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2012 13th International Conference on Ultimate Integration on Silicon (ULIS)最新文献

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Impact of substrate orientation on Ultra Thin BOX Fully Depleted SOI electrical performances 衬底取向对超薄盒完全耗尽SOI电性能的影响
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193386
I. Ben Akkez, C. Fenouillet-Béranger, A. Cros, P. Perreau, S. Haendler, O. Weber, F. Andrieu, D. Pellissier-Tanon, F. Abbate, C. Richard, R. Beneyton, P. Gouraud, A. Margain, C. Borowiak, E. Gourvest, K. Bourdelle, B. Nguyen, T. Poiroux, T. Skotnicki, O. Faynot, F. Balestra, G. Ghibaudo, F. Boeuf
In this paper, we compare the electrical properties of Ultra Thin Buried Oxide (UTBOX) Fully Depleted Silicon On Insulator (FD-SOI) MOS devices for rotated and not rotated substrate with different gate lengths. We found a significant performance enhancement on FD-SOI PMOSFETs as expected, while keeping a good control of short channel effects. Surprisingly, to a lower extent, an improvement is also found for NMOS devices. We have also studied the carrier mobility degradation as a function of temperature and we point out the contribution of different mechanisms that reduce the mobility such as impurity Coulomb scattering, phonons and neutral defects as a function gate length. We find that there is no significant effect of rotated substrate on the mobility degradation. All these results are discussed and possible explanations are also given.
在本文中,我们比较了不同栅极长度的旋转和非旋转衬底下超薄埋藏氧化物(UTBOX)全耗尽绝缘体上硅(FD-SOI) MOS器件的电学性能。我们发现FD-SOI pmosfet的性能如预期的那样显著增强,同时保持了对短通道效应的良好控制。令人惊讶的是,在较低程度上,NMOS器件也得到了改进。我们还研究了载流子迁移率随温度的下降,并指出了不同的机制对降低迁移率的贡献,如杂质库仑散射、声子和中性缺陷作为函数门长度。我们发现旋转底物对迁移率的降解没有明显的影响。对这些结果进行了讨论,并给出了可能的解释。
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引用次数: 0
Experimental investigation on direction dependence of Si (100) and Si (110) hole mobility in ultra-thin body pFETs 超薄体pfet中Si(100)和Si(110)空穴迁移率方向依赖性的实验研究
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193363
T. Kutsuki, K. Shimizu, H. Nomura, T. Saraya, T. Hiramoto
The direction dependence of hole mobility in (100) and (110) UTB pFETs has been investigated experimentally using special test device structures exclusive for the direction dependence measurements. It is found that there is no direction dependence under quantum confinement in (100) UTB pFETs with SOI thickness of 5nm. On the other hand, in (110) UTB pFETs, it is shown that hole mobility superiority in <;110>; to <;100>; decreases at low temperature and in high inversion carrier density.
在(100)和(110)UTB pfet中,空穴迁移率的方向依赖性已经用专门用于方向依赖性测量的特殊测试装置结构进行了实验研究。发现在量子约束下,SOI厚度为5nm的(100)UTB pfet不存在方向依赖性。另一方面,在(110)UTB pfet中,空穴迁移率在;;在低温和高反转载流子密度时减小。
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引用次数: 1
Device scaling model for bulk FinFETs 块finfet的器件缩放模型
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193370
A. Medury, K. Mercha, R. Ritzenthaler, A. De Keersgieter, T. Chiarella, N. Collaert, N. Bhat, K. N. Bhat
FinFETs are being considered as an attractive alternative to enable further CMOS Scaling. In this paper, a device scaling model for the electrostatics of bulk FinFETs is presented. Device parameters such as subthreshold slope (SS), threshold voltage (Vth), off-state current (IOFF)>; drain-induced-barrier lowering (DIBL) are modeled showing good agreement with TCAD and experimental results. Besides predicting the effects of technology scaling, this model provides good insight in terms of device design. By accounting for the effects of fin geometry variation and the drain voltage (Vd) on the effective fin doping (Na(ef)), the present work is very useful in determining Na(ff)) for low Vth, standard Vth and high Vth applications. Based on this model, it is also possible to determine the geometrical parameters required to achieve SS = 80 mV/dec, DIBL = 50 mV/V.
finfet被认为是实现进一步CMOS缩放的有吸引力的替代方案。本文提出了块体finfet静电的器件缩放模型。器件参数如亚阈值斜率(SS)、阈值电压(Vth)、关断电流(IOFF)>;模拟的漏阻降低(DIBL)模型与TCAD和实验结果吻合较好。除了预测技术规模的影响外,该模型还为设备设计提供了很好的洞察力。通过考虑翅片几何变化和漏极电压(Vd)对有效翅片掺杂(Na(ef))的影响,本文的工作对于确定低电压、标准电压和高电压应用中的Na(ff))非常有用。基于该模型,还可以确定实现SS = 80 mV/dec, DIBL = 50 mV/V所需的几何参数。
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引用次数: 3
Scaling of high-k/metal-gate Trigate SOI nanowire transistors down to 10nm width 高k/金属栅极三门SOI纳米线晶体管缩窄至10nm宽度
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193351
R. Coquand, S. Barraud, M. Cassé, P. Leroux, C. Vizioz, C. Comboroure, P. Perreau, E. Ernst, M. Samson, V. Maffini-Alvaro, C. Tabone, S. Barnola, D. Munteanu, G. Ghibaudo, S. Monfray, F. Boeuf, T. Poiroux
In this paper, Tri-Gate Nanowire (TGNW) FETs with high-k/metal gate are studied as an alternative way to planar devices for the future CMOS technological nodes (14 nm and beyond). The influence of Si film thickness (H) and nanowire width (W) on electrical performances of long- and short-channel devices are presented and discussed. We show that the transport properties in our TGNW are fully governed by the additive contributions of the (100) top surface and (110) sidewalls. As compared to wide planar devices, the improvement of electrostatic integrity (SS and DIBL) of scaled down TGNW FET is clearly demonstrated.
本文研究了具有高k/金属栅极的三栅极纳米线(TGNW)场效应管,作为未来CMOS技术节点(14纳米及以上)平面器件的替代方法。介绍并讨论了硅膜厚度(H)和纳米线宽度(W)对长通道和短通道器件电性能的影响。我们发现TGNW中的输运性质完全由(100)顶表面和(110)侧壁的加性贡献决定。与宽平面器件相比,缩小TGNW场效应管的静电完整性(SS和DIBL)得到了明显的改善。
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引用次数: 46
FDSOI devices: A solution to achieve low junction leakage with low temperature processes (≤ 650°C) FDSOI器件:低温工艺(≤650°C)实现低结漏的解决方案
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193384
B. Sklénard, C. Xu, P. Batude, B. Previtali, C. Tabone, Q. Rafhay, B. Colombeau, F. Khaja, I. Martín-Bragado, J. Berthoz, F. Allain, A. Toffoli, R. Kies, M. Jaud, P. Rivallin, S. Cristoloveanu, C. Tavernier, O. Faynot, T. Poiroux
In this paper, we demonstrate low junction leakage for devices fabricated at low temperature (≤ 650°C). This is explained by the reduced channel thickness of our device (6 nm). We show this through both experimental data and KMC simulations that enable to understand the origin of the leakage reduction.
在本文中,我们展示了在低温(≤650°C)下制造的器件的低结漏。这可以通过我们器件的通道厚度减小(6nm)来解释。我们通过实验数据和KMC模拟来证明这一点,从而能够理解泄漏减少的起源。
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引用次数: 6
Study of interface and oxide defects in high-k/In0.53Ga0.47As n-MOSFETs 高k/In0.53Ga0.47As n- mosfet的界面和氧化物缺陷研究
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193349
V. Djara, K. Cherkaoui, M. Schmidt, Y. Gomeniuk, E. O'Connor, I. Povey, D. O'Connell, S. Monaghan, M. Pemble, P. Hurley
Interface and oxide defects in surface-channel In0.53Ga0.47As n-MOSFETs, featuring a threshold voltage, VT, of 0.43 V, a subthreshold swing, SS, of 150 mV/dec, an ION/IOFF of ~ 104 and a source/drain resistance, RSD, of 103 Ω, have been investigated using “split C-V” measurements and self-consistent Poisson-Schrödinger quasi-static C-V simulations. An integrated density of traps across the In0.53Ga0.47As band gap at the Al2O3/In0.53Ga0.47As interface, NTrap, of ~ 7.8 × 1012 /cm2, has been obtained from a comparison of the theoretical and experimental quasi-static C-V responses, where NTrap reflects the combined contribution of interface traps and border traps. An equivalent surface density of fixed positive oxide charges, N+, of 1.4 × 1012 /cm2 is also reported. Finally, the application of the Maserjian Y-function to the Al2O3/In0.53Ga0.47As MOS system is briefly discussed.
使用“分裂C-V”测量和自一致Poisson-Schrödinger准静态C-V模拟,研究了表面通道In0.53Ga0.47As n- mosfet的界面和氧化物缺陷,其阈值电压VT为0.43 V,亚阈值摆幅SS为150 mV/dec,离子/IOFF为~ 104,源/漏极电阻RSD为103 Ω。通过对Al2O3/In0.53Ga0.47As界面上In0.53Ga0.47As带隙的理论和实验准静态C-V响应的比较,得到了约7.8 × 1012 /cm2的综合陷阱密度NTrap,其中NTrap反映了界面陷阱和边界陷阱的共同贡献。另外,还报道了固定氧化物正电荷N+的等效表面密度为1.4 × 1012 /cm2。最后简要讨论了Maserjian y函数在Al2O3/In0.53Ga0.47As MOS体系中的应用。
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引用次数: 2
Strain engineering in suspended graphene devices for pressure sensor applications 压力传感器应用中悬浮石墨烯器件的应变工程
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193347
A. D. Smith, S. Vaziri, A. Delin, M. Ostling, M. Lemme
The present paper describes a device structure for controlling and measuring strain in graphene membranes. We propose to induce strain by creating a pressure difference between the inside and the outside of a cavity covered with a graphene membrane. The combination of tight-binding calculations and a COMSOL model predicts strain induced band gaps in graphene for certain conditions and provides a guideline for potential device layouts. Raman spectroscopy on fabricated devices indicates the feasibility of this approach. Ultimately, pressure-induced band structure changes could be detected electrically, suggesting an application as ultra-sensitive pressure sensors.
本文介绍了一种控制和测量石墨烯膜应变的装置结构。我们建议通过在覆盖石墨烯膜的腔体内外之间制造压力差来诱导应变。结合紧密结合计算和COMSOL模型预测石墨烯在特定条件下的应变引起的带隙,并为潜在的器件布局提供指导。制造器件的拉曼光谱表明了这种方法的可行性。最终,压力引起的带结构变化可以通过电来检测,这表明了超灵敏压力传感器的应用。
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引用次数: 22
Explicit model for tunneling and thermionic current in Schottky barrier Double-Gate MOSFETs 肖特基势垒双栅mosfet中隧穿和热离子电流的显式模型
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193375
M. Schwarz, T. Holtij, A. Kloes, B. Iñíguez
In this paper we present a new approach to calculate the tunneling and thermionic current in Schottky barrier Double-Gate MOSFETs (SB-DG-MOSFETs). This prediction is based on a physics-based two-dimensional analysis. Analytical approximations for the spatial tunneling current density and carrier distributions in the channel are introduced. From this explicit analytical model equations for the tunneling current are derived in closed-form which inherently include two-dimensional effects on the tunneling probability and the carrier distributions. Furthermore, an explicit analytical model equation for the thermionic current is derived. Comparison of the current with an already existing analytical numerical model and TCAD simulation data are in a good agreement for channel lengths down to 22nm.
本文提出了一种计算肖特基势垒双栅mosfet (sb - dg - mosfet)隧穿电流和热离子电流的新方法。这一预测是基于基于物理的二维分析。介绍了空间隧道电流密度和载流子分布的解析近似。从这个显式解析模型推导出封闭形式的隧穿电流方程,该方程固有地包含了对隧穿概率和载流子分布的二维影响。进一步推导了热离子电流的解析模型方程。将电流与现有的解析数值模型和TCAD仿真数据进行比较,可以很好地将通道长度降低到22nm。
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引用次数: 1
Mechanisms of high hole mobility in (100) nanowire pMOSFETs with width of less than 10nm 宽度小于10nm的(100)纳米线pmosfet的高空穴迁移率机制
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193352
H. Nomura, R. Suzuki, T. Kutsuki, T. Saraya, T. Hiramoto
The mechanism of high mobility in <;110>;-directed nanowire pMOSFETs with height of 10nm on (100) SOI substrate is investigated. The 9nm-wide nanowire pFET has higher mobility than the (100) universal mobility at 300K The temperature dependence measurements of hole mobility show that the high mobility in nanowire pFET originates from the effect of (110) side surface of the nanowire. On the other hand, it is shown that the degraded mobility in 4nm-wide nanowire pFET is caused by the increase in surface roughness scattering.
研究了在(100)SOI衬底上制备高度为10nm的定向纳米线pmosfet的高迁移率机理。在300K时,9nm宽的纳米线pFET的迁移率比(100)通用迁移率高。空穴迁移率的温度依赖性测量表明,纳米线pFET的高迁移率源于纳米线(110)侧表面的影响。另一方面,在4nm宽的纳米线fet中,迁移率的下降是由于表面粗糙度散射的增加引起的。
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引用次数: 2
On the use of nanoelectronic logic cells based on metallic Single Electron Transistors 基于金属单电子晶体管的纳米电子逻辑单元的应用
Pub Date : 2012-03-06 DOI: 10.1109/ULIS.2012.6193381
M. Bounouar, A. Beaumont, F. Calmon, D. Drouin
Single Electron Transistors have the potential to be a very promising candidate for future computing architectures due to their low voltage operation and low power consumption. In this paper, for the first time, logic cells based on metallic SET operating at room temperature and up to 125 °C were designed. An evaluation of the energy consumption and a comparison with their equivalents in CMOS technology has been made. Based on results using accurate SET model, SET-based logic cells provide a significant consumption reduction as compared with their CMOS counterparts.
单电子晶体管由于其低电压运行和低功耗,有潜力成为未来计算架构的一个非常有前途的候选者。在本文中,首次设计了在室温和高达125℃下工作的基于金属SET的逻辑单元。对该方法的能耗进行了评价,并与CMOS技术中的等效方法进行了比较。基于使用精确的SET模型的结果,基于SET的逻辑单元与CMOS对应的逻辑单元相比,可以显著降低功耗。
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引用次数: 5
期刊
2012 13th International Conference on Ultimate Integration on Silicon (ULIS)
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