Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. In an attempt to apply a large area stamp to UV-NIL in a low vacuum environment, we have proposed a new UV-NIL process using an element-wise embossed stamp (EES), which consists of a number of elements, each of which is separated by channels. Nano-scale patterns of each element were fabricated using e-beam lithography and an etching process in which a Cr film was employed as a hard mask for transferring nanostructures to a quartz plate. Before pressing the EES, low viscosity resin droplets with a nano-liter volume were dispensed on each element of the EES. Experiments on UV-NIL were performed on an EVG620-NIL. 380 nm - 1 µm features of the EES were successfully transferred to 4 in. wafers. We measured patterns and residual layers on the imprinted wafers to evaluate the potential of the proposed process. Experiments showed that the EES enables UV-NIL using a large-area stamp in a low vacuum environment.
{"title":"UV Nanoimprint Lithography Using an Elementwise Embossed Stamp","authors":"Jun‐ho Jeong, Y. Sim, H. Sohn, Eung-sug Lee","doi":"10.1109/ICMENS.2004.150","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.150","url":null,"abstract":"Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. In an attempt to apply a large area stamp to UV-NIL in a low vacuum environment, we have proposed a new UV-NIL process using an element-wise embossed stamp (EES), which consists of a number of elements, each of which is separated by channels. Nano-scale patterns of each element were fabricated using e-beam lithography and an etching process in which a Cr film was employed as a hard mask for transferring nanostructures to a quartz plate. Before pressing the EES, low viscosity resin droplets with a nano-liter volume were dispensed on each element of the EES. Experiments on UV-NIL were performed on an EVG620-NIL. 380 nm - 1 µm features of the EES were successfully transferred to 4 in. wafers. We measured patterns and residual layers on the imprinted wafers to evaluate the potential of the proposed process. Experiments showed that the EES enables UV-NIL using a large-area stamp in a low vacuum environment.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128001680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A coupled AC dielectrophoretic membrane filtration technique is proposed in this paper.This technique utilizes ACdielectrophoresis and preferential transport through a semi-permeable membrane. Simultaneous application of ACdielectrophoresis and membrane filtration can be used for separation of trace amounts of a target species from an emulsion. This can be achieved by embedding inter-digitated microelectrode arrays on a membrane surface used in a cross flow filtration system. The electrode array, when actuated by an AC signal, will create a dielectrophoretic force field to capture the target species onto the membrane surface from the flowing emulsion during cross flow filtration. This paper explains the theoretical principles underlying such a process, and describes a simple mathematical framework based on trajectory analysis for assessing the separation efficiency of the technique. Simulation results indicate that preferential transport of the emulsified water through themembrane in a cross flow filtration device can be significantly enhanced by incorporating an AC dielectrophoretic field in the process. The novel technique proposed here can lead to a highly efficient continuous separation process for dilute emulsions.
{"title":"Dielectrophoretic Membrane Filtration Process by Integrating Microelectrode Array","authors":"Shahnawaz Molla, S. Bhattacharjee, J. Masliyah","doi":"10.1109/ICMENS.2004.54","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.54","url":null,"abstract":"A coupled AC dielectrophoretic membrane filtration technique is proposed in this paper.This technique utilizes ACdielectrophoresis and preferential transport through a semi-permeable membrane. Simultaneous application of ACdielectrophoresis and membrane filtration can be used for separation of trace amounts of a target species from an emulsion. This can be achieved by embedding inter-digitated microelectrode arrays on a membrane surface used in a cross flow filtration system. The electrode array, when actuated by an AC signal, will create a dielectrophoretic force field to capture the target species onto the membrane surface from the flowing emulsion during cross flow filtration. This paper explains the theoretical principles underlying such a process, and describes a simple mathematical framework based on trajectory analysis for assessing the separation efficiency of the technique. Simulation results indicate that preferential transport of the emulsified water through themembrane in a cross flow filtration device can be significantly enhanced by incorporating an AC dielectrophoretic field in the process. The novel technique proposed here can lead to a highly efficient continuous separation process for dilute emulsions.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115937974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shaoming Yang, Xiuqin Chen, M. Hasegawa, S. Motojima
Double-helix carbon micro-springs were prepared by the Ni catalyzed pyrolysis of acetylene containing a small amount of H2S, in high purity (almost 100% among the deposits) and yield (about 20% versus acetylene feed). The conformation and some properties of the carbon micro-springs were examined, and the potential applications were discussed. It was found that they have super-elastic properties, and could be extended to 3-15 times of the original spring axis length and contracted to original state after the load was released. The resistivity increased with increasing extension length, and then got recovery after the load was released. This property enables the microsprings to be used as an advanced bulk sensor material in MEMS. Furthermore, the micro-springs exhibited outstanding electromagnetic wave absorption properties in GHz regions. The conformation of novel single-helix carbon nano-springs prepared by Fe-containing alloys as the catalyst will be also presented.
{"title":"Conformations of Super-Elastic Carbon Micro/Nano-Springs and Their Properties","authors":"Shaoming Yang, Xiuqin Chen, M. Hasegawa, S. Motojima","doi":"10.1109/ICMENS.2004.45","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.45","url":null,"abstract":"Double-helix carbon micro-springs were prepared by the Ni catalyzed pyrolysis of acetylene containing a small amount of H2S, in high purity (almost 100% among the deposits) and yield (about 20% versus acetylene feed). The conformation and some properties of the carbon micro-springs were examined, and the potential applications were discussed. It was found that they have super-elastic properties, and could be extended to 3-15 times of the original spring axis length and contracted to original state after the load was released. The resistivity increased with increasing extension length, and then got recovery after the load was released. This property enables the microsprings to be used as an advanced bulk sensor material in MEMS. Furthermore, the micro-springs exhibited outstanding electromagnetic wave absorption properties in GHz regions. The conformation of novel single-helix carbon nano-springs prepared by Fe-containing alloys as the catalyst will be also presented.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114826086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pulmonary gene delivery is thought to play an important role in treating genetically related diseases and may induce immunity towards pathogens entering the body via the airways. We present here in vitro and in vivo methods developed at our laboratories to study carrier systems for pulmonary delivery of DNA vaccines.
{"title":"Developing and Testing of Drug Carrier Systems for Pulmonary Drug Delivery","authors":"G. Borchard, M. Bivas-Benita, H. Junginger","doi":"10.1109/ICMENS.2004.51","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.51","url":null,"abstract":"Pulmonary gene delivery is thought to play an important role in treating genetically related diseases and may induce immunity towards pathogens entering the body via the airways. We present here in vitro and in vivo methods developed at our laboratories to study carrier systems for pulmonary delivery of DNA vaccines.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128681613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this study, a biological photoelectric transducer based on bacteriorhodopsin (bR) is described. Purple membrane (PM) containing bR are deposited on a TiO₂ electrode surface and electrically oriented. The dried bR purple membrane film is then utilized to investigate the photoelectric response. The latter is induced by charge displacement of bR molecules in the purple membranes. The response is affected by both the wavelength and intensity of the incident light sources. The experimental results indicate that the generated photo-voltage is proportional to the intensity of the illumination light, and the photo-voltage measured under different wavelengths correspond to the absorption spectrum of bR.
{"title":"Biological Transducers Based on Bacteriorhodopsin for Smart Biosensor Applications","authors":"W. Wang, G. Knopf, A. Bassi","doi":"10.1109/ICMENS.2004.39","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.39","url":null,"abstract":"In this study, a biological photoelectric transducer based on bacteriorhodopsin (bR) is described. Purple membrane (PM) containing bR are deposited on a TiO₂ electrode surface and electrically oriented. The dried bR purple membrane film is then utilized to investigate the photoelectric response. The latter is induced by charge displacement of bR molecules in the purple membranes. The response is affected by both the wavelength and intensity of the incident light sources. The experimental results indicate that the generated photo-voltage is proportional to the intensity of the illumination light, and the photo-voltage measured under different wavelengths correspond to the absorption spectrum of bR.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125894969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Deformation of droplets in an externally imposed electrical field is a widely studied phenomenon, and is an important component of microfluidic operations involving electrical actuation of droplets. In this study, we explore a general numerical formulation for the deformation of droplets under an imposed electrical field. The solution is presented for two perfect dielectrics carring no free charge. The numerical solutions are first compared with an asymptotic analytic result for small deformations to assess the accuracy of the method. Following this, the dynamics of the deformation are presented to characterize the typical response times of droplets subjected to a step change in the electric field. The results provide the basis for modeling the dynamic response and control strategies for manipulating the droplets, and may provide considerable insight into microfluidic operations based on electrowetting.
{"title":"Finite Element Simulations of Transient Droplet Deformation in an Electrical Field","authors":"Graeme Supeene, C. Koch, S. Bhattacharjee","doi":"10.1109/ICMENS.2004.70","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.70","url":null,"abstract":"Deformation of droplets in an externally imposed electrical field is a widely studied phenomenon, and is an important component of microfluidic operations involving electrical actuation of droplets. In this study, we explore a general numerical formulation for the deformation of droplets under an imposed electrical field. The solution is presented for two perfect dielectrics carring no free charge. The numerical solutions are first compared with an asymptotic analytic result for small deformations to assess the accuracy of the method. Following this, the dynamics of the deformation are presented to characterize the typical response times of droplets subjected to a step change in the electric field. The results provide the basis for modeling the dynamic response and control strategies for manipulating the droplets, and may provide considerable insight into microfluidic operations based on electrowetting.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125500340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Ramsay, D. Waterhouse, K. Gelmon, N. Santos, E. Wasan, Jehan Alnajim, M. Anantha, C. Tucker, R. Klasa, G. Bebb, Juliana Yeung, Karen Fang, L. Edwards, Yanping Hu, Corrina Warburton, V. Dragowska, Sheela A. Abraham, Gigi Chui, M. Bally
Cancer is a complex disease and virtually all chemotherapy regimens for treating cancer utilize drug combinations selected to affect several targets that contribute to cancer cell survival and disease progression. Although drug combinations are the standard of care for patients with advanced cancer, new anticancer drugs are typically first introduced in patients as single agents and only after many years of clinical trials are these single agents combined with other drugs to determine their optimal role in cancer treatment. This process needs to change if patients are going to receive the full benefit of the arsenal of approved cytotoxic/cytostatic agents and emerging molecularly targeted therapeutics. It is clear that drug delivery systems will play an important role in the development and use of drug combinations for the treatment of cancer and the objective of this discussion is to highlight how existing and emerging drug carriers can be used as an enabling technology to create fixed ratio anticancer drug combination products for the treatment of systemic disease.
{"title":"Lipid/Polymer Nanoparticles as Tools to Improve the Therapeutic Activity of Existing and Emerging Anticancer Drug Combinations","authors":"E. Ramsay, D. Waterhouse, K. Gelmon, N. Santos, E. Wasan, Jehan Alnajim, M. Anantha, C. Tucker, R. Klasa, G. Bebb, Juliana Yeung, Karen Fang, L. Edwards, Yanping Hu, Corrina Warburton, V. Dragowska, Sheela A. Abraham, Gigi Chui, M. Bally","doi":"10.1109/ICMENS.2004.88","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.88","url":null,"abstract":"Cancer is a complex disease and virtually all chemotherapy regimens for treating cancer utilize drug combinations selected to affect several targets that contribute to cancer cell survival and disease progression. Although drug combinations are the standard of care for patients with advanced cancer, new anticancer drugs are typically first introduced in patients as single agents and only after many years of clinical trials are these single agents combined with other drugs to determine their optimal role in cancer treatment. This process needs to change if patients are going to receive the full benefit of the arsenal of approved cytotoxic/cytostatic agents and emerging molecularly targeted therapeutics. It is clear that drug delivery systems will play an important role in the development and use of drug combinations for the treatment of cancer and the objective of this discussion is to highlight how existing and emerging drug carriers can be used as an enabling technology to create fixed ratio anticancer drug combination products for the treatment of systemic disease.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122544604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Molecular recognition in chemistry and biology is a kind of host-guest phenomena, which concerns inclusion complexes formed through noncovalently controlled interactions between the host and guest. Possessing well-defined hydrophobic cavities of cyclodextrins (CDs), which can bind various organic, inorganic, and biological molecules to form stable inclusion complexes or supramolecular species, have been employed as excellent hosts in supramolecular chemistry and chiral selectors in separation science and technology. Hence, a great deal of efforts has been devoted to the design and syntheses of novel CD derivatives that display enhanced molecular binding abilities and selectivities for specific substrates.
{"title":"Molecular Recognition System Controlled by Thermosensitive Complexation Using Cyclodextrin-Conjugated Poly(ε-lysine)s","authors":"A. Takahashi, H. Choi, T. Ooya, N. Yui","doi":"10.1109/ICMENS.2004.102","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.102","url":null,"abstract":"Molecular recognition in chemistry and biology is a kind of host-guest phenomena, which concerns inclusion complexes formed through noncovalently controlled interactions between the host and guest. Possessing well-defined hydrophobic cavities of cyclodextrins (CDs), which can bind various organic, inorganic, and biological molecules to form stable inclusion complexes or supramolecular species, have been employed as excellent hosts in supramolecular chemistry and chiral selectors in separation science and technology. Hence, a great deal of efforts has been devoted to the design and syntheses of novel CD derivatives that display enhanced molecular binding abilities and selectivities for specific substrates.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114795983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Electrochemical discharge can be effectively and economically used for machining of a wide range of conducting and non-conducting materials, ceramics, and composites. This can be also used for selective deposition of metals and micro welding. Its potentials for rapid prototyping of small metallic parts have been vindicated. All these processes require generation of temperatures above the melting temperature of the metal under consideration. In the present work, experimentally measured and theoretically estimated temperature results are presented for electro chemical discharge machining (ECDM) process. In situ temperature measurements are performed for the first time in ECDM, especially, in the machining zone with various temperature sensing schemes. The temperatures at different radii of the work piece are calculated by considering the spark as a constant, circular heat source on the surface of the work piece and considering the heat balance of each discretised element of the work piece. Experimentally measured and theoretically estimated temperature results are comparable.
{"title":"Experimental Measurements and Theoretical Estimation of Temperature in ECDM Process","authors":"A. V. Kulkarni, M. Karnik","doi":"10.1109/ICMENS.2004.63","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.63","url":null,"abstract":"Electrochemical discharge can be effectively and economically used for machining of a wide range of conducting and non-conducting materials, ceramics, and composites. This can be also used for selective deposition of metals and micro welding. Its potentials for rapid prototyping of small metallic parts have been vindicated. All these processes require generation of temperatures above the melting temperature of the metal under consideration. In the present work, experimentally measured and theoretically estimated temperature results are presented for electro chemical discharge machining (ECDM) process. In situ temperature measurements are performed for the first time in ECDM, especially, in the machining zone with various temperature sensing schemes. The temperatures at different radii of the work piece are calculated by considering the spark as a constant, circular heat source on the surface of the work piece and considering the heat balance of each discretised element of the work piece. Experimentally measured and theoretically estimated temperature results are comparable.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133385125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
{"title":"A Tunable RF MEMS Inductor","authors":"I. Zine-El-Abidine, M. Okoniewski, J. McRory","doi":"10.1109/ICMENS.2004.24","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.24","url":null,"abstract":"This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129296351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：