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2009 IEEE International Reliability Physics Symposium最新文献

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Field effect diode for effective CDM ESD protection in 45 nm SOI technology 场效应二极管有效的CDM ESD保护在45纳米SOI技术
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173316
S. Cao, S. Beebe, A. Salman, M. Pelella, J. Chun, R. Dutton
In this paper, the improved field-effect diode (FED) has been characterized and modeled in 45 nm silicon-on-insulator (SOI) technology. It has been experimentally shown to be suitable for pad-based local clamping under normal supply voltage (Vdd) range (below 1 V) in high-speed integrated circuits. ESD protection capabilities are investigated using very fast transmission line pulse (VF-TLP) tests to predict the device's performance in charged device model (CDM) ESD events. The FED's advantages in improving transient turn-on behavior and reducing DC leakage current have been analyzed and compared with other Silicon-Controlled-Rectifier (SCR)-based SOI device variations. Technology CAD (TCAD) simulations are used to interpret the turn-on behavior and the physical effects. Process tradeoffs have been evaluated. The work prepares the device for being directly applied to high-speed Input/Output (I/O) circuit and it addresses the severe challenge in CDM ESD protection. The improved device enables the adoption of local clamping scheme that expands the ESD design window.
本文采用45 nm绝缘体上硅(SOI)技术对改进的场效应二极管(FED)进行了表征和建模。实验表明,它适用于高速集成电路中正常电源电压(Vdd)范围内(低于1v)的基于板的局部箝位。通过超高速传输线脉冲(VF-TLP)测试来预测器件在充电器件模型(CDM) ESD事件中的性能,研究了器件的ESD保护能力。分析和比较了FED在改善瞬态导通行为和降低直流漏电流方面的优势,以及其他基于可控硅(SCR)的SOI器件的变化。技术CAD (TCAD)模拟用于解释打开行为和物理效应。已经评估了流程的权衡。这项工作为器件直接应用于高速输入/输出(I/O)电路做好了准备,并解决了CDM ESD保护的严峻挑战。改进后的器件可以采用局部夹紧方案,扩大ESD设计窗口。
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引用次数: 19
Soft error rate cross-technology prediction on embedded DRAM 嵌入式DRAM软错误率跨技术预测
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173382
Yi-Pin Fang, B. Vaidyanathan, A. Oates
Embedded DRAM has been widely used in System on Chip (SOC) systems due to its higher density than SRAM. Embedded DRAM soft error rate (SER) has become an important subject since more embedded dynamic random access memories (DRAM) are now embedded on the chip as technology advances. Experiments show alpha-SER rapidly declines with embedded DRAM scaling while neutron-SER is less significantly impacted. We develop a simple and rapid method to predict neutron- and alpha-SER scaling trends for embedded DRAM without the use of complicated simulation procedures.
嵌入式DRAM由于具有比SRAM更高的密度,在片上系统(SOC)中得到了广泛应用。随着技术的进步,越来越多的嵌入式动态随机存取存储器(DRAM)被嵌入到芯片中,嵌入式DRAM的软错误率(SER)已成为一个重要的课题。实验表明,α - ser随嵌入式DRAM缩放而迅速下降,而中子- ser受影响较小。我们开发了一种简单快速的方法来预测嵌入式DRAM的中子和α - ser缩放趋势,而无需使用复杂的模拟程序。
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引用次数: 10
Effect of multiple via layout on electromigration performance and current density distribution in copper interconnect 多通孔布局对铜互连电迁移性能和电流密度分布的影响
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173363
M. Lin, N. Jou, James W. Liang, K. Su
Downstream Electromigration (EM) was studied on different multiple via structures. Structures with more via gained better EM performance improvement. Failure analysis showed different EM failure modes on these structures. Finite element analysis is applied to find out the current density profiles and their variation between these structures. Resistance increases due to EM induced void are also simulated and found to be dependent on size and location of void. The different EM results of these multiple via structures are explained with the current density results and the different diffusion patterns found.
研究了不同多通孔结构下的下游电迁移。通孔越多,结构的电磁性能就越好。失效分析表明,这些结构的电磁破坏模式不同。采用有限元分析方法,研究了两种结构的电流密度分布及其变化规律。由于电磁诱导的空穴引起的电阻增加也进行了模拟,并发现与空穴的大小和位置有关。用电流密度结果和不同的扩散模式解释了这些多通孔结构的不同EM结果。
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引用次数: 11
Methodology to analyze failure mechanisms of ohmic contacts on MEMS switches MEMS开关欧姆触点失效机理分析方法
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173369
A. Broué, J. Dhennin, C. Seguineau, X. Lafontan, C. Dieppedale, J. Desmarres, P. Pons, R. Plana
This paper demonstrates the efficiency of a new methodology using a commercial nanoindenter coupling with electrical measurement on test vehicles specially designed to investigate the micro contact reliability. This study examines the response of gold contacts with 5 μm2 square bumps under various levels of current flowing through contact asperities. Contact temperature rising is observed leading to shifts of the mechanical properties of contact material, modifications of the contact topology and a diminution of the time dependence creep effect. The data provides a better understanding of micro-scale contact physics especially failure mechanisms due to the heating of the contact on MEMS switches.
本文展示了一种利用商用纳米压头耦合电测量的新方法在专门设计用于研究微接触可靠性的测试车上的有效性。本文研究了具有5 μm2方形凸起的金触点在不同电流水平下的响应。观察到接触温度升高导致接触材料力学性能的变化,接触拓扑结构的改变和随时间变化的蠕变效应的减弱。这些数据可以更好地理解微尺度接触物理,特别是由于MEMS开关上的接触加热而导致的失效机制。
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引用次数: 12
The effect of elevated temperature on digital single event transient pulse widths in a bulk CMOS technology 体CMOS技术中温度升高对数字单事件瞬态脉冲宽度的影响
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173246
M. Gadlage, J. Ahlbin, B. Narasimham, V. Ramachandran, C. Dinkins, B. Bhuva, peixiong zhao, R. Shuler
Combinational logic soft errors are expected to be the dominant reliability issue for advanced technologies. One of the major factors affecting the soft-error rates is single-event transient (SET) pulse widths. The SET pulse widths, which are controlled by drift, diffusion, and parasitic bipolar transistor parameters, are a strong function of operating temperature. In this work, heavy-ion induced SET pulse widths are reported at temperatures ranging from 25° to 100° C with an autonomous SET capture circuit. Experimental and simulation results in a 90nm bulk CMOS technology indicate an increase as high as 37% in average SET pulse width with increasing operating temperature, with some pulses almost 2 ns long at higher temperatures. The increase in the SET pulse width can be explained by the dependence of bipolar amplification on temperature.
组合逻辑软误差将成为先进技术的主要可靠性问题。影响软误差率的主要因素之一是单事件瞬态(SET)脉冲宽度。由漂移、扩散和寄生双极晶体管参数控制的SET脉冲宽度是工作温度的重要函数。在这项工作中,重离子诱导的SET脉冲宽度在25°到100°C的温度范围内,具有自主SET捕获电路。在90nm块体CMOS技术上的实验和仿真结果表明,随着工作温度的升高,平均SET脉冲宽度增加了37%,在更高温度下,一些脉冲的长度接近2ns。SET脉冲宽度的增加可以用双极放大对温度的依赖来解释。
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引用次数: 14
Experimental study of gate oxide early-life failures 栅氧化物早期失效的实验研究
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173324
T. Chen, Young Moon Kim, Kyunglok Kim, Y. Kameda, M. Mizuno, S. Mitra
Large-scale experimental data from 90nm test chips consisting of 49,152 transistors, and experiments on 90nm test chips containing inverter chains are used to establish: 1. A gate-oxide early-life failure (ELF, also called infant mortality) candidate transistor produces gradually degraded drive currents over time; 2. A digital circuit path consisting of a gate-oxide ELF candidate transistor experiences gradual delay shifts over time before the circuit produces functional failures. These results may be utilized to effectively overcome ELF challenges in scaled CMOS technologies.
利用49152个晶体管组成的90nm测试芯片的大规模实验数据,以及包含逆变链的90nm测试芯片上的实验,建立:栅极氧化物早期寿命失效(ELF,也称为婴儿死亡率)候选晶体管会随着时间的推移逐渐降低驱动电流;2. 在电路产生功能故障之前,由栅极氧化物极低频候选晶体管组成的数字电路路径经历逐渐的延迟移位。这些结果可用于有效地克服规模CMOS技术中的ELF挑战。
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引用次数: 19
Threshold voltage instability in organic TFT with SiO2 and SiO2/parylene-stack dielectrics 有机TFT中SiO2和SiO2/聚苯乙烯叠层电介质的阈值电压不稳定性
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173234
N. Wrachien, A. Cester, A. Pinato, M. Meneghini, A. Tazzoli, G. Meneghesso, J. Kováč, J. Jakabovic, D. Donoval
We study the charge trapping/detrapping kinetics on pentacene-based organic thin-film-transistors featuring SiO2 and SiO2/parylene C stack gate insulators. The threshold voltage variation is correlated with the gate pulse width and amplitude, and it is due to charge trapping, rather than permanent degradation. The detrapping kinetics is thermally-activated and it is accelerated if the device is illuminated. The additional parylene layer brings benefits by strongly reducing the charge trapping/detrapping, and increasing the hole mobility and the drain current.
研究了二氧化硅和二氧化硅/聚对二甲苯堆栅绝缘体的五苯基有机薄膜晶体管的电荷捕获/脱陷动力学。阈值电压的变化与栅极脉冲宽度和幅度相关,这是由于电荷捕获,而不是永久退化。脱除动力学是热激活的,如果装置被照亮,它就会加速。额外的聚对二甲苯层带来的好处是,它大大减少了电荷捕获/脱陷,增加了空穴迁移率和漏极电流。
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引用次数: 0
Failure mechanisms in CMOS-based RF switches subjected to RF stress 基于cmos的射频开关在射频应力作用下的失效机制
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173341
A. Madan, T. Thrivikraman, J. Cressler
We investigate the reliability of RF switches for high-power, high dynamic range RF applications. Switches in two different CMOS technology platforms (180 nm and 130 nm) were observed to fail catastrophically beyond 33 dBm RF input power. The switches were single-pole double-throw with series-shunt topology. The reliability of a standalone switching series transistor from a single-pole double-throw switch was analyzed to investigate the failure mechanisms involved. Gate dielectric breakdown at high RF input power is demonstrated to lead to the failure of RF switches. Finally, the effect of transistor failure on switch operation is discussed.
我们研究了高功率、高动态范围射频应用中射频开关的可靠性。两种不同CMOS技术平台(180 nm和130 nm)的开关在超过33 dBm射频输入功率时发生灾难性故障。开关为单极双掷串联并联拓扑。对单极双掷开关独立开关系列晶体管的可靠性进行了分析,探讨了其失效机理。在高射频输入功率下,栅极介电击穿会导致射频开关失效。最后讨论了晶体管失效对开关工作的影响。
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引用次数: 11
Material analysis with a helium ion microscope 用氦离子显微镜进行材料分析
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173271
L. Scipioni, W. Thompson, S. Sijbrandij, S. Ogawa
The helium ion microscope, a new imaging technology, is being applied also to sample modification. The application opportunity exists due to the extreme high resolution and the ability to gather analytical data as well as images. Possible applications include inspection, elemental analysis, and dopant concentration measurements.
氦离子显微镜作为一种新的成像技术,也被应用于样品修饰。由于极高的分辨率和收集分析数据以及图像的能力,应用机会存在。可能的应用包括检测、元素分析和掺杂剂浓度测量。
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引用次数: 6
Analytical expression for temporal width characterization of radiation-induced pulse noises in SOI CMOS logic gates SOI CMOS逻辑门中辐射诱发脉冲噪声时间宽度特性的解析表达式
Pub Date : 2009-04-26 DOI: 10.1109/IRPS.2009.5173245
D. Kobayashi, T. Makino, K. Hirose
Radiation-induced pulse noises called single-event transients, SETs, are becoming a serious soft-error source for logic VLSIs. Analytical models explicitly expressing the relationship between the pulse width and radiation/device/circuit parameters are desired as guidelines to develop optimized countermeasures. A simple mathematical expression is devised for characterizing SET pulse widths in SOI CMOS technologies. It is based on the physical mechanisms of the SETs and on the idea of Moll's storage time. Device simulations demonstrate that the expression explains pulse-width trends properly for large radiation-induced noise charges.
被称为单事件瞬态(set)的辐射诱发脉冲噪声正在成为逻辑vlsi的严重软误差源。明确表示脉冲宽度与辐射/器件/电路参数之间关系的分析模型是开发优化对策的指导原则。设计了一个简单的数学表达式来表征SOI CMOS技术中的SET脉冲宽度。它基于set的物理机制和摩尔存储时间的概念。器件模拟表明,该表达式可以很好地解释大辐射引起的噪声电荷的脉宽趋势。
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引用次数: 27
期刊
2009 IEEE International Reliability Physics Symposium
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