In recent years, fiber optic smart structure is widely studied because of its intrinsic benefits [1] [2]. One of the most striking evolvements is the technology, of which FBG (Fiber Bragg Grating) sensor systems are embedded in fiber reinforced composite materials, so that any ambience induced responses of the host structures can be monitored in real time, consequently proper actuations are initiated. Thus a neural system is realized. This work reports an entire optimization process of the FBG sensors embedded in Graphite/Epoxy composite material. Moreover, performance of the sensor system was observed and the applicability is discussed. Due to the mechanically orthotropic characteristics of the Graphite/Epoxy composite material, two FBG sensors were orthogonally embedded along the two principle axes in mid-plane of the specimen. When strain load was applied along one of the axes, longitudinal and shear responses of the structure were simultaneously monitored, hence its orthotropic properties were determined. Further, any randomly oriented strain applied to the specimen will be analytically quantified along the two sensors. Recurring to surface mounted resistance strain gage concept, the embedded FBG strain gage array was recalibrated, and its sensing alterability is quantified. This work tends to provide a quantitative discussion on FBG sensors’ residual erroneousness after an optimized embedment, the conclusion may give designers a reference to properly interpret FBG sensors’ performances, in case they are used as an embedded strain gage.
{"title":"Applicability of an Optimized Fiber Optic Smart Structure","authors":"Yu Fan, M. Kahrizi","doi":"10.1109/ICMENS.2004.35","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.35","url":null,"abstract":"In recent years, fiber optic smart structure is widely studied because of its intrinsic benefits [1] [2]. One of the most striking evolvements is the technology, of which FBG (Fiber Bragg Grating) sensor systems are embedded in fiber reinforced composite materials, so that any ambience induced responses of the host structures can be monitored in real time, consequently proper actuations are initiated. Thus a neural system is realized. This work reports an entire optimization process of the FBG sensors embedded in Graphite/Epoxy composite material. Moreover, performance of the sensor system was observed and the applicability is discussed. Due to the mechanically orthotropic characteristics of the Graphite/Epoxy composite material, two FBG sensors were orthogonally embedded along the two principle axes in mid-plane of the specimen. When strain load was applied along one of the axes, longitudinal and shear responses of the structure were simultaneously monitored, hence its orthotropic properties were determined. Further, any randomly oriented strain applied to the specimen will be analytically quantified along the two sensors. Recurring to surface mounted resistance strain gage concept, the embedded FBG strain gage array was recalibrated, and its sensing alterability is quantified. This work tends to provide a quantitative discussion on FBG sensors’ residual erroneousness after an optimized embedment, the conclusion may give designers a reference to properly interpret FBG sensors’ performances, in case they are used as an embedded strain gage.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125014696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation ( ñ) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numericalbased closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.
{"title":"Modeling of Surface Forces between Micron-Sized Objects in Dry Condition","authors":"A. Hariri, J. Zu, R. Mrad","doi":"10.1109/ICMENS.2004.97","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.97","url":null,"abstract":"Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation ( ñ) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numericalbased closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123663939","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The biggest hurdle to be solved, in order to create autonomous Micro-Electro-Mechanical Systems (MEMS) microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research investigated a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. The use of lasers to directly power micrometer scale silicon thermal actuators was explored. Optothermal actuators, intended for use on a small wirelessly propelled autonomous MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. A 760 µm by 710 µm prototype MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 µm of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless polysilicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation. The experiments also demonstrated a potentially viable design that could be used to propel the world’s smallest autonomous MEMS microrobot.
为了制造自主微机电系统(MEMS)微型机器人，需要解决的最大障碍是为它们的执行器引擎发电。目前大多数执行器需要的功率比目前可从微功率源获得的功率大几个数量级。为了实现更小的微型机器人，本研究研究了一种简化的电源概念，通过使用从环境中无线供电的致动器，消除了对车载电源和控制电路的需求。探讨了利用激光直接为微米级硅热致动器供电的方法。采用PolyMUMPs硅金属芯片制造工艺，对用于小型无线推进自主MEMS微型机器人的光热致动器进行了建模、设计、制造和测试。设计、制作并测试了一个760 μ m × 710 μ m的基于多晶硅的MEMS微机器人原型机，该机器人采用光热致动器。它的每个部分都被证明是使用外部激光的能量来提供驱动的。光热致动器为微型机器人驱动轴提供2µm的偏转，脉冲激光功率为60 mW。这些实验的结果证明了一种新型的无线多晶硅致动器的有效性，这种致动器不直接依赖于电力。实验还展示了一种潜在可行的设计，可用于推动世界上最小的自主MEMS微型机器人。
{"title":"Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots","authors":"Francis R. Szabo, Paul E. Kladiti","doi":"10.1109/ICMENS.2004.50","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.50","url":null,"abstract":"The biggest hurdle to be solved, in order to create autonomous Micro-Electro-Mechanical Systems (MEMS) microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research investigated a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. The use of lasers to directly power micrometer scale silicon thermal actuators was explored. Optothermal actuators, intended for use on a small wirelessly propelled autonomous MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. A 760 µm by 710 µm prototype MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 µm of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless polysilicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation. The experiments also demonstrated a potentially viable design that could be used to propel the world’s smallest autonomous MEMS microrobot.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114969819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-08-25DOI: 10.1109/ICMENS.2004.1508987
A. Ito, T. Ooya, N. Yui
In recent years, polyrotaxanes (PRXs) have been extensively studied as a novel supramolecular assembly that has interlocked structure between a cyclic molecule and a linear polymeric chain. Based on the interlocked structure of PRXs, one can expect excellent properties in terms of supramolecular motion of the cyclic molecules. In pharmaceutical fields, we have studied biodegradable PRXs as a drug carrier, in which many α-cyclodextrins (α-CDs) are threaded onto a poly (ethylene glycol) (PEG) capped with bulky blocking group via peptide linkages1). Drugs were immobilized α-CDs via biodegradable spacer. When the terminals of PRX were enzymatically hydrolyzed, drug-immobilized α-CDs could be released.
{"title":"Hydrolyzable Polyrotaxanes Consisting of β-Cyclodextrins and Pluronic® for Drug Delivery","authors":"A. Ito, T. Ooya, N. Yui","doi":"10.1109/ICMENS.2004.1508987","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.1508987","url":null,"abstract":"In recent years, polyrotaxanes (PRXs) have been extensively studied as a novel supramolecular assembly that has interlocked structure between a cyclic molecule and a linear polymeric chain. Based on the interlocked structure of PRXs, one can expect excellent properties in terms of supramolecular motion of the cyclic molecules. In pharmaceutical fields, we have studied biodegradable PRXs as a drug carrier, in which many α-cyclodextrins (α-CDs) are threaded onto a poly (ethylene glycol) (PEG) capped with bulky blocking group via peptide linkages1). Drugs were immobilized α-CDs via biodegradable spacer. When the terminals of PRX were enzymatically hydrolyzed, drug-immobilized α-CDs could be released.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"153 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127272915","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yujun Zhang, Mao-Peng Lin, Fengfu Li, Wen Wang, Zhenhao Jin
The phenolic resin/montmorillonite nanocomposites (NCPs) were synthesized by one-step method. Then FTIR and XRD were used to characterize microstructures of samples. The results shows that phenolic has been intercalated between adjacent montmorillonite platelets and d_001 of Montmorillonite platelets increases with phenolic content increasing. The study of the thermal property also shows that phenolic resin/montmorillonite are of better thermal stability with the increase of montmorillonite content.
{"title":"Synthesis and Characteration of Phenolic Resin/Montmorillonite Nanocomposites","authors":"Yujun Zhang, Mao-Peng Lin, Fengfu Li, Wen Wang, Zhenhao Jin","doi":"10.1109/ICMENS.2004.138","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.138","url":null,"abstract":"The phenolic resin/montmorillonite nanocomposites (NCPs) were synthesized by one-step method. Then FTIR and XRD were used to characterize microstructures of samples. The results shows that phenolic has been intercalated between adjacent montmorillonite platelets and d_001 of Montmorillonite platelets increases with phenolic content increasing. The study of the thermal property also shows that phenolic resin/montmorillonite are of better thermal stability with the increase of montmorillonite content.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127696426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The antimalarial drugs are used for prophylactic suppressive chemotherapy of malaria but various toxicity and resistance problems associated with such chemotherapy need some sustained delivery and safer carriers. Dendrimers are recently reported as carriers for various chemotherapeutic agents. Their structures are of regular repeated molecular architecture. Due to number of – NH2 group and charged species like carbonyl groups available on dendritic structures there is huge possibilities for drug loading and drug delivery and further their chemical architecture increases stability of such carriers as compared to other conventional carriers like liposomes, nanoparticles and microparticles. The present work was undertaken to solubilize and load model drug Chloroquine phosphate (CP) and reduce drawbacks of simple drug administration.
{"title":"PEGylated-poly-l-lysine Dendrimers for Delivery of Chloroquine Phosphate","authors":"D. Bhadra, S. Bhadra, N. K. Jain","doi":"10.1109/ICMENS.2004.123","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.123","url":null,"abstract":"The antimalarial drugs are used for prophylactic suppressive chemotherapy of malaria but various toxicity and resistance problems associated with such chemotherapy need some sustained delivery and safer carriers. Dendrimers are recently reported as carriers for various chemotherapeutic agents. Their structures are of regular repeated molecular architecture. Due to number of – NH2 group and charged species like carbonyl groups available on dendritic structures there is huge possibilities for drug loading and drug delivery and further their chemical architecture increases stability of such carriers as compared to other conventional carriers like liposomes, nanoparticles and microparticles. The present work was undertaken to solubilize and load model drug Chloroquine phosphate (CP) and reduce drawbacks of simple drug administration.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122263185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nonlinear filtering has proven to be a valuable tool in many applications ranging from search and rescue to performing arts. Herein we discuss an application of filtering to medical imaging. A sample problem in detecting, tracking, and characterizing the movement of promyelocytic leukemia nuclear bodies within a cell nucleus is used to demonstrate the utility of nonlinear filtering in this area. Simulation results are presented and discussed.
{"title":"Tracking Promyelocytic Leukemia Nuclear Bodies for Disease Detection: A Proof of Concept via Filtering","authors":"J. Hailes, M. Kouritzin, R. Marsh, J. McCrosky","doi":"10.1109/ICMENS.2004.147","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.147","url":null,"abstract":"Nonlinear filtering has proven to be a valuable tool in many applications ranging from search and rescue to performing arts. Herein we discuss an application of filtering to medical imaging. A sample problem in detecting, tracking, and characterizing the movement of promyelocytic leukemia nuclear bodies within a cell nucleus is used to demonstrate the utility of nonlinear filtering in this area. Simulation results are presented and discussed.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127151934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this work we will show a new type of a microvalve that uses the phase change effect in order to control the flow of a fluid. The valve consists just of a micro channel that possesses a heating element made of copper at one side. Furthermore, the valve can be cooled by a special external cooling system. If the fluid flowing trough the channel gets a temperature below the phase transition temperature it becomes a solid. The flow of the former fluid will be stopped. By means of an electrical current applied on the heating element the flow can be restored. We have investigated in this work the flow of melted wax. The melting temperature is above 80°C. The viscosity of the wax changes from 50mPas at 80°C to 3mPas at 140°C. We investigated new microvalves with channel dimensions between 20 mm and 90 mm in diameter. Two types of the channels, with circled and elliptical shaped cross-section, have been studied, too. The wax temperature varies from 80°C to 140°C. A cooling fluid that possesses a temperature of 20°C cooled the valve. The time constant of cooling and flow stopping depends on the material of the channel, the fluid temperature and the channel geometry. It can vary between 30ms to 120ms. Technological procedures for production of such one he new microvalve can be produced by means of silicon microtechnologies.
{"title":"Active New Microvalve Based on Phase Change Effect","authors":"S. Bogdanov, X. Riedl, N. Schwesinger","doi":"10.1109/ICMENS.2004.26","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.26","url":null,"abstract":"In this work we will show a new type of a microvalve that uses the phase change effect in order to control the flow of a fluid. The valve consists just of a micro channel that possesses a heating element made of copper at one side. Furthermore, the valve can be cooled by a special external cooling system. If the fluid flowing trough the channel gets a temperature below the phase transition temperature it becomes a solid. The flow of the former fluid will be stopped. By means of an electrical current applied on the heating element the flow can be restored. We have investigated in this work the flow of melted wax. The melting temperature is above 80°C. The viscosity of the wax changes from 50mPas at 80°C to 3mPas at 140°C. We investigated new microvalves with channel dimensions between 20 mm and 90 mm in diameter. Two types of the channels, with circled and elliptical shaped cross-section, have been studied, too. The wax temperature varies from 80°C to 140°C. A cooling fluid that possesses a temperature of 20°C cooled the valve. The time constant of cooling and flow stopping depends on the material of the channel, the fluid temperature and the channel geometry. It can vary between 30ms to 120ms. Technological procedures for production of such one he new microvalve can be produced by means of silicon microtechnologies.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133995833","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
New architectures to reduce the acuation voltage of a cantilever beam MEMS switch are presented. Voltage reduction is achieved through manipulation of the shape of the capacitor plates to increase the effective area and decrease the effective distance between plates. Improvements are achieved without a physical increase in footprint dimensions, beam to substrate separation, or a decrease in the spring constant of the beam. The architectures are particularly applications that require a small footprint, high degrees of electrical isolation, and low switching times.
{"title":"Analysis of Alternative Capacitor Topologies for MEMS Switches Fabricated with Printed Circuit Technology","authors":"B. Deken","doi":"10.1109/ICMENS.2004.31","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.31","url":null,"abstract":"New architectures to reduce the acuation voltage of a cantilever beam MEMS switch are presented. Voltage reduction is achieved through manipulation of the shape of the capacitor plates to increase the effective area and decrease the effective distance between plates. Improvements are achieved without a physical increase in footprint dimensions, beam to substrate separation, or a decrease in the spring constant of the beam. The architectures are particularly applications that require a small footprint, high degrees of electrical isolation, and low switching times.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130754271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
An analytical model has been developed to understand the rotational dynamics of a microbeam-supported rigid microplate, which is positioned across a microchannel partially filled with an isotropic liquid. Physical phenomena included in this work are those associated with surface tension, buoyancy, hydrodynamics, interfacial microwaves, and torsional stiffness of the microbeam supports. Consideration of surface tension results in nonlinear terms for the righting moment and for the forcing function terms of the ordinary differential equation of rotational motion. Response characteristics are investigated for varying microwave amplitudes and frequencies, as well as microplate and microbeam principal dimensions. Results show that the analysis presented in this work can be used in designing microdevices for measurement of fluid properties, microwave features and pulsating pressures.
{"title":"Dynamic Response of a Microbeam-Supported Microplate under Interfacial Microwave Load","authors":"A. Allievi","doi":"10.1109/ICMENS.2004.55","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.55","url":null,"abstract":"An analytical model has been developed to understand the rotational dynamics of a microbeam-supported rigid microplate, which is positioned across a microchannel partially filled with an isotropic liquid. Physical phenomena included in this work are those associated with surface tension, buoyancy, hydrodynamics, interfacial microwaves, and torsional stiffness of the microbeam supports. Consideration of surface tension results in nonlinear terms for the righting moment and for the forcing function terms of the ordinary differential equation of rotational motion. Response characteristics are investigated for varying microwave amplitudes and frequencies, as well as microplate and microbeam principal dimensions. Results show that the analysis presented in this work can be used in designing microdevices for measurement of fluid properties, microwave features and pulsating pressures.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116817357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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