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2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)最新文献

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Lattice Boltzmann Simulation of Microfluidics with Non-uniform Zeta Potentials: Requirements of Flow Rate and Current Continuities 具有非均匀Zeta电位的微流体晶格玻尔兹曼模拟:流速和电流连续性的要求
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.85
F. Tian, Baoming Li, D. Kwok
The characteristics of electrokinetic flow in a microchannel depend on both the nature of the surface potential, i.e. whether it is uniform or nonuniform, and the electric potential distribution along the channel. In this paper, the nonlinear Poisson-Boltzmann equation is used to model the electrical double layer and the Lattice Boltzmann Model coupled with the constraint of current continuity is used to simulate the flow field in a rectangular microchannel with step change surface potential. The results show that step change ion distribution caused by step change surface potential will influence significantly the electric potential distribution along the channel, the velocity profiles and the volumetric flow rate. This may indicate that if disturbance on the ion distribution due to nonuniform surface potential and velocity distortion is large and not negligible, the electric potential distribution along the channel in both pressure-driven and electroosmotic flow may not be linear.
微通道内的电动流动特性取决于表面电位的性质,即是均匀还是不均匀,以及沿通道的电势分布。本文采用非线性泊松-玻尔兹曼方程对双电层进行建模,并采用结合电流连续性约束的晶格玻尔兹曼模型对具有阶跃表面电位的矩形微通道内的流场进行模拟。结果表明,台阶变化表面电位引起的台阶变化离子分布对通道电位分布、速度分布和体积流量有显著影响。这可能表明,如果由于不均匀的表面电位和速度畸变对离子分布的干扰很大且不可忽略,则在压力驱动和电渗透流动中沿通道的电位分布都可能不是线性的。
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引用次数: 2
The Effect of π-Coupling on the Electronic Properties of 1,4-Dithiol Benzene Stacking π-耦合对1,4-二硫醇苯堆叠电子性质的影响
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.141
M. Layachi, Y. Savaria, A. Rochefort
We have studied the influence of π-coupling on electronic and structural properties of self-assembled 1,4-dithiol benzene (HSC₆H₄SH) molecule with the first principle DFT-KS method. The isolated molecule shows well defined electronic properties, which drastically change once the molecule is packed into a dense 1-D molecular wire. The HOMO-LUMO gap for a dimer decreases by 1.2 eV when intermolecular distance changes from 6.9 to 3.3 Å, while it sharply decreases by 2.2 eV for a wire containing seven (7) molecular units. It is found that intermolecular distances between molecular units, as well as the number of molecules in the molecular wire are the two main correlated factors that influence the magnitude of the changes. In fact, the two parameters that influence the electronic structure properties of the wires are clearly related to magnitude of π-electron interaction in the vicinity of the HOMO-LUMO gap region.
采用第一性原理DFT-KS方法研究了π偶联对自组装1,4-二硫醇苯(HSC₆H₄SH)分子电子和结构性质的影响。孤立的分子显示出明确的电子特性,一旦分子被包装成致密的一维分子线,电子特性就会发生巨大变化。当分子间距离从6.9变为3.3 Å时,二聚体的HOMO-LUMO间隙减小1.2 eV,而含有7个分子单元的金属丝的HOMO-LUMO间隙则急剧减小2.2 eV。研究发现,分子单元之间的分子间距离以及分子线中的分子数是影响变化幅度的两个主要相关因素。事实上,影响金属丝电子结构性能的两个参数明显与HOMO-LUMO间隙区附近π-电子相互作用的大小有关。
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引用次数: 0
Resolution Enhancement of a Sigma-Delta Micro-Accelerometer Using Signal Prediction 利用信号预测增强Sigma-Delta微加速度计的分辨率
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.127
É. Colinet, J. Juillard, S. Guessab, R. Kielbasa
This paper presents a new design of a closed-loop sigma-delta accelerometer using an acceleration prediction feedback element. Thanks to a Kalman state estimator associated with a Linear-Quadratic-Gaussian (LQG) controller, the proof mass is maintained near its position of equilibrium. Consequently, operating on the relatively small proof mass displacement makes it possible to enhance the performance of the sigma-delta converter. This architecture shows an increase of more than 20 dB in signal quantization noise ratio compared to conventional sigma-delta accelerometers and has the advantage of being a completely digital solution.
本文提出了一种利用加速度预测反馈元件设计的闭环加速度计。由于卡尔曼状态估计器与线性二次高斯(LQG)控制器相关联,证明质量保持在其平衡位置附近。因此,在相对较小的证明质量位移上操作可以提高σ - δ变换器的性能。与传统的sigma-delta加速度计相比,该结构的信号量化噪声比提高了20 dB以上,并且具有完全数字化解决方案的优势。
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引用次数: 11
A Monolithically Packaged Cordless Sensor System Embedding MEMS A/D Converter and Saw Transponder 嵌入MEMS A/D转换器和Saw转发器的单片封装无线传感器系统
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.12
Jae-Geun Oh, Bumkyoo Choi, Seung-Yop Lee
A monolithically packaged SAW (Surface Acoustic Wave) radio transponder and pressure sensor is developed for the application to a TPMS (Tire Pressure Monitoring System). The device contains the wireless transponder, which converts analog signal into digital one without any auxillary electronic circuits and then transmits the converted data wirelessly. No power sources are needed for wireless transponder and pressure sensor. The touch-mode pressure sensor converts externally applied pressure into a capacitance, and the SAW radio transponder radiates sensor values as pulse train to the interrogation (measurement) unit. The realization of the mechanical A/D conversion is possible since the SAW radio transponder has been connected to the touch-mode capacitive pressure sensor. The SAW radio transponder and touch-mode sensor have been fabricated using a surface micromachining and a bulk micromachining technologies, respectively. The performance of the integrated, passive and wireless pressure sensor meets the design specifications such as linearity, sensitivity and noise figure. Finally, experimental results on the radio transponder and sensor without power source are presented.
为应用于轮胎压力监测系统(TPMS),开发了单片封装的SAW(表面声波)无线电应答器和压力传感器。该装置包含无线应答器,它将模拟信号转换为数字信号,而不需要任何辅助的电子电路,然后将转换后的数据无线传输。无线应答器和压力传感器不需要电源。触摸式压力传感器将外部施加的压力转换为电容,SAW无线电应答器将传感器值作为脉冲序列辐射到询问(测量)单元。机械A/D转换的实现是可能的,因为SAW无线电应答器已连接到触摸模式电容压力传感器。SAW无线电应答器和触摸模式传感器分别采用表面微加工和体微加工技术制造。集成、无源和无线压力传感器的性能满足线性度、灵敏度和噪声系数等设计指标。最后给出了无电源应答器和传感器的实验结果。
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引用次数: 2
A Novel pH Sensor Current Mode Read-Out Circuit Using Operational Floating Current Conveyor 一种新型的pH传感器电流模式读出电路
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.16
Y. Ghallab, Wael Badawy
This paper presents a novel Ion Sensitive Field Effect Transistor (ISFET), as a pH sensor, read-out circuit that uses three Operational Floating Current Conveyors (OFCC). This read-out circuit provides a linear sensitivity to pH over a wide range (pH values 2-12). Moreover, it provides an output current that is linearly related to the measured pH. It uses only one type of active element (i.e. OFCC) that makes this circuit easier to be both integrated and fabricated using a conventional CMOS process. Our simulation results demonstrate that the read-out circuit works reliably and can be a suitable sensor read-out circuit for lab on a chip biomedical applications.
本文提出了一种新型离子敏感场效应晶体管(ISFET)作为pH传感器的读出电路,该电路采用三个可操作浮动电流传送带(OFCC)。该读出电路在宽范围内(pH值2-12)提供对pH值的线性灵敏度。此外,它提供的输出电流与测量的ph值线性相关。它只使用一种类型的有源元件(即OFCC),这使得该电路更容易集成和使用传统的CMOS工艺制造。仿真结果表明,该读出电路工作可靠,可作为一种适用于生物医学实验室的传感器读出电路。
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引用次数: 4
New Biocompatible Nanoparticles Based on Fractionized Gelatin as Drug Delivery Systems for Nucleic Acids and Peptides 基于明胶分级的新型生物相容性纳米颗粒作为核酸和多肽的药物递送系统
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.113
C. Coester
In 1978 Marty et al. described for the first time the preparation of gelatin nanoparticles using desalting or desolvating agents. The desolvation process using acetone or other non-solvents works only with very low concentrations of gelatin (0.1%) [1]. By increasing the gelatin concentration in the solution the formation of aggregations during desolvation and cosslinking also dramatically increases. In 1985 the molecular weight of gelatin was described to be between 60000-90000 Da [2]. With improved analytical equipment, the specification of the molecular weight of one of the largest gelatin producers worldwide (DGF Stoess AG, Eberbach, Germany) is today from below 20000 to over 400000 Da. This shows the heterogeneity of gelatin and makes it more understanding why there are many difficulties in the preparation of nanoparticles from this substance.
1978年,Marty等人首次描述了使用脱盐或脱溶剂制备明胶纳米颗粒。使用丙酮或其他非溶剂的脱溶过程只适用于极低浓度的明胶(0.1%)[1]。通过增加溶液中明胶的浓度,在脱溶和交联过程中聚集的形成也显著增加。1985年,明胶的分子量被描述为60000-90000 Da[2]。随着分析设备的改进,全球最大的明胶生产商之一(DGF Stoess AG, Eberbach, Germany)的分子量规格从20000 Da以下到400000 Da以上。这表明了明胶的非均质性,并使人们更加理解为什么从这种物质制备纳米粒子有很多困难。
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引用次数: 1
A Platinum Nanowires Actuator: Metallic Nano-Muscles 铂纳米线致动器:金属纳米肌肉
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.20
Shaoxin Lu, B. Panchapakesan
In this paper, we report the fabrication and characterization of electro-chemical actuator using platinum nanowire networks. Reversible strain amplitudes of ~ 0.04% have been observed by controlling the surface electronic charge density of the nanowire network through an applied voltage in an electrolyte solution. Displacement amplitudes of up to 3mm was observed for an applied voltage of only ±3 V, much smaller compared to most commercial piezoceramic materials. These results indicate the potential application of platinum nanowires for construction of artificial muscles and materials with tunable electronic properties.
本文报道了利用铂纳米线网络制备电化学致动器并进行了表征。通过在电解质溶液中施加电压来控制纳米线网络的表面电子电荷密度,可以观察到~ 0.04%的可逆应变幅度。仅在±3v的电压下,位移幅度可达3mm,与大多数商用压电陶瓷材料相比要小得多。这些结果表明铂纳米线在构建人造肌肉和具有可调谐电子性能的材料方面具有潜在的应用前景。
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引用次数: 1
Fabrications of Micro-Channel Device by Hot Emboss and Direct Bonding of PMMA 热压印与PMMA直接键合制备微通道器件
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.66
J. Mizuno, T. Harada, T. Glinsner, M. Ishizuka, T. Edura, K. Tsutsui, H. Ishida, S. Shoji, Y. Wada
We have fabricated and evaluated the mechanical, optical and fluidic characteristics a 50µm wide and a 30µm deep micro-channel device produced by hot emboss and direct bonding of PMMA plate with dimensions of 20mm × 20mm × 1mm. The fabricated micro-channel device was evaluated the bond strength, which was confirmed to be high enough for practical use as well as for quite severe cleaning conditions as ultrasonic cleaning in pure water. The optical loss around bonded interface was also evaluated and no increase in the light absorption was observed. The above results confirmed that the hot emboss and direct bonding technologies for micro-channel manufacturing using the PMMA plates realizes high performance micro channel devices.
我们制作并评估了尺寸为20mm × 20mm × 1mm的PMMA板热压花和直接键合生产的50µm宽和30µm深的微通道器件的机械、光学和流体特性。对所制备的微通道装置进行了粘接强度评估,证实其具有足够高的粘接强度,可用于实际应用,也可用于在纯水中进行超声波清洗等相当苛刻的清洗条件。对键合界面周围的光损失也进行了评估,并没有观察到光吸收的增加。以上结果证实了利用PMMA板材制造微通道的热压花和直接键合技术可以实现高性能的微通道器件。
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引用次数: 14
New Functions Elaborated in Oxide Glasses by Nanotechnology 纳米技术在氧化玻璃中的新功能
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.114
J. Nishii, K. Hirao
Recent three topics of Nanotechnology Glass Project were described. (1) A proton-conducting hybrid material was fabricated using a glass plate with nano-pores. The conductivity of the hybrid glass plate was comparable to Nafion, and no corrosion or degradation observed up to 120°C. (2) Nano-particles of CdTe were synthesized in a water solution and embedded in the glass matrix using a sol-gel method. The emission quantum efficiency pf 3% was attained. (3) Deep dry etching followed by overcladding buried the DOE with a deep groove inside a Si0₂ plate, which was used for fabrication of an ultra small demultiplexer.
介绍了纳米技术玻璃项目的三个最新课题。(1)利用带纳米孔的玻璃板制备质子导电杂化材料。混合玻璃板的导电性与Nafion相当,并且在高达120°C的温度下没有腐蚀或降解。(2)采用溶胶-凝胶法在水溶液中合成了CdTe纳米颗粒,并将其嵌入到玻璃基体中。发射量子效率为3%。(3)深干蚀刻后复包将DOE埋在Si0₂板内,并形成深槽,用于制作超小型解复用器。
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引用次数: 0
Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications 设计,生物力学用压阻式六自由度加速度计的研制
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.48
R. Amarasinghe, D. Dao, T. Toriyama, S. Sugiyama
A miniaturized piezoresistive six-degree of freedom (6DOF) accelerometer has been developed and fabricated using bulk micromachining technology. Most accelerometers developed so far, sense accelerations in only three axial directions. This accelerometer measures three components of linear acceleration and three components of angular acceleration on three orthogonal axes in the frequency bandwidth of 300Hz. The average measured sensitivities of the fabricated sensor for linear accelerations and angular accelerations show a cross-axis sensitivity of <2%. Comparison of the obtained experimental results and finite element simulation shows good agreement. The sensor is ideal for use in biomechanical research applications such as the study of human gesture recognition systems.
采用体微加工技术研制了一种小型压阻式六自由度加速度计。到目前为止,大多数加速度计只能在三个轴向上感知加速度。该加速度计在300Hz的带宽范围内测量三个正交轴上的三个线性加速度分量和三个角加速度分量。所制备的传感器对线加速度和角加速度的平均测量灵敏度显示跨轴灵敏度<2%。所得实验结果与有限元模拟结果比较,结果吻合较好。该传感器非常适合用于生物力学研究应用,如研究人类手势识别系统。
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引用次数: 3
期刊
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
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