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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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A 600-V GaN Active Gate Driver with Level Shifter Common-Mode Noise Sensing for Built-in dV/dt Self-Adaptive Control 一种内置dV/dt自适应控制的600 v GaN有源栅极驱动器,带电平移位共模噪声检测
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147641
Tianqi Liu, R. Martins, Yan Lu
This paper proposes a 600- V half-bridge GaN active gate driver with built-in dV/dt self-adaptive control utilizing a common-mode (CM) noise sensing and amplifying unit. The two 600- V LDMOS FETs existing in the conventional level shifter are used to sense the CM noises. When the dV/ dt rate is large enough, the sensed CM noises will be amplified and then rapidly provide a pull-down gate current for reducing the turn-on speed. As the dV/dt rate becomes smaller, the pull-down gate current will decrease adaptively, which achieving double peaks in the waveform of driving current. Compared to adding an extra high-voltage capacitor or LDMOS as a dV/dt sensor, this method has no additional area overhead and negligible control delay. At the same slew rate, we compare the low-side gate noises induced by Miller coupling at condition of either only $R_{ON}$ or the proposed self-adaptive adjustments. It shows that the noise peak in $V_{GL}$ for self-adaptive control decreases 46% at $V_{JN}=300mathrm{V}$ and also the noise envelope becomes smaller due to the dV/dt adjustment, dramatically reducing the probability of shoot-through current in the half bridge.
本文提出了一种600 V半桥GaN有源栅极驱动器,内置dV/dt自适应控制,利用共模(CM)噪声传感和放大单元。利用传统移电平器中存在的两个600 V LDMOS场效应管来检测CM噪声。当dV/ dt速率足够大时,检测到的CM噪声将被放大,然后迅速提供一个下拉栅极电流,以降低导通速度。随着dV/dt速率的减小,下拉栅极电流自适应减小,驱动电流波形出现双峰。与增加额外的高压电容器或LDMOS作为dV/dt传感器相比,该方法没有额外的面积开销和可忽略不计的控制延迟。在相同的转换率下,我们比较了仅R_{ON}$和提出的自适应调整条件下米勒耦合引起的低侧栅极噪声。结果表明,自适应控制的V_{GL}$的噪声峰值在V_{JN}=300 maththrm {V}$时降低了46%,并且由于dV/dt的调整,噪声包络线变小,显著降低了半电桥中穿透电流的概率。
{"title":"A 600-V GaN Active Gate Driver with Level Shifter Common-Mode Noise Sensing for Built-in dV/dt Self-Adaptive Control","authors":"Tianqi Liu, R. Martins, Yan Lu","doi":"10.1109/ISPSD57135.2023.10147641","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147641","url":null,"abstract":"This paper proposes a 600- V half-bridge GaN active gate driver with built-in dV/dt self-adaptive control utilizing a common-mode (CM) noise sensing and amplifying unit. The two 600- V LDMOS FETs existing in the conventional level shifter are used to sense the CM noises. When the dV/ dt rate is large enough, the sensed CM noises will be amplified and then rapidly provide a pull-down gate current for reducing the turn-on speed. As the dV/dt rate becomes smaller, the pull-down gate current will decrease adaptively, which achieving double peaks in the waveform of driving current. Compared to adding an extra high-voltage capacitor or LDMOS as a dV/dt sensor, this method has no additional area overhead and negligible control delay. At the same slew rate, we compare the low-side gate noises induced by Miller coupling at condition of either only $R_{ON}$ or the proposed self-adaptive adjustments. It shows that the noise peak in $V_{GL}$ for self-adaptive control decreases 46% at $V_{JN}=300mathrm{V}$ and also the noise envelope becomes smaller due to the dV/dt adjustment, dramatically reducing the probability of shoot-through current in the half bridge.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121624023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
First Demonstration of 600 V 4H-SiC Lateral Bi-Directional Metal-Oxide-Semiconductor Field-Effect Transistor (LBiDMOS) 600 V 4H-SiC横向双向金属氧化物半导体场效应晶体管(LBiDMOS)首次演示
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147546
S. Jang, S. Isukapati, Dongyoung Kim, Woongje Sung
This paper presents the first successful demonstration of cell-to-cell integrated 600 V 4H-SiC Lateral Bi-Directional MOSFET (LBiDMOS). The unit cell of the LBiDMOS is constructed by connecting two SiC MOSFET unit cells back-to-back with a common-drain configuration. By sharing the n-drift region in the middle and omitting the drain terminal, a novel and efficient structure was created. The peripheral design of the LBiDMOS was optimized in addition to the cell design to ensure blocking capabilities in both forward and reverse directions. The fabricated LBiDMOS exhibits symmetric bi-directional transfer, output, and blocking characteristics under the control of two gates. Over 600 V of breakdown voltage was achieved in both directions.
本文首次成功演示了电池间集成的600 V 4H-SiC横向双向MOSFET (LBiDMOS)。LBiDMOS的单元单元是通过用共漏配置将两个SiC MOSFET单元单元背对背连接而成的。通过共享中间的n漂移区和省略漏极,创造了一种新颖高效的结构。除了电池设计外,LBiDMOS的外围设计也进行了优化,以确保正向和反向的阻塞能力。制备的LBiDMOS在两个栅极控制下具有对称的双向转移、输出和阻塞特性。双向击穿电压均超过600 V。
{"title":"First Demonstration of 600 V 4H-SiC Lateral Bi-Directional Metal-Oxide-Semiconductor Field-Effect Transistor (LBiDMOS)","authors":"S. Jang, S. Isukapati, Dongyoung Kim, Woongje Sung","doi":"10.1109/ISPSD57135.2023.10147546","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147546","url":null,"abstract":"This paper presents the first successful demonstration of cell-to-cell integrated 600 V 4H-SiC Lateral Bi-Directional MOSFET (LBiDMOS). The unit cell of the LBiDMOS is constructed by connecting two SiC MOSFET unit cells back-to-back with a common-drain configuration. By sharing the n-drift region in the middle and omitting the drain terminal, a novel and efficient structure was created. The peripheral design of the LBiDMOS was optimized in addition to the cell design to ensure blocking capabilities in both forward and reverse directions. The fabricated LBiDMOS exhibits symmetric bi-directional transfer, output, and blocking characteristics under the control of two gates. Over 600 V of breakdown voltage was achieved in both directions.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122000709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Strain Engineering in Modern Si Trench Power MOSFETs — A Performance Booster for Future Generations 现代硅沟槽功率mosfet的应变工程-未来一代的性能助推器
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147538
Stefan Karner, O. Blank, J. Keckes, M. Rösch, Seung Hwan Lee, S. Léomant
The ongoing trend towards electrification and digitalization requires the continuous improvement of high frequency, high power density switching solutions such as split-gate Si trench power MOSFETs. However, their pure figure of merit (FOM) related performance improvement through conventional scaling has reached a physical limit. Similar to the approaches for planar MOSFETs, the device performance can also be improved by strain engineering, leading to a modified charge carrier mobility in the electrically active monocrystalline Si. Therefore, a novel strain engineering approach is proposed for Si trench power MOSFETs, adding a strain functionality to the trenches on top of their charge compensation purpose. It is shown that the device performance is increased by up to 16.8%, which is achieved by not only altering the mobility in the channel but also influencing the drift region of the device. Since the correlation of electrical and mechanical device characteristics is key to effectively implement strain engineering concepts in Si trench power MOSFETs, high-precision nanoscale stress and strain characterization techniques as well as finite element mechanical simulations are established and presented.
电气化和数字化的持续趋势要求不断改进高频、高功率密度开关解决方案,如分栅Si沟槽功率mosfet。然而,通过传统的扩展,它们的纯性能指标(FOM)相关的性能改进已经达到了物理极限。与平面mosfet的方法类似,该器件的性能也可以通过应变工程来改善,从而改善电活性单晶Si中的电荷载流子迁移率。因此,本文提出了一种新的应变工程方法,在硅沟槽功率mosfet的电荷补偿功能的基础上,为沟槽增加应变功能。结果表明,通过改变通道内的迁移率和影响器件的漂移区域,器件的性能提高了16.8%。由于电气和机械器件特性的相关性是在硅沟槽功率mosfet中有效实施应变工程概念的关键,因此建立并提出了高精度纳米尺度应力和应变表征技术以及有限元力学模拟。
{"title":"Strain Engineering in Modern Si Trench Power MOSFETs — A Performance Booster for Future Generations","authors":"Stefan Karner, O. Blank, J. Keckes, M. Rösch, Seung Hwan Lee, S. Léomant","doi":"10.1109/ISPSD57135.2023.10147538","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147538","url":null,"abstract":"The ongoing trend towards electrification and digitalization requires the continuous improvement of high frequency, high power density switching solutions such as split-gate Si trench power MOSFETs. However, their pure figure of merit (FOM) related performance improvement through conventional scaling has reached a physical limit. Similar to the approaches for planar MOSFETs, the device performance can also be improved by strain engineering, leading to a modified charge carrier mobility in the electrically active monocrystalline Si. Therefore, a novel strain engineering approach is proposed for Si trench power MOSFETs, adding a strain functionality to the trenches on top of their charge compensation purpose. It is shown that the device performance is increased by up to 16.8%, which is achieved by not only altering the mobility in the channel but also influencing the drift region of the device. Since the correlation of electrical and mechanical device characteristics is key to effectively implement strain engineering concepts in Si trench power MOSFETs, high-precision nanoscale stress and strain characterization techniques as well as finite element mechanical simulations are established and presented.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122178357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Power Cycling of Sintered SiC Power MOSFET Baseplate-less Modules with Aluminum Oxide and Silicon Nitride Substrates 氧化铝和氮化硅衬底烧结SiC功率MOSFET无基板模块的功率循环
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147471
Ivana Kovacevic-Badstuebner, E. Mengotti, P. Natzke, S. Race, E. Bianda, J. Jormanainen, U. Grossner
This paper shows a comparison of power cycling (PC) lifetime between SiC power MOSFET baseplate-less modules with Si3N4 and Al2O3 DBC substrates at heating on/off-times of 2 s. As the modules were designed with soft Si-gel encapsulation and silver sinter die attach, the dominant failure mechanism was bond wire lift-off. Electro-thermal-mechanical (ETM) simulations are performed to support the lifetime analysis on a small set of statistical data. The results point out that the PC capability of the Al wires is not significantly affected by changing the semiconductor material from Si to SiC. Furthermore, the developed ETM simulations show that Si3N4 substrates will cause a faster temperature rise time, but will not lead to a significantly higher thermo-mechanical stress of the bond wire foot.
本文展示了Si3N4和Al2O3 DBC衬底的SiC功率MOSFET无基板模块在加热开/关时间为2 s时的功率循环(PC)寿命的比较。由于模块采用软硅凝胶封装和银烧结模连接设计,因此主要的失效机制是焊线脱落。为了支持对一小部分统计数据的寿命分析,进行了电热机械(ETM)模拟。结果表明,将半导体材料由Si改为SiC对铝丝的PC性能没有显著影响。此外,开发的ETM模拟表明,Si3N4衬底会导致更快的升温时间,但不会导致键合线脚的热机械应力显著增加。
{"title":"Power Cycling of Sintered SiC Power MOSFET Baseplate-less Modules with Aluminum Oxide and Silicon Nitride Substrates","authors":"Ivana Kovacevic-Badstuebner, E. Mengotti, P. Natzke, S. Race, E. Bianda, J. Jormanainen, U. Grossner","doi":"10.1109/ISPSD57135.2023.10147471","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147471","url":null,"abstract":"This paper shows a comparison of power cycling (PC) lifetime between SiC power MOSFET baseplate-less modules with Si3N4 and Al2O3 DBC substrates at heating on/off-times of 2 s. As the modules were designed with soft Si-gel encapsulation and silver sinter die attach, the dominant failure mechanism was bond wire lift-off. Electro-thermal-mechanical (ETM) simulations are performed to support the lifetime analysis on a small set of statistical data. The results point out that the PC capability of the Al wires is not significantly affected by changing the semiconductor material from Si to SiC. Furthermore, the developed ETM simulations show that Si3N4 substrates will cause a faster temperature rise time, but will not lead to a significantly higher thermo-mechanical stress of the bond wire foot.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115032500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Application of a Smart Gate Driver to Detect Aging in SiC Power MOSFETs 智能栅极驱动器在SiC功率mosfet老化检测中的应用
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147513
Mengqi Wang, Jiupeng Zhang, W. Ng, H. Nishio, Motomitsu Iwamoto, H. Sumida
In this paper we present an integrated smart gate driver (SGD) capable of in-operation detection of SiC power MOSFET aging. The SGD IC monitors the discrete time differentiated (DTD) gate voltage slope, $Delta V_{GS}$, to identify the time to start of the Miller plateau, $t_{1}$, during turn-on. Under known operating conditions, the value of $t_{1}$ can be used as an aging indicator to detect changes in the Miller plateau due to threshold voltage shifts. A synthesized digital central control unit (CCU) within the SGD can adjust the gate drive profile and gate drive bus voltage ($V_{DR}$) based on the aging-induced changes in $t_{1}$. We demonstrate that following 200 hours of high-temperature gate bias (HTGB) at 200 °C, $V_{DR, stress}=30 mathrm{V}$, aging-induced gate degradation of a 1.2 kV 75A SiC MOSFET results in a decrease in drain current ($I_{D}$) by 1.5%. An increase in $V_{text{MP}}$ by 0.5 V can restore $I_{D}$ by 1.7% to pre-aged levels. This is achieved by adjusting the digital pulse width modulation (PWM) duty cycle of the on-chip DC-DC boost converter.
本文提出了一种集成的智能栅极驱动器(SGD),能够在运行中检测SiC功率MOSFET老化。SGD IC监测离散时间差分(DTD)栅极电压斜率$Delta V_{GS}$,以识别米勒平台在导通期间开始的时间$t_{1}$。在已知的工作条件下,$t_{1}$的值可以作为一个老化指标来检测由于阈值电压移动而引起的米勒平台的变化。SGD内的合成数字中央控制单元(CCU)可以根据老化引起的$t_{1}$的变化来调整栅极驱动轮廓和栅极驱动母线电压($V_{DR}$)。我们证明,在200°C, $V_{DR,应力}=30 mathrm{V}$下,经过200小时的高温栅极偏置(HTGB), 1.2 kV 75A SiC MOSFET的老化引起的栅极退化导致漏极电流($I_{D}$)降低1.5%。$V_{text{MP}}$每增加0.5 V,可使$I_{D}$恢复1.7%至老化前的水平。这是通过调整片上DC-DC升压转换器的数字脉宽调制(PWM)占空比来实现的。
{"title":"Application of a Smart Gate Driver to Detect Aging in SiC Power MOSFETs","authors":"Mengqi Wang, Jiupeng Zhang, W. Ng, H. Nishio, Motomitsu Iwamoto, H. Sumida","doi":"10.1109/ISPSD57135.2023.10147513","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147513","url":null,"abstract":"In this paper we present an integrated smart gate driver (SGD) capable of in-operation detection of SiC power MOSFET aging. The SGD IC monitors the discrete time differentiated (DTD) gate voltage slope, $Delta V_{GS}$, to identify the time to start of the Miller plateau, $t_{1}$, during turn-on. Under known operating conditions, the value of $t_{1}$ can be used as an aging indicator to detect changes in the Miller plateau due to threshold voltage shifts. A synthesized digital central control unit (CCU) within the SGD can adjust the gate drive profile and gate drive bus voltage ($V_{DR}$) based on the aging-induced changes in $t_{1}$. We demonstrate that following 200 hours of high-temperature gate bias (HTGB) at 200 °C, $V_{DR, stress}=30 mathrm{V}$, aging-induced gate degradation of a 1.2 kV 75A SiC MOSFET results in a decrease in drain current ($I_{D}$) by 1.5%. An increase in $V_{text{MP}}$ by 0.5 V can restore $I_{D}$ by 1.7% to pre-aged levels. This is achieved by adjusting the digital pulse width modulation (PWM) duty cycle of the on-chip DC-DC boost converter.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"2007 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129596613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrical Characterization and Analysis of 4H-SiC Lateral MOSFET (LMOS) for High-Voltage Power Integrated Circuits 用于高压电源集成电路的4H-SiC横向MOSFET (LMOS)的电学特性与分析
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147418
Li Liu, Jue Wang, Zishi Wang, Miaoguang Bai, Junze Li, Zhengyun Zhu, Hongyi Xu, Na Ren, Qing Guo, Kuang Sheng
This paper demonstrates a SiC lateral MOSFET (LMOS) with DOUBLE RESURFs (reduce surface field) technology to improve the device's breakdown voltage. The electrical characteristics and analysis of the fabricated SiC LMOS are carried out in terms of output, transfer and blocking characteristics, as well as the leakage current mechanisms. In particular, the effect of the length of the P-top RESURFs on device performance is studied. The experimental results indicate that the SiC LMOS with P-top RESURFs of length $7 mumathrm{m}$ exhibits best comprehensively with the highest breakdown voltage of 970 V, the highest Baliga's figure of merit BFOM of 83.6MW/cm2, and low (gate) leakage current. Which is recommended in this work and also encourages its further application in the power integrated circuits (Power ICs).
本文演示了一种采用DOUBLE RESURFs(减少表面场)技术的SiC横向MOSFET (LMOS),以提高器件的击穿电压。从输出特性、转移特性和阻塞特性以及漏电流机理等方面对制备的SiC LMOS进行了电学特性分析。特别地,研究了P-top refs长度对器件性能的影响。实验结果表明,长度为$7 mumathrm{m}$的P-top RESURFs材料综合性能最好,击穿电压最高为970 V, Baliga优值bfm最高为83.6MW/cm2,漏电流小。这是本工作所推荐的,并鼓励其在功率集成电路(power ic)中的进一步应用。
{"title":"Electrical Characterization and Analysis of 4H-SiC Lateral MOSFET (LMOS) for High-Voltage Power Integrated Circuits","authors":"Li Liu, Jue Wang, Zishi Wang, Miaoguang Bai, Junze Li, Zhengyun Zhu, Hongyi Xu, Na Ren, Qing Guo, Kuang Sheng","doi":"10.1109/ISPSD57135.2023.10147418","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147418","url":null,"abstract":"This paper demonstrates a SiC lateral MOSFET (LMOS) with DOUBLE RESURFs (reduce surface field) technology to improve the device's breakdown voltage. The electrical characteristics and analysis of the fabricated SiC LMOS are carried out in terms of output, transfer and blocking characteristics, as well as the leakage current mechanisms. In particular, the effect of the length of the P-top RESURFs on device performance is studied. The experimental results indicate that the SiC LMOS with P-top RESURFs of length $7 mumathrm{m}$ exhibits best comprehensively with the highest breakdown voltage of 970 V, the highest Baliga's figure of merit BFOM of 83.6MW/cm2, and low (gate) leakage current. Which is recommended in this work and also encourages its further application in the power integrated circuits (Power ICs).","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129666089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of BVdss instability in trench power MOSFET through DLTS, electrical characterization and TCAD simulations 通过DLTS、电学表征和TCAD仿真研究沟槽功率MOSFET中BVdss的不稳定性
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147489
Marina Ruggeri, P. Calenzo, F. Morancho, L. Masoero, R. Germana, Alessandro Nodari, R. Monflier
In this paper, we investigated the drain to source breakdown voltage (BVdss) instability during avalanche current drain stress of Shielded Gate MOSFET (SG-MOSFET) structure and we propose a new methodology to correlate electrical results to TCAD simulations. The presence of positive charged states at the Field Plate (FP) oxide/Si interface was confirmed by Capacitance Deep Level Transient Spectroscopy (C-DLTS). Thus, it was implemented in TCAD simulations that predict the experimental behavior of two architectures. Thanks to these results, walk-in contributors were discriminated to suggest a pathway to increase device robustness with a slight Ron impact.
本文研究了屏蔽栅MOSFET (SG-MOSFET)结构雪崩电流漏极应力时漏极到源击穿电压(BVdss)的不稳定性,并提出了一种将电学结果与TCAD模拟相关联的新方法。电容深能级瞬态光谱(c - dlt)证实了电场板(FP)氧化物/硅界面正电荷态的存在。因此,它在TCAD仿真中实现,预测了两种体系结构的实验行为。由于这些结果,随机贡献者被区分为建议一种途径,以增加设备的鲁棒性,同时产生轻微的Ron影响。
{"title":"Investigation of BVdss instability in trench power MOSFET through DLTS, electrical characterization and TCAD simulations","authors":"Marina Ruggeri, P. Calenzo, F. Morancho, L. Masoero, R. Germana, Alessandro Nodari, R. Monflier","doi":"10.1109/ISPSD57135.2023.10147489","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147489","url":null,"abstract":"In this paper, we investigated the drain to source breakdown voltage (BVdss) instability during avalanche current drain stress of Shielded Gate MOSFET (SG-MOSFET) structure and we propose a new methodology to correlate electrical results to TCAD simulations. The presence of positive charged states at the Field Plate (FP) oxide/Si interface was confirmed by Capacitance Deep Level Transient Spectroscopy (C-DLTS). Thus, it was implemented in TCAD simulations that predict the experimental behavior of two architectures. Thanks to these results, walk-in contributors were discriminated to suggest a pathway to increase device robustness with a slight Ron impact.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129715758","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Exploitation of Hole Injection and Spreading for Dynamic Enhancement in p-GaN Gate HEMT under Room/High Temperatures 室温/高温下p-GaN栅极HEMT动态增强的空穴注入和扩散研究
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147649
Junjie Yang, Yanlin Wu, Muqin Nuo, Zheng-wei Chen, Xuelin Yang, B. Shen, Maojun Wang, Jin Wei
In this study, we investigate the role of hole injection and spreading in a p-GaN gate HEMT for addressing buffer-related dynamic $R_{text{ON}}$ degradations. The proposed structure includes a buried AlGaN layer that acts as a hole barrier and provides a hole spreading channel (BHSC) under the 2DEG channel. During the on-state, holes are injected from the gate and spread along the BHSC. We observe that the hole injection is enhanced with increasing temperatures. The lateral spreading of holes is critical for suppressing buffer trapping outside of the gate region. As the suppression of buffer trapping is enhanced with an increase in $V_{text{GS}}$, the dynamic $R_{text{ON}}$ is dramatically reduced. We then adopt the widely used back-gating test to evaluate the dynamic $R_{text{ON}}$ when buffer trapping is intentionally introduced. Finally, we demonstrate that the proposed device with BHSC exhibits nearly zero buffer-related dynamic $R_{text{ON}}$ degradation from room temperature to 125°C.
在这项研究中,我们研究了p-GaN栅极HEMT中空穴注入和扩散的作用,以解决与缓冲相关的动态$R_{text{ON}}$退化问题。所提出的结构包括一个埋藏的AlGaN层,作为一个孔屏障,并在2℃通道下提供一个孔扩展通道(BHSC)。在导通状态下,空穴从栅极注入并沿BHSC扩散。我们观察到,随着温度的升高,井眼注入增强。孔的横向扩展对于抑制栅极区域外的缓冲阱是至关重要的。随着$V_{text{GS}}$的增加,缓冲区捕获的抑制得到增强,动态的$R_{text{ON}}$显著减少。然后,我们采用广泛使用的反向控制测试来评估有意引入缓冲区捕获时的动态$R_{text{ON}}$。最后,我们证明了所提出的具有BHSC的器件在室温到125°C期间具有几乎零缓冲相关的动态$R_{text{ON}}$退化。
{"title":"Exploitation of Hole Injection and Spreading for Dynamic Enhancement in p-GaN Gate HEMT under Room/High Temperatures","authors":"Junjie Yang, Yanlin Wu, Muqin Nuo, Zheng-wei Chen, Xuelin Yang, B. Shen, Maojun Wang, Jin Wei","doi":"10.1109/ISPSD57135.2023.10147649","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147649","url":null,"abstract":"In this study, we investigate the role of hole injection and spreading in a p-GaN gate HEMT for addressing buffer-related dynamic $R_{text{ON}}$ degradations. The proposed structure includes a buried AlGaN layer that acts as a hole barrier and provides a hole spreading channel (BHSC) under the 2DEG channel. During the on-state, holes are injected from the gate and spread along the BHSC. We observe that the hole injection is enhanced with increasing temperatures. The lateral spreading of holes is critical for suppressing buffer trapping outside of the gate region. As the suppression of buffer trapping is enhanced with an increase in $V_{text{GS}}$, the dynamic $R_{text{ON}}$ is dramatically reduced. We then adopt the widely used back-gating test to evaluate the dynamic $R_{text{ON}}$ when buffer trapping is intentionally introduced. Finally, we demonstrate that the proposed device with BHSC exhibits nearly zero buffer-related dynamic $R_{text{ON}}$ degradation from room temperature to 125°C.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"42 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120919003","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simplified Open-Loop Transfer Functions to Analyze Influential Parasitic Parameters for Oscillation Caused by Parallel Connected Transistors 简化开环传递函数分析并联晶体管振荡寄生参数的影响
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147582
Hiroto Sakai, Yuta Okawauchi, Shinji Yato, Hideo Araki, Takayuki Atago, K. Nakahara
This study suggests a method to derive an approximate but sufficient formula of an open-loop transfer function for examining the oscillation seen for power devices connected in parallel. The stability of parallel-connected power devices is evaluated by an equivalent circuit and its open-loop characteristics are analyzed using simulation. The simulated Bode diagram is classified into bands by the estimated poles and zeros, and accordingly, the open-loop transfer function is successfully expressed as a simplified analytical form. This calculation makes it clear that while gate-to-drain capacitance prevents self-turn-on and enhances high-speed switching, it also causes parallel oscillation. This insight achieved by simulations was experimentally confirmed.
本研究提出了一种方法,推导出一个近似但充分的开环传递函数公式,用于检查并联电力设备的振荡。采用等效电路对并联电源器件的稳定性进行了评价,并对并联电源器件的开环特性进行了仿真分析。根据估计的极点和零点将模拟波德图划分为带,并成功地将开环传递函数表示为简化的解析形式。这个计算清楚地表明,虽然栅极-漏极电容可以防止自导通并增强高速开关,但它也会导致并行振荡。这种通过模拟得出的见解在实验中得到了证实。
{"title":"Simplified Open-Loop Transfer Functions to Analyze Influential Parasitic Parameters for Oscillation Caused by Parallel Connected Transistors","authors":"Hiroto Sakai, Yuta Okawauchi, Shinji Yato, Hideo Araki, Takayuki Atago, K. Nakahara","doi":"10.1109/ISPSD57135.2023.10147582","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147582","url":null,"abstract":"This study suggests a method to derive an approximate but sufficient formula of an open-loop transfer function for examining the oscillation seen for power devices connected in parallel. The stability of parallel-connected power devices is evaluated by an equivalent circuit and its open-loop characteristics are analyzed using simulation. The simulated Bode diagram is classified into bands by the estimated poles and zeros, and accordingly, the open-loop transfer function is successfully expressed as a simplified analytical form. This calculation makes it clear that while gate-to-drain capacitance prevents self-turn-on and enhances high-speed switching, it also causes parallel oscillation. This insight achieved by simulations was experimentally confirmed.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116323990","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Package Design Consideration for Suppressing Radiated EMI Noise in Semi-Bridgeless PFC Converters 抑制半无桥PFC变换器辐射EMI噪声的封装设计考虑
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147635
Satoshi Yoshida, T. Yasuzumi, Tsuguhiro Tanaka, Yasuyuki Fujiwara
A semi-bridgeless power factor correction (PFC) converter offers an excellent trade-off between efficiency, conducted electro-magnetic interference (EMI) performance, and cost. However, reduction of radiated EMI remains as an issue. This paper proposes a multichip package design for realizing low radiated EMI semi-bridgeless PFC converters. The proposed package design was applied to a 1.0 kW semi-bridgeless PFC converter and reduction of the radiated EMI was successfully demonstrated.
半无桥功率因数校正(PFC)转换器在效率、传导电磁干扰(EMI)性能和成本之间提供了极好的权衡。然而,减少辐射电磁干扰仍然是一个问题。提出了一种实现低辐射电磁干扰半桥式PFC变换器的多芯片封装设计。将所提出的封装设计应用于1.0 kW半无桥PFC变换器,并成功地证明了辐射EMI的降低。
{"title":"Package Design Consideration for Suppressing Radiated EMI Noise in Semi-Bridgeless PFC Converters","authors":"Satoshi Yoshida, T. Yasuzumi, Tsuguhiro Tanaka, Yasuyuki Fujiwara","doi":"10.1109/ISPSD57135.2023.10147635","DOIUrl":"https://doi.org/10.1109/ISPSD57135.2023.10147635","url":null,"abstract":"A semi-bridgeless power factor correction (PFC) converter offers an excellent trade-off between efficiency, conducted electro-magnetic interference (EMI) performance, and cost. However, reduction of radiated EMI remains as an issue. This paper proposes a multichip package design for realizing low radiated EMI semi-bridgeless PFC converters. The proposed package design was applied to a 1.0 kW semi-bridgeless PFC converter and reduction of the radiated EMI was successfully demonstrated.","PeriodicalId":344266,"journal":{"name":"2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126873661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
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