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2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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Investigations of capacitively-coupled plasmas by electrostatic probe technique 用静电探针技术研究电容耦合等离子体
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298131
G. Cirino, R. M. Castro, M. Pisani, P. Verdonck, R. Mansano, M. Massi, R. Pessoa, L. Barea, T. M. Brahim, H. Maciel
This work reports on the electric characterization of capacitively-coupled RF plasmas by employing electrostatic (Langmuir) probes. Experiments with argon, oxygen and sulfur hexafluoride (SF6) plasmas were carried out. The floating potential and cathode self-bias, as well as the shape of the Langmuir probe current-voltage characteristics were measured and interpreted. The current-voltage characteristic for SF6 plasmas showed a strong variation in the floating potential, and a distortion in the region of electron retarding. An unexpected behavior of the curves was observed for the higher pressure discharge regime, at 100 mTorr. The cathode self-bias also was very different for SF6 plasmas when compared to more electropositive oxygen and argon discharges. The results obtained pointed to the massive presence of negative ions in SF6 plasmas.
本文报道了利用静电(朗缪尔)探针对电容耦合射频等离子体的电特性。用氩、氧和六氟化硫(SF6)等离子体进行了实验。对浮电位和阴极自偏置以及Langmuir探针的形状进行了测量和解释。SF6等离子体的电流-电压特性在浮动电位中表现出强烈的变化,并且在电子延迟区出现畸变。在100 mTorr的高压放电状态下,观察到曲线的意外行为。与氧和氩放电相比,SF6等离子体的阴极自偏置也有很大不同。结果表明SF6等离子体中大量存在负离子。
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引用次数: 0
Impact of diameter on TFET conduction mechanisms 直径对TFET传导机制的影响
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298146
V. B. Sivieri, P. Agopian, J. Martino
In this work, the impact of diameter on the TFET conduction mechanisms and the consequent influence on the device performance is investigated through simulation analysis. The results show a higher current level and a lower gate voltage to reach the band-to-band tunneling regime in NW-TFETs with smaller diameters. Some anomalies related to the performance degradation were found in the transfer characteristic curves of the narrower devices (D <; 30 nm) and are analyzed based on the simulated energy band diagrams and tunneling rate values. The Si NW-TFET with 10 nm diameter presented a drain current approximately 3 orders of magnitude lower than the larger nanowires at high gate voltages due to presence of gate/source overlap region in abrupt source/channel junction.
本文通过仿真分析研究了直径对TFET导通机制的影响及其对器件性能的影响。结果表明,在直径较小的nw - tfet中,更高的电流水平和更低的栅极电压可以达到带到带的隧穿状态。在较窄器件的传递特性曲线中发现了一些与性能退化有关的异常(D <;并根据模拟能带图和隧道速率值进行了分析。在高栅极电压下,直径为10 nm的Si NW-TFET的漏极电流比较大的纳米线低约3个数量级,这是由于源/沟道交界处的栅极/源重叠区域的存在。
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引用次数: 2
Imaging amplification for minimally invasive medical devices 微创医疗设备的成像放大
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298117
J. Correia, J. M. Gomes, C. G. Costa, R. Wolffenbuttel, J. Carmo
The performance of minimally invasive devices for medical inspection could be significantly improved by an amplification imaging module (AIM), which can be considered a highly miniaturized digital microscope to image in-vivo tissue in real-time. An example is the magnification provided by the bulky conventional endoscope that allows the recognition of the affected mucosa with higher precision as compared to normal endoscopic inspection and enables the differentiation of affected tissue from healthy surroundings. Therefore, an AIM that can be integrated in very small medical devices as optical tool for ophthalmologic, thoracic and gastro endoscopic diagnostic will be a tremendous breakthrough. An especially microfabricated 200 μm thick PDMS lens, limiting the total length of the optical system to about 11 mm plus 4 mm for the lateral lens assembly (suitable to include in a 30 mm×11 mm cylindrical medical device) was assembled with more 3 commercial lenses. The height, radius of curvature and focal length of the PDMS lens can be changed by design and were selected to meet the specified system performance, which is set by the imaging requirements. The fabrication process was based in a hanging droplet approach, which is a very low-cost and effective method for obtaining lens with the desired properties. Several analyses were performed showing good performance of the lens system: a paraxial magnification of 14 times was achieved with a Modulation Transfer Function (MTF) around 37% at 50 lp/mm and maximum distortion about 1.83%.
放大成像模块(AIM)可以显著提高微创医疗检查设备的性能,该模块可以被认为是一种高度小型化的数字显微镜,可以实时对体内组织进行成像。一个例子是由笨重的传统内窥镜提供的放大,与普通内窥镜检查相比,它可以以更高的精度识别受影响的粘膜,并能够将受影响的组织与健康环境区分开来。因此,将AIM集成到非常小的医疗设备中,作为眼科、胸腔镜和胃镜诊断的光学工具,将是一个巨大的突破。一个特别微加工的200 μm厚的PDMS透镜,将光学系统的总长度限制在约11 mm加上4 mm的横向透镜组件(适合包括在30 mm×11 mm的圆柱形医疗设备中)与3个以上的商业透镜组装在一起。PDMS透镜的高度、曲率半径和焦距可以通过设计改变,并根据成像要求选择满足指定系统性能的透镜。制备过程基于悬滴法,这是一种非常低成本和有效的方法,可以获得具有所需性能的透镜。几项分析显示了透镜系统的良好性能:在50 lp/mm时,调制传递函数(MTF)约为37%,近轴放大倍数为14倍,最大畸变约为1.83%。
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引用次数: 0
Photoactive thin films based on benzoxazole derivatives 基于苯并恶唑衍生物的光活性薄膜
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298109
L. P. Etcheverry, F. Rodembusch, H. Boudinov, A. Gundel, E. C. Moreira
In this work it is presented a photophysical study of thin films based on excited-state intermolecular proton transfer dyes 2-(4'amino-2'-hydroxyphenyl)benzoxazole (AHPBO) and 2-(4'aminophenyl)benzoxazole (APBO). The studied thin films were characterized by Raman Spectroscopy, Atomic Force Microscopy, as well as Photoluminescence and UV-Vis absorption spectroscopies. In addition, theoretical calculations were applied using Gaussian09 software to obtain vibrational frequencies, corresponding vibrational assignments and its correlation with experimentally obtained by Raman spectra. The ESIPT mechanism showed to play a fundamental role on the photophysics of the AHPBO in despite of the APBO where only a locally excited specie takes place in the excited state.
本文对激发态质子转移染料2-(4′氨基-2′-羟基苯基)苯并恶唑(AHPBO)和2-(4′氨基苯基)苯并恶唑(APBO)薄膜进行了光物理研究。用拉曼光谱、原子力显微镜、光致发光光谱和紫外-可见吸收光谱对所研究的薄膜进行了表征。此外,利用Gaussian09软件进行理论计算,得到了振动频率、相应的振动赋值及其与拉曼光谱实验结果的相关性。ESIPT机制在AHPBO的光物理中发挥了重要作用,尽管APBO中只有局部激发态的物质发生。
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引用次数: 0
Carbon dioxide sensing at near infrared using zeolitic imidazolate framework-8 (ZIF-8) absorbers 利用沸石咪唑酸框架-8 (ZIF-8)吸收体近红外探测二氧化碳
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298116
A. Volponi, S. G. dos Santos Filho
In this work, it is presented the carbon dioxide sensing at near infrared using zeolitic imidazolate framework-8 (ZIF-8) absorbers. ZIF-8 was synthesized by dissolving 4.3 g of zinc nitrate hexahydrate and 9.7 g of 2-methylimidazole in 800 mL of ethanol. The solution was stirred for 60 min at room temperature and 10mL of the fresh solution was dripped and spread over the rough side of a Si wafer to be dryed at the room temperature during 10 min and annealed at 150°C during 5 h in ultrapure N2. As a result, 11.7-μm thick films were obtained on the Si-p wafers. From FTIR spectroscopy, it was worthy of note that the signal of the asymmetric stretching mode at 2337 cm-1 increases with the increase of the CO2 pressure and with the time interval in which the pressure is kept. Besides the component at 2337 cm-1, a second component was also observed at 2360 cm-1, indicating two different mechanisms of CO2 adsorption. The component at 2337 cm-1 was interpreted as a substantial portion of CO2 molecules inserted into the ZIF-8 film at the contours of the nanocrystals or inside of the framework and the component at 2360 cm-1 was understood as a portion of CO2 molecules adsorbed directly on the surface of the ZIF-8 film. In addition, it was observed a sensitivity of 100 ppm for CO2 if the ZIF-8 loading time at the atmospheric pressure is at least twenty minutes in order to achieve a measurable absorbance inferior limit of 0.01.
本文介绍了利用沸石咪唑盐框架-8 (ZIF-8)吸收体对近红外二氧化碳的传感。以4.3 g六水硝酸锌和9.7 g 2-甲基咪唑溶解于800 mL乙醇中合成ZIF-8。将溶液在室温下搅拌60分钟,取10mL新鲜溶液滴在硅片的粗糙面上,在室温下干燥10分钟,在超纯N2中150℃退火5小时。结果表明,Si-p晶圆上的薄膜厚度为11.7 μm。从FTIR光谱来看,值得注意的是,2337 cm-1处的不对称拉伸模式信号随着CO2压力的增加和压力保持的时间间隔而增加。除了在2337 cm-1处的组分外,在2360 cm-1处还观察到第二个组分,这表明了两种不同的CO2吸附机制。2337 cm-1处的组分被解释为插入到ZIF-8薄膜中纳米晶体轮廓或框架内部的大部分CO2分子,2360 cm-1处的组分被理解为直接吸附在ZIF-8薄膜表面的一部分CO2分子。此外,如果ZIF-8在大气压下加载时间至少为20分钟,为了达到可测量的吸光度下限0.01,则观察到对CO2的灵敏度为100 ppm。
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引用次数: 0
Production of Yb3+/Er3+ codoped PbO-GeO2 pedestal type waveguides for photonic applications 用于光子应用的Yb3+/Er3+共掺杂PbO-GeO2基座型波导的生产
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298112
F. A. Bomfim, D. L. D. Silva, L. Kassab, M. I. Alayo
We report experimental results on pedestal waveguides produced with Yb3+ /Er3+ codoped PbO-GeO2 thin films deposited by RF Sputtering for photonic applications. Losses around 2.5 dB/cm and 1.5 dB/cm were obtained at 632 and 1068 nm, respectively, for waveguides in the 20-100 μm width range. Internal gain of 6.0 dB and 4.0 dB, at 1530 nm, under 980 nm excitation, were measured for waveguides width of 80 and 14 μm, respectively. The present results show the possibility of using Yb3+/Er3+ codoped PbO-GeO2 pedestal waveguide for optical amplifiers.
本文报道了用Yb3+ /Er3+共掺杂PbO-GeO2薄膜进行射频溅射沉积制备用于光子应用的基座波导的实验结果。在20 ~ 100 μm宽度范围内,波导在632 nm和1068 nm处的损耗分别约为2.5 dB/cm和1.5 dB/cm。当波导宽度为80 μm和14 μm时,分别在1530 nm和980 nm激发下测得6.0 dB和4.0 dB的内部增益。本研究结果显示了Yb3+/Er3+共掺PbO-GeO2基波导用于光放大器的可能性。
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引用次数: 2
Use of back gate bias to enhance the analog performance of planar FD and UTBB SOI transistors-based self-cascode structures 利用后门偏置增强平面FD和UTBB SOI晶体管自级联码结构的模拟性能
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298134
R. Doria, D. Flandre, R. Trevisoli, M. de Souza, M. Pavanello
This paper reports, for the first time, the use of back gate bias to improve the intrinsic voltage gain of self-cascode structures composed by planar FD and UTBB SOI MOSFETs. It is shown a voltage gain improvement larger than 10 dB when either a forward back bias is applied to the drain-side transistor or a reverse back bias is applied to the source side device.
本文首次报道了利用反向偏置提高由平面FD和UTBB SOI mosfet组成的自级联码结构的固有电压增益。结果显示,当漏极侧晶体管施加正向反偏置或源侧器件施加反向反偏置时,电压增益提高大于10 dB。
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引用次数: 2
Back Enhanced (BE) SOI pMOSFET 背增强SOI pMOSFET
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298121
R. Rangel, J. Martino
We report for the first time the fabrication of Back Enhanced (BE) SOI pMOSFET. In this device, there is no doping step process like ion implantation, diffusion or other kind of doping for formation of source/drain or channel, and it is a planar device. The source/drain is enhanced (holes accumulated at back interface) by applying a high negative voltage at back gate (substrate). The front gate voltage should be enough to pinch off the channel. This device is very simple to fabricate, and thus allows many universities an opportunity to fabricate your own device for educational purposes. Moreover, this device has also interesting features like a threshold voltage modulate by back gate from negative to positive (resulting in enhanced and depletion mode operation), a subthreshold slope of 77mV/dec, body factor of 1.11 and ION/IOFF of 105. The BE SOI MOSFET parameter is compatible with other devices with the same operation principle, i.e. current flows near to back interface, but it is much easier to fabricate, using only tree photolithography steps.
本文首次报道了背增强(BE) SOI pMOSFET的制备。该器件不存在离子注入、扩散或其他掺杂等形成源漏或通道的掺杂阶跃过程,为平面器件。通过在后门(衬底)施加高负电压,源极/漏极得到增强(在后界面上积累孔)。前门电压应该足够掐断通道。这种设备制造起来非常简单,因此许多大学都有机会制造自己的设备用于教育目的。此外,该器件还具有一些有趣的特性,如后门从负到正的阈值电压调制(导致增强和耗尽模式工作),亚阈值斜率为77mV/dec,体因子为1.11,ION/IOFF为105。BE SOI MOSFET参数与具有相同工作原理的其他器件兼容,即电流在靠近后接口处流动,但它更容易制造,仅使用三个光刻步骤。
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引用次数: 21
Adaptation of the pedagogical approaches for master students in microelectronics in the frame of a French-Chinese joint program 法中联合项目框架下微电子专业硕士生教学方法的调整
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298143
O. Bonnaud, Xuefei Zhong
In the Far-East there are more and more international joint programs between local universities and occidental academic institutions. In the field of microelectronics, joint masters were set-up. The aim is to form on both sides the students in order to give them the skills and the know-how adapted to economic world. The paper deals with the difference of culture based on the origin of the students that leads to a difference of pedagogical approach by the professorial body. The purpose is built on the experience of a French-Chinese joint master. The proposed solutions had proved their efficiency.
在远东地区,当地大学与西方学术机构之间的国际合作项目越来越多。在微电子领域,设立了联合硕士学位。其目的是形成双方的学生,以给他们的技能和诀窍,以适应经济世界。本文从生源文化的差异出发,论述了生源文化的差异所导致的教学方法的差异。目的是建立在一个法中联合大师的经验。提出的解决办法已证明是有效的。
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引用次数: 2
Analysis of analog parameters in NW-TFETs with Si and SiGe source composition at high temperatures 高温下Si和SiGe源组成的nw - tfet模拟参数分析
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298148
C. Bordallo, J. Martino, P. Agopian, R. Rooyackers, A. Vandooren, A. Thean, E. Simoen, C. Claeys
In this work, the analysis of analog parameters in Tunnel-FET devices is performed at high temperatures and for two different source compositions (Si and Si0.73Ge0.27). For high gate voltage, band-to-band tunneling is the dominant mechanism, and due to that, a degradation in output conductance (gD), early voltage (VEA) and intrinsic voltage gain (AV) was observed. In the SiGe devices, trap assisted tunneling is the dominant mechanism at low gate bias, which improves gD, VEA and consequently AV. The temperature increases both ION and IOFF current leading to a degradation of gD, VEA and AV. The transistor efficiency (gm/ID) decreases at high temperature in the “weak inversion region” and improves in the “strong inversion region” at high current.
在这项工作中,在高温和两种不同的源成分(Si和Si0.73Ge0.27)下,对隧道场效应管器件的模拟参数进行了分析。对于高栅极电压,带到带隧穿是主要机制,因此,观察到输出电导(gD),早期电压(VEA)和固有电压增益(AV)的下降。在SiGe器件中,陷阱辅助隧道是低栅极偏压下的主要机制,它提高了gD、VEA,从而提高了AV。温度增加离子和IOFF电流导致gD、VEA和AV下降。晶体管效率(gm/ID)在“弱反转区”高温下降低,在“强反转区”高电流下提高。
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引用次数: 4
期刊
2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)
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