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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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High Performance Dual Field Plate Trench MOSFETs for Middle-voltage Applications 用于中压应用的高性能双场极板沟槽mosfet
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147550
Shuhei Tokuyama, Hiroaki Kato, T. Kachi, K. Miyashita, Kenya Kobayashi
We propose a 200 V-class dual-field-plate (DFP) trench MOSFET (DFP MOSFET), which has multiple field-plate of different length inside the deep trench. This structure can be formed by simple DFP process. To clarify optimum design of DFP structure and reveal its potential, we verify the significant device parameters by TCAD simulation. We obtained a specific on-resistance of $147.7 mathrm{m}Omegacdot text{mm}^{2}$ at a breakdown voltage of 237 V, which is the best result in comparable voltage rating MOSFETs.
我们提出了一种200v级双场极板(DFP)沟槽MOSFET (DFP MOSFET),它在深沟槽内具有多个不同长度的场极板。这种结构可以通过简单的DFP过程形成。为了明确DFP结构的优化设计,揭示其潜力,我们通过TCAD仿真验证了重要的器件参数。在237v击穿电压下,我们获得了$147.7 mathrm{m}Omegacdot text{mm}^{2}$的导通电阻,这是同类额定电压mosfet中最好的结果。
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引用次数: 0
Failure Process of GaN-HEMTs by Repetitive Overvoltage Stress 重复过电压应力作用下gan - hemt的失效过程
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147411
W. Saito, S. Nishizawa
Failure process by overvoltage stress in GaN-HEMTs is discussed by burst UIS waveforms and C-V characteristics shift. One of the critical disadvantages of GaN-HEMTs is its lack of the UIS withstanding capability, because there is no removal structure of holes, which generated by the avalanche breakdown. Although overvoltage margin for the GaN power converters has been discussed by dynamic breakdown voltage, failure process by overvoltage stress has not been discussed sufficiently. This paper shows that overvoltage stress generated local shunt path between drain and substrate, graduated dielectric breakdown and hole trap/de-trap were observed by repetitive overvoltage stress. These results verify catastrophic failure of GaN-HEMTs by overvoltage stress is ascribed to a percolation process activated by the high-vertical electric field in hetero-epitaxial layers.
通过脉冲波形和C-V特性位移分析了gan - hemt的过电压应力失效过程。gan - hemt的一个关键缺点是它缺乏抗UIS能力,因为它没有雪崩击穿产生的孔的去除结构。虽然已经通过动态击穿电压讨论了氮化镓功率变换器的过电压裕度,但过电压应力引起的失效过程尚未得到充分的讨论。通过重复过电压应力可以观察到漏极与衬底之间局部分路产生的过电压应力、梯度介质击穿和空穴阱/去阱。这些结果验证了gan - hemt在过电压应力下的灾难性失效是由异质外延层中高垂直电场激活的渗透过程引起的。
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引用次数: 0
An Electro-Thermal Co-Designed Ga2O3[100] Trench Power Diode Featuring Ferroelectric Dielectric 基于铁电介质的Ga2O3[100]沟槽功率二极管
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147506
Yuan Li, Yitong Yang, Xiaoli Lu, Yunlong He, Xiao-hua Ma, Yue Hao
One major roadblock toward the maturation of Ga2O3 technology is device overheating. For Ga2O3 trench devices, although with the higher thermal conductivity (kT[010]) of [100] trench sidewall compared to [010] trench sidewall, the Ga2O3 trench devices with [100] trench are rarely adopted, due to the worst sidewall interface quality induced by sidewall-orientation-dependent etch damage, even after the wet etch repair using acids. For the first time, the proposed electro-thermal co-designed Ga2O3 [100] trench diode based on optimized trench sidewall interface quality, featuring ferroelectric dielectric, exhibits better performance compared with Ga2O3 [010] trench diode. Under the identical power consumption, the Ga2O3 [100] trench diode shows the lowest center junction temperature, which is 9 degree lower than that of Ga2O3 [010] trench diode. The new interface-quality optimization strategy can significantly provide potential for electro-thermal optimization of Ga2O3 trench devices.
阻碍Ga2O3技术成熟的一个主要障碍是器件过热。对于Ga2O3沟槽器件,尽管与[010]沟槽相比,[100]沟槽的导热系数(kT[010])更高,但具有[100]沟槽的Ga2O3沟槽器件很少被采用,因为即使在使用酸进行湿式蚀刻修复后,由于侧壁取向相关的蚀刻损伤导致的最差的侧壁界面质量。本文提出的基于优化沟槽边壁界面质量的电热协同设计Ga2O3[100]沟槽二极管,具有铁电介质,与Ga2O3[010]沟槽二极管相比,首次表现出更好的性能。在相同功耗下,Ga2O3[100]沟槽二极管的中心结温最低,比Ga2O3[010]沟槽二极管低9度。新的界面质量优化策略为Ga2O3沟槽器件的电热优化提供了重要的潜力。
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引用次数: 0
0.18µm 200V SOI-BCD Technology with Ultra-Low Specific On-Resistance LDMOS for Automotive Application 0.18µm 200V SOI-BCD技术,超低比导通电阻LDMOS汽车应用
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147740
Li Lu, Shulang Ma, Jinyu Xiao, Feng Lin, Shuxian Chen, Hong Shao, Sen Zhang, Kui Xiao, Yixin Dai, Zhihan Zhu, Jia Ma, Jiaxing Wei, Long Zhang, Siyang Liu, Weifeng Sun
In this work, a new 200V 0.18µm SOI-BCD platform has been developed comprehensively including the wide-SOA n&pLDMOS, low-Ron nLDMOS and LIGBT. It is noted that a ultra-thin N-drift has been skillfully applied below the shallow-trench-isolation (STI) structure for the low-Ron nLDMOS to realize an ultra-low specific on-state resistance (Ron, sp) with 20% decrease than the best reported study and the off-state breakdown voltage (BVoff) is also unsacrificed. Moreover, a linear buffer near the drain side has been arranged in the wide-SOA n&pLDMOS for high on-state breakdown voltage (BVon). Finally, the reliability concerns have been also investigated fully including the negative bias temperature instability (NBTI) for the wide-SOA pLDMOS and hot carrier injection (HCI) for nLDMOS.
在这项工作中,开发了一个新的200V 0.18µm SOI-BCD平台,包括宽soa n&pLDMOS,低ron nLDMOS和light。值得注意的是,在低Ron nLDMOS的浅沟隔离(STI)结构下巧妙地应用了超薄n漂移,实现了超低的比导通状态电阻(Ron, sp),比目前报道的最好的研究降低了20%,并且也没有牺牲导通状态击穿电压(BVoff)。此外,在宽soa n&pLDMOS中,在漏极侧附近设置了一个线性缓冲器,用于高导通击穿电压(BVon)。最后,对可靠性问题也进行了全面的研究,包括宽soa pLDMOS的负偏置温度不稳定性(NBTI)和nLDMOS的热载流子注入(HCI)。
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引用次数: 0
Total-Ionizing-Dose Radiation Induced Gate Damage in High Voltage P-GaN Gate HEMTs 高压P-GaN栅极hemt中总电离剂量辐射引起的栅极损伤
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147501
Zhao Wang, Xin Zhou, Zhanghua Wu, Chen Chen, Qi Zhou, M. Qiao, Zhaoji Li, Bo Zhang
TID radiation induced damage in metal/p-GaN/AlGaN/GaN gate stack of p-GaN gate HEMTs is studied and the damage mechanisms highly correlated with electric field are revealed. For on-state bias, irradiation damages related to donor-like traps are located at the reverse-biased metal/p-GaN Schottky junction with high electric field. The depletion region in the Schottky junction would extend, and the trap-assisted tunneling mechanism could be introduced to increase the forward gate current. For off-state bias, irradiation damages are located at the reverse-biased p-GaN/AlGaN/GaN (p-i-n) junction in relation to holes trapped in the AlGaN barrier and the GaN channel. The energy barrier of the AlGaN barrier and the GaN channel would be lowered for electron injection, leading to reverse gate current and off-state drain leakage current increasing. Irradiation induced damage at the Schottky junction may be permanent, while the p-i-n junction damage is recoverable with time.
研究了p-GaN栅极hemt金属/p-GaN/AlGaN/GaN栅极堆叠的TID辐射损伤,揭示了与电场高度相关的损伤机制。对于导态偏置,与供体样陷阱相关的辐照损伤位于高电场的反向偏置金属/p-GaN肖特基结。肖特基结的耗尽区会扩大,陷阱辅助隧道机制可以被引入来增加正向栅极电流。对于非态偏置,辐射损伤位于反向偏置的p-GaN/AlGaN/GaN (p-i-n)结,与被困在AlGaN势垒和GaN通道中的空穴有关。电子注入会降低氮化镓势垒和氮化镓通道的能垒,导致反向栅极电流和失态漏极电流增大。辐射引起的肖特基结损伤可能是永久性的,而p-i-n结损伤随时间的推移是可恢复的。
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引用次数: 0
Lifetime Modeling of SiC MOSFET Power Modules During Power Cycling Tests at Low Temperature Swings 低温波动下功率循环测试中SiC MOSFET功率模块的寿命建模
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147533
F. Hoffmann, S. Schmitt, N. Kaminski
The goal of this work is to assess the power cycling performance of silicon carbide MOSFETs at low temperature swings and investigate the previously reported discrepancy between common lifetime model and power cycling test results. Additionally, the impact of the minimum temperature on the power cycling performance was examined. For this purpose, power cycling tests with temperature swings between 40 K to 100 K and at minimum temperatures of 20°C and 40°C are performed. The results confirm, that the lifetime of SiC MOSFETs is significantly underestimated at low temperature swings by state-of-the-art lifetime models, when the model is fitted to power cycling test results at high temperature swings, which is in agreement with previous reports. Furthermore, the test results suggest that the discrepancy increases even further towards lower temperature swings, which can be modeled by a change of the Coffin-Manson exponent at a threshold temperature swing. This could be a possible indication of the transition from plastic to elastic deformation as the prevalent fatigue mechanism. Moreover, the tests at different minimum temperatures show a significantly higher impact of the baseline temperature on the lifetime at low temperature swings compared to high temperature swings. This may indicate that the threshold temperature swing for the transition from plastic to elastic deformation is impacted by the minimum temperature.
这项工作的目的是评估碳化硅mosfet在低温波动下的功率循环性能,并研究先前报道的通用寿命模型与功率循环测试结果之间的差异。此外,还研究了最低温度对功率循环性能的影响。为此,进行了温度在40 K至100 K之间波动,最低温度为20°C至40°C的功率循环测试。结果证实,当模型拟合到高温波动下的功率循环测试结果时,最先进的寿命模型在低温波动下显著低估了SiC mosfet的寿命,这与先前的报告一致。此外,测试结果表明,在较低的温度波动下,这种差异甚至会进一步增加,这可以通过阈值温度波动时Coffin-Manson指数的变化来模拟。这可能是一个可能的迹象,从塑性变形过渡到弹性变形作为普遍的疲劳机制。此外,在不同最低温度下的试验表明,与高温波动相比,基线温度对低温波动下寿命的影响要大得多。这可能表明,从塑性变形过渡到弹性变形的阈值温度摆动受到最低温度的影响。
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引用次数: 0
A SiC 3D Power IC Directly Integrating a Power MOSFET With Its CMOS Gate Driver Using Flip Chip Bonding 用倒装片键合直接集成功率MOSFET和CMOS栅极驱动器的SiC 3D功率IC
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147700
Atsushi Yao, M. Okamoto, Shinji Sato, D. Yamaguchi, Hiroshi Sato
In this study, the first 3D direct integration of a SiC power MOSFET and its SiC CMOS gate driver is achieved using flip chip bonding, enabling a wire bondless connection. Switching operation of the resulting “SiC 3D power IC” is achieved experimentally at 600 V and 20 A for the first time at speeds of 102 and 67.0 V/ns for turn-on and turn-off operations, respectively. Further experiments demonstrated that the switching speed of the first version of the SiC 3D power IC is improved by over 14% compared to previous devices using wire bonding (wire bonding devices). Numerical predictions indicate that the SiC 3D power IC has the potential to more than double the switching speed of wire bonding devices and realizes switching speeds of 300 V/ns or more if the gate resistance is decreased.
在这项研究中,首次使用倒装芯片键合实现了SiC功率MOSFET及其SiC CMOS栅极驱动器的3D直接集成,从而实现了无线键合连接。实验首次实现了“SiC 3D功率IC”在600 V和20 A下的开关操作,分别以102和67.0 V/ns的速度进行通断操作。进一步的实验表明,第一版SiC 3D功率IC的开关速度比以前使用线键合的器件提高了14%以上。数值预测表明,如果降低栅极电阻,碳化硅三维功率集成电路的开关速度有可能是线键合器件的两倍以上,并且可以实现300 V/ns以上的开关速度。
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引用次数: 0
Optimization of Reverse Recovery Characteristics Based on Termination Structure for 700V Super-Junction VDMOS 基于端接结构的700V超结VDMOS反向恢复特性优化
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147399
Yibing Wang, M. Qiao, Jue Li, Ruidi Wang, Bo Zhang
In this work, we propose a 700V super-junction vertical double-diffused MOSFET (SJ VDMOS) with P-type lateral connection (LC) layer in the termination region. By changing the doping concentration of the LC layer, we can effectively adjust the reverse recovery characteristics. More internal holes remain near the depletion boundary for the termination structure with lower P-type LC layer doping concentration during the recovery period, leading to slower recovery current drop. However, the doping concentration of P-type LC layer does not affect the reverse period. Using this optimization method, we conduct experiments based on a multi-epitaxy/multi-implant platform. The experimental device realizes specific on-resistance of 12.09 m Ω.cm2 and breakdown voltage of 719 V. The experimental results are in good consistence with the simulated results. Both simulated and experimental results validate the effectiveness and feasibility of the proposed method.
在这项工作中,我们提出了一个在终端区具有p型横向连接(LC)层的700V超结垂直双扩散MOSFET (SJ VDMOS)。通过改变LC层的掺杂浓度,可以有效地调节反向回收特性。p型LC层掺杂浓度越低,在恢复期间终止结构的耗尽边界附近保留更多的内部空穴,导致恢复电流下降越慢。而p型LC层的掺杂浓度对反向周期没有影响。利用这种优化方法,我们在多外延/多植入平台上进行了实验。实验装置实现比导通电阻12.09 m Ω。cm2,击穿电压719v。实验结果与仿真结果吻合较好。仿真和实验结果验证了该方法的有效性和可行性。
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引用次数: 0
Novel Multifunctional Transient Voltage Suppressor Technology for Modular EOS/ESD Protection Circuit Designs 模块化EOS/ESD保护电路设计的新型多功能暂态电压抑制技术
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147403
Zhao Qi, M. Qiao, Jingqi Wei, Yonggang Shi, Hongquan Chen, Zhaoji Li, Bo Zhang
Transient voltage suppressor (TVS) is a kind of widely-used protection device which can enhance system surge and electrostatic discharge (ESD) robustness in small PCB area. However, different TVS cannot be fabricated using same technology due to the huge characteristic difference, which brings technology complexity in multifunctional system. In order to unity the TVS designs, a novel multifunctional TVS technology which solves non-uniformity finger triggering, voltage stacking and low leakage modular assembly issues is proposed. By using this TVS technology, the low-capacitance TVS array gets the peak current $(I_{text{PP}})$ of 5 A under the line-line capacitance $(C_{mathrm{L}-mathrm{L}})$ of 0.25 pF, 5 V power clamp gets the $I_{text{PP}}$ of 10 A with the dynamic resistance $(R_{text{dyn}})$ of 0.15 Ohm, high-voltage protection diode gets the breakdown voltage (BV) of 70 V by stacking eight units and the surge TVS realizes $I_{text{PP}}$ of 320 A by increasing finger amount without non-uniformity triggering.
暂态电压抑制器(TVS)是一种广泛应用的保护装置,可以在小PCB区域内增强系统的浪涌和静电放电(ESD)稳健性。然而,由于巨大的特性差异,不同的TVS无法使用相同的技术制造,这给多功能系统带来了技术复杂性。为了统一TVS设计,提出了一种新型多功能TVS技术,解决了手指触发不均匀、电压叠加和低漏模块组装等问题。通过使用这种电视技术、低电容电视数组美元得到了峰值电流(I_{文本{PP}})行了行了电容下的5美元(C_ { mathrm {L} - mathrm {L}}) $ 0.25 pF, 5 V电源夹得到美元I_ {PP}}{文本动态电阻的10美元(R_{文本{达因}})$ 0.15欧姆,高压保护二极管的击穿电压70 V的(BV)叠加8个单位和美元飙升电视实现I_ {PP}}{文本通过增加320美元的手指数量没有触发不均匀性。
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引用次数: 0
The Impact of the Dead-Time on the Reverse Recovery Behavior of SiC-MOSFET Body Diodes 死区时间对SiC-MOSFET体二极管反向恢复行为的影响
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147719
Xing Liu, Xupeng Li, C. Herrmann, T. Basler
The impact of the dead-time on the body diode reverse recovery behavior for 1.2 kV silicon carbide MOSFETs has been studied in this paper. The plasma formation behavior of the body diode at different temperatures and load currents is investigated firstly. The time for the plasma stabilization can be estimated. Afterwards, the influence of the load current amplitude, the operating temperature, and the switching speed have been investigated with standard double-pulse tests. Different MOSFET cell designs of various manufacturers were compared. It has been found that selecting a suitable dead-time and switching speed is essential for the optimization of the overall losses, especially at higher operation temperatures.
本文研究了死区时间对1.2 kV碳化硅mosfet体二极管反向恢复行为的影响。首先研究了体二极管在不同温度和负载电流下的等离子体形成行为。等离子体稳定的时间是可以估计的。然后,通过标准双脉冲试验研究了负载电流幅值、工作温度和开关速度的影响。比较了不同厂家的MOSFET电池设计。研究发现,选择合适的死区时间和开关速度对于优化总体损耗至关重要,特别是在较高的工作温度下。
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引用次数: 1
期刊
2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
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