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2021 IEEE 71st Electronic Components and Technology Conference (ECTC)最新文献

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Extreme High Aspect Ratio RDL Patterning with Low Temperature Curable Polyimide using Double Patterning Technology 低温固化聚酰亚胺双模技术的超高纵横比RDL模
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00254
Atsushi Nakamura, T. Koizumi, Naoki Sato, Toshihide Aoshima, Michihiro Ogawa, Daisuke Asakawa, Yuki Sakamoto, H. Noguchi
In this paper, extreme high aspect ratio RDL patterning technologies using double patterning technology and low temperature curable polyimide is demonstrated. The extreme high aspect ratio patterning is realized by combination of 1st and 2nd patterning before curing, and was used to successfully form both trench and via patterns, as well as combination of via and trench. The aspect ratio was measured by cross-sectional observation of the resulting pattern using an electron microscope, and was found to be over 8 after curing. Finally, a PI film was formed using the double patterning technology, and a single curing step was applied to obtain a permanent film, with reliability evaluation performed using biased HAST and HTS test. Furthermore, the elongation at break and modulus were measured through stress-strain curve. The results of biased HAST and HTS, as well as mechanical property measurements, are promising. The PI permanent film formed by double patterning and obtained by single curing is homogenized, passes the reliability evaluation, and can be applied to actual devices.
本文介绍了利用双模技术和低温固化聚酰亚胺的超高纵横比RDL模化技术。通过固化前的第一次和第二次图案组合实现了超高纵横比的图案,并成功地形成了沟槽和通孔图案,以及通孔和沟槽的组合。利用电子显微镜对所得到的图案进行横断面观察来测量纵横比,发现固化后纵横比大于8。最后,采用双模技术形成PI膜,采用单一固化步骤获得永久膜,并采用偏置HAST和HTS测试进行可靠性评估。通过应力-应变曲线测量了断裂伸长率和模量。偏置HAST和HTS的结果以及力学性能测量都是有希望的。经双图像化、单固化得到的PI永膜均质化,通过了可靠性评估,可应用于实际器件。
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引用次数: 0
Extraordinarily enhanced sintering performance of pressureless sinterable Cu nanoparticle paste for achieving robust die-attach bonding by using reducing hybrid solvent 采用还原性杂化溶剂,显著提高了无压烧结铜纳米颗粒浆料的烧结性能,实现了牢固的模附键合
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00104
Hai-Jun Huang, Min-bo Zhou, Xin-Ping Zhang
Hybrid solvents with reducing property, composed of diethylene glycol (DEG) and glycerol (G), are developed for use as carrier solvent of the Cu nanoparticle paste, which has been employed successfully to achieve die-attach bonding through a pressureless low-temperature sintering process, with sintered joints having shear strength of 72 MPa, the highest reported thus far. The amount of residual solvent in high temperature range (150–250 °C) determined by boiling point of carrier solvents is directly related to the ratio of unbonded areas in the sintered Cu paste matrix. Solvents with the reducing property, which is crucial to decomposition of Cu lactate during sintering process, are indispensable for forming highly dense Cu bulks as the reinforcing phase in the sintered matrix. Finite element simulations of the influence of unbonded areas (defects) in the sintered Cu paste matrix on thermal cycling performance of the joints show that equivalent total strain increases with unbonded area, but shear stress behaves in the opposite way. For sintered joints using DEG+G formulated Cu paste, the dwell time of high temperature storage (HTS) at 250°C has limited effect on joints' strength. The Cu NP paste stored in the fridge at −5°C and −40°C for 6 months still retains the capability of pressureless low-temperature sintering, which meets the requirement of the industry application, concerning with transportation, storage and handling of Cu paste.
采用二甘醇(DEG)和甘油(G)组成的具有还原性的杂化溶剂作为铜纳米颗粒浆料的载体溶剂,通过无压低温烧结工艺成功实现了模贴结合,烧结后的接头抗剪强度达到72 MPa,为目前报道的最高。由载体溶剂沸点测定的高温范围(150 ~ 250℃)内残余溶剂的量与烧结Cu膏体基体中未键合区比例直接相关。具有还原性的溶剂是烧结过程中乳酸铜分解的关键,在烧结基体中形成高密度的Cu体作为增强相是必不可少的。对烧结铜膏体基体中非粘结区(缺陷)对接头热循环性能影响的有限元模拟表明,等效总应变随非粘结区增大而增大,而剪切应力则相反。对于采用DEG+G配方Cu膏体烧结的接头,250℃高温保存时间对接头强度的影响有限。在- 5°C和- 40°C的冰箱中存放6个月的铜NP膏体,仍然保持了无压低温烧结的能力,满足了铜膏体运输、储存和处理的工业应用要求。
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引用次数: 1
Study of the adhesion of a sintered Ag joint on a Cu substrate using laser shocks. Influence of aging 激光冲击烧结银接头在铜基体上的粘附性研究。老化的影响
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00106
X. Milhet, T. de Rességuier, L. Signor, Etienne Barraud, Kokouvi Happy N'Tsouaglo, Hadi Bahsoum, J. Baillargeat
Silver pastes sintering is a potential candidate for die bonding in power electronic modules which are built by stacking up layers of various materials having different coefficients of thermal expansion. Consequently, in operating conditions, thermal stresses (tensile or compressive) develop at the interfaces between the layers. Moreover, during aging, the initial interface is expected to evolve, mostly due to diffusion of atomic species between adjacent layers. In this study, original laser-shock experiments, involving tensile stresses near the interface, are performed to investigate the influence of aging on the adhesive strength of sintered silver joints onto copper.
银糊烧结是一种潜在的候选材料,用于电力电子模块的模具键合,该模块是由具有不同热膨胀系数的各种材料层堆叠而成的。因此,在操作条件下,热应力(拉伸或压缩)在层之间的界面上产生。此外,在时效过程中,初始界面预计会发生演化,这主要是由于相邻层之间原子物质的扩散。在本研究中,采用原始激光冲击实验,包括界面附近的拉应力,研究时效对烧结银接头与铜的结合强度的影响。
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引用次数: 0
Co-Design of Chip-Package-Antenna in Fan-out Package for Practical 77 GHz Automotive Radar 实用77 GHz汽车雷达扇出封装芯片天线协同设计
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00191
Chuanming Zhu, Yinglu Wan, Zongming Duan, Yuefei Dai
This paper presents a co-design of chip-package-antenna in fan-out package for automotive radar. Many packaged chips are directly soldered onto the feeding network of planar antenna array. However, the interconnections and associated radiation interferences are seldom considered. Thus co-design of chip-package-antenna is necessary since the radiation pattern is seriously affected by the packaged chip and feeding network, especially at millimetre-wave frequency. In this work, the used antenna is a planar 12-element series-fed linear antenna array. Based on Dolph-Chebyshev magnitude distribution, the desired radiation pattern is firstly synthesized by tapering each patch width. Then the transition of chip-package-board is proposed and realized by properly designing redistribution layer (RDL) in fan-out package and the GCPW line on PCB. After chip is flip-chipped onto antenna, the side lobe level (SLL) of the whole chip-package-antenna gets worse. By redesigning the width and distances of between elements, the SLL can be improved. The results show that the proposed method of chip-package-antenna paves the way to practical automotive radar application.
提出了一种车用雷达扇出封装中芯片封装天线的协同设计方法。许多封装芯片是直接焊接在平面天线阵馈电网络上的。然而,互连和相关的辐射干扰很少被考虑。由于封装芯片和馈电网络对天线的辐射方向图影响很大,尤其是毫米波频段的辐射方向图,因此采用芯片-封装天线协同设计是必要的。在这项工作中,使用的天线是平面12元串联馈电线性天线阵列。基于道尔夫-切比雪夫星等分布,首先将每个贴片宽度变细,合成所需的辐射方向图。然后通过合理设计扇出封装中的再分配层(RDL)和PCB上的GCPW线,提出并实现了芯片封装板的过渡。芯片倒装到天线上后,整个芯片封装天线的旁瓣电平(SLL)变差。通过重新设计元素之间的宽度和距离,可以改善SLL。结果表明,所提出的芯片封装天线方法为汽车雷达的实际应用铺平了道路。
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引用次数: 0
Two-step fabrication process for die-to-die and die-to-wafer Cu-Cu bonds 两步制程的模对模和模对晶片的Cu-Cu键
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00043
J. Ong, K. Shie, K. Tu, Chih Chen
The scale of joints shrinks continuously due to super small and extremely fast computing devices consent to Moore's Law. Copper-to-copper direct bonding appears to be one of a solution to the limitation of scaling down into sub-micron scale. Moreover, bonding quality such as mechanical strength and electrical properties in copper bonding becoming an important topic. In this study, we examine the relationship of the bonding time and temperature on the bonding strength and bump resistance in Cu-Cu bonds with highly <111> oriented nanotwinned copper. In addition, the Cu-Cu joints were subjected to a post annealing process at the bonding strength after the second step annealing at 300 °C under 47MPa for 1 hour in vacuum ambient. The bonding strength increases 3–4 folds after the post annealing. Some of the open Cu-Cu joints became connected after the post-annealing process.
由于超小、超快的计算设备符合摩尔定律,关节的规模不断缩小。铜-铜直接键合似乎是解决缩小到亚微米尺度限制的一种解决方案。此外,铜键合中的机械强度和电性能等键合质量也成为一个重要的课题。在这项研究中,我们研究了键合时间和温度对高取向纳米孪晶铜的Cu-Cu键的键合强度和抗碰撞性能的关系。另外,在真空环境下,在300℃、47MPa条件下进行第二步退火1小时后,对Cu-Cu接头进行结合强度的后退火处理。退火后的结合强度提高了3-4倍。部分开口的Cu-Cu接头在退火后重新连接。
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引用次数: 3
The Study of Packaging Substrate Effect in FCBGA by Laser Assisted Bonding 激光辅助键合FCBGA封装衬底效应研究
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00110
Yu Lung Huang, Joe Huang, C. M. Huang, K. Yu, Tank Luo, W. Hong, Taishin Ren
In order to support the high growth of Artificial Intelligence, Internet of Things, Industrial IOT, Cloud Service and 5G, the IC (Server/Router/Switch) needs higher/faster performance to collect, store, commute and transmit a mass of data. Therefore, the I/O (input/output) density of IC will increase with the silicon nodes < 5 nm, fine pitch $mutext{bump}$, and fine line width/space substrate. However, the solder reflow of IC faces two problems of the chip damages (silicon nodes: current leakage, highly electromigration; ELK (extremely low-k): current leakage, crack) and solder high stress (solder: wicking, IMC (intermetallic compound)) due to highly thermal budget of MR (mass reflow). In this paper, LAB (laser assisted bonding) will replace MR (mass reflow) to solve these problems. In this study, a test vehicle with the size of $55^{ast}55 text{mm}2$ FCBGA (flip chip ball grid array) was built. Two types (A and B) of substrate were applied to the FCBGA, with the differences between the solder mask (thickness, surface brightness/roughness) and substrate mass. LAB uses a semiconductor laser with wavelength of 980 nm, and the area of laser beam is 91.5% of the substrate area. The study is divided into three parts. For the first part, the surface temperature of die without substrate is higher than that of die with substrate at the same parameters about 187.2 °C. The result shows that the substrate has the function of heat storage. In addition, for the surface temperature of die with substrate, the result shows that all solders melt at 2.82 sec, and the surface temperature of the center of die is 22.8 °C lower than the four corners of it. Then the delta temperature between the surface temperature of the center of die and bump is 48.3 °C. The result shows that the overall temperature of die with substrate is not uniform. Next, for substrate effect, the surface temperature of die and B substrate is lower than that of die and A substrate based on the following reasons: for the solder mask, (a) the surface brightness of B substrate is 11% higher than that of A substrate result in an increase of the reflected light; (b) the roughness of B substrate is 26% lower than that of A substrate result in an increase of the reflected light; (c) the thickness of B substrate is 23% lower than that of A Substrate result in a reduction of Absorbed light; for substrate mass (d) the weight of B substrate is 10% higher than that of A substrate. Finally, the assembled FCBGA packages by LAB passed reliability tests: MSL4 pre-conditioning with uHAST 168 hours, TCT B 1000 thermal cycles and HTST 1000 hours. Details of the results are presented and discussed in the paper. In summary, we have developed the parameter set to solve it in different substrates and predicted the melting time of solder and temperature profile of die surface. Therefore, LAB (laser assisted bonding) can successfully solve the problems MR encounters. The full descriptions of the development results will
为了支持人工智能、物联网、工业物联网、云服务和5G的高速增长,IC(服务器/路由器/交换机)需要更高/更快的性能来收集、存储、交换和传输大量数据。因此,集成电路的I/O(输入/输出)密度将随着硅节点< 5 nm、细间距$mutext{bump}$和细线宽/空间衬底而增加。然而,集成电路的焊料回流面临芯片损伤(硅节点)的两个问题:漏电流、高电迁移;ELK(极低k):漏电流,裂纹)和焊料高应力(焊料:吸丝,IMC(金属间化合物))由于MR(质量回流)的高热预算。在本文中,激光辅助键合(LAB)将取代质量回流(MR)来解决这些问题。本研究构建了尺寸为$55^{ast}55 text{mm}2$ FCBGA(倒装芯片球栅阵列)的实验车。将两种类型的衬底(A和B)应用于FCBGA,其阻焊层(厚度、表面亮度/粗糙度)和衬底质量之间存在差异。LAB采用波长为980 nm的半导体激光器,激光束面积为衬底面积的91.5%。本研究分为三个部分。对于第一部分,在相同参数下,无衬底的模具表面温度高于有衬底的模具表面温度,约为187.2℃。结果表明,该衬底具有储热功能。此外,对于有衬底的模具表面温度,结果表明,所有焊料在2.82秒熔化,模具中心表面温度比模具四角低22.8℃。模具中心表面温度与凸块表面温度的差值为48.3℃。结果表明,模具与衬底的整体温度不均匀。其次,对于衬底效应,由于以下原因,模具和B衬底的表面温度低于模具和A衬底的表面温度:对于阻焊片,(A) B衬底的表面亮度比A衬底高11%,导致反射光增加;(b) b基板的粗糙度比A基板的粗糙度低26%,导致反射光增加;(c) B衬底的厚度比A衬底的厚度低23%,导致吸收光减少;对于衬底质量(d), B衬底的重量比A衬底的重量高10%。最后,通过LAB组装的FCBGA封装通过了可靠性测试:MSL4预处理uHAST 168小时,TCT B 1000热循环,HTST 1000小时。文中详细介绍了实验结果并进行了讨论。综上所述,我们开发了在不同衬底下求解该问题的参数集,并预测了焊料的熔化时间和模具表面的温度分布。因此,LAB(激光辅助键合)可以成功地解决MR遇到的问题。本研究将讨论开发结果的完整描述。
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引用次数: 1
Next generation of adhesion enhancement system for high speed substrate manufacturing 用于高速基材制造的下一代附着力增强系统
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00042
T. Thomas, P. Brooks, F. Michalik, W. Cho
Improving adhesion between copper and lamination resin is one of the biggest challenges in micro-electronic manufacturing, such as IC substrate. Bonding enhancement process by surface roughening is predominant use method, due to providing the highest possible mechanical interlocking. In this process typically $mathrm{1}-mathrm{2} mumathrm{m}$ of copper need to be removed for reliable adhesion of dielectrics to the copper surface. Follow rapid development of electronics industry, where fine $mathrm{L}/mathrm{S}, (< mathrm{10} mumathrm{m})$ and good signal propagation at higher speed are required. The conventional approach to ensure good adhesion of the conductor to the dielectrics by increasing surface roughness to achieve adhesion is no longer applicable. This work demonstrates the development of a novel surface treatment method of copper which can meet all the challenges of IC substate manufacturing for high speed function. The developed surface treatment system adopted subsequent treatment of organic coating so called “adhesion promoter (AP)” on top of copper surface to provide the strongest possible bond strength via chemical adhesion. As a result, significant improvement of adhesion of conductor to dielectrics can be obtained at ultra-low copper surface roughness.
提高铜与层压树脂之间的粘附性是微电子制造中最大的挑战之一,例如集成电路衬底。由于提供了尽可能高的机械联锁,通过表面粗化增强粘合工艺是主要的使用方法。在这个过程中,通常需要去除$ mathm {1}- $ mathm {2} mu mathm {m}$的铜,以保证电介质与铜表面的可靠粘附。随着电子工业的快速发展,对$mathrm{L}/mathrm{S}, (< mathrm{10} mumathrm{m})$和较高速度下良好的信号传播提出了要求。通过增加表面粗糙度来确保导体与电介质良好粘附的传统方法已不再适用。这项工作证明了一种新的铜表面处理方法的发展,可以满足高速功能IC基态制造的所有挑战。所开发的表面处理系统采用了在铜表面上进行后续处理的有机涂层,即所谓的“粘附促进剂(AP)”,通过化学粘附提供尽可能强的结合强度。结果表明,在铜表面粗糙度极低的情况下,导体与介电体的附着力显著提高。
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引用次数: 0
PI/SI consideration for enabling 3D IC design PI/SI考虑实现3D IC设计
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00211
Jung-Man Son, S. Moon, Seungki Nam, Wook Kim
In this work, we present a comprehensive analysis methodology for parameters that should be considered in terms of power integrity (PI) and signal integrity (SI) when designing 3D IC. By analyzing the basic structure of the 3D IC, each block was separated and modified to a simplified model using equivalent circuit formula to create a simplified full system simulation environment. Using this setup, voltage noise in the system power delivery network (PDN) environment considering various through-silicon-via (TSV) types, pitch, etc. was analyzed, and the difference from the existing 2D structure was compared. In addition, it is found that there is a trade-off relationship between voltage drop and area overhead by the increase of number of TSVs and the optimization process that satisfies both conditions simultaneously. Finally, the IP power density that are required on the top and bottom dies was examined for the IP layout considering thermal effects in the initial design stage of 3D IC. Each of these individual analyses is summarized in a unified database and eventually is able to provide a design guideline at the early stage through the process of finding out a solution that satisfies all given conditions.
在这项工作中,我们提出了在设计3D IC时应考虑功率完整性(PI)和信号完整性(SI)的参数的综合分析方法。通过分析3D IC的基本结构,将每个模块分离并使用等效电路公式修改为简化模型,以创建简化的全系统仿真环境。利用该结构分析了考虑不同通硅通孔(TSV)类型、节距等因素的系统供电网络(PDN)环境下的电压噪声,并比较了与现有二维结构的区别。此外,还发现电压降与面积开销之间存在一种权衡关系,即tsv数量的增加以及同时满足这两个条件的优化过程。最后,考虑到3D集成电路初始设计阶段的热效应,对IP布局的顶部和底部模具所需的IP功率密度进行了检查。每个单独的分析都总结在一个统一的数据库中,并最终能够通过找到满足所有给定条件的解决方案的过程,在早期阶段提供设计指南。
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引用次数: 3
Impact of System-in-Package in side-by-side discrete SoC-DRAM configurations on SI, PI and thermal performance 系统级封装中并排分立SoC-DRAM配置对SI、PI和热性能的影响
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00285
Goeun Kim, Doohee Lim, Jongmin Lee, I. Chang, J. Pak, Youngsang Cho, Yunhyeok Im
In this paper, a SoC (System on Chip) - DRAM configured 2D planar side-by-side SiP (System in Package) is compared to a conventional SCP (single chip package) on board with respect to SI (signal integrity), PI (power integrity), and thermal performance. In SI and PI aspects, eye aperture widths of DQ signals are used as a figure of merit for performance decisions. SiP's shorter channel lengths and fewer discontinuities can result in wider eye apertures but its longer and smaller PDN (power delivery network) shapes narrows them. In order to enhance SiP PI and consequent wider eye aperture width, De-cap (decoupling capacitor) values are swept and their numbers, capacities and locations are changed. Finally, the optimal De-cap placement to achieve robust PI performance can be found. However, since SiP has shorter distance and larger thermal coupling between SoC and DRAM, SiP configuration shows a comparatively worse thermal performance than SCP on board. The thermal comparison is based on two temperatures taken from the top surfaces of the SoC and DRAM, and the leakage power of the two SoC's. Through this comparison study between SCP on board and SiP, a basic understanding on how to adopt advanced DDR features in SiP application for D-TV (digital TV) can be obtained.
在本文中,在SI(信号完整性),PI(功率完整性)和热性能方面,将SoC(片上系统)- DRAM配置的2D平面并排SiP(系统中封装)与传统的单芯片封装(单芯片封装)进行了比较。在SI和PI方面,DQ信号的孔径宽度被用作性能决策的优劣指标。SiP较短的信道长度和较少的不连续可以导致更大的孔径,但其更长的和更小的PDN(电力输送网络)形状使其变窄。为了提高SiP PI和由此产生的更宽的眼孔径宽度,De-cap(去耦电容)值被扫描,它们的数量、容量和位置被改变。最后,可以找到实现稳健PI性能的最佳De-cap放置。然而,由于SiP配置的SoC与DRAM之间的距离较短,热耦合较大,因此SiP配置的热性能相对较板载SCP差。热比较是基于SoC和DRAM顶部表面的两个温度,以及两个SoC的泄漏功率。通过对星载SCP和SiP协议的比较研究,对如何在数字电视(D-TV)的SiP应用中采用先进的DDR特性有了基本的了解。
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引用次数: 1
Comparison of Global Optimization Algorithms for Inverse Design of Substrate Metal Density for Low Warpage Design in Ultra-Thin Packages 面向超薄封装低翘曲设计的基板金属密度反设计全局优化算法比较
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00363
C. Selvanayagam, P. Duong, Brett Wilkerson, N. Raghavan
An inverse design framework incorporating a physics-based surrogate model and global optimization is proposed to assist in the design of low warpage ultra-thin packages by adjusting the metal densities over substrate subsections and layers. The surrogate model is derived from two finite element analysis (FEA) models. The first one describes the relationship between the metal density in the substrate layer to the coefficient of thermal expansion (CTE) while the second one describes the relationship between in-plane CTE variation of the substrate to the warpage profile. Results from these two FEA models are used to train separate artificial neural networks (ANN). When these ANNs are run sequentially, the surrogate model can accurately determine the warpage profile for any set of metal densities. Three global optimization algorithms, Particle Swarm Optimization (PSO), Genetic Algorithm (GA) and Cross Entropy (CE) were then evaluated using this surrogate model. Three case studies consisting of different warpage profiles (original and 20% reduced warpage) and constraints to the optimization search space (±20% or ±50% change to metal density) were then evaluated using these algorithms. For all three cases, the three algorithms converged to similar solutions, indicating that indeed the global minimum has been attained and determined. However, GA took a significantly longer time to converge than PSO and CE. Based on these results, PSO and CE are recommended to be suitable algorithms to carry out inverse design for this type of problem.
提出了一个包含基于物理的代理模型和全局优化的逆设计框架,通过调整基板分段和层上的金属密度来帮助设计低翘曲超薄封装。代理模型由两个有限元分析模型推导而来。第一个模型描述了基板层中的金属密度与热膨胀系数(CTE)之间的关系,第二个模型描述了基板的平面内CTE变化与翘曲轮廓之间的关系。这两种有限元模型的结果用于训练单独的人工神经网络。当这些人工神经网络依次运行时,代理模型可以准确地确定任何一组金属密度的翘曲分布。利用该模型对粒子群优化(PSO)、遗传算法(GA)和交叉熵优化(CE)三种全局优化算法进行了评价。然后使用这些算法评估了由不同翘曲轮廓(原始翘曲和减少20%翘曲)和优化搜索空间约束(金属密度变化±20%或±50%)组成的三个案例研究。对于这三种情况,三种算法收敛到相似的解,表明确实已经达到并确定了全局最小值。然而,遗传算法的收敛时间明显长于PSO和CE。在此基础上,提出了PSO算法和CE算法作为求解该类问题的合适算法。
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2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
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