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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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Compact 200V Diode Constructed on Thick SOI Wafer 在厚SOI晶圆上构造的紧凑的200V二极管
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147711
J. Pjencak, Ladislav Seliga
In the recent decade, the modern Smart Power Applications drive BCD technologies to higher voltage nodes (>100V), lower cost and isolation improvement. Thick SOI technology is one of the options providing sufficient breakdown and desired power. Doping of device wafer is setup low to support necessary spread of depletion region. Typical HV diode is made by implanting a layer of opposite dopant type. Lateral distance between anode and cathode contacts is then defining diode area and become more significant for higher operating voltage. Our work demonstrates a new approach that enable significantly smaller size without additional cost.
近十年来,现代智能电源应用将BCD技术推向更高的电压节点(>100V),更低的成本和隔离改进。厚SOI技术是提供足够击穿和所需功率的选择之一。器件晶片的掺杂设置较低,以支持必要的耗尽区扩展。典型的高压二极管是通过植入一层相反类型的掺杂而制成的。阳极和阴极触点之间的横向距离定义了二极管的面积,并且在较高的工作电压下变得更加重要。我们的工作展示了一种新的方法,可以在不增加成本的情况下实现更小的尺寸。
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引用次数: 0
A Systematic Characterization Method for Time-resolved Stability and Reliability Issues on Lateral GaN Power Devices 横向GaN功率器件时间解决稳定性和可靠性问题的系统表征方法
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147699
Yifei Huang, Q. Jiang, Sen Huang, Xinyu Liu
In this work, three testing modes, including continuous hard switching testing (HSW), high-voltage DC stress testing (DC) and recovery testing (RE), are implemented to characterize time-resolved dynamic $R_{text{ON}}$ behaviors of GaN HEMT devices, based on the inductive-load evaluation platform. The proposed stressing pattern (DC-HSW-DC-RE) enables the separation of de-stress- and transient-stress-induced dynamic $R_{text{ON}}$. Based on the stressing pattern, a novel physical-based characterization method is proposed to identify the irreversible degradation of dynamic $R_{text{ON}}$, featuring excellent sensitivity when compared with the traditional methods. In addition, lifetime acceleration experiments are carried out, and the irreversible $R_{text{ON}}$ degradation exhibits a strong dependence on voltage and current, but a weak dependence on temperature.
本文基于电感负载评估平台,实现了连续硬开关测试(HSW)、高压直流应力测试(DC)和恢复测试(RE)三种测试模式,以表征GaN HEMT器件的时间分辨动态$R_{text{ON}}$行为。所提出的应力模式(DC-HSW-DC-RE)能够实现去应力和瞬态应力诱导的动态$R_{text{ON}}$分离。基于应力模式,提出了一种新的基于物理的表征方法来识别动态$R_{text{on}}$的不可逆退化,与传统方法相比具有优异的灵敏度。此外,还进行了寿命加速实验,发现不可逆的$R_{text{ON}}$降解对电压和电流有较强的依赖性,而对温度的依赖性较弱。
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引用次数: 0
Novel Diode Structure for Ultra-Law-Loss RC-IGBTs 超律损耗rc - igbt新型二极管结构
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147707
Y. Yamashita, S. Machida, J. Saito, Masaru Senoo
Reverse conducting integrated gate bipolar transistor (RC-IGBT) features a monolithically integrated diode. In the case of diodes, a lifetime killer is generally introduced because of large switching losses caused by accumulated carriers during forward conduction. However, lifetime killer causes an increase in IGBT on-resistance. This study proposes Schottky and Multi-layered Anode (SMA) structures for low loss RC-IGBT to control diode performance while maintaining IGBT characteristics. Results show that the proposed structure reduces the reverse recovery charge by 41 % compared to a conventional structure. In contrast, in the IGBT characteristics, the threshold voltage, on-voltage, and turn-off characteristics remain practically unchanged.
反导集成栅双极晶体管(RC-IGBT)具有单片集成二极管。在二极管的情况下,由于在正向导通过程中载流子累积造成的巨大开关损耗,通常引入寿命杀手。然而,终生杀手导致IGBT导通抵抗增加。本研究提出了用于低损耗RC-IGBT的肖特基和多层阳极(SMA)结构,以控制二极管的性能,同时保持IGBT的特性。结果表明,与传统结构相比,该结构可减少41%的反向回收费用。相反,在IGBT特性中,阈值电压、导通电压和关断特性几乎保持不变。
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引用次数: 0
Stability Analysis of Parallel SiC power MOSFETs based on a Virtual Prototype 基于虚拟样机的并联SiC功率mosfet稳定性分析
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147660
Michel Nagel, Ivana Kovacevic-Badstuebner, Race Salvatore, D. Popescu, B. Popescu, D. Romano, Giulio Antonini, U. Grossner
This paper presents a novel modeling approach for assessing the stability of SiC power MOSFETs connected in parallel considering the voltage-dependent MOSFET C-V and I-V characteristics, as well as the frequency-dependent PCB layout parasitics. It is shown that the switching circuit is time-variant and hence, has to be analyzed both in the time-and frequency-domain to have a complete understanding of the (un)stable oscillations. Such a two-domain analysis can be beneficial for designing optimized circuits with parallel SiC power MOSFETs.
本文提出了一种新的建模方法,用于评估并联的SiC功率MOSFET的稳定性,考虑了电压相关的MOSFET C-V和I-V特性,以及频率相关的PCB布局寄生。结果表明,开关电路是时变的,因此,必须在时域和频域进行分析,才能完全理解(非)稳定振荡。这种双域分析有助于设计具有并联SiC功率mosfet的优化电路。
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引用次数: 0
Mechanism of Threshold Voltage Instability in SiC MOSFETs and Impacts on Dynamic Switching SiC mosfet阈值电压不稳定机理及其对动态开关的影响
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147608
Junsong Jiang, Mohan Tian, Wen Ji, Zhihao Hu, Haoran Li, Yuzheng Guo, Zhaofu Zhang, Xi Tang, Cungang Hu, Wenping Cao
The threshold voltage ($V_{text{TH}}$) instability of silicon carbon (SiC) metal-oxide semiconductor field-effect transistors (MOSFETs) are investigated by pulsed bias characterizations. The $V_{text{TH}}$ instability is observed at a time range from nanoseconds (ns) to seconds. The bias induced $V_{text{TH}}$ shift caused by is observed within 40 ns. It is also found that a negative gate bias induces a negative $V_{text{TH}}$ shift while a positive gate bias induces a positive $V_{text{TH}}$ shift. The carrier trapping and de-trapping processes into the gate oxide cause the $V_{text{TH}}$ instabilities and they are explained by the energy band diagrams. The TCAD simulations are performed to demonstrate the exsistence of the electric fields to sweep carriers into the trapping region under both positive and negative gate bias conditions. The capacitance-voltage characterizations and first-principles calculations are further carried out to evaluate the defect distribution and explore the intrinsic source of high-density interface traps near the SiC-SiO2 interface.
利用脉冲偏置特性研究了硅碳金属氧化物半导体场效应晶体管(mosfet)阈值电压($V_{text{TH}}$)的不稳定性。$V_{text{TH}}$不稳定性在纳秒(ns)到秒的时间范围内被观察到。在40 ns内观察到由偏置引起的$V_{text{TH}}$移位。此外,还发现负栅极偏置诱导负的$V_{text{TH}}$移位,而正栅极偏置诱导正的$V_{text{TH}}$移位。栅极氧化物中的载流子捕获和释放过程导致了$V_{text{TH}}$不稳定性,并用能带图解释了这一不稳定性。通过TCAD仿真证明了在正负栅极偏置条件下,电场的存在将载流子扫入捕获区。通过电容电压表征和第一性原理计算,进一步评估了SiC-SiO2界面附近高密度界面陷阱的缺陷分布,并探索了其本征源。
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引用次数: 0
Mechanism Analysis and Improved Model for HCI in 200V STI-based Triple RESURF LDMOS With n-p-n Layer 200V si基n-p-n层三层重熔LDMOS HCI机理分析及改进模型
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147414
Zuquan Zheng, M. Qiao, Wenliang Liu, Xingrui Long, Penglong Xu, Chunxia Ma, Feng Lin, Bo Zhang
This paper researches the hot carrier injection (HCI) degradation of 200V STI-based triple reduced surface field (RESURF) lateral double-diffused MOSFET (LDMOS). The degradation phenomenon of specific on-resistance ($R_{text{on},text{sp}}$) increasing, then decreasing and finally increasing at low gate voltage ($V_{text{gs}}$) was discovered in HCI test. First electron injection, then hole injection, and finally interface state generation, three mechanisms were put forward to account for this degradation phenomenon. With the assistance of TCAD tools, it can be concluded that the degradation of $R_{text{on},text{sp}}$ caused by both electron traps and hole traps is much greater at STI corner than elsewhere for the same amount. Furthermore, an improved model based on above three mechanisms is proposed. This model introduces a parameter $alpha(V_{text{gs}})$ to characterize the influence of impact ionization peak locations on degradation.
研究了200V si基三还原表面场(RESURF)横向双扩散MOSFET (LDMOS)的热载流子注入(HCI)降解。HCI试验发现在低栅极电压($V_{text{gs}}$)下,比导通电阻($R_{text{on},text{sp}}$)先增大后减小,最后增大的退化现象。首先是电子注入,然后是空穴注入,最后是界面态的生成。在TCAD工具的帮助下,可以得出结论,在相同数量的情况下,电子陷阱和空穴陷阱对$R_{text{on}},text{sp}}$的退化要比其他地方大得多。在此基础上,提出了一种基于上述三种机制的改进模型。该模型引入参数$alpha(V_{text{gs}})$来表征冲击电离峰位置对降解的影响。
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引用次数: 0
A SEB Hardened Trench Gate DMOS with HfO2 Gate Dielectric and Decelerating Electric Field Layer in Parasitic NPN Base 一种具有HfO2栅极介质和减速电场层的寄生NPN基SEB硬化沟栅DMOS
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147721
Jian Fang, Yibo Lei, Zhou Fang, Lijuan Shi, Lingli Tang, Xihe Yang, Ling Yan, Bo Zhang
The paper proposes a single-event burnout (SEB) hardened trench-gate DMOS with HfO2 gate dielectric and a decelerating electric field layer in the parasitic NPN. The proposed device presents remarkable potential to tolerate SEB. High-$k$ gate dielectric (HfO2) is adopted to obtain a higher channel doping concentration while maintaining the normal $V_{text{TH}}$, thereby suppressing the secondary breakdown of parasitic NPN. The decelerating electric field layer will reduce the $beta$ of parasitic NPN. For the hardened trench gate DMOS with breakdown voltage of 572V under irradiation linear energy transfer value of 1pC/µm (96MeV/mg/cm2), numerical results (without considering the self-heating effect) show that the SEB threshold voltage is 554V, while the conventional device's is 132V. The SEB threshold voltage is increased by 32%. When the LET value is smaller than 0.6pC/µm, the SEB threshold voltage is over 570V. The SEB threshold voltage of proposed device almost equals its original breakdown voltage. It is meaningful for SEB hardening design of power devices.
本文提出了一种具有HfO2栅极介质和寄生NPN减速电场层的单事件烧坏(SEB)强化沟栅DMOS。所提出的装置具有显著的耐受SEB的潜力。采用高k栅极介电介质(HfO2)在保持正常V_{text{TH}}$的同时获得较高的通道掺杂浓度,从而抑制寄生NPN的二次击穿。减速电场层将降低寄生NPN的$beta$。对于击穿电压为572V的硬化沟槽栅DMOS,在辐照线性能量传递值为1pC/µm (96MeV/mg/cm2)的情况下,不考虑自热效应的SEB阈值电压为554V,而传统器件的阈值电压为132V。SEB阈值电压提高32%。当LET值小于0.6pC/µm时,SEB阈值电压大于570V。所提出器件的SEB阈值电压几乎等于其原始击穿电压。这对电力设备的SEB硬化设计具有一定的指导意义。
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引用次数: 0
Improvement of HCI and HTRB Reliability on 100V pLDMOS for 48V Battery Applications 用于48V电池的100V pLDMOS HCI和HTRB可靠性的改进
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147539
Dong-Hoon Park, Min-Woo Kim, Jun-Ki Min, Kwang-Young Ko, Sang-Gi Lee
In this paper, improvement of gate oxide breakdown and BVdss walk-in after HCI stress of 100V PLDMOS devices was studied. The poly field plate extension applied at 60V or lower in the previous study could improve gate oxide breakdown by HCI of 100V PLDMOS. However, BVdss walk-in occurred after on-stress due to a change in the electric field distribution by changing the poly field plate. Changes in electrical potential and impact ionization were confirmed through TCAD simulation and improvements in HCI and HTRB of 100V PLDMOS devices were achieved by changing the metal field plates and N-type sinker design, in addition to poly field plates. Based on these results, we propose a novel structure for 100V class PLDMOS.
本文研究了100V PLDMOS器件在HCI应力作用下栅极氧化物击穿和BVdss游走的改善。在之前的研究中,在60V或更低的电压下应用多场极板扩展,可以改善100V PLDMOS的HCI栅氧化物击穿。然而,由于改变多场板的电场分布,使BVdss在加应力后发生了walk-in。通过TCAD仿真证实了电势和冲击电离的变化,并通过改变金属场板和n型下沉设计,以及改变多场板,实现了100V PLDMOS器件的HCI和HTRB的改善。基于这些结果,我们提出了一种新的100V级PLDMOS结构。
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引用次数: 0
5 A/1.17 kV NiO/$beta$-Ga2O3 heterojunction power rectifier with high-temperature operation capability up to 548 K 5 A/1.17 kV NiO/$beta$-Ga2O3异质结功率整流器,高温工作能力高达548 K
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147400
Zhengpeng Wang, H. Gong, Xinxin Yu, F. Ren, S. Gu, Youdou Zheng, Rong Zhang, Jiandong Ye
Industrial power devices are required to conduct at least several amperes current in the on-state while blocking at least hundreds of volts in the off-state. In this work, high-temperature operational $text{NiO}/beta-text{Ga}_{2}mathrm{O}_{3}$ vertical p-n heterojunction diodes (HJDs) with ampere-level forward current and kV -level reverse breakdown voltage $(V_{b})$ have been demonstrated. The temperature-dependent current-voltage characteristics reveal that trap-assisted tunneling (TAT) current dominates the forward conduction mechanism of HJDs, while the leakage current is dominated by variable range hopping (VRH) mechanism under the high reverse bias. The resultant large-area (1×1 mm2) HJD rectifiers exhibit a superior forward on-state current of 5 A, a nearly-unity ideality factor and a large $V_{b}$ of 1.17 kV operated at a high temperature up to 548 K. The low deterioration rate of forward on-state current (1.24 mA/K at 4 V) and $V_{b}$ (0.95 V/K) with temperature implies high reliability of HJD, evidencing the promising potential of Ga2O3-based power diodes in harsh-environment power systems.
工业电源设备需要在导通状态下传导至少几安培的电流,而在关断状态下阻断至少数百伏的电流。在这项工作中,已经证明了具有安培级正向电流和kV级反向击穿电压(V_{b})的高温工作的垂直p-n异质结二极管。温度相关的电流-电压特性表明,陷阱辅助隧道(TAT)电流主导了hjd的正向传导机制,而高反向偏置下的泄漏电流则以变范围跳变(VRH)机制主导。由此得到的大面积(1×1 mm2) HJD整流器具有5 a的正向导通电流,几乎一致的理想因数和1.17 kV的大V_{b}$,可在高达548 K的高温下工作。正向导通电流(4 V时为1.24 mA/K)和$V_{b}$ (0.95 V/K)随温度的低劣化率意味着HJD的高可靠性,证明了ga2o3基功率二极管在恶劣环境电力系统中的良好潜力。
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引用次数: 0
Low Loss Lateral Insulated Gate Bipolar Transistor with an Anode PNP Structure and Integrated Freewheeling Diode 具有阳极PNP结构和集成自由转二极管的低损耗侧绝缘栅双极晶体管
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147701
Yuxi Wei, Jie Wei, Pengcheng Zhu, Kemeng Yang, Kaiwei Dai, Jie Li, Junnan Wang, Bo Zhang, X. Luo
A low loss lateral insulated gate bipolar transistor (LIGBT) features an anode PNP structure and an integrated freewheeling diode (iFWD), named as PD LIGBT, is proposed and investigated by simulation. For the anode PNP structure, its P+ Collector shorts to the potential extracting contact above the P-top layer of iFWD, and its emitter is the anode of the LIGBT. During turning off period with the increasing $V_{text{AK}}$, the PNP is activated and hole current is allowed to flow through the PNP to iFWD. It suppresses the hole injection of the anode into the N-drift region, and thus the current density decreases quickly. Therefore, the PD LIGBT achieves a fast turning-off speed and reduces the $E_{text{off}}$ significantly. In the on-state with low anode voltage $V_{text{AK}}$, the PNP is not activated, hence the PD LIGBT gets into bipolar conduction without snapback effect. Moreover, the iFWD can realize reverse conduction and obtain a low reverse recovery charge ($Q_{text{rr}}$). Compared with the SSA and STA LIGBTs, the proposed LIGBT reduces the $E_{text{off}}$ by 81% and 70% at the same on-state voltage drop ($V_{text{on}}$), respectively. The reverse recovery charge of the proposed device is reduced by 49.5% compared with that of SSA LIGBT.
提出了一种具有阳极PNP结构和集成自由旋转二极管(iFWD)的低损耗侧绝缘栅双极晶体管(light),并对其进行了仿真研究。对于阳极PNP结构,其P+集电极短接于iFWD P顶层以上的抽电位触点,其发射极为light的阳极。在关断期间,随着$V_{text{AK}}$的增大,PNP被激活,空穴电流允许通过PNP流向iFWD。它抑制了阳极向n漂移区注入空穴,因此电流密度迅速下降。因此,PD light实现了快速的关闭速度,并显著降低了$E_{text{off}}$。在低阳极电压$V_{text{AK}}$的导通状态下,PNP未被激活,因此PD light进入双极导通,无回吸效应。此外,iFWD可以实现反向导通,获得较低的反向回收电荷($Q_{text{rr}}$)。与SSA和STA灯相比,在相同导通电压降($V_{text{on}}$)下,该灯分别将$E_{text{off}}$降低81%和70%。与SSA light相比,该装置的反向回收费用降低了49.5%。
{"title":"Low Loss Lateral Insulated Gate Bipolar Transistor with an Anode PNP Structure and Integrated Freewheeling Diode","authors":"Yuxi Wei, Jie Wei, Pengcheng Zhu, Kemeng Yang, Kaiwei Dai, Jie Li, Junnan Wang, Bo Zhang, X. Luo","doi":"10.1109/ISPSD57135.2023.10147701","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147701","url":null,"abstract":"A low loss lateral insulated gate bipolar transistor (LIGBT) features an anode PNP structure and an integrated freewheeling diode (iFWD), named as PD LIGBT, is proposed and investigated by simulation. For the anode PNP structure, its P+ Collector shorts to the potential extracting contact above the P-top layer of iFWD, and its emitter is the anode of the LIGBT. During turning off period with the increasing $V_{text{AK}}$, the PNP is activated and hole current is allowed to flow through the PNP to iFWD. It suppresses the hole injection of the anode into the N-drift region, and thus the current density decreases quickly. Therefore, the PD LIGBT achieves a fast turning-off speed and reduces the $E_{text{off}}$ significantly. In the on-state with low anode voltage $V_{text{AK}}$, the PNP is not activated, hence the PD LIGBT gets into bipolar conduction without snapback effect. Moreover, the iFWD can realize reverse conduction and obtain a low reverse recovery charge ($Q_{text{rr}}$). Compared with the SSA and STA LIGBTs, the proposed LIGBT reduces the $E_{text{off}}$ by 81% and 70% at the same on-state voltage drop ($V_{text{on}}$), respectively. The reverse recovery charge of the proposed device is reduced by 49.5% compared with that of SSA LIGBT.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126411086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
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