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2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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Impact of diameter on TFET conduction mechanisms 直径对TFET传导机制的影响
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298146
V. B. Sivieri, P. Agopian, J. Martino
In this work, the impact of diameter on the TFET conduction mechanisms and the consequent influence on the device performance is investigated through simulation analysis. The results show a higher current level and a lower gate voltage to reach the band-to-band tunneling regime in NW-TFETs with smaller diameters. Some anomalies related to the performance degradation were found in the transfer characteristic curves of the narrower devices (D <; 30 nm) and are analyzed based on the simulated energy band diagrams and tunneling rate values. The Si NW-TFET with 10 nm diameter presented a drain current approximately 3 orders of magnitude lower than the larger nanowires at high gate voltages due to presence of gate/source overlap region in abrupt source/channel junction.
本文通过仿真分析研究了直径对TFET导通机制的影响及其对器件性能的影响。结果表明,在直径较小的nw - tfet中,更高的电流水平和更低的栅极电压可以达到带到带的隧穿状态。在较窄器件的传递特性曲线中发现了一些与性能退化有关的异常(D <;并根据模拟能带图和隧道速率值进行了分析。在高栅极电压下,直径为10 nm的Si NW-TFET的漏极电流比较大的纳米线低约3个数量级,这是由于源/沟道交界处的栅极/源重叠区域的存在。
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引用次数: 2
Characterization of HfO2 on Hafnium-Indium-Zinc Oxide HIZO layer metal-insulator-semiconductor structures deposited by RF sputtering 射频溅射沉积铪-铟-氧化锌HIZO层金属-绝缘体-半导体结构上HfO2的表征
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298130
I. Hernández, M. Estrada, I. Garduño, J. Tinoco, A. Cerdeira
The electrical properties of RF magnetron sputtered HfO2 layers as dielectric and Hafnium-Indium-Zinc-Oxide HIZO as semiconductor in metal-insulator-semiconductor (MIS) structures are investigated. The dielectric constant of the HfO2 layer was around 9 measured at 10 kHz. The critical electric field was higher than 5×105 V/cm and the leakage current below 5×10-9 A/cm2. The effective charged density of interface states in the order of 5×1012 cm-2. Flat band shift due to polarization of the dielectric at voltage rage between -5 and 5 V is below 0.5 V. The RF deposited HIZO layer presents higher density of interface and bulk traps than similar layers deposited by other more complex techniques requiring higher processing temperature. However, results indicate that they can still be used in low voltage range amorphous oxide semiconductor thin film transistors AOSTFTs.
研究了金属-绝缘体-半导体(MIS)结构中射频磁控溅射HfO2层作为介电层和HfO2层作为半导体层的电学性能。在10khz下测得的HfO2层介电常数约为9。临界电场大于5×105 V/cm,漏电电流小于5×10-9 A/cm2。界面态的有效带电密度为5×1012 cm-2。在-5 ~ 5v电压范围内,介质极化引起的平带位移小于0.5 V。RF沉积的HIZO层比其他需要更高加工温度的更复杂技术沉积的类似层具有更高的界面密度和大块陷阱。然而,结果表明,它们仍然可以用于低电压范围的非晶氧化物半导体薄膜晶体管。
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引用次数: 1
Engineering of the photoluminescence of ZnO nanowires by different growth and annealing environments 不同生长和退火环境下ZnO纳米线的光致发光工程
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298151
A. L. F. Cauduro, C. I. Sombrio, P. Franzen, H. Boudinov, D. L. Baptista
Optical properties of ZnO nanowires were investigated through photoluminescence (PL) at room and low temperatures. An excitonic structure was observed in the UV band emission and we are able to distinguish between free excitons, bound excitons and donor acceptor pairs. The PL spectra shows deep level emissions ranging from 1.4 eV up to 2.8 eV, strongly depending on surface defects whereas the red emission (1.7 eV) is activated at cryogenic temperatures. We attribute the green luminescence (2.4 eV) emission to the presence of zinc vacancies into ZnO nanowires. Further evidences that confirm the mechanism are observed in the PL emission spectra after annealing in O2 or Ar environments.
利用光致发光(PL)技术研究了ZnO纳米线在室温和低温下的光学性能。在紫外波段发射中观察到一个激子结构,我们能够区分自由激子,束缚激子和供体受体对。PL光谱显示深能级发射范围从1.4 eV到2.8 eV,强烈依赖于表面缺陷,而红色发射(1.7 eV)在低温下被激活。我们将绿色发光(2.4 eV)归因于ZnO纳米线中锌空位的存在。在O2或Ar环境中退火后的PL发射光谱进一步证实了这一机制。
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引用次数: 1
Photoactive thin films based on benzoxazole derivatives 基于苯并恶唑衍生物的光活性薄膜
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298109
L. P. Etcheverry, F. Rodembusch, H. Boudinov, A. Gundel, E. C. Moreira
In this work it is presented a photophysical study of thin films based on excited-state intermolecular proton transfer dyes 2-(4'amino-2'-hydroxyphenyl)benzoxazole (AHPBO) and 2-(4'aminophenyl)benzoxazole (APBO). The studied thin films were characterized by Raman Spectroscopy, Atomic Force Microscopy, as well as Photoluminescence and UV-Vis absorption spectroscopies. In addition, theoretical calculations were applied using Gaussian09 software to obtain vibrational frequencies, corresponding vibrational assignments and its correlation with experimentally obtained by Raman spectra. The ESIPT mechanism showed to play a fundamental role on the photophysics of the AHPBO in despite of the APBO where only a locally excited specie takes place in the excited state.
本文对激发态质子转移染料2-(4′氨基-2′-羟基苯基)苯并恶唑(AHPBO)和2-(4′氨基苯基)苯并恶唑(APBO)薄膜进行了光物理研究。用拉曼光谱、原子力显微镜、光致发光光谱和紫外-可见吸收光谱对所研究的薄膜进行了表征。此外,利用Gaussian09软件进行理论计算,得到了振动频率、相应的振动赋值及其与拉曼光谱实验结果的相关性。ESIPT机制在AHPBO的光物理中发挥了重要作用,尽管APBO中只有局部激发态的物质发生。
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引用次数: 0
Carbon dioxide sensing at near infrared using zeolitic imidazolate framework-8 (ZIF-8) absorbers 利用沸石咪唑酸框架-8 (ZIF-8)吸收体近红外探测二氧化碳
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298116
A. Volponi, S. G. dos Santos Filho
In this work, it is presented the carbon dioxide sensing at near infrared using zeolitic imidazolate framework-8 (ZIF-8) absorbers. ZIF-8 was synthesized by dissolving 4.3 g of zinc nitrate hexahydrate and 9.7 g of 2-methylimidazole in 800 mL of ethanol. The solution was stirred for 60 min at room temperature and 10mL of the fresh solution was dripped and spread over the rough side of a Si wafer to be dryed at the room temperature during 10 min and annealed at 150°C during 5 h in ultrapure N2. As a result, 11.7-μm thick films were obtained on the Si-p wafers. From FTIR spectroscopy, it was worthy of note that the signal of the asymmetric stretching mode at 2337 cm-1 increases with the increase of the CO2 pressure and with the time interval in which the pressure is kept. Besides the component at 2337 cm-1, a second component was also observed at 2360 cm-1, indicating two different mechanisms of CO2 adsorption. The component at 2337 cm-1 was interpreted as a substantial portion of CO2 molecules inserted into the ZIF-8 film at the contours of the nanocrystals or inside of the framework and the component at 2360 cm-1 was understood as a portion of CO2 molecules adsorbed directly on the surface of the ZIF-8 film. In addition, it was observed a sensitivity of 100 ppm for CO2 if the ZIF-8 loading time at the atmospheric pressure is at least twenty minutes in order to achieve a measurable absorbance inferior limit of 0.01.
本文介绍了利用沸石咪唑盐框架-8 (ZIF-8)吸收体对近红外二氧化碳的传感。以4.3 g六水硝酸锌和9.7 g 2-甲基咪唑溶解于800 mL乙醇中合成ZIF-8。将溶液在室温下搅拌60分钟,取10mL新鲜溶液滴在硅片的粗糙面上,在室温下干燥10分钟,在超纯N2中150℃退火5小时。结果表明,Si-p晶圆上的薄膜厚度为11.7 μm。从FTIR光谱来看,值得注意的是,2337 cm-1处的不对称拉伸模式信号随着CO2压力的增加和压力保持的时间间隔而增加。除了在2337 cm-1处的组分外,在2360 cm-1处还观察到第二个组分,这表明了两种不同的CO2吸附机制。2337 cm-1处的组分被解释为插入到ZIF-8薄膜中纳米晶体轮廓或框架内部的大部分CO2分子,2360 cm-1处的组分被理解为直接吸附在ZIF-8薄膜表面的一部分CO2分子。此外,如果ZIF-8在大气压下加载时间至少为20分钟,为了达到可测量的吸光度下限0.01,则观察到对CO2的灵敏度为100 ppm。
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引用次数: 0
Production of Yb3+/Er3+ codoped PbO-GeO2 pedestal type waveguides for photonic applications 用于光子应用的Yb3+/Er3+共掺杂PbO-GeO2基座型波导的生产
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298112
F. A. Bomfim, D. L. D. Silva, L. Kassab, M. I. Alayo
We report experimental results on pedestal waveguides produced with Yb3+ /Er3+ codoped PbO-GeO2 thin films deposited by RF Sputtering for photonic applications. Losses around 2.5 dB/cm and 1.5 dB/cm were obtained at 632 and 1068 nm, respectively, for waveguides in the 20-100 μm width range. Internal gain of 6.0 dB and 4.0 dB, at 1530 nm, under 980 nm excitation, were measured for waveguides width of 80 and 14 μm, respectively. The present results show the possibility of using Yb3+/Er3+ codoped PbO-GeO2 pedestal waveguide for optical amplifiers.
本文报道了用Yb3+ /Er3+共掺杂PbO-GeO2薄膜进行射频溅射沉积制备用于光子应用的基座波导的实验结果。在20 ~ 100 μm宽度范围内,波导在632 nm和1068 nm处的损耗分别约为2.5 dB/cm和1.5 dB/cm。当波导宽度为80 μm和14 μm时,分别在1530 nm和980 nm激发下测得6.0 dB和4.0 dB的内部增益。本研究结果显示了Yb3+/Er3+共掺PbO-GeO2基波导用于光放大器的可能性。
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引用次数: 2
Use of back gate bias to enhance the analog performance of planar FD and UTBB SOI transistors-based self-cascode structures 利用后门偏置增强平面FD和UTBB SOI晶体管自级联码结构的模拟性能
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298134
R. Doria, D. Flandre, R. Trevisoli, M. de Souza, M. Pavanello
This paper reports, for the first time, the use of back gate bias to improve the intrinsic voltage gain of self-cascode structures composed by planar FD and UTBB SOI MOSFETs. It is shown a voltage gain improvement larger than 10 dB when either a forward back bias is applied to the drain-side transistor or a reverse back bias is applied to the source side device.
本文首次报道了利用反向偏置提高由平面FD和UTBB SOI mosfet组成的自级联码结构的固有电压增益。结果显示,当漏极侧晶体管施加正向反偏置或源侧器件施加反向反偏置时,电压增益提高大于10 dB。
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引用次数: 2
Back Enhanced (BE) SOI pMOSFET 背增强SOI pMOSFET
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298121
R. Rangel, J. Martino
We report for the first time the fabrication of Back Enhanced (BE) SOI pMOSFET. In this device, there is no doping step process like ion implantation, diffusion or other kind of doping for formation of source/drain or channel, and it is a planar device. The source/drain is enhanced (holes accumulated at back interface) by applying a high negative voltage at back gate (substrate). The front gate voltage should be enough to pinch off the channel. This device is very simple to fabricate, and thus allows many universities an opportunity to fabricate your own device for educational purposes. Moreover, this device has also interesting features like a threshold voltage modulate by back gate from negative to positive (resulting in enhanced and depletion mode operation), a subthreshold slope of 77mV/dec, body factor of 1.11 and ION/IOFF of 105. The BE SOI MOSFET parameter is compatible with other devices with the same operation principle, i.e. current flows near to back interface, but it is much easier to fabricate, using only tree photolithography steps.
本文首次报道了背增强(BE) SOI pMOSFET的制备。该器件不存在离子注入、扩散或其他掺杂等形成源漏或通道的掺杂阶跃过程,为平面器件。通过在后门(衬底)施加高负电压,源极/漏极得到增强(在后界面上积累孔)。前门电压应该足够掐断通道。这种设备制造起来非常简单,因此许多大学都有机会制造自己的设备用于教育目的。此外,该器件还具有一些有趣的特性,如后门从负到正的阈值电压调制(导致增强和耗尽模式工作),亚阈值斜率为77mV/dec,体因子为1.11,ION/IOFF为105。BE SOI MOSFET参数与具有相同工作原理的其他器件兼容,即电流在靠近后接口处流动,但它更容易制造,仅使用三个光刻步骤。
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引用次数: 21
Adaptation of the pedagogical approaches for master students in microelectronics in the frame of a French-Chinese joint program 法中联合项目框架下微电子专业硕士生教学方法的调整
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298143
O. Bonnaud, Xuefei Zhong
In the Far-East there are more and more international joint programs between local universities and occidental academic institutions. In the field of microelectronics, joint masters were set-up. The aim is to form on both sides the students in order to give them the skills and the know-how adapted to economic world. The paper deals with the difference of culture based on the origin of the students that leads to a difference of pedagogical approach by the professorial body. The purpose is built on the experience of a French-Chinese joint master. The proposed solutions had proved their efficiency.
在远东地区,当地大学与西方学术机构之间的国际合作项目越来越多。在微电子领域,设立了联合硕士学位。其目的是形成双方的学生,以给他们的技能和诀窍,以适应经济世界。本文从生源文化的差异出发,论述了生源文化的差异所导致的教学方法的差异。目的是建立在一个法中联合大师的经验。提出的解决办法已证明是有效的。
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引用次数: 2
Analysis of analog parameters in NW-TFETs with Si and SiGe source composition at high temperatures 高温下Si和SiGe源组成的nw - tfet模拟参数分析
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298148
C. Bordallo, J. Martino, P. Agopian, R. Rooyackers, A. Vandooren, A. Thean, E. Simoen, C. Claeys
In this work, the analysis of analog parameters in Tunnel-FET devices is performed at high temperatures and for two different source compositions (Si and Si0.73Ge0.27). For high gate voltage, band-to-band tunneling is the dominant mechanism, and due to that, a degradation in output conductance (gD), early voltage (VEA) and intrinsic voltage gain (AV) was observed. In the SiGe devices, trap assisted tunneling is the dominant mechanism at low gate bias, which improves gD, VEA and consequently AV. The temperature increases both ION and IOFF current leading to a degradation of gD, VEA and AV. The transistor efficiency (gm/ID) decreases at high temperature in the “weak inversion region” and improves in the “strong inversion region” at high current.
在这项工作中,在高温和两种不同的源成分(Si和Si0.73Ge0.27)下,对隧道场效应管器件的模拟参数进行了分析。对于高栅极电压,带到带隧穿是主要机制,因此,观察到输出电导(gD),早期电压(VEA)和固有电压增益(AV)的下降。在SiGe器件中,陷阱辅助隧道是低栅极偏压下的主要机制,它提高了gD、VEA,从而提高了AV。温度增加离子和IOFF电流导致gD、VEA和AV下降。晶体管效率(gm/ID)在“弱反转区”高温下降低,在“强反转区”高电流下提高。
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引用次数: 4
期刊
2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)
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