首页 > 最新文献

2010 IEEE International Frequency Control Symposium最新文献

英文 中文
Development and characterization of biodegradable conductive polymers for the next generation of RF bio-resonators 用于下一代射频生物谐振器的可生物降解导电聚合物的开发和表征
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556332
C. Boutry, Wei Sun, Tobias Strunz, Hengky Chandrahalim, C. Hierold
The objective of this research is to develop a completely polymeric and biodegradable RF driven RLC resonator circuit. New polymer composites are fabricated and characterized: they consist on conductive polymer nanoparticles (polypyrrole PPy) embedded in a biodegradable polymer matrix (both polylactide PLLA and polycaprolactone PCL are under investigation). The influence of PPy content and polymerization conditions (temperature, atmosphere, additional doping agent) on the resistivity are evaluated. A strong decrease of the resistivity is observed for composites containing more than 12% and 6% of PPy for PLLA/PPy and PCL/PPy, respectively. Resistivities of 0.0043Ω.m (PLLA/PPy39%) and 0.0016Ω.m (PCL/PPy39%) are achieved. A Matlab modelling and HFSS simulation of the RLC resonator performances based on the measured material properties is performed. The simulation results validate the use of these composites to successfully fabricate RLC resonators.
本研究的目的是开发一种完全聚合和可生物降解的射频驱动RLC谐振电路。新型聚合物复合材料的制备和表征:它们由导电聚合物纳米颗粒(聚吡咯PPy)嵌入可生物降解的聚合物基体(聚乳酸PLLA和聚己内酯PCL正在研究中)组成。考察了聚吡啶含量和聚合条件(温度、气氛、外加掺杂剂)对电阻率的影响。PLLA/PPy和PCL/PPy复合材料的电阻率分别大于12%和6%。电阻率0.0043Ω。m (PLLA/PPy39%)和0.0016Ω。m (PCL/PPy39%)。基于实测材料特性,对RLC谐振器进行了Matlab建模和HFSS仿真。仿真结果验证了该复合材料在RLC谐振器制造中的应用。
{"title":"Development and characterization of biodegradable conductive polymers for the next generation of RF bio-resonators","authors":"C. Boutry, Wei Sun, Tobias Strunz, Hengky Chandrahalim, C. Hierold","doi":"10.1109/FREQ.2010.5556332","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556332","url":null,"abstract":"The objective of this research is to develop a completely polymeric and biodegradable RF driven RLC resonator circuit. New polymer composites are fabricated and characterized: they consist on conductive polymer nanoparticles (polypyrrole PPy) embedded in a biodegradable polymer matrix (both polylactide PLLA and polycaprolactone PCL are under investigation). The influence of PPy content and polymerization conditions (temperature, atmosphere, additional doping agent) on the resistivity are evaluated. A strong decrease of the resistivity is observed for composites containing more than 12% and 6% of PPy for PLLA/PPy and PCL/PPy, respectively. Resistivities of 0.0043Ω.m (PLLA/PPy39%) and 0.0016Ω.m (PCL/PPy39%) are achieved. A Matlab modelling and HFSS simulation of the RLC resonator performances based on the measured material properties is performed. The simulation results validate the use of these composites to successfully fabricate RLC resonators.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126234643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A study on the aging of ultra-thin Palladium films on SAW hydrogen gas sensors SAW氢气传感器上超薄钯膜的老化研究
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556333
B. Fisher, D. Malocha
Traditionally, low-powered, room temperature sensing of gaseous hydrogen (H2) is difficult. With renewed interest in H2 as a source of energy, there is a need for reliable, energy-efficient sensors. A potential solution can be found in using surface acoustic wave (SAW) devices, which have been implemented as passive, wireless RFID tag-sensors. Thus, in concept, it is advantageous to develop a SAW device with H2 sensing capabilities. Prior experiments have successfully demonstrated a passive SAW-based H2 gas sensor by placing an ultra-thin Palladium (Pd) film (<50Å) in the propagation path [1–3]. These sensors have an instantaneous response and a significant fractional change in SAW propagation loss; however, the lifetime of these sensors are still unknown. Hence, the objective of this study was to examine the influence of aging of ultra-thin Pd films on the usable life of passive SAW H2 gas sensors.
传统上,气体氢(H2)的低功率室温传感是困难的。随着人们对氢气作为一种能源的兴趣重新燃起,人们需要可靠、节能的传感器。一种潜在的解决方案是使用表面声波(SAW)设备,它已经被实现为无源无线RFID标签传感器。因此,从概念上讲,开发具有H2传感能力的SAW器件是有利的。先前的实验已经通过在传播路径中放置超薄钯(Pd)薄膜(<50Å)成功地展示了一种基于saw的被动H2气体传感器[1-3]。这些传感器具有瞬时响应和声表面波传播损耗的显著分数变化;然而,这些传感器的寿命仍然是未知的。因此,本研究的目的是研究超薄Pd膜老化对被动式SAW H2气体传感器使用寿命的影响。
{"title":"A study on the aging of ultra-thin Palladium films on SAW hydrogen gas sensors","authors":"B. Fisher, D. Malocha","doi":"10.1109/FREQ.2010.5556333","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556333","url":null,"abstract":"Traditionally, low-powered, room temperature sensing of gaseous hydrogen (H2) is difficult. With renewed interest in H2 as a source of energy, there is a need for reliable, energy-efficient sensors. A potential solution can be found in using surface acoustic wave (SAW) devices, which have been implemented as passive, wireless RFID tag-sensors. Thus, in concept, it is advantageous to develop a SAW device with H2 sensing capabilities. Prior experiments have successfully demonstrated a passive SAW-based H2 gas sensor by placing an ultra-thin Palladium (Pd) film (<50Å) in the propagation path [1–3]. These sensors have an instantaneous response and a significant fractional change in SAW propagation loss; however, the lifetime of these sensors are still unknown. Hence, the objective of this study was to examine the influence of aging of ultra-thin Pd films on the usable life of passive SAW H2 gas sensors.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129848721","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Repetitive interrogation of 2-level quantum systems 对2级量子系统的重复询问
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556339
J. Prestage, Sang K. Chung
Trapped ion clocks derive information from a reference atomic transition by repetitive interrogations of the same quantum system, either a single ion or ionized gas of many millions of ions. Atomic beam frequency standards, by contrast, measure reference atomic transitions in a continuously replenished “flow through” configuration where initial ensemble atomic coherence is zero. We will describe some issues and problems that can arise when atomic state selection and preparation of the quantum atomic system is not completed, that is, optical pumping has not fully relaxed the coherence and also not fully transferred atoms to the initial state. We present a simple two-level density matrix analysis showing how frequency shifts during the state-selection process can cause frequency shifts of the measured clock transition. Such considerations are very important when a low intensity lamp light source is used for state selection, where there is relatively weak relaxation and re-pumping of ions to an initial state and much weaker ‘environmental’ relaxation of the atomic coherence set-up in the atomic sample.
捕获离子时钟通过重复询问同一量子系统(单个离子或由数百万个离子组成的电离气体),从参考原子跃迁中获得信息。相比之下,原子束频率标准测量的是连续补充的“流过”配置中的参考原子跃迁,其中初始系综原子相干性为零。我们将描述在量子原子系统的原子状态选择和制备尚未完成时可能出现的一些问题和问题,即光泵浦没有完全放松相干性,也没有完全将原子转移到初始状态。我们提出了一个简单的两级密度矩阵分析,显示了在状态选择过程中的频率移动如何导致测量时钟跃迁的频率移动。当使用低强度灯光源进行状态选择时,这些考虑是非常重要的,其中存在相对较弱的弛豫和离子重新泵送到初始状态,并且原子样品中原子相干设置的“环境”弛豫要弱得多。
{"title":"Repetitive interrogation of 2-level quantum systems","authors":"J. Prestage, Sang K. Chung","doi":"10.1109/FREQ.2010.5556339","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556339","url":null,"abstract":"Trapped ion clocks derive information from a reference atomic transition by repetitive interrogations of the same quantum system, either a single ion or ionized gas of many millions of ions. Atomic beam frequency standards, by contrast, measure reference atomic transitions in a continuously replenished “flow through” configuration where initial ensemble atomic coherence is zero. We will describe some issues and problems that can arise when atomic state selection and preparation of the quantum atomic system is not completed, that is, optical pumping has not fully relaxed the coherence and also not fully transferred atoms to the initial state. We present a simple two-level density matrix analysis showing how frequency shifts during the state-selection process can cause frequency shifts of the measured clock transition. Such considerations are very important when a low intensity lamp light source is used for state selection, where there is relatively weak relaxation and re-pumping of ions to an initial state and much weaker ‘environmental’ relaxation of the atomic coherence set-up in the atomic sample.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130137086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Precise monitoring of ultra low expansion Fabry-Perot cavity length by the use of a stabilized optical frequency comb 通过使用稳定的光学频率梳精确监测超低膨胀法布里-珀罗腔长度
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556284
R. Smíd, O. Cíp, Z. Buchta, J. Ježek, B. Mikel, M. Čížek, J. Lazar
The use of an ultra low expansion cavity plays a crucial role in laser stabilization, and it is essential in atomic or ion clocks. In this work we present a method of mirror distance monitoring in an evacuated Fabry-Perot cavity (FPC) made from an ultra low expansion material (Zerodur expansion class 0). The FPC was placed into a temperature-stabilized stainless steel chamber and the FPC temperature was set to remain close to the point where the expansion coefficient of the cavity material is the lowest. The precise distance of the FPC mirrors in vacuum was indirectly proportional to the optical frequency of a laser. One of the frequency comb component chosen by FBG grating was locked to the FPC of 400 MHz free spectral range. The 100 MHz repetition frequency of the femtosecond laser comb was monitored with counter referenced to a crystal oscillator with short term stability < 10−12 and long term stability locked to a GPS.
超低膨胀腔的使用在激光稳定中起着至关重要的作用,在原子钟或离子钟中是必不可少的。在这项工作中,我们提出了一种在由超低膨胀材料(Zerodur膨胀等级0)制成的真空法布里-珀罗腔(FPC)中进行镜像距离监测的方法。FPC被放置在温度稳定的不锈钢腔室中,FPC的温度被设置为保持在腔材料膨胀系数最低的点附近。真空中FPC反射镜的精确距离与激光的光频成正比。将光纤光栅选择的梳频分量锁定在400 MHz自由频谱范围内的FPC上。飞秒激光梳的100 MHz重复频率由晶体振荡器进行监测,晶体振荡器短期稳定度< 10−12,长期稳定度锁定在GPS上。
{"title":"Precise monitoring of ultra low expansion Fabry-Perot cavity length by the use of a stabilized optical frequency comb","authors":"R. Smíd, O. Cíp, Z. Buchta, J. Ježek, B. Mikel, M. Čížek, J. Lazar","doi":"10.1109/FREQ.2010.5556284","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556284","url":null,"abstract":"The use of an ultra low expansion cavity plays a crucial role in laser stabilization, and it is essential in atomic or ion clocks. In this work we present a method of mirror distance monitoring in an evacuated Fabry-Perot cavity (FPC) made from an ultra low expansion material (Zerodur expansion class 0). The FPC was placed into a temperature-stabilized stainless steel chamber and the FPC temperature was set to remain close to the point where the expansion coefficient of the cavity material is the lowest. The precise distance of the FPC mirrors in vacuum was indirectly proportional to the optical frequency of a laser. One of the frequency comb component chosen by FBG grating was locked to the FPC of 400 MHz free spectral range. The 100 MHz repetition frequency of the femtosecond laser comb was monitored with counter referenced to a crystal oscillator with short term stability < 10−12 and long term stability locked to a GPS.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129365256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Chemically etched resonant LGS microsensors 化学蚀刻谐振LGS微传感器
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556259
G. Douchet, O. Medeira, F. Sthal, T. Leblois
Materials like langasite (LGS), langatate (LGT) or gallium orthophosphate (GaPO4) crystals have higher piezoelectric coefficients and also have a better high-temperature behaviour than quartz crystal. Thus they are worth being considered as a replacement for quartz in applications such as oscillators, piezoelectric accelerometers, microbalances or clocks. Length-extension resonators have already been manufactured using quartz crystal in order to get atomically-resolved imaging by frequency-modulation atomic force microscopy. The goal of this study is to obtain better results with langasite. It has been shown that LGS-crystal microsensors should have a sensitivity three times better than quartz crystal ones. This fact added to the existence of temperature-compensated cuts for the extensional mode of vibration is of prime importance for applications such as microcantilevers for frequency-modulation atomic force microscopes. This paper focuses on the fabrication of Langasite resonators with different cut angles around the temperature-compensated cuts both in length-extension and flexure mode.
langasite (LGS), langate (LGT)或GaPO4 (GaPO4)晶体等材料具有更高的压电系数,并且比石英晶体具有更好的高温性能。因此,在振荡器、压电加速度计、微天平或时钟等应用中,它们值得被视为石英的替代品。为了获得调频原子力显微镜的原子分辨成像,已经用石英晶体制造出了长度扩展谐振器。本研究的目的是用langasite获得更好的效果。研究表明,lgs晶体微传感器的灵敏度应该是石英晶体微传感器的3倍。这一事实加上存在的温度补偿切割的扩展振动模式,是最重要的应用,如微悬臂的调频原子力显微镜。本文重点研究了在长度-延伸和弯曲模式下,在温度补偿切口周围具有不同切口角度的Langasite谐振腔的制备。
{"title":"Chemically etched resonant LGS microsensors","authors":"G. Douchet, O. Medeira, F. Sthal, T. Leblois","doi":"10.1109/FREQ.2010.5556259","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556259","url":null,"abstract":"Materials like langasite (LGS), langatate (LGT) or gallium orthophosphate (GaPO4) crystals have higher piezoelectric coefficients and also have a better high-temperature behaviour than quartz crystal. Thus they are worth being considered as a replacement for quartz in applications such as oscillators, piezoelectric accelerometers, microbalances or clocks. Length-extension resonators have already been manufactured using quartz crystal in order to get atomically-resolved imaging by frequency-modulation atomic force microscopy. The goal of this study is to obtain better results with langasite. It has been shown that LGS-crystal microsensors should have a sensitivity three times better than quartz crystal ones. This fact added to the existence of temperature-compensated cuts for the extensional mode of vibration is of prime importance for applications such as microcantilevers for frequency-modulation atomic force microscopes. This paper focuses on the fabrication of Langasite resonators with different cut angles around the temperature-compensated cuts both in length-extension and flexure mode.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130901250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Single-ended-to-differential and differential-to-differential channel-select filters based on piezoelectric AlN contour-mode MEMS resonators 基于压电AlN轮廓模MEMS谐振器的单端对差分和差分对差分通道选择滤波器
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556383
C. Zuo, G. Piazza
This paper reports on the first demonstration of single-ended-to-differential and differential-to-differential (S2D and D2D) channel-select filters based on single-layer (SL) and dual-layer-stacked (DLS) AlN contour-mode MEMS resonators. The key filter performances in terms of insertion loss (as low as 1.4 dB), operating frequency (250–1280 MHz), and out-of-band rejection (up to 60 dB) constitute a significant advancement over all other state-of-the-art RF MEMS technologies. The fabrication process, namely stacking of two piezoelectric AlN layers (600 nm each) and three Pt electrode layers (100 nm each), is fully compatible with the previously demonstrated AlN RF MEMS switch process (also post-CMOS compatible), which makes it possible to implement multi-frequency switchable filter banks on a single chip. The S2D configuration is also able to combine the balun, filter, and impedance transformer functions in a single MEMS structure and only takes on a very small form factor (60×200 µm). These unique features will potentially revolutionize the field of RF and microwave IC design by enabling MEMS-IC co-design and the development of unconventional and low-power RF architectures.
本文报道了基于单层(SL)和双层堆叠(DLS) AlN轮廓模MEMS谐振器的单端对差分和差分对差分(S2D和D2D)通道选择滤波器的首次演示。在插入损耗(低至1.4 dB),工作频率(250-1280 MHz)和带外抑制(高达60 dB)方面的关键滤波器性能构成了所有其他最先进的RF MEMS技术的重大进步。制造工艺,即两个压电AlN层(每个600纳米)和三个Pt电极层(每个100纳米)的堆叠,与先前演示的AlN RF MEMS开关工艺(也是后cmos兼容)完全兼容,这使得在单个芯片上实现多频率可切换滤波器组成为可能。S2D配置还能够在单个MEMS结构中结合平衡、滤波器和阻抗变压器功能,并且仅采用非常小的外形尺寸(60×200µm)。通过实现MEMS-IC协同设计以及非常规和低功耗射频架构的开发,这些独特的功能将有可能彻底改变射频和微波IC设计领域。
{"title":"Single-ended-to-differential and differential-to-differential channel-select filters based on piezoelectric AlN contour-mode MEMS resonators","authors":"C. Zuo, G. Piazza","doi":"10.1109/FREQ.2010.5556383","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556383","url":null,"abstract":"This paper reports on the first demonstration of single-ended-to-differential and differential-to-differential (S2D and D2D) channel-select filters based on single-layer (SL) and dual-layer-stacked (DLS) AlN contour-mode MEMS resonators. The key filter performances in terms of insertion loss (as low as 1.4 dB), operating frequency (250–1280 MHz), and out-of-band rejection (up to 60 dB) constitute a significant advancement over all other state-of-the-art RF MEMS technologies. The fabrication process, namely stacking of two piezoelectric AlN layers (600 nm each) and three Pt electrode layers (100 nm each), is fully compatible with the previously demonstrated AlN RF MEMS switch process (also post-CMOS compatible), which makes it possible to implement multi-frequency switchable filter banks on a single chip. The S2D configuration is also able to combine the balun, filter, and impedance transformer functions in a single MEMS structure and only takes on a very small form factor (60×200 µm). These unique features will potentially revolutionize the field of RF and microwave IC design by enabling MEMS-IC co-design and the development of unconventional and low-power RF architectures.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129931158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
LiNbO3 Film Bulk Acoustic Resonator LiNbO3薄膜体声谐振器
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556245
M. Pijolat, S. Loubriat, D. Mercier, A. Reinhardt, E. Defay, C. Deguet, M. Aid, S. Queste, S. Ballandras
As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultra wide band Radio Frequency (RF) filters. Depending on the crystalline orientation, LiNbO3 can achieve electromechanical coupling factors Kt2 more than 6 times larger than those of sputtered aluminium nitride films. In this paper, a process based on direct bonding, grinding, polishing and Deep Reactive Ion Etching (DRIE) is proposed to fabricate a single crystal LiNbO3 Film Bulk Acoustic Resonator (FBAR). From the fabricated test vehicles Kt2 of 45% is measured confirming the values predicted by theoretical computations.
近年来,随着层转移技术的显著改进,铌酸锂(LiNbO3)成为下一代超宽带射频(RF)滤波器的候选材料。根据晶体取向的不同,LiNbO3可以实现比溅射氮化铝薄膜大6倍以上的机电耦合因子Kt2。本文提出了一种基于直接键合、研磨、抛光和深度反应离子刻蚀(DRIE)的单晶LiNbO3薄膜体声谐振器(FBAR)的制备工艺。在自制试验车上测量了45%的Kt2,证实了理论计算的预测值。
{"title":"LiNbO3 Film Bulk Acoustic Resonator","authors":"M. Pijolat, S. Loubriat, D. Mercier, A. Reinhardt, E. Defay, C. Deguet, M. Aid, S. Queste, S. Ballandras","doi":"10.1109/FREQ.2010.5556245","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556245","url":null,"abstract":"As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultra wide band Radio Frequency (RF) filters. Depending on the crystalline orientation, LiNbO3 can achieve electromechanical coupling factors Kt2 more than 6 times larger than those of sputtered aluminium nitride films. In this paper, a process based on direct bonding, grinding, polishing and Deep Reactive Ion Etching (DRIE) is proposed to fabricate a single crystal LiNbO3 Film Bulk Acoustic Resonator (FBAR). From the fabricated test vehicles Kt2 of 45% is measured confirming the values predicted by theoretical computations.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130066943","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
High spectral purity oscillator at 40 GHz: Design using air-dielectric cavity 40 GHz高光谱纯度振荡器:采用空气介质腔的设计
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556293
A. Hati, C. Nelson, B. Riddle, D. Howe
We describe the design of a low-phase modulated (PM) noise 40 GHz oscillator that uses a conventional air-dielectric cavity resonator as a frequency discriminator to clean up the PM noise of a commercial 10 GHz dielectric resonator oscillator (DRO) multiplied by four. The main features of this design incorporate (1) unloaded cavity quality factor (Q) of 30,000, (2) high coupling coefficient, (3) large carrier suppression by use of interferometric signal processing, (4) large operating signal power of approximately 1 Watt (W), and (5) relatively small size.
我们设计了一种低相位调制(PM)噪声40ghz振荡器,该振荡器使用传统的空气-介电腔谐振器作为鉴频器来清除商用10ghz介电谐振振荡器(DRO)的4倍PM噪声。本设计的主要特点包括:(1)空腔质量因子(Q)为30,000,(2)耦合系数高,(3)利用干涉信号处理抑制载波,(4)工作信号功率大,约为1瓦(W),(5)体积相对较小。
{"title":"High spectral purity oscillator at 40 GHz: Design using air-dielectric cavity","authors":"A. Hati, C. Nelson, B. Riddle, D. Howe","doi":"10.1109/FREQ.2010.5556293","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556293","url":null,"abstract":"We describe the design of a low-phase modulated (PM) noise 40 GHz oscillator that uses a conventional air-dielectric cavity resonator as a frequency discriminator to clean up the PM noise of a commercial 10 GHz dielectric resonator oscillator (DRO) multiplied by four. The main features of this design incorporate (1) unloaded cavity quality factor (Q) of 30,000, (2) high coupling coefficient, (3) large carrier suppression by use of interferometric signal processing, (4) large operating signal power of approximately 1 Watt (W), and (5) relatively small size.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122160355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Conductivity and complex permittivity of langatate at high temperature up to 900°C 语言酸盐在高达900°C高温下的电导率和复介电常数
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556331
P. Davulis, M. Pereira da Cunha
There are a large number of high-temperature sensing and frequency control applications that can be addressed using acoustic wave devices capable of operation at high-temperatures. For those applications, it is important to characterize the acoustic properties of the piezoelectric crystal used as substrate at elevated temperatures. Langatate (LGT) is one of the crystals which allow the fabrication of SAW devices at elevated temperatures. In a previous work, the authors measured and discussed the LGT elastic constants up to 900°C. This paper reports the langatate complex dielectric permittivity and conductivity from 25 to 900°C. The constants were extracted from impedance measurements of parallel-plate capacitors fabricated with Pt/Rh/ZrO2 electrodes on LGT wafers aligned along the X and Z crystalline axes. The real permittivities, έ11 and έ33, were found to change significantly in the range from 25 to 900°C with a 38% increase and a 49% decrease of their room temperature values, respectively. Thus, it is important to include the extracted high temperature permittivities when designing LGT acoustic wave devices and not simply to use extrapolated low temperature data. Both LGT conductivity and imaginary permittivity are necessary to quantify the electrical losses of sensors, signal-processing, and frequency-control devices operating with this substrate at high-temperatures.
使用能够在高温下工作的声波装置可以解决大量的高温传感和频率控制应用。对于这些应用,表征用作衬底的压电晶体在高温下的声学特性是很重要的。langate (LGT)是一种可以在高温下制造SAW器件的晶体。在之前的工作中,作者测量并讨论了高达900°C的LGT弹性常数。本文报道了在25 ~ 900℃范围内的复合介电常数和电导率。这些常数是从沿X和Z晶轴排列的LGT晶圆上用Pt/Rh/ZrO2电极制作的并联板电容器的阻抗测量中提取的。在25 ~ 900°C的范围内,实际介电常数 11和 33,分别比室温值增加38%和减少49%,变化显著。因此,在设计LGT声波器件时,重要的是要包括提取的高温介电常数,而不是简单地使用外推的低温数据。LGT电导率和虚介电常数对于量化传感器、信号处理和频率控制设备在高温下使用该衬底的电损耗都是必要的。
{"title":"Conductivity and complex permittivity of langatate at high temperature up to 900°C","authors":"P. Davulis, M. Pereira da Cunha","doi":"10.1109/FREQ.2010.5556331","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556331","url":null,"abstract":"There are a large number of high-temperature sensing and frequency control applications that can be addressed using acoustic wave devices capable of operation at high-temperatures. For those applications, it is important to characterize the acoustic properties of the piezoelectric crystal used as substrate at elevated temperatures. Langatate (LGT) is one of the crystals which allow the fabrication of SAW devices at elevated temperatures. In a previous work, the authors measured and discussed the LGT elastic constants up to 900°C. This paper reports the langatate complex dielectric permittivity and conductivity from 25 to 900°C. The constants were extracted from impedance measurements of parallel-plate capacitors fabricated with Pt/Rh/ZrO2 electrodes on LGT wafers aligned along the X and Z crystalline axes. The real permittivities, έ11 and έ33, were found to change significantly in the range from 25 to 900°C with a 38% increase and a 49% decrease of their room temperature values, respectively. Thus, it is important to include the extracted high temperature permittivities when designing LGT acoustic wave devices and not simply to use extrapolated low temperature data. Both LGT conductivity and imaginary permittivity are necessary to quantify the electrical losses of sensors, signal-processing, and frequency-control devices operating with this substrate at high-temperatures.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"146 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116457516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Phase noise modeling of opto-mechanical oscillators 光机械振荡器的相位噪声建模
Pub Date : 2010-06-01 DOI: 10.1109/FREQ.2010.5556330
S. Tallur, S. Sridaran, S. Bhave, T. Carmon
We build upon and derive a precise far from carrier phase noise model for radiation pressure driven opto-mechanical oscillators and show that calculations based on our model accurately match published phase noise data for such oscillators. Furthermore, we derive insights based on the equations presented and calculate phase noise for an array of coupled disk resonators, showing that it is possible to achieve phase noise as low as −80 dBc/Hz at 1 kHz offset for a 54 MHz opto-mechanical oscillator.
我们建立并推导了辐射压力驱动光机械振荡器的精确载波相位噪声模型,并表明基于我们模型的计算准确匹配此类振荡器的已公布相位噪声数据。此外,我们根据所提出的方程得出了见解,并计算了一组耦合盘谐振器的相位噪声,表明对于54 MHz光机械振荡器,在1 kHz偏置下可以实现低至- 80 dBc/Hz的相位噪声。
{"title":"Phase noise modeling of opto-mechanical oscillators","authors":"S. Tallur, S. Sridaran, S. Bhave, T. Carmon","doi":"10.1109/FREQ.2010.5556330","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556330","url":null,"abstract":"We build upon and derive a precise far from carrier phase noise model for radiation pressure driven opto-mechanical oscillators and show that calculations based on our model accurately match published phase noise data for such oscillators. Furthermore, we derive insights based on the equations presented and calculate phase noise for an array of coupled disk resonators, showing that it is possible to achieve phase noise as low as −80 dBc/Hz at 1 kHz offset for a 54 MHz opto-mechanical oscillator.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124440939","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
期刊
2010 IEEE International Frequency Control Symposium
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1