Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556350
É. Colinet, J. Arcamone, A. Niel, E. Lorent, S. Hentz, E. Ollier
This paper describes the implementation of a 100 MHz oscillator based on a Lamé-mode MEMS resonator polarized with a low dc bias voltage (< 5 V). Under low vacuum, the MEMS resonator exhibits high quality factors up to 60000 ensuring reasonable performance in terms of measured phase noise: −100 dBc/Hz @ 1kHz from carrier. A specific capacitive actuation/detection scheme ensures an active cancellation of the feedthrough capacitances and facilitates the balance by the rack-level sustaining electronics of the equivalent 50 kΩ motional impedance (on resonance) of the 100 MHz resonator.
{"title":"100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator","authors":"É. Colinet, J. Arcamone, A. Niel, E. Lorent, S. Hentz, E. Ollier","doi":"10.1109/FREQ.2010.5556350","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556350","url":null,"abstract":"This paper describes the implementation of a 100 MHz oscillator based on a Lamé-mode MEMS resonator polarized with a low dc bias voltage (< 5 V). Under low vacuum, the MEMS resonator exhibits high quality factors up to 60000 ensuring reasonable performance in terms of measured phase noise: −100 dBc/Hz @ 1kHz from carrier. A specific capacitive actuation/detection scheme ensures an active cancellation of the feedthrough capacitances and facilitates the balance by the rack-level sustaining electronics of the equivalent 50 kΩ motional impedance (on resonance) of the 100 MHz resonator.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130322365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556251
A. Haboucha, H. Jiang, P. Lemonde, A. Clairon, G. Santarelli, F. Kéfélian
We report on a fiber-stabilized agile laser with ultra-low frequency noise. The frequency noise power spectral density (PSD) is comparable to the one of an ultra-stable cavity stabilized laser at Fourier frequencies higher than 30 Hz. When it is chirped at a constant rate of ∼ 40 MHz/s, the max non-linearity frequency error is about 50 Hz peak to peak over more than 600 MHz tuning range. When the laser is chirped, the Rayleigh backscattering (RBS) is a significant frequency noise source related to fiber length, chirping rate and the power imbalance of the interferometer arms. We analyze both theoretically and experimentally this effect and put forward the noise reduction techniques.
{"title":"An ultra-low frequency noise agile laser","authors":"A. Haboucha, H. Jiang, P. Lemonde, A. Clairon, G. Santarelli, F. Kéfélian","doi":"10.1109/FREQ.2010.5556251","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556251","url":null,"abstract":"We report on a fiber-stabilized agile laser with ultra-low frequency noise. The frequency noise power spectral density (PSD) is comparable to the one of an ultra-stable cavity stabilized laser at Fourier frequencies higher than 30 Hz. When it is chirped at a constant rate of ∼ 40 MHz/s, the max non-linearity frequency error is about 50 Hz peak to peak over more than 600 MHz tuning range. When the laser is chirped, the Rayleigh backscattering (RBS) is a significant frequency noise source related to fiber length, chirping rate and the power imbalance of the interferometer arms. We analyze both theoretically and experimentally this effect and put forward the noise reduction techniques.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128736838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556273
V. Gokhale, Y. Shim, M. Rais-Zadeh
We report on the experimental verification of the acoustoelectric effect in gallium nitride (GaN) and present a model to describe this effect in GaN thickness-mode bulk acoustic filters. Filters are fabricated using 2.2 µm thick n-type GaN on high resistivity silicon epiwafers obtained from SOITEC. Acoustoelectric effect was observed by applying an electric field parallel to c-axis, the direction of acoustic wave propagation. Improvement in the insertion loss and out-of-band rejection was observed and Q amplifications exceeding 240% was achieved. Acoustoelectric effect makes it possible to dynamically tune the frequency response of GaN resonators and filters.
{"title":"Observation of the acoustoelectric effect in gallium nitride micromechanical bulk acoustic filters","authors":"V. Gokhale, Y. Shim, M. Rais-Zadeh","doi":"10.1109/FREQ.2010.5556273","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556273","url":null,"abstract":"We report on the experimental verification of the acoustoelectric effect in gallium nitride (GaN) and present a model to describe this effect in GaN thickness-mode bulk acoustic filters. Filters are fabricated using 2.2 µm thick n-type GaN on high resistivity silicon epiwafers obtained from SOITEC. Acoustoelectric effect was observed by applying an electric field parallel to c-axis, the direction of acoustic wave propagation. Improvement in the insertion loss and out-of-band rejection was observed and Q amplifications exceeding 240% was achieved. Acoustoelectric effect makes it possible to dynamically tune the frequency response of GaN resonators and filters.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129268223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556320
D. Calonico, F. Levi, L. Lorini, G. Mana
In this paper Bayesian analysis is applied to a Cesium fountain frequency standard to estimate the density shift correction, the maser drift and their uncertainty as well. Cesium fountain frequency standards realize the second in the International System of Units with a relative uncertainty approaching 10−16. Among the main contributions to the accuracy budget, cold collisions play an important role because of the so called atomic density shift of the reference atomic transition. The Bayes theorem allows the a priori knowledge of the sign of the collision shift, that is definitively negative, to be rigorously embedded into the analysis; also the magnitude of the maser drift is known from previous results. We analyze the effect of the Bayesian approach on seven different frequency evaluation of a Maser frequency reported to the BIPM from 2008 to 2010 using IT-CsF1. Comparing the results obtained with the two statistics it is evident a 35% reduction of the frequency uncertainty of the maser frequency estimate, in favour of the Bayesian approach.
{"title":"Use of Bayesian statistics to reduce the density shift uncertainty in Cesium fountain","authors":"D. Calonico, F. Levi, L. Lorini, G. Mana","doi":"10.1109/FREQ.2010.5556320","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556320","url":null,"abstract":"In this paper Bayesian analysis is applied to a Cesium fountain frequency standard to estimate the density shift correction, the maser drift and their uncertainty as well. Cesium fountain frequency standards realize the second in the International System of Units with a relative uncertainty approaching 10−16. Among the main contributions to the accuracy budget, cold collisions play an important role because of the so called atomic density shift of the reference atomic transition. The Bayes theorem allows the a priori knowledge of the sign of the collision shift, that is definitively negative, to be rigorously embedded into the analysis; also the magnitude of the maser drift is known from previous results. We analyze the effect of the Bayesian approach on seven different frequency evaluation of a Maser frequency reported to the BIPM from 2008 to 2010 using IT-CsF1. Comparing the results obtained with the two statistics it is evident a 35% reduction of the frequency uncertainty of the maser frequency estimate, in favour of the Bayesian approach.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"261 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117274094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556351
E. Marigó, J. Munoz-Gamarra, J. Giner, J.L. Lopez, F. Torres, A. Uranga, N. Barniol, J. Verd
In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.
{"title":"Linear operation of a 11MHz CMOS-MEMS resonator","authors":"E. Marigó, J. Munoz-Gamarra, J. Giner, J.L. Lopez, F. Torres, A. Uranga, N. Barniol, J. Verd","doi":"10.1109/FREQ.2010.5556351","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556351","url":null,"abstract":"In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115483780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556269
A. Bouchier, K. Saleh, P. Merrer, O. Llopis, G. Cibiel
In order to improve the phase noise of high purity OEO based on optical resonators, like resonant fibre rings, these oscillators have been theoretically studied in terms of white frequency noise. We present here the optimization of the performances of a fibre ring resonator and the experimental phase noise results we obtained for the OEO based on an optimized very high quality factor optical resonator.
{"title":"Theoretical and experimental study of the phase noise of opto-electronic oscillators based on high quality factor optical resonators","authors":"A. Bouchier, K. Saleh, P. Merrer, O. Llopis, G. Cibiel","doi":"10.1109/FREQ.2010.5556269","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556269","url":null,"abstract":"In order to improve the phase noise of high purity OEO based on optical resonators, like resonant fibre rings, these oscillators have been theoretically studied in terms of white frequency noise. We present here the optimization of the performances of a fibre ring resonator and the experimental phase noise results we obtained for the OEO based on an optimized very high quality factor optical resonator.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"144 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114338494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556319
T. Parker, S. Jefferts, T. Heavner
Hydrogen masers are used extensively in time scale ensembles, but the frequency drift must be accurately known. NIST-F1, the cesium fountain primary frequency standard at the National Institute of Standards and Technology, now operates nearly every month and has provided an unprecedented opportunity to characterize the medium-term frequency stability (τ = 30 to 90 days) of six hydrogen masers. An unexpected observation was a moderate level of correlation in the frequency fluctuations of all the masers.
{"title":"Medium-term frequency stability of hydrogen masers as measured by a cesium fountain","authors":"T. Parker, S. Jefferts, T. Heavner","doi":"10.1109/FREQ.2010.5556319","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556319","url":null,"abstract":"Hydrogen masers are used extensively in time scale ensembles, but the frequency drift must be accurately known. NIST-F1, the cesium fountain primary frequency standard at the National Institute of Standards and Technology, now operates nearly every month and has provided an unprecedented opportunity to characterize the medium-term frequency stability (τ = 30 to 90 days) of six hydrogen masers. An unexpected observation was a moderate level of correlation in the frequency fluctuations of all the masers.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125845215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556369
L. Nicu, T. Alava, F. Mathieu, C. Ayela, C. Soyer, D. Remiens
Sensing platforms (5mm*5mm) containing 5 piezoelectric membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer. Each membrane (circular, with radius varying from 360 microns to 440 microns) could be individually actuated through a PZT 1-micron thick film and sensed either via the same piezoelectric patch or via two terminal piezoresistances (obtained by boron implantation) placed at high-stress location onto the devices. Specific associated electronics (bandwidth of 2 MHz) have been designed and realized so that multiplexed actuation and sensing of all membranes resonant frequencies can be performed either in open-loop or closed-loop mode.
{"title":"Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant bioMEMS realm","authors":"L. Nicu, T. Alava, F. Mathieu, C. Ayela, C. Soyer, D. Remiens","doi":"10.1109/FREQ.2010.5556369","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556369","url":null,"abstract":"Sensing platforms (5mm*5mm) containing 5 piezoelectric membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer. Each membrane (circular, with radius varying from 360 microns to 440 microns) could be individually actuated through a PZT 1-micron thick film and sensed either via the same piezoelectric patch or via two terminal piezoresistances (obtained by boron implantation) placed at high-stress location onto the devices. Specific associated electronics (bandwidth of 2 MHz) have been designed and realized so that multiplexed actuation and sensing of all membranes resonant frequencies can be performed either in open-loop or closed-loop mode.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"283 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127466975","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556352
Masako Tanaka
The most outstanding feature of quartz crystal device is its frequency stability in wide range of temperature. In the last ten years, miniaturization of quartz devices has been accelerated. The newest resonators are 1/500 in size compared to those in ten years ago. Miniaturization of devices in general sacrifices its quality factor (Q value), S/N ratio, frequency-temperature stability, and product uniformity. QMEMS is a promising mass-production process to solve problems mentioned above. The flexibility of design makes possible quartz devices with 3 dimensional configurations. As a result, mechanical energy dispersion was prevented efficiently by the isolation design of miniature tuning fork and gyro sensor. Using the QMEMS process, the frequency stability in range of less than 2×10−7 can be guaranteed in TCXO. These advances in leaps of properties were supported by QMEMS technology. At the same time QMEMS technology is an efficient mass production system to make uniform resonators with small tolerance.
{"title":"An overview of quartz MEMS devices","authors":"Masako Tanaka","doi":"10.1109/FREQ.2010.5556352","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556352","url":null,"abstract":"The most outstanding feature of quartz crystal device is its frequency stability in wide range of temperature. In the last ten years, miniaturization of quartz devices has been accelerated. The newest resonators are 1/500 in size compared to those in ten years ago. Miniaturization of devices in general sacrifices its quality factor (Q value), S/N ratio, frequency-temperature stability, and product uniformity. QMEMS is a promising mass-production process to solve problems mentioned above. The flexibility of design makes possible quartz devices with 3 dimensional configurations. As a result, mechanical energy dispersion was prevented efficiently by the isolation design of miniature tuning fork and gyro sensor. Using the QMEMS process, the frequency stability in range of less than 2×10−7 can be guaranteed in TCXO. These advances in leaps of properties were supported by QMEMS technology. At the same time QMEMS technology is an efficient mass production system to make uniform resonators with small tolerance.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126522561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556321
J. Guéna, S. Bize, A. Clairon, R. Li, K. Gibble
We report measurements and calculations of distributed cavity phase errors in an atomic fountain clock. We isolate even and odd symmetry contributions to the distributed cavity phase shift and measure their characteristic power dependences. The measurements and model largely agree with no free parameters. Verification of the model will enable a reduction of the distributed cavity phase uncertainty for current clocks and validates new cavity designs that have minimal phase variations.
{"title":"Measurements of the distributed cavity phase shift in the LNE-SYRTE FO2 fountain","authors":"J. Guéna, S. Bize, A. Clairon, R. Li, K. Gibble","doi":"10.1109/FREQ.2010.5556321","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556321","url":null,"abstract":"We report measurements and calculations of distributed cavity phase errors in an atomic fountain clock. We isolate even and odd symmetry contributions to the distributed cavity phase shift and measure their characteristic power dependences. The measurements and model largely agree with no free parameters. Verification of the model will enable a reduction of the distributed cavity phase uncertainty for current clocks and validates new cavity designs that have minimal phase variations.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126529200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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