automated gang-pot system in a production environment. Aside from wire sweep, effects on die pad shift was also considered. This paper will discuss the relationship between the compound formulations, moldability, wire sweep, and pad shift. Although results were obtained on a test die with 100 /spl mu/m pad pitch, the information garnered should be extendible down to finer pitch.
对20种不同的环氧化合物配方进行了评估,以评估其在手动gang-pot成型机中的可塑性和由此产生的钢丝扫线倾向。考虑了填料含量、填料形状和大小、硬化剂粘度、催化剂用量、树脂类型和触变指数等因素的影响。在160导联的PQFP上获得的结果帮助将选择的配方减少到5种,然后在生产环境中的全自动组焊系统中进行测试。除钢丝扫线外,还考虑了对模具垫移的影响。本文将讨论复合配方、可塑性、钢丝扫描和垫移之间的关系。虽然结果是在垫距为100 /spl mu/m的测试模具上获得的,但所获得的信息应该可以扩展到更细的间距。
{"title":"Wire sweep control with mold compound formulations [plastic packaging]","authors":"L. Nguyen, J. Jackson, C. H. Teo, S. Chillara, C. Asanasavest, T. Burke, R. Walberg, R. Lo, P. Weiler, D. Ho, H. Rauhut","doi":"10.1109/ECTC.1997.606147","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606147","url":null,"abstract":"Twenty different epoxy compound formulations were evaluated to assess the moldability and the resulting wire sweep propensity in a manual gang-pot molding machine. Effects such as filler content, filler shape and size, hardener viscosity, catalyst level, resin type, and thixotropic index were considered. Results obtained on a 160-lead PQFP with wire lengths up to 160 mils helped reduce the selection down to 5 formulations, which were then tested in a fully automated gang-pot system in a production environment. Aside from wire sweep, effects on die pad shift was also considered. This paper will discuss the relationship between the compound formulations, moldability, wire sweep, and pad shift. Although results were obtained on a test die with 100 /spl mu/m pad pitch, the information garnered should be extendible down to finer pitch.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133518440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Application of die attachless process for plastic packages (Thermoplastic Polyimide-Transferred Wafer Technology) 塑料封装无贴装工艺的应用(热塑性聚酰亚胺转移晶圆技术)
Pub Date : 1997-05-18 DOI: 10.1109/ECTC.1997.606289
N. Umehara, M. Amagai, M. Kobayashi
The mechanical stability of plastic packages such as QFP, BGA, and CSP used in surface mount technology is our primary concern. The dominant issue is the interfacial delamination around the die attach materials. Furthermore, significant production cost increases occur due to a variety of chip sizes requiring numerous die pads for lead frame designs. To address these issues, a unique process has been developed, called "Polyimide-Transferred Wafer Process". This technology allows the thermoplastic polyimide to be perfectly transferred from its coating dicing tapes to the wafer backside at an elevated temperature prior to the dicing process. The polyimide-deposited chip replaces the die attach dispense process and has given rise to the possibility of all sorts of cost efficient lead frame designs.
表面贴装技术中使用的QFP、BGA和CSP等塑料封装的机械稳定性是我们主要关注的问题。主要的问题是模具附着材料周围的界面分层。此外,由于各种芯片尺寸需要许多引线框架设计的模垫,导致生产成本显著增加。为了解决这些问题,开发了一种独特的工艺,称为“聚酰亚胺转移晶圆工艺”。该技术允许热塑性聚酰亚胺在切割过程之前,在较高的温度下从涂层切割带完美地转移到晶圆背面。聚酰亚胺沉积芯片取代了模具贴附点胶工艺,并产生了各种成本效益的引线框架设计的可能性。
{"title":"Application of die attachless process for plastic packages (Thermoplastic Polyimide-Transferred Wafer Technology)","authors":"N. Umehara, M. Amagai, M. Kobayashi","doi":"10.1109/ECTC.1997.606289","DOIUrl":"https://doi.org/10.1109/ECTC.1997.606289","url":null,"abstract":"The mechanical stability of plastic packages such as QFP, BGA, and CSP used in surface mount technology is our primary concern. The dominant issue is the interfacial delamination around the die attach materials. Furthermore, significant production cost increases occur due to a variety of chip sizes requiring numerous die pads for lead frame designs. To address these issues, a unique process has been developed, called \"Polyimide-Transferred Wafer Process\". This technology allows the thermoplastic polyimide to be perfectly transferred from its coating dicing tapes to the wafer backside at an elevated temperature prior to the dicing process. The polyimide-deposited chip replaces the die attach dispense process and has given rise to the possibility of all sorts of cost efficient lead frame designs.","PeriodicalId":339633,"journal":{"name":"1997 Proceedings 47th Electronic Components and Technology Conference","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1997-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132172912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
1997 Proceedings 47th Electronic Components and Technology Conference
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1