首页 > 最新文献

2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

英文 中文
Design and comparative performance simulation of RHBD inverter cells in 180nm CMOS 180nm CMOS中RHBD逆变电池的设计与性能对比仿真
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298137
Pablo Ilha Vaz, G. Wirth
In this work, the Radiation Hardened by Design (RHBD) of an inverter cell is proposed. The design considers the use of standard CMOS processes with commercial PDK, focusing on fully incorporating the design into CAD tools allowing the automatic place & route. Corners and Monte Carlo simulations were performed in order to analyze and compare the performances between the standard cells and proposed devices in terms of power, delay, and area consumption. The simulated results indicate that by trading of area and circuit density it is possible to synthesize an automated RHBD with an equivalent performance. Moreover, employing enclosed gate technique in both NMOS and PMOS networks improved propagation delay, energy consumption and lead to reduced variability if compared to standard cells.
本文提出了一种逆变器电池的抗辐射设计方法(RHBD)。该设计考虑使用标准CMOS工艺和商业PDK,重点是将设计完全纳入CAD工具,允许自动放置和布线。为了分析和比较标准单元和拟议器件在功率、延迟和面积消耗方面的性能,进行了角场和蒙特卡罗模拟。仿真结果表明,通过交换面积和电路密度,可以合成具有等效性能的自动化RHBD。此外,与标准单元相比,在NMOS和PMOS网络中采用封闭栅极技术可以改善传播延迟、能量消耗和减少可变性。
{"title":"Design and comparative performance simulation of RHBD inverter cells in 180nm CMOS","authors":"Pablo Ilha Vaz, G. Wirth","doi":"10.1109/SBMICRO.2015.7298137","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298137","url":null,"abstract":"In this work, the Radiation Hardened by Design (RHBD) of an inverter cell is proposed. The design considers the use of standard CMOS processes with commercial PDK, focusing on fully incorporating the design into CAD tools allowing the automatic place & route. Corners and Monte Carlo simulations were performed in order to analyze and compare the performances between the standard cells and proposed devices in terms of power, delay, and area consumption. The simulated results indicate that by trading of area and circuit density it is possible to synthesize an automated RHBD with an equivalent performance. Moreover, employing enclosed gate technique in both NMOS and PMOS networks improved propagation delay, energy consumption and lead to reduced variability if compared to standard cells.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129151217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Asymmetric Self-Cascode versus Graded-Channel SOI nMOSFETs for analog applications 模拟应用的非对称自级联码与渐变通道SOI nmosfet
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298120
R. Assalti, M. Pavanello, D. Flandre, M. de Souza
This paper compares the performance of Asymmetric Self-Cascode and Graded-Channel SOI nMOSFETs, both proposed to improve the analog performance of fully depleted SOI nMOSFETs. The differences at device level are evaluated and the impact of their application in basic analog circuits, i.e. common-source amplifier, source-follower and common-source current mirror are explored through experimental results.
本文比较了非对称自级联码和梯度通道SOI nmosfet的性能,两者都是为了提高完全耗尽SOI nmosfet的模拟性能而提出的。评估了器件级的差异,并通过实验结果探讨了它们在基本模拟电路中应用的影响,即共源放大器、源跟随器和共源电流镜。
{"title":"Asymmetric Self-Cascode versus Graded-Channel SOI nMOSFETs for analog applications","authors":"R. Assalti, M. Pavanello, D. Flandre, M. de Souza","doi":"10.1109/SBMICRO.2015.7298120","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298120","url":null,"abstract":"This paper compares the performance of Asymmetric Self-Cascode and Graded-Channel SOI nMOSFETs, both proposed to improve the analog performance of fully depleted SOI nMOSFETs. The differences at device level are evaluated and the impact of their application in basic analog circuits, i.e. common-source amplifier, source-follower and common-source current mirror are explored through experimental results.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124328104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Fresnel Zone Plate array fabricated by maskless lithography 无掩模光刻技术制备菲涅耳带板阵列
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298155
L. Barea, A. V. Von Zuben, T. M. Brahim, A. Montagnoli, Michel Hospital, N. Frateschi, G. Cirino
This work reports the fabrication of Fresnel Zone Plates (FZP) by employing a maskless lithography tool based on direct laser writing. The target application areas in this work are to use a micro lens array (MLA) in a wavefront sensor, for optical aberrations quantification in human eye diagnostics or adaptive optical system. This last one is essential in astronomy applications in order to correct the aberrations introduced by earth atmosphere. The fabricated FZP generates illumination points with high-contrast intensity in the focal plane, which is the purpose of the wavefront sensor. This high-contrast image suggests that the employed fabrication process is well controlled and it matches the design parameters.
本文报道了采用基于直接激光书写的无掩模光刻工具制造菲涅耳带片(FZP)。本工作的目标应用领域是在波前传感器中使用微透镜阵列(MLA),用于人眼诊断或自适应光学系统中的光学像差量化。最后一种在天文学应用中是必不可少的,以纠正地球大气引入的像差。制作的FZP在焦平面上产生高对比度的照明点,这是波前传感器的目的。这幅高对比度的图像表明,所采用的制造过程得到了很好的控制,并且与设计参数相匹配。
{"title":"Fresnel Zone Plate array fabricated by maskless lithography","authors":"L. Barea, A. V. Von Zuben, T. M. Brahim, A. Montagnoli, Michel Hospital, N. Frateschi, G. Cirino","doi":"10.1109/SBMICRO.2015.7298155","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298155","url":null,"abstract":"This work reports the fabrication of Fresnel Zone Plates (FZP) by employing a maskless lithography tool based on direct laser writing. The target application areas in this work are to use a micro lens array (MLA) in a wavefront sensor, for optical aberrations quantification in human eye diagnostics or adaptive optical system. This last one is essential in astronomy applications in order to correct the aberrations introduced by earth atmosphere. The fabricated FZP generates illumination points with high-contrast intensity in the focal plane, which is the purpose of the wavefront sensor. This high-contrast image suggests that the employed fabrication process is well controlled and it matches the design parameters.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127092725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Design of an interdigitated microelectrode biosensor using a-SiC:H surface to capture E. coli 利用a-SiC:H表面捕获大肠杆菌的交叉指状微电极生物传感器设计
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298142
J. Herrera-Celis, C. Reyes-Betanzo, A. Orduña-Díaz
This work proposes an interdigitated microelectrode biosensor (IMB), which includes hydrogenated amorphous silicon carbide (a-SiC:H) as surface to be functionalized. Accordingly, two a-SiC:H films are included, one on top of SiO2, and another on top of microelectrodes. The design along with the medium were simulated on CoventorWare® software, taking into account that the IMB proposed will be for the detection of Escherichia coli. The influence of both the a-SiC:H thin film and the capture of bacteria on electrodes on the impedance spectroscopy of the biosensor in the range of 10 kHz to 100 MHz was studied. The results show that the higher the conductivity of the thin film on microelectrodes, the lower is the increase of the magnitude of the impedance spectrum measured in presence of the sterile blank solution, and that the capture of bacteria on microelectrodes increases the sensitivity. The maximum percentage change in the magnitude of impedance of the PIMB is about 45 times greater than that of the conventional interdigitated microelectrode biosensor (CIMB).
本工作提出了一种交叉指状微电极生物传感器(IMB),其包括氢化非晶碳化硅(a-SiC:H)作为表面进行功能化。因此,包括两个a-SiC:H膜,一个在SiO2上,另一个在微电极上。考虑到所提出的IMB将用于检测大肠杆菌,在CoventorWare®软件上对设计和培养基进行了模拟。研究了a-SiC:H薄膜和细菌在电极上的捕获对生物传感器阻抗谱在10 kHz ~ 100 MHz范围内的影响。结果表明,微电极上的薄膜电导率越高,无菌空白溶液存在时测量的阻抗谱幅度增加越小,微电极上的细菌捕获增加了灵敏度。阻抗大小的最大百分比变化比传统的交叉指状微电极生物传感器(CIMB)大约45倍。
{"title":"Design of an interdigitated microelectrode biosensor using a-SiC:H surface to capture E. coli","authors":"J. Herrera-Celis, C. Reyes-Betanzo, A. Orduña-Díaz","doi":"10.1109/SBMICRO.2015.7298142","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298142","url":null,"abstract":"This work proposes an interdigitated microelectrode biosensor (IMB), which includes hydrogenated amorphous silicon carbide (a-SiC:H) as surface to be functionalized. Accordingly, two a-SiC:H films are included, one on top of SiO2, and another on top of microelectrodes. The design along with the medium were simulated on CoventorWare® software, taking into account that the IMB proposed will be for the detection of Escherichia coli. The influence of both the a-SiC:H thin film and the capture of bacteria on electrodes on the impedance spectroscopy of the biosensor in the range of 10 kHz to 100 MHz was studied. The results show that the higher the conductivity of the thin film on microelectrodes, the lower is the increase of the magnitude of the impedance spectrum measured in presence of the sterile blank solution, and that the capture of bacteria on microelectrodes increases the sensitivity. The maximum percentage change in the magnitude of impedance of the PIMB is about 45 times greater than that of the conventional interdigitated microelectrode biosensor (CIMB).","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131967948","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Photo and electroluminescence from SiNx layers deposited by reactive sputtering 反应溅射沉积的SiNx层的光和电致发光
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298152
G. Sombrio, Frâncio Rodrigues, P. Franzen, P. A. Soave, H. Boudinov
Non-stoichiometric silicon nitride layers were sandwiched between indium thin oxide (transparent contact) and n type silicon substrate. These films were deposited by reactive sputtering from silicon target. The composition and thickness were extracted by Rutherford backscattering spectroscopy measurement. Photo and electroluminescence spectra have been compared and there is a considerable difference between emitted wavelengths. Exponential conduction models (Pool-Frenkel and Fowler-Nordheim) were used to fit the experimental data. A linear correlation between electroluminescence intensity and current density has been observed. Electroluminescence spectra at several temperatures (50 to 300 K) were reported.
非化学计量氮化硅层夹在铟薄氧化物(透明接触)和n型硅衬底之间。这些薄膜是用反应溅射法制备的。采用卢瑟福后向散射光谱法提取样品的成分和厚度。光光谱和电致发光光谱进行了比较,发现发射波长之间存在相当大的差异。采用指数传导模型(Pool-Frenkel和Fowler-Nordheim)拟合实验数据。电致发光强度与电流密度呈线性相关。报道了50 ~ 300 K温度下的电致发光光谱。
{"title":"Photo and electroluminescence from SiNx layers deposited by reactive sputtering","authors":"G. Sombrio, Frâncio Rodrigues, P. Franzen, P. A. Soave, H. Boudinov","doi":"10.1109/SBMICRO.2015.7298152","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298152","url":null,"abstract":"Non-stoichiometric silicon nitride layers were sandwiched between indium thin oxide (transparent contact) and n type silicon substrate. These films were deposited by reactive sputtering from silicon target. The composition and thickness were extracted by Rutherford backscattering spectroscopy measurement. Photo and electroluminescence spectra have been compared and there is a considerable difference between emitted wavelengths. Exponential conduction models (Pool-Frenkel and Fowler-Nordheim) were used to fit the experimental data. A linear correlation between electroluminescence intensity and current density has been observed. Electroluminescence spectra at several temperatures (50 to 300 K) were reported.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121000153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
More moore and more than moore meeting for 3D 更多的摩尔和更多的摩尔会议为3D
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298105
S. Deleonibus
In the future, drastic power consumption reduction will request less energy greedy device, interconnect, computing technologies and architectures. Challenging tomorrow's exponentially growing electronic market, towards Autonomous and Mobile systems for new societal needs, request a drastic reduction towards Zero Intrinsic Variability, Heterogeneous and 3D integration at the device, functional and system levels. Maximizing Energy Efficiency of combined Low Power, High Performance CMOS and Memories to contribute to the energy saving balance at system level, become realistic goals.
在未来,大幅降低功耗将要求更少的能源贪婪的设备,互连,计算技术和架构。挑战未来指数级增长的电子市场,面向新的社会需求的自主和移动系统,要求在设备,功能和系统层面大幅减少零内在变异性,异构和3D集成。将低功耗、高性能CMOS与存储器相结合,最大限度地提高能效,实现系统级的节能平衡,成为现实的目标。
{"title":"More moore and more than moore meeting for 3D","authors":"S. Deleonibus","doi":"10.1109/SBMICRO.2015.7298105","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298105","url":null,"abstract":"In the future, drastic power consumption reduction will request less energy greedy device, interconnect, computing technologies and architectures. Challenging tomorrow's exponentially growing electronic market, towards Autonomous and Mobile systems for new societal needs, request a drastic reduction towards Zero Intrinsic Variability, Heterogeneous and 3D integration at the device, functional and system levels. Maximizing Energy Efficiency of combined Low Power, High Performance CMOS and Memories to contribute to the energy saving balance at system level, become realistic goals.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123360225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability of film thickness extraction through CV curves of SOI p-i-n gated diodes SOI p-i-n门控二极管CV曲线提取膜厚的可靠性
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298123
K. Sasaki, C. Navarro, M. Bawedin, F. Andrieu, J. Martino, S. Cristoloveanu
This work aims to study the reliability of the Si film thickness extraction method based on the capacitance derivative analysis in p-i-n gated diodes. Results provided by the derivative procedure are compared to the basic capacitance method (without the derivative). The basic method yields accurate Si-film thicknesses, but it can only be applied to relatively thick body devices where the supercoupling effect does not occur. On the other hand, the use of the derivative analysis is feasible and effective in ultrathin devices. This makes the derivative procedure more suitable for the characterization of the body thickness in advanced FDSOI MOS-like devices.
本文旨在研究基于电容导数分析的p-i-n门控二极管硅膜厚度提取方法的可靠性。将导数法所得结果与基本电容法(无导数法)进行了比较。基本方法可以得到精确的硅膜厚度,但它只能应用于相对较厚的体器件,在那里不会发生超耦合效应。另一方面,在超薄器件中使用导数分析是可行和有效的。这使得衍生程序更适合于表征先进的FDSOI类mos器件的体厚。
{"title":"Reliability of film thickness extraction through CV curves of SOI p-i-n gated diodes","authors":"K. Sasaki, C. Navarro, M. Bawedin, F. Andrieu, J. Martino, S. Cristoloveanu","doi":"10.1109/SBMICRO.2015.7298123","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298123","url":null,"abstract":"This work aims to study the reliability of the Si film thickness extraction method based on the capacitance derivative analysis in p-i-n gated diodes. Results provided by the derivative procedure are compared to the basic capacitance method (without the derivative). The basic method yields accurate Si-film thicknesses, but it can only be applied to relatively thick body devices where the supercoupling effect does not occur. On the other hand, the use of the derivative analysis is feasible and effective in ultrathin devices. This makes the derivative procedure more suitable for the characterization of the body thickness in advanced FDSOI MOS-like devices.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114848858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
From InAs extended monolayer flat 2D terraces to 3D islands grown on GaAs substrates 从扩展单层平面二维梯田到生长在砷化镓衬底上的三维岛屿
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298133
G. Torelly, R. Jakomin, M. Pires, L. Dornelas, R. Prioli, P. G. Caldas, H. Xie, F. Ponce, P. L. Souza
The formation of self-assembled InAs quantum dots is investigated as the growth time increases from 3.6 to 12 seconds at a low growth rate. The morphological evolution from a rough surface at a short length scale to an extended 2D InAs flat area, and finally to the 3D InAs islands is followed using atomic force microscopy, photoluminescence and transmission electron microscopy. We show that micrometer long terraces with 2 and 3 monolayers thicknesses can co-exist even though 3 monolayers is beyond the critical thickness. As the quantum dots are nucleated the 3 monolayers thick terrace is depleted by the 3D islands.
研究了在低生长速率下,当生长时间从3.6秒增加到12秒时,自组装InAs量子点的形成。利用原子力显微镜、光致发光显微镜和透射电子显微镜观察了从短长度尺度的粗糙表面到扩展的二维InAs平坦区域,最后到三维InAs岛屿的形态演变过程。我们发现,即使3层厚度超过临界厚度,2层和3层厚度的微米级阶地也可以共存。当量子点成核时,3层厚的阶地被三维岛屿耗尽。
{"title":"From InAs extended monolayer flat 2D terraces to 3D islands grown on GaAs substrates","authors":"G. Torelly, R. Jakomin, M. Pires, L. Dornelas, R. Prioli, P. G. Caldas, H. Xie, F. Ponce, P. L. Souza","doi":"10.1109/SBMICRO.2015.7298133","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298133","url":null,"abstract":"The formation of self-assembled InAs quantum dots is investigated as the growth time increases from 3.6 to 12 seconds at a low growth rate. The morphological evolution from a rough surface at a short length scale to an extended 2D InAs flat area, and finally to the 3D InAs islands is followed using atomic force microscopy, photoluminescence and transmission electron microscopy. We show that micrometer long terraces with 2 and 3 monolayers thicknesses can co-exist even though 3 monolayers is beyond the critical thickness. As the quantum dots are nucleated the 3 monolayers thick terrace is depleted by the 3D islands.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123065422","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effective channel length in Junctionless Nanowire Transistors 无结纳米线晶体管的有效沟道长度
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298144
R. Trevisoli, R. Doria, M. de Souza, M. Pavanello
The aim of this work is to analyze the influence of the lateral depletion induced by the gate towards the source/drain regions on the effective channel length of Junctionless Nanowire Transistors. The effective channel length increase at the subthreshold regime is analyzed by means of simulations together with experimental results, showing that the JNT can be significantly longer than the gate length.
本工作的目的是分析栅极对源极/漏极区域的横向损耗对无结纳米线晶体管有效沟道长度的影响。通过仿真和实验结果分析了亚阈值区域的有效信道长度增长,表明JNT可以明显长于栅极长度。
{"title":"Effective channel length in Junctionless Nanowire Transistors","authors":"R. Trevisoli, R. Doria, M. de Souza, M. Pavanello","doi":"10.1109/SBMICRO.2015.7298144","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298144","url":null,"abstract":"The aim of this work is to analyze the influence of the lateral depletion induced by the gate towards the source/drain regions on the effective channel length of Junctionless Nanowire Transistors. The effective channel length increase at the subthreshold regime is analyzed by means of simulations together with experimental results, showing that the JNT can be significantly longer than the gate length.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"138 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124353277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Role of the extensions in Double-Gate Junctionless MOSFETs in the drain current at high gate voltage 双栅无结mosfet扩展在高栅极电压下漏极电流中的作用
Pub Date : 2015-08-01 DOI: 10.1109/SBMICRO.2015.7298108
A. Cerdeira, F. Avila Herrera, B. Cardoso Paz, M. Estrada, M. Pavanello
This work studies the effect of doping level applied to the extensions on the electrical characteristics of short channel double gate junctionless transistor. Structures with homogeneous doping profile between source and drain contacts and structures with additional doping in the extensions are studied. 2D simulations were performed for structures with doping concentration of 5×1018 and 1019 cm-3, silicon layer thickness of 10 and 15 nm and with/without extensions of 30 nm. Above flat band voltage, the drain current in saturation presents an important decrease for homogeneously doped structures with extensions attributed to the reduction of potentials at high gate voltage. Lower short channel effects, as less threshold voltage roll off and less subthreshold slope take place in this type of structures due to the shift of minimum potential in the extension regions.
本文研究了掺杂水平对短沟道双栅无结晶体管电特性的影响。研究了源极与漏极之间均质掺杂结构和外延处附加掺杂结构。对掺杂浓度分别为5×1018和1019 cm-3、硅层厚度分别为10和15 nm、延伸长度分别为30 nm的结构进行了二维模拟。在平带电压以上,均匀掺杂结构的饱和漏极电流显著减小,其扩展归因于高栅电压下电位的降低。短通道效应较低,因为在这种类型的结构中,由于扩展区域中最小电位的移动,阈值电压滚降较小,亚阈值斜率较小。
{"title":"Role of the extensions in Double-Gate Junctionless MOSFETs in the drain current at high gate voltage","authors":"A. Cerdeira, F. Avila Herrera, B. Cardoso Paz, M. Estrada, M. Pavanello","doi":"10.1109/SBMICRO.2015.7298108","DOIUrl":"https://doi.org/10.1109/SBMICRO.2015.7298108","url":null,"abstract":"This work studies the effect of doping level applied to the extensions on the electrical characteristics of short channel double gate junctionless transistor. Structures with homogeneous doping profile between source and drain contacts and structures with additional doping in the extensions are studied. 2D simulations were performed for structures with doping concentration of 5×1018 and 1019 cm-3, silicon layer thickness of 10 and 15 nm and with/without extensions of 30 nm. Above flat band voltage, the drain current in saturation presents an important decrease for homogeneously doped structures with extensions attributed to the reduction of potentials at high gate voltage. Lower short channel effects, as less threshold voltage roll off and less subthreshold slope take place in this type of structures due to the shift of minimum potential in the extension regions.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133081325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
期刊
2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1