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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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Investigations of Residual Damage in SiC Trench MOSFETs after Single and Multiple Short-Circuit Stress 单次和多次短路应力作用下SiC沟槽mosfet的残余损伤研究
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147463
Mitsuki Takahashi, H. Yano, N. Iwamuro, S. Harada
This study investigated the residual damage to 1.2 kV SiC trench MOSFETs after being subjected to single or multiple short-circuit stress tests. The SiC trench MOSFETs showed higher gate leakage current ($I_{mathrm{G}}$) than $S$ iC planar MOSFETs with short-circuit transient. However, the SiC planar MOSFETs showed a large positive shift of the $I_{mathrm{D}}-V_{text{GS}}$ curve after single short-circuit stress tests despite lower $I_{mathrm{G}}$, while the $S$ iC trench MOSFETs with higher $I_{mathrm{G}}$ did not show such degradation. This could be caused by electrons trapped in the higher density oxide traps in the SiC planar MOSFETs during the single short-circuit stress tests regardless of the size of $I_{mathrm{G}}$. It was also found that multiple short-circuit stress tests to the $S$ iC trench MOSFETs did not affect $I_{mathrm{D}}-V_{text{GS}}$ stability. These results indicate that SiC trench MOSFETs have superior stability against short-circuit stress compared to SiC planar MOSFETs.
研究了1.2 kV SiC沟槽mosfet在单次或多次短路应力试验后的残余损伤。SiC沟槽mosfet具有更高的栅极漏电流($I_{mathrm{G}}$),比S$ iC平面mosfet具有更高的短路瞬态。然而,SiC平面mosfet在单次短路应力测试后,尽管$I_{ mathm {G}}$较低,但$I_{ mathm {D}}-V_{text{GS}}$曲线出现了较大的正移位,而$I_{ mathm {G}}$较高的$S$ iC沟槽mosfet没有出现这种退化。这可能是由于在单次短路应力测试中,电子被捕获在SiC平面mosfet中高密度的氧化物陷阱中,而不管$I_{math {G}}$的大小。同时发现,对$S$ iC沟槽mosfet进行多次短路应力测试并不影响$ i {math {D}}-V_{text{GS}}$的稳定性。这些结果表明,与SiC平面mosfet相比,SiC沟槽mosfet具有更好的抗短路应力稳定性。
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引用次数: 0
Experimental Demonstration of dV/dt Effect on Silicon Carbon SGTO for Pulse Power Applications 脉冲电源用硅碳SGTO的dV/dt效应实验验证
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147445
Chao Liu, Ziwen Chen, Qingyu Liu, Ruize Sun, Wanjun Chen, Zhaoji Li, Bo Zhang, Heng Deng, Yijun Shi
In this work, the dV/dt characteristics of silicon carbide super gate turn-off thyristor (SiC SGTO) is experimentally demonstrated and investigated for the first time. An analytical model of SiC GTO dV/dt immunity is established, which presents the mechanism of dV/dt effect on SiC SGTO. A specially designed SiC SGTO is fabricated and tested at different dV/dt conditions. It is shown that the fabricated SiC SGTO exhibits a high pulse current capability with peak current of 2.4 kA/cm2. And the dV/dt immunity of SiC SGTO changes with varying external gate resistance ($R_{load}$). At $R_{load}=0 Omega$, the device under test (DUT) does not be triggered at dV/dt of $124.8 text{kV}/mumathrm{s}$. While at $R_{load}=51 Omega$, the DUT is triggered at a relatively low dV/dt of $31.8 text{kV}/mumathrm{s}$.
本文首次对碳化硅超级栅关断晶闸管(SiC SGTO)的dV/dt特性进行了实验论证和研究。建立了SiC GTO抗dV/dt的解析模型,揭示了dV/dt效应对SiC GTO抗dV/dt的影响机理。制作了一种特殊设计的SiC SGTO,并在不同的dV/dt条件下进行了测试。结果表明,制备的SiC SGTO具有较高的脉冲电流能力,峰值电流为2.4 kA/cm2。SiC SGTO的dV/dt抗扰度随外部栅极电阻的变化而变化($R_{load}$)。在$R_{load}=0 Omega$,被测设备(DUT)不会在$124.8 text{kV}/mumathrm{s}$的dV/dt处触发。而在$R_{load}=51 Omega$处,DUT在相对较低的dV/dt $31.8 text{kV}/mumathrm{s}$处触发。
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引用次数: 0
Fabrication of Ampere-Class $p$-Cu2O/$n-beta$-Ga2O3 Trench Heterojunction Barrier Schottky Diodes and Double-Pulse Evaluation 安培级$p$- cu2o /$n- β $- ga2o3沟槽异质结势垒肖特基二极管的制备及双脉冲评价
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147584
A. Takatsuka, Hironobu Miyamoto, K. Sasaki, A. Kuramata
Ampere-class $beta$-Ga2O3 trench heterojunction barrier Schottky diodes (THJBSs) were successfully developed for the first time. In fabrication, a lift-off process replacing an etching process was used to form $p$-type Cu2O that works as a heterojunction component, which contributed to the realization of ampere-class devices. Experimental results with the fabricated $beta$-Ga2O3 THJBSs indicate a turn-on voltage of 1.1 V, maximum current of 3.5 A, and specific on-resistance of $21 mathrm{m}Omegacdot text{cm}^{2}$ in forward characteristics. The breakdown voltage was −986 V with leakage current of $1.3times 10^{-3} mathrm{A}/text{cm}^{2}$ in reverse characteristics. In double-pulse measurements, the devices exhibited fast and low-loss switching behavior similar to general Schottky barrier diodes (SBDs), suggesting that the device operated with only majority carriers. In addition, from a high-temperature reverse-bias (HTRB) test, steady reverse current without breakdown was confirmed under the stress for 428 h. These results confirm that the ampere-class $beta$-Ga2O3 THJBSs are suitable for applications requiring fast switching, low loss, and high reliability.
首次成功研制了安培级$beta$ -Ga2O3沟槽异质结势垒肖特基二极管(THJBSs)。在制造过程中,采用提升工艺取代蚀刻工艺,形成$p$型Cu2O,作为异质结元件,有助于实现安培级器件。实验结果表明,$beta$ -Ga2O3 thjbs的导通电压为1.1 V,最大电流为3.5 a,导通电阻为$21 mathrm{m}Omegacdot text{cm}^{2}$。击穿电压为−986 V,漏电流为$1.3times 10^{-3} mathrm{A}/text{cm}^{2}$。在双脉冲测量中,该器件表现出与普通肖特基势垒二极管(sbd)相似的快速低损耗开关行为,表明该器件仅在多数载流子下工作。此外,通过高温反偏置(HTRB)测试,在428小时的应力下确认了稳定的反向电流而没有击穿。这些结果证实了安培级$beta$ -Ga2O3 thjbs适用于需要快速开关,低损耗和高可靠性的应用。
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引用次数: 0
The Impact of the Dead-Time on the Reverse Recovery Behavior of SiC-MOSFET Body Diodes 死区时间对SiC-MOSFET体二极管反向恢复行为的影响
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147719
Xing Liu, Xupeng Li, C. Herrmann, T. Basler
The impact of the dead-time on the body diode reverse recovery behavior for 1.2 kV silicon carbide MOSFETs has been studied in this paper. The plasma formation behavior of the body diode at different temperatures and load currents is investigated firstly. The time for the plasma stabilization can be estimated. Afterwards, the influence of the load current amplitude, the operating temperature, and the switching speed have been investigated with standard double-pulse tests. Different MOSFET cell designs of various manufacturers were compared. It has been found that selecting a suitable dead-time and switching speed is essential for the optimization of the overall losses, especially at higher operation temperatures.
本文研究了死区时间对1.2 kV碳化硅mosfet体二极管反向恢复行为的影响。首先研究了体二极管在不同温度和负载电流下的等离子体形成行为。等离子体稳定的时间是可以估计的。然后,通过标准双脉冲试验研究了负载电流幅值、工作温度和开关速度的影响。比较了不同厂家的MOSFET电池设计。研究发现,选择合适的死区时间和开关速度对于优化总体损耗至关重要,特别是在较高的工作温度下。
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引用次数: 1
Design of 1200-V RC-IGBT for TOYOTA's 5th generation HEV/PHEV systems 用于丰田第五代HEV/PHEV系统的1200 v RC-IGBT设计
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147591
Junpei Okawara, Masaru Senoo, T. Nishiwaki, Y. Yamashita, S. Machida, Yuma Kagata, Masaki Konishi
We developed a new 1200-V reverse conducting insulated gate bipolar transistor with a structure called Schottky and multi-layered anode (a unique carrier injection control approach without lifetime-control) for TOYOTA's 5th generation hybrid electric vehicle and plug-in hybrid electric vehicle systems. The developed devices reduced total losses (conduction and switching losses) by 10% compared to the conventional product. It also reduced the number of parts for the power module and contributed to its 25% size reduction, ultimately contributing to the downsizing of 13% of the power control unit.
我们为丰田第五代混合动力汽车和插电式混合动力汽车系统开发了一种新的1200 v反导绝缘栅双极晶体管,其结构称为肖特基和多层阳极(一种独特的载流子注入控制方法,不需要寿命控制)。与传统产品相比,开发的器件将总损耗(传导和开关损耗)降低了10%。它还减少了电源模块的零件数量,并使其尺寸减小了25%,最终使电源控制单元的尺寸缩小了13%。
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引用次数: 0
700 V/2.5 A Normally-off Ultrathin-barrier AlGaN(<6nm)/GaN MIS-HEMTs with Improved Gate Overdrive Window and PBTI 700 V/2.5 A常关超薄势垒AlGaN(<6nm)/GaN miss - hemts与改进栅极超速驱动窗口和PBTI
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147548
T. Luan, Sen Huang, Yixu Yao, Q. Jiang, Yuhao Wang, Yifei Huang, Chao Feng, Xinhua Wang, Xinyu Liu, Ronghua Wang, Yongshuo Ren, Wanxi Cheng, Huinan Liang
700 V/2.5 A enhancement-mode (E-mode) ultrathin-barrier (UTB)-AlGaN (<6nm)/GaN metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) device was demonstrated on 6-inch GaN-on-Si wafers without AlGaN barrier recess. A combination of plasma-enhanced atomic-layer-deposited (PEALD) AlN and low-pressure chemical-vapor-deposited (LPCVD) SiNx passivation layer is adopted for the recovery of the two-dimensional electron gas (2DEG) in the access region of the E-mode UTB-AlGaN/GaN MIS-HEMTs. Compared to a controlled MOS-Channel-HEMT (MOSC-HEMT) with a fully recessed gate, the fabricated AlGaN-recess-free E-mode GaN-on-Si MIS-HEMTs exhibit a threshold voltage ($V_{text{TH}}$) of 0.1 V with good uniformity, a maximum drain current of 2.5 A, and a breakdown voltage over 700 V. The device also features a decent gate overdrive window and positive bias temperature instability (PBTI). The UTB-AlGaN/GaN-on-Si technology platform is highly preferred for an AlGaN-recess-free fabrication and integration of GaN-based power devices and ICs.
在无AlGaN势垒凹槽的6英寸GaN-on- si晶片上,展示了700 V/2.5 A增强模式(E-mode)超薄势垒(UTB)-AlGaN (<6nm)/GaN金属-绝缘体-半导体高电子迁移率晶体管(MIS-HEMTs)器件。采用等离子体增强原子层沉积(PEALD) AlN和低压化学气相沉积(LPCVD) SiNx钝化层的组合,回收了e模UTB-AlGaN/GaN MIS-HEMTs的入口区域的二维电子气(2DEG)。与具有全凹槽栅极的可控mos - hemt (MOSC-HEMT)相比,制备的无algan凹槽的e模GaN-on-Si mis - hemt具有0.1 V的阈值电压($V_{text{TH}}$),均匀性好,最大漏极电流为2.5 a,击穿电压超过700 V。该器件还具有良好的栅极超速窗口和正偏置温度不稳定性(PBTI)。UTB-AlGaN/GaN-on-Si技术平台是基于gan的功率器件和ic的无algan凹槽制造和集成的首选技术。
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引用次数: 0
Ultra-Fast Positive Gate Bias Stress (<100ns) to Understand the Hole Injection in Power p-GaN HEMTs 超快速正栅偏置应力(<100ns)理解功率p-GaN hemt的空穴注入
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147734
Zhen-Hong Huang, Wei-Syuan Lin, T. Lo, Shun-Wei Tang, Szu-Chia Chen, D. Wellekens, M. Borga, N. Posthuma, B. Bakeroot, S. Decoutere, Tian-Li Wu
Ultra-fast positive gate bias stress (<100ns) in p-GaN HEMTs is reported for the first time to investigate the hole injection/trapping phenomena in power p-GaN HEMTs, including the analysis from the time-dependent TCAD simulations. The results indicate that the negative threshold voltage (VTH) shift caused by the hole injection and trapping can be minimized under the ultra-fast positive gate bias, suggesting that p-GaN power HEMTs are promising for the fast turn-on operation that can be immune to PBTI instability.
本文首次报道了p-GaN hemt中的超快速正栅极偏置应力(<100ns),用于研究功率p-GaN hemt中的空穴注入/捕获现象,包括来自时间相关TCAD模拟的分析。结果表明,在超快正栅极偏压下,由空穴注入和捕获引起的负阈值电压(VTH)偏移可以最小化,这表明p-GaN功率hemt有望实现不受PBTI不稳定性影响的快速导通操作。
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引用次数: 0
A Novel Lateral Power MOSFET with Ultra-low Energy Consumption and Extraordinary Robustness 一种具有超低能耗和超强鲁棒性的新型横向功率MOSFET
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147729
Junji Cheng, Tao Zhong, B. Yi, Haimeng Huang, Keqiang Ma, Xinkai Guo, Hongqiang Yang, Zhiming Wang, Guoyi Zhang
A novel lateral double-diffused metal-oxide-semiconductor field-effect transistor (LDMOS) with fourfold charge-compensation is proposed. The first feature of the proposed device is that a P-bury layer and a surface high-$k$ (HK) film jointly compensate the drift region in an all-round way. The second feature is that the HK film is also contributed to resisting the adverse effects caused by charge deviations. Hence, due to the above two features, the proposed device is able to obtain not only excellent performance but also good robustness. According to the simulation results, in comparison with the conventional LDMOS with single, double and triple charge-compensation, the proposed one gets a specific on-resistance reduced by 48%, 37% and 17%, respectively. Its figure of merit reaches 15.7 MW/cm2, which is superior to the prior art. Moreover, the proposed device presents much better immunity to the charge deviations and the interface charges.
提出了一种具有四倍电荷补偿的横向双扩散金属氧化物半导体场效应晶体管(LDMOS)。该器件的第一个特点是p埋层和表面高k (HK)膜共同对漂移区进行全方位补偿。第二个特点是,HK薄膜还有助于抵抗电荷偏差带来的不利影响。因此,由于上述两个特征,所提出的器件不仅能够获得优异的性能,而且具有良好的鲁棒性。仿真结果表明,与传统的单电荷补偿、双电荷补偿和三电荷补偿的LDMOS相比,所提方案的导通电阻分别降低了48%、37%和17%。其优点系数达到15.7 MW/cm2,优于现有技术。此外,该器件对电荷偏差和接口电荷具有较好的抗扰性。
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引用次数: 0
Method to Study Dynamic Depletion Behaviors in High-Voltage ($BV=1.4 text{kV}$) p-GaN Gate HEMT on Sapphire Substrate 蓝宝石衬底上高压($BV=1.4 text{kV}$) p-GaN栅极HEMT动态损耗行为研究方法
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147490
Jiawei Cui, Yanlin Wu, Junjie Yang, Jingjing Yu, Teng Li, Xuelin Yang, B. Shen, Maojun Wang, Jin Wei
This study presents an investigation of high-voltage enhancement-mode p-GaN gate HEMTs on a sapphire substrate. The breakdown voltage of the devices shows a linear relationship with the $L_{text{GD}}$. For $L_{text{GD}}=27 mumathrm{m}$, the device exhibits a high breakdown voltage of 1412 V. The threshold voltage is 0.9 V. The $R_{text{on}}$ is $17.7 Omegacdot text{mm}$, and the specific on-resistance $R_{text{sp}}$ is $6.73 mathrm{m}Omegacdot text{cm}^{2}$. To measure the depletion region directly for high-voltage devices, depletion-testing structures were fabricated alongside the HEMTs. The depletion lengths were determined based on the I-$V$ characteristics of the structures, with the pinch-off voltage of the I-$V$ characteristics correlated to the depletion length. Additionally, using pulse waveforms as the gate control signals, the formation of the depletion region under dynamic conditions was revealed.
本文研究了蓝宝石衬底上的高压增强模式p-GaN栅极hemt。器件的击穿电压与电流呈线性关系 $L_{text{GD}}$. 因为 $L_{text{GD}}=27 mumathrm{m}$,该器件具有1412 V的高击穿电压。阈值电压为0.9 V。The $R_{text{on}}$ 是 $17.7 Omegacdot text{mm}$,以及比导通电阻 $R_{text{sp}}$ 是 $6.73 mathrm{m}Omegacdot text{cm}^{2}$. 为了直接测量高压器件的耗尽区,在hemt旁边制作了耗尽测试结构。耗尽长度是根据I-确定的$V$ 结构的特性,与I-的引脚电压$V$ 特征与耗尽长度相关。此外,利用脉冲波形作为栅极控制信号,揭示了在动态条件下耗尽区的形成。
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引用次数: 0
Monolithic FET-Controlled GaN Driver with Pre-Boosting and Robust Dead Time Control for DToF LiDAR Application 具有预升压和鲁棒死区时间控制的单片fet控制GaN驱动器在dof激光雷达中的应用
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147581
Chun-wang Zhuang, Xin Ming, Zijie Ye, Yao Qin, Zhikang Lin, W. Li, H. Yan, Bo Zhang
For monolithic GaN LiDAR driver, in order to achieve high speed narrow pulse and low power consumption, pre-boosting and robust dead time (PBRD) control is proposed to enhance pull-up capability and limit short-through current during transient. A non-BGR under-voltage lockout (UVLO) is also provided for preventing the driver from operating in the event of supply voltage failure. Experimental results show that the proposed driver achieves peak load current of 10A and 2ns pulse width at the operation frequency of 20MHz. The fall and rise time of output pulse are 310ps and 334ps, respectively, and measured dynamic power is 80mW at the operation frequency of 10MHz.
对于单片GaN激光雷达驱动器,为了实现高速窄脉冲和低功耗,提出了预升压和鲁棒死区(PBRD)控制,以提高暂态时的上拉能力和限制短通电流。还提供了一个非bgr欠压锁定(UVLO),用于防止驱动器在电源电压故障时运行。实验结果表明,该驱动器在工作频率为20MHz时,峰值负载电流为10A,脉宽为2ns。输出脉冲下降和上升时间分别为310ps和334ps,工作频率为10MHz时实测动态功率为80mW。
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引用次数: 0
期刊
2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
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