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2021 IEEE 71st Electronic Components and Technology Conference (ECTC)最新文献

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Ultrasonic Thick Wire Bonding Process Simulation and Validation for Silicon Carbide Power Devices 碳化硅功率器件超声粗线键合工艺仿真与验证
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00282
Pan Liu, Liangtao Li, Z. Zeng, Guoqi Zhang, Pengfei Liu, Jon Qingchun Zhang, Jing Zhang
Ultrasonic wire bonding is one of the critical challenges for power semiconductor manufacturing process, especially for silicon carbide (SiC) power devices. Packaging-related strain on the dies is one of the limiting factors for SiC devices scaling towards mass-production. Furthermore, due to the high current demand for SiC power device packaging, thick bond wires are often needed, which brings major challenges for the ultrasonic wire bonding process. Thus, computational simulation methods are under development to assist the wire bonding process. This paper presents a simulation method that can quickly narrow the process window for thick bond wires on SiC power devices beforehand. A process model was created to adapt process parameters of bonding force and power. This model aims to simulate the bond deformation for a discretized bonding area. Wire deformation and equivalent plastic strain were then examined and compared. The model was further validated through experiments. Experimental validation of the wire bonding model reveals a suitable deformation of bond wires, which helps to improve thick wire bonding reliability for power electronics packaging.
超声焊线是功率半导体,特别是碳化硅(SiC)功率器件制造工艺的关键挑战之一。封装相关的应变是SiC器件大规模生产的限制因素之一。此外,由于目前对SiC功率器件封装的需求很大,通常需要较粗的键合线,这给超声波线键合工艺带来了重大挑战。因此,计算模拟方法正在开发中,以辅助线键合过程。本文提出了一种模拟方法,可以提前快速缩小碳化硅功率器件上粗键合线的工艺窗口。根据粘接力和粘接功率的工艺参数,建立了工艺模型。该模型旨在模拟一个离散键合区域的键合变形。然后对钢丝变形和等效塑性应变进行了检测和比较。通过实验进一步验证了模型的正确性。通过对该模型的实验验证,发现了合适的键合线变形,有助于提高电力电子封装中粗线键合的可靠性。
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引用次数: 0
Wireless Photonic Sensors with Flex Fan-Out Packaged Devices and Enhanced Power Telemetry 无线光子传感器与柔性扇出封装设备和增强电力遥测
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00246
Sepehr Soroushiani, Huy Nguyen, Carlos Riera Cercado, Abdulhameed Abdal, Christopher Bolig, S. Y. B. Sayeed, S. Bhardwaj, Wei-Chiang Lin, P. Raj
The objective of this paper is to demonstrate flex-embedded and surface-assembled photonic devices, inductive telemetry, and passive integration to form next-generation miniaturized biophotonic sensors. A hybrid combination of embedding and surface-assembled devices on flex is pursued to reduce the lateral and thickness dimensions of biophotonic systems. Embedding of premanufactured discrete passive devices is demonstrated by inserting in cavities, followed by printed fan-out connections to form the bridge connects between devices and other system components. Initial prototypes showed functional response to color shifts and reliability under bending loads on tissue phantoms. Measurements also confirmed responses to muscle activity as seen through changes in the backscattered light intensity during fist-closure with human subject hands. Initial bending test and reliability after water immersion indicate the stability of the chosen material systems towards flexible and wearable applications. This system concept can eventually be integrated with other system components such as RF transceivers for data telemetry, leading to completely autonomous wireless photosensors for wearable and implantable systems.
本文的目的是演示柔性嵌入和表面组装光子器件,感应遥测和被动集成,以形成下一代小型化生物光子传感器。为了减小生物光子系统的横向尺寸和厚度尺寸,研究了嵌入和表面组装器件在柔性器件上的混合组合。预先制造的离散无源器件的嵌入通过插入空腔来演示,然后通过打印的扇形连接来形成器件和其他系统组件之间的桥接。最初的原型显示了对颜色变化的功能响应和组织模在弯曲载荷下的可靠性。测量也证实了肌肉活动的反应,通过观察到的变化,背向散射光强度与人类受试者的手握拳。初始弯曲测试和水浸后的可靠性表明所选材料系统在柔性和可穿戴应用方面的稳定性。该系统概念最终可以与其他系统组件集成,例如用于数据遥测的射频收发器,从而为可穿戴和可植入系统提供完全自主的无线光传感器。
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引用次数: 0
ECTC 2021 Technical Program Committee ECTC 2021技术计划委员会
Pub Date : 2021-06-01 DOI: 10.1109/ectc32696.2021.00008
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引用次数: 0
Numerical Investigation on Microfluidic Electroless Deposition for Uniform Copper Pillar Microbumps Interconnection 均匀铜柱微凸点互连微流控化学沉积数值研究
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00074
Yonglin Zhang, Haibin Chen, H. Fan, Jinglei Yang, Jingshen Wu
The conventional thermo-compression bonding method in either solder-based or solder-less approaches for the 3D chip integration lead to reliability issues including warpage, delamination and die crack due to high temperature and pressure. To eliminate the issues, an approach of microfluidic electroless interconnection featured with low temperature and pressure has been reported. In this work, the multi-physical field model was firstly developed to understand the deposition mechanism of the microfluidic electroless interconnection method based on a simulation framework considering electrochemistry, fluid flow and mass transfer, and experimental validation was conducted. The results of the numerical work manifest good agreement with the experimental data, and the dominant limitation of the technology is insufficient mass transfer in the microchannel introducing deposition thickness non-uniformity reaching 90%. To eliminate the non-uniformity, the effects of flow velocity and reverse flow are investigated demonstrating remarkable enhancement. The theoretical simulation model shows good feasibility and accuracy providing insight and understanding in the process and mechanism of the technology.
传统的基于焊料或无焊料的3D芯片集成热压结合方法会导致可靠性问题,包括翘曲、分层和高温高压导致的模具裂纹。为了消除这些问题,提出了一种低温低压微流控化学互连方法。本文首先在考虑电化学、流体流动和传质的模拟框架下,建立了多物理场模型来理解微流体化学互连方法的沉积机理,并进行了实验验证。数值计算结果与实验数据吻合较好,该技术的主要缺陷是微通道内传质不足,导致沉积厚度不均匀性达到90%。为了消除非均匀性,研究了流速和逆流对非均匀性的影响。理论仿真模型显示了良好的可行性和准确性,为深入了解该技术的过程和机理提供了依据。
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引用次数: 0
Study and Application of Nano Copper Sintering Technology in Power Electronics Packaging 纳米铜烧结技术在电力电子封装中的研究与应用
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00304
Xu Liu, Quan Zhou, Xu Zhao, S. Koh, H. Ye, Guoqi Zhang
Nano-metal sintering has been proven to be a promising die attachment technology for power electronics packaging in the high-end application. Compared with nano silver technology, it is believed that copper-based sintering technology has better cost and performance superiority, and thus has more potential to be utilized in the industry in the future. However, most of the current developed nano copper sintering material and technology shows bad performance with high sintering energy input. In this study, a novel nano-copper based paste has been developed with excellent process ability (sinterable below 280°C for 10 min with low pressure assisted) and good material property (over 40 MPa shear strength), which turns out to be suitable for the state-of-the-art packaging process. Then the material was applied into a SiC power module packaging scenario which shows comparable performance as silver sintering. The whole process only consumed less than 0.5h for each batch, which indicates that the copper sintering technology has great potential for the packaging application in high power situation.
纳米金属烧结技术在电力电子封装的高端应用中已被证明是一种很有前途的贴装技术。与纳米银技术相比,铜基烧结技术具有更好的成本和性能优势,未来具有更大的工业应用潜力。然而,目前开发的纳米铜烧结材料和工艺大多存在烧结能量大、烧结性能差的问题。在本研究中,开发了一种新型纳米铜基浆料,具有优异的工艺性能(可在280℃以下低压辅助下烧结10 min)和良好的材料性能(抗剪强度超过40 MPa),适用于最先进的包装工艺。然后将该材料应用于SiC功率模块封装场景,显示出与银烧结相当的性能。整个过程每批仅消耗不到0.5h,表明铜烧结技术在大功率场合的封装应用具有很大的潜力。
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引用次数: 0
Reliability analysis of 3D CSP MEMS and IC under thermal cycle-impact coupled multi-physics loads 热循环冲击耦合多物理场载荷下三维CSP MEMS和IC的可靠性分析
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00221
Shuye Zhang, Jianhao Xu, Shang Zhang, P. He, Mingjia Sun, Jianqun Yang, Xingji Li, K. Paik
In this paper, reliability analysis of 3D CSP MEMS and IC under thermal cycle-impact coupled multi-physics loads was investigated. COMSOL Multiphysics, a finite element software, was used to analyze the mechanical behavior of our device under a −55°C/125°C thermal cycling and 1500G@1ms with half-sine pulse impact coupled load. MEMS chip was bonded on a silicon interposer by solder balls. An application specific integrated circuit (ASIC) for the signal processing was placed on the interposer beneath the MEMS. Combining the effects of thermal stress and impact loads, we hope to find out the failure modes of interconnect structures including solder joints and whole device. The deformation and stress distribution of the overall device will be carried out for layout optimization of interconnect structures.
本文研究了三维CSP MEMS和集成电路在热循环冲击耦合多物理场载荷下的可靠性分析。利用有限元软件COMSOL Multiphysics分析了该器件在- 55°C/125°C热循环和1500G@1ms半正弦脉冲冲击耦合载荷下的力学行为。用焊料球将MEMS芯片粘接在硅中间层上。用于信号处理的专用集成电路(ASIC)被放置在MEMS下面的中间层上。结合热应力和冲击载荷的影响,我们希望找出互连结构包括焊点和整个器件的破坏模式。将对整个装置进行变形和应力分布,以优化互连结构的布局。
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引用次数: 0
Direct Bonded Heterogeneous Integration (DBHi) Si Bridge 直接键合异质集成(DBHi)硅桥
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00034
K. Sikka, R. Bonam, Yang Liu, P. Andry, Dishit P. Parekh, Aakrati Jain, M. Bergendahl, R. Divakaruni, Maryse Cournoyer, P. Gagnon, Catherine Dufort, I. de Sousa, Hongqing Zhang, Ed Cropp, T. Wassick, H. Mori, S. Kohara
We introduce a new packaging technology termed as Direct Bonded Heterogeneous Integration (DBHi) where a Si-bridge is directly bonded to and in between processor chips using Cu pillars, allowing high-bandwidth low-latency low-power communication between the chips. The DBHi package structure, test vehicle design, and bond and assembly details are first described. The test vehicle package consists of chips with standard interconnect pitch where they join to a laminate chip-carrier and fine-pitch pads in the region where the chips joins to a bridge. The bridge has Cu pillars correspondingly mating to the pads on the chips. The bond and assembly sequence starts with first joining the silicon chips and bridge using a thermocompression bonding process followed by a mass reflow join of the chips to the laminate. The assembly is then underfilled and capped using specialized techniques. Mechanical modeling was extensively used to simulate the DBHi structure and assembly process to allow material selection and reliability prediction. The mechanical models were calibrated using warpage measurements. The stress/strain reliability metrics of the DBHi package are compared to a non-bridge package of the same dimensions. Results show that the main focus should be directed towards ensuring a robust assembly process as the standard reliability stress/strain metrics of the DBHi package are very similar to a non-bridge package. Thermal measurements using chip heaters and temperature sensors were conducted to calibrate a numerical thermal model of the DBHi package. The thermal model was exercised to show the relation between the allowable chip and bridge power densities for the particular package size and cooling conditions. DBHi test packages were created using the best-known assembly process and then measured for continuity performance. A variety of inter- and intra-bridge daisy chain nets were incorporated into the test vehicle for continuity measurements. Post-assembly continuity measurements demonstrated a robust assembly process for multiple rounds of assembly. Reliability performance was demonstrated using standard JEDEC tests of thermal cycling, aging, and temperature/humidity.
我们介绍了一种新的封装技术,称为直接键合异构集成(DBHi),其中硅桥直接键合到处理器芯片之间,并使用铜柱,允许芯片之间的高带宽,低延迟,低功耗通信。首先介绍了DBHi封装结构、测试车辆设计以及连接和装配细节。测试车辆封装由具有标准互连间距的芯片组成,这些芯片连接到层压板芯片载体,并在芯片连接到桥的区域使用细间距衬垫。电桥的铜柱与芯片上的衬垫相匹配。粘合和组装顺序首先使用热压粘合工艺连接硅芯片和桥接,然后将芯片大量回流连接到层压板上。然后使用专门的技术对组件进行欠填充和封盖。机械建模被广泛用于模拟DBHi的结构和装配过程,以允许材料选择和可靠性预测。力学模型是用翘曲量来校准的。DBHi封装的应力/应变可靠性指标与相同尺寸的非桥封装进行了比较。结果表明,由于DBHi封装的标准可靠性应力/应变指标与非桥接封装非常相似,因此应将重点放在确保稳健的装配过程上。利用芯片加热器和温度传感器进行了热测量,以校准DBHi封装的数值热模型。运用热模型计算了特定封装尺寸和冷却条件下芯片和电桥允许功率密度之间的关系。DBHi测试包是使用最著名的组装过程创建的,然后测量连续性性能。各种桥间和桥内菊花链网被纳入测试车辆进行连续性测量。装配后的连续性测量证明了多轮装配的稳健装配过程。可靠性性能通过标准JEDEC热循环、老化和温度/湿度测试进行验证。
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引用次数: 14
Heterogeneous Integration with Embedded Fine Interconnect 嵌入式精细互连的异构集成
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00348
C. T. Chong, Lim Teck Guan, D. Ho, Han Yong, C. Choong, Sharon Lim Pei Siang, S. Bhattacharya
High density heterogeneous integration of ASIC and HBM2 through the use of embedded fine pitch interconnect (EFI) in face-to-face configuration using RDL 1st fan-out wafer packaging platform is demonstrated. The EFI configuration, thermal design consideration and heat dissipation for high power application, mechanical structural modeling for warpage control, wafer fabrication and assembly process integration and reliability testing results will be discussed.
采用RDL第1扇出晶圆封装平台,通过采用嵌入式细间距互连(EFI)在面对面配置中实现ASIC和HBM2的高密度异构集成。将讨论EFI配置、高功率应用的热设计考虑和散热、翘曲控制的机械结构建模、晶圆制造和组装过程集成以及可靠性测试结果。
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引用次数: 3
Challenges and key learnings in enabling Low Temperature Solder (LTS) technology at packaging components supply base 在封装元件供应基地启用低温焊料(LTS)技术的挑战和关键经验
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00112
Anna Prakash, K. Byrd, R. Sidhu, S. Elhalawaty, Nevil M. Wu, Hiroshi Okumura, Srinivas Erukula, Jason Lim
There has been a great interest in the use of low temperature soldering (LTS) for surface mount technology (SMT) in the past five years. Low temperature solder (LTS) technology improves the package warpage by reducing thermo-mechanical stress during SMT reflow. Several other benefits with LTS include environmental benefits, decreased carbon emissions, and lower electricity consumption. In this study, LTS technology has been evaluated on several electronic components such as, Integrated circuit (IC), memory, ASIC, and passives. Using several LTS formulations, Solder Joint Reliability (SJR) properties were characterized EOL as well as after reliability testing at components suppliers. Several different package types (i.e. QFN, LGA, CSP, WLCSP etc.), and surface finishes were used in this study. For some of the IC components, different types of packages were evaluated: land grid array (LGA) and quad flat no leads (QFN). Different paste formulations having (35–58 wt.% Bi content) were used in these evaluations and SAC305 was the POR/control leg used. Temperature cycle and other reliability data showed promising results with comparable data for both LTS and SAC legs. The goal in this paper is to document some of the challenges in components supply chain enabling and key learnings on the factors that modulate LTS solder joint reliability for various components during SMT process.
在过去的五年中,在表面贴装技术(SMT)中使用低温焊接(LTS)引起了极大的兴趣。低温焊料(LTS)技术通过减少SMT回流过程中的热机械应力来改善封装翘曲。LTS的其他好处包括环境效益、减少碳排放和降低电力消耗。在这项研究中,LTS技术已经在几个电子元件上进行了评估,如集成电路(IC),存储器,ASIC和无源。使用几种LTS配方,在EOL和组件供应商进行可靠性测试后,对焊点可靠性(SJR)特性进行了表征。本研究中使用了几种不同的包装类型(即QFN, LGA, CSP, WLCSP等)和表面处理。对于一些IC组件,评估了不同类型的封装:陆地网格阵列(LGA)和四平无引线(QFN)。在这些评估中使用了不同的膏体配方(Bi含量为35-58 wt.%), SAC305是使用的POR/对照腿。温度循环和其他可靠性数据与LTS和SAC腿的可比数据显示了令人鼓舞的结果。本文的目标是记录组件供应链实现中的一些挑战,以及在SMT过程中调节各种组件的LTS焊点可靠性的因素的关键学习。
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引用次数: 2
Data-Driven Remaining Useful Life Prediction of QFN Packages on Board Level with On-Chip Stress Sensors 基于片上应力传感器的QFN封装板级剩余使用寿命预测
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00150
Daniel Riegel, P. Gromala, B. Han, S. Rzepka
Miniaturization of components and higher operating loads lead to reduced lifetimes. Prognostics and Health Management (PHM) enables predictive maintenance of components whose lifetime is shorter than that of the system they are part of. The key to PHM lies in sensor data that correlates with component degradation. In this study, run-to-failure data sets have been generated using in-situ measurements of on-chip stress sensors. Physical failure analysis has provided the link between the data and remaining useful life.
组件的小型化和更高的工作负载导致使用寿命缩短。预测和健康管理(PHM)支持对寿命短于其所属系统寿命的组件进行预测性维护。PHM的关键在于与部件退化相关的传感器数据。在这项研究中,使用片上应力传感器的原位测量生成了运行到故障的数据集。物理故障分析提供了数据和剩余使用寿命之间的联系。
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引用次数: 1
期刊
2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
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