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2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)最新文献

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Applicability of an Optimized Fiber Optic Smart Structure 一种优化的光纤智能结构的适用性
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.35
Yu Fan, M. Kahrizi
In recent years, fiber optic smart structure is widely studied because of its intrinsic benefits [1] [2]. One of the most striking evolvements is the technology, of which FBG (Fiber Bragg Grating) sensor systems are embedded in fiber reinforced composite materials, so that any ambience induced responses of the host structures can be monitored in real time, consequently proper actuations are initiated. Thus a neural system is realized. This work reports an entire optimization process of the FBG sensors embedded in Graphite/Epoxy composite material. Moreover, performance of the sensor system was observed and the applicability is discussed. Due to the mechanically orthotropic characteristics of the Graphite/Epoxy composite material, two FBG sensors were orthogonally embedded along the two principle axes in mid-plane of the specimen. When strain load was applied along one of the axes, longitudinal and shear responses of the structure were simultaneously monitored, hence its orthotropic properties were determined. Further, any randomly oriented strain applied to the specimen will be analytically quantified along the two sensors. Recurring to surface mounted resistance strain gage concept, the embedded FBG strain gage array was recalibrated, and its sensing alterability is quantified. This work tends to provide a quantitative discussion on FBG sensors’ residual erroneousness after an optimized embedment, the conclusion may give designers a reference to properly interpret FBG sensors’ performances, in case they are used as an embedded strain gage.
近年来,光纤智能结构因其固有的优点而受到广泛的研究。其中最引人注目的发展之一是将光纤光栅传感器系统嵌入到纤维增强复合材料中,从而可以实时监测宿主结构的任何环境诱导响应,从而启动适当的驱动。这样就实现了一个神经系统。本工作报告了嵌入石墨/环氧复合材料的FBG传感器的整个优化过程。此外,还对传感器系统的性能进行了观察,并对其适用性进行了讨论。由于石墨/环氧复合材料的机械正交异性特性,两个FBG传感器沿试件中平面的两个主轴垂直嵌入。当沿某一轴施加应变荷载时,同时监测结构的纵向和剪切响应,从而确定其正交各向异性。此外,任何随机取向的应变施加到试样将分析量化沿两个传感器。根据表面贴装电阻应变片的概念,对嵌入式光纤光栅应变片阵列进行了重新校准,并对其传感变异性进行了量化。本工作旨在对优化后的光纤光栅传感器残余误差进行定量讨论,结论可为设计人员在将光纤光栅传感器用作嵌入式应变片时正确解释其性能提供参考。
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引用次数: 4
Modeling of Surface Forces between Micron-Sized Objects in Dry Condition 微米级物体在干燥条件下的表面力建模
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.97
A. Hariri, J. Zu, R. Mrad
Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation ( ñ) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numericalbased closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.
毛细管力、范德华力(vdW)和静电力通常被称为表面力,它们可以显著影响包含可以相互接触的表面的微机电系统(MEMS)的行为和性能。在这里,我们关注的是vdW力,它是干燥条件下导电表面之间的主要表面力。在本研究中,我们首先回顾了由高斯型和分形型随机过程描述的现有粗糙度模型。然后,考虑粗糙表面高度分布的一阶和二阶概率密度函数(pdf),采用两种方法推导了vdW力。所得公式是连续采样点之间相关性的函数(ñ)。基于相关关系和其他参数对这些公式进行分析,确定了vdW力的上界和下界,并推导了上界的数值封闭形式公式。最后,根据所建立的方程和表面微加工过程的数据,讨论了各种情况。
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引用次数: 5
Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots 电力清除无线微型机器人多晶硅光热驱动器的设计、建模与测试
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.50
Francis R. Szabo, Paul E. Kladiti
The biggest hurdle to be solved, in order to create autonomous Micro-Electro-Mechanical Systems (MEMS) microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research investigated a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. The use of lasers to directly power micrometer scale silicon thermal actuators was explored. Optothermal actuators, intended for use on a small wirelessly propelled autonomous MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. A 760 µm by 710 µm prototype MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 µm of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless polysilicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation. The experiments also demonstrated a potentially viable design that could be used to propel the world’s smallest autonomous MEMS microrobot.
为了制造自主微机电系统(MEMS)微型机器人,需要解决的最大障碍是为它们的执行器引擎发电。目前大多数执行器需要的功率比目前可从微功率源获得的功率大几个数量级。为了实现更小的微型机器人,本研究研究了一种简化的电源概念,通过使用从环境中无线供电的致动器,消除了对车载电源和控制电路的需求。探讨了利用激光直接为微米级硅热致动器供电的方法。采用PolyMUMPs硅金属芯片制造工艺,对用于小型无线推进自主MEMS微型机器人的光热致动器进行了建模、设计、制造和测试。设计、制作并测试了一个760 μ m × 710 μ m的基于多晶硅的MEMS微机器人原型机,该机器人采用光热致动器。它的每个部分都被证明是使用外部激光的能量来提供驱动的。光热致动器为微型机器人驱动轴提供2µm的偏转,脉冲激光功率为60 mW。这些实验的结果证明了一种新型的无线多晶硅致动器的有效性,这种致动器不直接依赖于电力。实验还展示了一种潜在可行的设计,可用于推动世界上最小的自主MEMS微型机器人。
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引用次数: 12
Hydrolyzable Polyrotaxanes Consisting of β-Cyclodextrins and Pluronic® for Drug Delivery 由β-环糊精和Pluronic&#174组成的可水解聚轮烷用于给药
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.1508987
A. Ito, T. Ooya, N. Yui
In recent years, polyrotaxanes (PRXs) have been extensively studied as a novel supramolecular assembly that has interlocked structure between a cyclic molecule and a linear polymeric chain. Based on the interlocked structure of PRXs, one can expect excellent properties in terms of supramolecular motion of the cyclic molecules. In pharmaceutical fields, we have studied biodegradable PRXs as a drug carrier, in which many α-cyclodextrins (α-CDs) are threaded onto a poly (ethylene glycol) (PEG) capped with bulky blocking group via peptide linkages1). Drugs were immobilized α-CDs via biodegradable spacer. When the terminals of PRX were enzymatically hydrolyzed, drug-immobilized α-CDs could be released.
近年来,聚轮烷(PRXs)作为一种在环状分子和线性聚合物链之间具有互锁结构的新型超分子组装体得到了广泛的研究。基于prx的互锁结构,人们可以期望在环分子的超分子运动方面具有优异的性能。在制药领域,我们已经研究了可生物降解的PRXs作为药物载体,其中许多α-环糊精(α-CDs)通过肽键连接到覆盖有大块阻断基团的聚乙二醇(PEG)上。药物通过可生物降解的间隔剂固定α-CDs。当PRX末端被酶解时,可以释放药物固定化的α-CDs。
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引用次数: 0
Synthesis and Characteration of Phenolic Resin/Montmorillonite Nanocomposites 酚醛树脂/蒙脱土纳米复合材料的合成与表征
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.138
Yujun Zhang, Mao-Peng Lin, Fengfu Li, Wen Wang, Zhenhao Jin
The phenolic resin/montmorillonite nanocomposites (NCPs) were synthesized by one-step method. Then FTIR and XRD were used to characterize microstructures of samples. The results shows that phenolic has been intercalated between adjacent montmorillonite platelets and d_001 of Montmorillonite platelets increases with phenolic content increasing. The study of the thermal property also shows that phenolic resin/montmorillonite are of better thermal stability with the increase of montmorillonite content.
采用一步法制备了酚醛树脂/蒙脱土纳米复合材料。利用FTIR和XRD对样品进行微观结构表征。结果表明:相邻蒙脱土薄片之间有酚醛嵌入,蒙脱土薄片的d_001随酚醛含量的增加而增加。热性能的研究还表明,随着蒙脱土含量的增加,酚醛树脂/蒙脱土具有更好的热稳定性。
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引用次数: 0
PEGylated-poly-l-lysine Dendrimers for Delivery of Chloroquine Phosphate 聚酰基化聚赖氨酸树状大分子递送磷酸氯喹
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.123
D. Bhadra, S. Bhadra, N. K. Jain
The antimalarial drugs are used for prophylactic suppressive chemotherapy of malaria but various toxicity and resistance problems associated with such chemotherapy need some sustained delivery and safer carriers. Dendrimers are recently reported as carriers for various chemotherapeutic agents. Their structures are of regular repeated molecular architecture. Due to number of – NH2 group and charged species like carbonyl groups available on dendritic structures there is huge possibilities for drug loading and drug delivery and further their chemical architecture increases stability of such carriers as compared to other conventional carriers like liposomes, nanoparticles and microparticles. The present work was undertaken to solubilize and load model drug Chloroquine phosphate (CP) and reduce drawbacks of simple drug administration.
抗疟药物用于疟疾的预防性抑制性化疗,但与这种化疗相关的各种毒性和耐药性问题需要一些持续的给药和更安全的载体。树状大分子最近被报道为各种化疗药物的载体。它们的结构具有规则的重复分子结构。由于树突结构上可用的- NH2基团和带电物质(如羰基)的数量,因此药物装载和药物递送具有巨大的可能性,并且与脂质体、纳米粒子和微粒等其他传统载体相比,它们的化学结构增加了这种载体的稳定性。本研究旨在对模型药物磷酸氯喹(Chloroquine phosphate, CP)进行增溶和载药,以减少给药简单的缺点。
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引用次数: 5
Tracking Promyelocytic Leukemia Nuclear Bodies for Disease Detection: A Proof of Concept via Filtering 跟踪早幼粒细胞白血病核体用于疾病检测:通过过滤的概念验证
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.147
J. Hailes, M. Kouritzin, R. Marsh, J. McCrosky
Nonlinear filtering has proven to be a valuable tool in many applications ranging from search and rescue to performing arts. Herein we discuss an application of filtering to medical imaging. A sample problem in detecting, tracking, and characterizing the movement of promyelocytic leukemia nuclear bodies within a cell nucleus is used to demonstrate the utility of nonlinear filtering in this area. Simulation results are presented and discussed.
非线性滤波已被证明是一个有价值的工具,在许多应用范围从搜索和救援表演艺术。本文讨论了滤波在医学成像中的应用。在检测,跟踪和表征早幼粒细胞白血病核体在细胞核内的运动的一个样本问题被用来证明非线性滤波在这一领域的效用。给出了仿真结果并进行了讨论。
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引用次数: 0
Active New Microvalve Based on Phase Change Effect 基于相变效应的新型主动微阀
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.26
S. Bogdanov, X. Riedl, N. Schwesinger
In this work we will show a new type of a microvalve that uses the phase change effect in order to control the flow of a fluid. The valve consists just of a micro channel that possesses a heating element made of copper at one side. Furthermore, the valve can be cooled by a special external cooling system. If the fluid flowing trough the channel gets a temperature below the phase transition temperature it becomes a solid. The flow of the former fluid will be stopped. By means of an electrical current applied on the heating element the flow can be restored. We have investigated in this work the flow of melted wax. The melting temperature is above 80°C. The viscosity of the wax changes from 50mPas at 80°C to 3mPas at 140°C. We investigated new microvalves with channel dimensions between 20 mm and 90 mm in diameter. Two types of the channels, with circled and elliptical shaped cross-section, have been studied, too. The wax temperature varies from 80°C to 140°C. A cooling fluid that possesses a temperature of 20°C cooled the valve. The time constant of cooling and flow stopping depends on the material of the channel, the fluid temperature and the channel geometry. It can vary between 30ms to 120ms. Technological procedures for production of such one he new microvalve can be produced by means of silicon microtechnologies.
在这项工作中,我们将展示一种新型的微阀,它利用相变效应来控制流体的流动。该阀门仅由一个微通道组成,微通道的一侧有一个由铜制成的加热元件。此外,阀门可以通过特殊的外部冷却系统进行冷却。如果流过通道的流体温度低于相变温度,它就变成固体。前一种液体的流动将被停止。通过在加热元件上施加电流,可以恢复流动。在这项工作中,我们研究了熔化蜡的流动。熔化温度在80℃以上。蜡的粘度从80℃时的50mPas变化到140℃时的3mPas。我们研究了新的微阀,通道尺寸在直径20毫米到90毫米之间。本文还研究了两种截面呈圆形和椭圆形的通道。蜡的温度范围为80℃~ 140℃。温度为20°C的冷却液冷却阀门。冷却和停止流动的时间常数取决于通道的材料、流体温度和通道的几何形状。它可以在30ms到120ms之间变化。利用硅微技术可以生产这种新型微阀的工艺流程。
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引用次数: 0
Analysis of Alternative Capacitor Topologies for MEMS Switches Fabricated with Printed Circuit Technology 采用印刷电路技术制造MEMS开关的备选电容拓扑分析
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.31
B. Deken
New architectures to reduce the acuation voltage of a cantilever beam MEMS switch are presented. Voltage reduction is achieved through manipulation of the shape of the capacitor plates to increase the effective area and decrease the effective distance between plates. Improvements are achieved without a physical increase in footprint dimensions, beam to substrate separation, or a decrease in the spring constant of the beam. The architectures are particularly applications that require a small footprint, high degrees of electrical isolation, and low switching times.
提出了一种降低悬臂梁式MEMS开关电压的新结构。电压降低是通过操纵电容器极板的形状来增加有效面积和减小极板之间的有效距离来实现的。改进是在没有足迹尺寸、光束到基材分离或光束的弹簧常数减少的情况下实现的。这些架构特别适用于需要占用空间小、高度电隔离和低开关时间的应用。
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引用次数: 0
Dynamic Response of a Microbeam-Supported Microplate under Interfacial Microwave Load 界面微波载荷作用下微柱支撑微孔板的动态响应
Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.55
A. Allievi
An analytical model has been developed to understand the rotational dynamics of a microbeam-supported rigid microplate, which is positioned across a microchannel partially filled with an isotropic liquid. Physical phenomena included in this work are those associated with surface tension, buoyancy, hydrodynamics, interfacial microwaves, and torsional stiffness of the microbeam supports. Consideration of surface tension results in nonlinear terms for the righting moment and for the forcing function terms of the ordinary differential equation of rotational motion. Response characteristics are investigated for varying microwave amplitudes and frequencies, as well as microplate and microbeam principal dimensions. Results show that the analysis presented in this work can be used in designing microdevices for measurement of fluid properties, microwave features and pulsating pressures.
建立了一种分析模型来理解微梁支撑的刚性微板的旋转动力学,该微板位于部分填充各向同性液体的微通道上。本工作中包括的物理现象与微梁支架的表面张力、浮力、流体动力学、界面微波和扭转刚度有关。考虑表面张力后,旋转运动常微分方程的矫直力矩和力函数项均为非线性项。研究了不同微波振幅和频率以及微孔板和微束主尺寸下的响应特性。结果表明,本文的分析可用于设计流体特性、微波特性和脉动压力测量的微型装置。
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引用次数: 0
期刊
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
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