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2021 IEEE 71st Electronic Components and Technology Conference (ECTC)最新文献

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Chiplets in Wafers (CiW) - Process Design Kit and Demonstration of High-Frequency Circuits with GaN Chiplets in Silicon Interposers 晶圆晶片(CiW) -制程设计套件及在硅中间层中使用GaN晶片的高频电路演示
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00039
F. Herrault, J. Wong, I. Ramos, H. Tai, M. King
The Metal Embedded Chiplet Assembly for Microwave Integrated Circuits (MECAMIC) technology utilizes RF GaN transistor chiplets integrated into passive interposer wafers using a metal electroplating embedding approach. Chiplets in Wafers (CiW) enable high level of integration between the transistor chiplets and the packaging circuitry, resulting in high RF performance. In this paper, we present the detailed process flow, the development of a MECAMIC Process Design Kit (PDK) for mm-wave RF Integrated Circuits (ICs), and its application to the design, simulation, fabrication and measurements of heterogeneously-integrated multi-stage W-band Low Noise Amplifiers (LNAs) using state-of-the-art mm-wave GaN transistor chiplets and low-cost silicon interposer packaging with 16 dB gain and 4dB noise figure at 77 GHz.
用于微波集成电路的金属嵌入式芯片组装(MECAMIC)技术利用金属电镀嵌入方法将RF GaN晶体管芯片集成到无源中间体晶圆中。晶片内芯片(CiW)实现了晶体管芯片和封装电路之间的高度集成,从而实现了高射频性能。在本文中,我们介绍了详细的工艺流程,为毫米波射频集成电路(ic)开发的MECAMIC工艺设计套件(PDK),并将其应用于采用最先进的毫米波GaN晶体管芯片和低成本硅中间封装的异构集成多级w波段低噪声放大器(LNAs)的设计,仿真,制造和测量,该放大器在77 GHz时具有16 dB增益和4dB噪声系数。
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引用次数: 2
Effect of crystal anisotropy and IMCs on electromigration resistivity of low temperature flip chip interconnect 晶体各向异性和IMCs对低温倒装互连电迁移电阻率的影响
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00298
K. Murayama, Mitsuhiro Aizawa, K. Oi
In recent years, global warming prevention and reduction of energy consumption are increasingly required. And technical point of view, low stress bonding is required. A low temperature bonding using Sn-Bi solder is candidate technique to solve these problems. In this report, improving the reliability of electro-migration at flip chip interconnect in Sn-Bi solder, which is a low-temperature solder, are focused. A combination of six types of Sn-Bi solder and surface finish of interposer pad were studied, these are, combination of Sn30wt.%Bi (Sn30Bi) solder, Sn57wt.%Bi (Sn57Bi) solder, electroless Ni/Au on Cu pad and Ni/Pd/ Au on Cu pad. The effects of Bi concentration, trace element and inter-metallic compounds formation on electromigration resistivity were evaluated. The current density of 40 kA/cm2 was applied at 125 degrees C. Analysis of the microstructure and crystal orientation of the interconnected bumps were performed in all combinations by electron backscatter diffraction and electron probe microanalyzer. Mean time to failure of Sn57Bi/NiAu(thick), that of Sn30Bi/NiAu(thick) and that of Sn30Bi/NiPdAu were19, 141 and 600 hours, respectively. And maximum resistance increases from initial of Sn57Bi/NiAu(thick), that of Sn30Bi/NiAu(thick), Sn30Bi/NiPdAu were 60.6%, 19.5%, 13.2% after 2500 hours. Reducing the total amount of Au and Pd atoms in the solder can delay increase of resistance after current stressing. In cases of NiAu(thick) and NiAu(thin) pads, two types of failure mode were observed after current stressing. One was growth of large (Cu, Ni)6Sn5 with thick Ni(P rich) layer. The other was the mode in which (Cu, Ni) 6Sn5 hardly grow and unreacted Sn layer remains. In case of c-axis of the beta-Sn grain aligned with the electron flow, Ni diffusion from Ni pad to the solder was accelerated. On the other hand, in the case of NiPdAu pad, only one failure mode was observed after current stressing. It is a mode in which the unreacted Sn layer remains. Even if c-axis of the beta-Sn grain aligned with the electron flow, Ni diffusion from Ni pad was not observed. Focusing on the intermetallic compounds (IMCs) formed on the interposer pad after 10% resistance change, in cases of NiAu(thick) and NiAu(thin) pads, un-uniform and needle-type (Cu, Ni) 6Sn5 were formed. Large Ni diffusion from their grain boundary into IMCs were observed after current stressing. On the other hand, in the case of NiPdAu pad, thin (Ni, Cu)3Sn4 and uniform and dense scallop-type (Cu, Ni)6Sn5 were formed after 10% resistance change. They were still stabled after current stressing. The significant increase in resistance in the early stage is influenced by Bi concentration in solder. And Au atoms play a role of accelerating diffusion and increase in resistance at early stage on electro-migration test. Dense scallop-type (Cu, Ni)6Sn5 layer on Ni pad showed as an effective barrier diffusion of Cu or Ni. It was found that if a uniform and dense IMCs were formed on the interpose
近年来,预防全球变暖和降低能源消耗的要求越来越高。从技术角度来看,低应力粘合是必需的。利用锡铋焊料进行低温键合是解决这些问题的备选技术。本文主要研究了如何提高低温锡铋焊料倒装互连电迁移的可靠性。研究了六种Sn-Bi焊料的组合和中间焊盘的表面光洁度,即Sn30wt的组合。%Bi (Sn30Bi)焊料,Sn57wt。%Bi (Sn57Bi)焊料,Cu焊盘化学镀Ni/Au和Cu焊盘化学镀Ni/Pd/ Au。评价了铋浓度、微量元素和金属间化合物形成对电迁移电阻率的影响。在125℃下施加电流密度为40 kA/cm2,通过电子背散射衍射和电子探针微量分析仪分析了所有组合下互连凸起的微观结构和晶体取向。Sn57Bi/NiAu(厚)、Sn30Bi/NiAu(厚)和Sn30Bi/NiPdAu的平均失效时间分别为19、141和600小时。2500 h后,Sn57Bi/NiAu(厚)、Sn30Bi/NiAu(厚)、Sn30Bi/NiPdAu的最大电阻增幅分别为60.6%、19.5%、13.2%。减少焊料中Au和Pd原子的总量可以延缓电流应力后电阻的增加。在NiAu(厚)和NiAu(薄)衬垫的情况下,电流应力作用后观察到两种类型的破坏模式。一是生长出较大的(Cu, Ni)6Sn5,并具有较厚的富Ni(P)层。另一种模式是(Cu, Ni) 6Sn5几乎不生长,未反应的Sn层仍然存在。当β - sn晶粒c轴与电子流对齐时,Ni从Ni焊盘向焊料的扩散速度加快。另一方面,NiPdAu衬垫在电流应力作用下只观察到一种破坏模式。这是一种未反应的锡层仍然存在的模式。即使β - sn晶粒的c轴与电子流对齐,也没有观察到Ni从Ni垫中扩散。在NiAu(厚)衬垫和NiAu(薄)衬垫中,形成了不均匀的针状(Cu, Ni) 6Sn5;在电流应力作用下,Ni从晶界扩散到IMCs中。另一方面,在NiPdAu衬垫中,电阻变化10%后形成薄的(Ni, Cu)3Sn4和均匀致密的扇贝型(Cu, Ni)6Sn5。它们在当前的压力下仍然稳定。早期电阻的显著增加受焊料中铋浓度的影响。在电迁移试验中,金原子在早期具有加速扩散和增加电阻的作用。Ni衬垫上致密的扇贝型(Cu, Ni)6Sn5层是Cu或Ni的有效屏障扩散层。结果表明,在电流应力作用前,如果在中间焊盘上形成均匀致密的imc,即使在低温焊料中也会表现出较高的电迁移电阻率。
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引用次数: 1
In Situ Degradation Monitoring Methods during Lifetime Testing of Power Electronic Modules 电力电子模块寿命试验中的原位劣化监测方法
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00149
A. Schiffmacher, D. Strahringer, Shreyas Malasani, J. Wilde, Carsten Kempiak, A. Lindemann
Within the scope of this work three in-situ degradation monitoring methods are presented. The methods are suitable for the detection of degradations in power electronic modules during active power cycling test without interrupting the test itself. A comparison of the results is illustrated by conducting all three techniques during the lifetime testing of a power electronic module at the same time. In sum, electrical, electrothermal, thermal and thermomechanical parameters were evaluated. From the observations, we conclude that the primary failure mechanism of a novel die-top interconnect technology for power modules is the crack propagation in the Al-metallisation of the semiconductor. Cross-sectional images of the samples were prepared to confirm the previously given evidence of the failure. Furthermore a lifetime model was established for this assembly technology. Finally, a comparison of the advantages and limitations of the conducted degradation monitoring techniques will be presented.
在这项工作的范围内,提出了三种原位退化监测方法。该方法适用于电力有功循环试验中电力电子模块退化的检测,而不中断试验本身。通过在电力电子模块的寿命测试中同时进行这三种技术,说明了结果的比较。总之,电学、电热、热学和热力学参数进行了评估。从观察中,我们得出结论,新型电源模块模顶互连技术的主要失效机制是半导体铝金属化中的裂纹扩展。准备了样品的横截面图像,以确认先前给出的失败证据。在此基础上,建立了该装配工艺的寿命模型。最后,比较了传导降解监测技术的优点和局限性。
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引用次数: 1
Room Temperature KlettWelding Interconnect Technology for High Performance CMOS Logic 用于高性能CMOS逻辑的室温熔接互连技术
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00069
F. Roustaie, S. Quednau, F. Weissenborn, O. Birlem, David Riehl, Xiang Ding, Andreas Kramer, K. Hofmann
In this work we report a novel room temperature bonding technology based on metallic NanoWires, so-called KlettWelding. This technology can be used for bonding Flip-Chips with down to $5 mumathrm{m}$ edge length bumps and fine pitches less than $8 mumathrm{m}$. The process is expected to work for die to wafer (d2w) or wafer to wafer (w2w) bonding. The required bonding pressures range from 1 to 15 MPa for flip chips, Diodes, IGBT, MOSFETS, $mu mathrm{C}$, Video chips, LEDs and sensors. The measured shear strength of these connections yields 15 to 60 MPa. Such contacts have shown in the first results a high thermal conductance in the range of 350 W/mK. Also, the connections can tolerate temperatures higher than 500 °C.
在这项工作中,我们报告了一种新的基于金属纳米线的室温键合技术,即所谓的klet12ding。该技术可用于连接具有低至$5 mathrm{m}$边缘长度凸起和细间距小于$8 mathrm{m}$的倒装芯片。该工艺预计适用于晶圆到晶圆(d2w)或晶圆到晶圆(w2w)键合。倒装芯片、二极管、IGBT、mosfet、$mu mathm {C}$、视频芯片、led和传感器所需的键合压力范围为1至15 MPa。这些接头的抗剪强度为15至60 MPa。这种接触在第一个结果中显示出在350 W/mK范围内的高热导率。此外,该接头可以承受高于500°C的温度。
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引用次数: 0
Low Cost Grounding Integration for Surface Ion Trap 表面离子阱的低成本接地集成
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00259
Hongyu Li, W. Seit, Hwang Gilho, P. Zhao, J. Tao, C. S. Tan
Si substrate provide the integration platform for surface ion trap device fabrication. Grounding metal for the surface ion trap is necessary because of high RF voltage ($> 100mathrm{V}$) applied and lower RF loss required within functionality. High resistivity Si substrate with floating metal grounding and low-grade Si substrate with connected grounding metal were integrated with surface ion trap. Ion trap resonance curves were observed at 47.1 MHz frequency for ion trap devices with different grounding metal. The curves have similar resonant power.
硅衬底为表面离子阱器件的制造提供了集成平台。由于施加的高射频电压($> 100 mathm {V}$)和功能内所需的低射频损耗,表面离子阱的接地金属是必要的。采用表面离子阱将高电阻率硅衬底与浮金属接地和低品位硅衬底与接接地金属相结合。在47.1 MHz频率下观察了不同接地金属离子阱器件的谐振曲线。曲线具有相似的谐振功率。
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引用次数: 0
Automated Void Detection in TSVs from 2D X-Ray Scans using Supervised Learning with 3D X-Ray Scans 自动空洞检测tsv从2D x射线扫描使用监督学习与3D x射线扫描
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00143
R. Pahwa, S. Gopalakrishnan, Huang Su, Ong Ee Ping, Haiwen Dai, D. Wee, Ren Qin, V. S. Rao
Yield improvement is a critical component of semiconductor manufacturing. It is done by collecting, analyzing, identifying the causes of defects, and then coming up with a practical solution to resolve the root causes. Semiconductor components such as Through Silicon Vias (TSVs) and other package interconnects are getting smaller and smaller with the ongoing miniaturization progress in the industry. Detecting defects in these buried interconnects is becoming both more difficult and more important. We collect both 2D and 3D X-Ray scans of defective TSVs containing defects such as voids. We label the data in 3D and perform registration between 2D and 3D scans. We use this registration information to locate the TSVs and void defects in these 2D X-ray scans which would be difficult to label manually as these voids look very fuzzy in 2D scans. Thereafter we use a state-of-the-art deep-learning segmentation network to train models to identify foreground (TSV, void defects) from the background. We show that our model can accurately identify the TSVs and their voids in images where it is impossible to locate the defects manually. We report a dice score of 0.87 for TSV segmentation and a dice score of 0.67 for void detection. The dice score for voids demonstrates the capability of our models to detect these difficult buried defects in 2D directly.
良率的提高是半导体制造的关键组成部分。它是通过收集、分析、确定缺陷的原因,然后提出解决根本原因的实际解决方案来完成的。半导体元件,如硅通孔(tsv)和其他封装互连正变得越来越小,随着工业的不断小型化的进展。在这些隐藏的互连中检测缺陷变得越来越困难和重要。我们收集含有缺陷(如空洞)的缺陷tsv的二维和三维x射线扫描。我们在3D中标记数据,并在2D和3D扫描之间进行配准。我们使用这些配准信息来定位这些二维x射线扫描中的tsv和空洞缺陷,这些缺陷很难手工标记,因为这些空洞在二维扫描中看起来非常模糊。然后,我们使用最先进的深度学习分割网络来训练模型,以从背景中识别前景(TSV,空洞缺陷)。我们表明,我们的模型可以准确地识别图像中不可能手动定位缺陷的tsv及其空洞。我们报告了TSV分割的骰子得分为0.87,空洞检测的骰子得分为0.67。空洞的骰子分数证明了我们的模型在2D中直接检测这些困难的隐藏缺陷的能力。
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引用次数: 3
Investigation of Aromatic Voltage Stabilizers for Enhancing High Voltage Stability of Epoxy for Power Electronics 芳香稳压器提高电力电子用环氧树脂高压稳定性的研究
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00367
Jiaxiong Li, K. Mohanalingam, Omkar Gupte, Zhijian Sun, K. Moon, C. Wong
Drive train electrification in automotive industry has become the general trend in recent years. As crucial components in the encapsulation and isolation of future wide-bandgap semiconductor-based power cards, epoxy resin and its composites face great challenges from the high voltage operation. This work provides an exploration into employing a group of polycyclic aromatic hydrocarbon molecules with varied number of aromatic rings, namely naphthalene, anthracene and pyrene, as voltage stabilizers in epoxy resin. The conjugated $pi$ system can be excited by the incoming high energy electrons, thus absorbing their kinetic energy which endangers the polymer integrity. The UV-Vis spectra of the compounds were recorded to illustrate the energy absorbing behavior, and the effects of these additives on epoxy curing, glass transition temperature and dielectric properties are presented. In the study, pyrene was found to enhance the breakdown voltage of the epoxy film.
近年来,汽车传动系统电气化已成为汽车工业发展的大趋势。环氧树脂及其复合材料作为未来宽带隙半导体电源卡封装和隔离的关键部件,面临着高压工作带来的巨大挑战。本研究探索了采用萘、蒽和芘等具有不同环数的多环芳烃分子作为环氧树脂的电压稳定剂。共轭$pi$系统会被进入的高能电子激发,从而吸收它们的动能,从而危及聚合物的完整性。记录了化合物的紫外可见光谱以说明其吸能行为,并给出了这些添加剂对环氧树脂固化、玻璃化转变温度和介电性能的影响。在研究中发现,芘可以提高环氧膜的击穿电压。
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引用次数: 0
Effect of Bismuth Content on the Mechanical Cyclic Properties of SAC+Bi Lead Free Solders 铋含量对SAC+Bi无铅钎料循环力学性能的影响
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00284
M. A. Haq, M. A. Hoque, J. Suhling, P. Lall
During the transition from tin-lead solders to lead-free solders, Sn-Ag-Cu (SAC) alloys have become the most widely used lead free alloys for the various levels of interconnects in an electronic package. To improve the thermal cycling reliability of SAC alloys, new doped $text{SAC} +mathrm{X}$ alloys have been developed, were X = Bismuth is often added to provide enhanced strength and improved aging resistance. Our prior work has shown that the use of $text{SAC}+text{Bi}$ solders can improve the reliability of the electronic package. However, there have been only limited studies regarding the cyclic mechanical properties of lead free SAC solder alloys with added bismuth content. In this paper, the authors have quantified the evolution of the properties of $text{SAC} +text{Bi}$ lead free solder joints subjected to isothermal mechanical cycling. Various levels of bismuth content have been studied including 1%, 2%, and 3%, and the results have been compared to previous studies performed on SAC305. Cylindrical solder specimens were prepared and reflowed with a reflow profile similar to that utilized in industry SMT joints. The formed samples were then mechanically cycled at room temperature using five different total strain ranges including 0.003, 0.005, 0.007, 0.009, and 0.012. The obtained cyclic stress-strain curves were recorded up to the 20th cycle, where the hysteresis loops became somewhat stable from one cycle to the other. The obtained hysteresis loops were then analyzed to evaluate the plastic work accumulated, the peak stress, and the plastic strain range for each of the total strain ranges considered. The plastic work dissipated per cycle is often an important parameter in predicting solder joint reliability with models such as the Morrow/Darveaux models. For each solder alloy, the obtained plastic work was correlated with the applied total strain range to develop correlations between the two quantities. Using the obtained results, specimens of the various $text{SAC} +text{Bi}$ alloys were then mechanically cycled to failure using the same initial plastic work (hysteresis loop area) in the first cycle. Failure was considered to have occurred with a 50% drop of the applied load. The cyclic stress-strain loops obtained from the fatigue failure cyclic experiments were then studied to measure the change in the cyclic properties for different bismuth contents. This approach removed the limitations from previous fatigue life studies where a constant strain range was used across all the alloys, which resulted in various hysteresis loop sizes. Rectangular cross-sectioned and polished samples of all the alloys were also cycled at the same corresponding strain ranges to study the change in microstructure of the alloys with mechanical cycling. This has helped us gain a better understanding on how the bismuth percentage in an alloy affects the microstructure evolution during mechanical cycling.
在锡铅焊料向无铅焊料过渡的过程中,Sn-Ag-Cu (SAC)合金已成为电子封装中各级互连中应用最广泛的无铅合金。为了提高SAC合金的热循环可靠性,开发了新的掺杂$text{SAC} + maththrm {X}$合金,其中X =铋经常被添加以提供增强的强度和改善的抗老化性。我们之前的工作表明,使用$text{SAC}+text{Bi}$焊料可以提高电子封装的可靠性。然而,关于添加铋的无铅SAC钎料合金的循环力学性能的研究非常有限。在本文中,作者量化了$text{SAC} +text{Bi}$无铅焊点在等温机械循环作用下的性能演变。研究了不同水平的铋含量,包括1%、2%和3%,并将结果与先前在SAC305上进行的研究进行了比较。制备了圆柱形焊料试样,并使用类似于工业SMT接头中使用的回流曲线进行回流。然后在室温下使用0.003、0.005、0.007、0.009和0.012五种不同的总应变范围进行机械循环。得到的循环应力-应变曲线记录到第20个循环,从一个循环到另一个循环,滞回曲线趋于稳定。然后对得到的滞回线进行分析,以评估所考虑的每个总应变范围的累积塑性功、峰值应力和塑性应变范围。每个周期消耗的塑料功通常是预测焊点可靠性的一个重要参数,如Morrow/Darveaux模型。对于每种焊料合金,获得的塑性功与应用的总应变范围相关联,以建立两者之间的相关性。利用得到的结果,在第一次循环中使用相同的初始塑性功(迟滞回线面积),对各种$text{SAC} +text{Bi}$合金试样进行机械循环直至失效。故障被认为发生了50%的下降所施加的负载。然后研究了疲劳破坏循环试验得到的循环应力-应变环,以测量不同铋含量下循环性能的变化。这种方法消除了以前的疲劳寿命研究的局限性,在这些研究中,所有合金都使用恒定的应变范围,导致各种迟滞回线尺寸。在相同的应变范围内,对所有合金的矩形截面和抛光试样进行循环,研究合金的微观组织随机械循环的变化。这有助于我们更好地理解合金中铋含量对机械循环过程中微观组织演变的影响。
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引用次数: 2
Evaluation of Low-k Integration Integrity Using Shear Testing on Sub-30 Micron Micro-Cu Pillars 基于剪切试验的亚30微米微铜柱低k集成完整性评价
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00139
Tae-Kyu Lee, Greg Baty, O. Ahmed, P. Su, Bernard Glasauer
Mechanical integrity of low-k dielectric films remains a quality and reliability challenge for devices using advanced silicon nodes. In wafer fabs, while great efforts are made in controlling and monitoring individual processing steps, the overall mechanical quality of a particular device is not often effectively monitored. Defects such as interfacial delamination may only manifest themselves during system assembly processes or in-field operation, bringing significant disruption and impact onto production and product quality. As silicon sizes and package sizes continue to grow, chip-packaging interaction becomes more significant, and the risk of low-k related failures increases as a result. Particularly for 3D and 2.5D devices, the complexity of chip stacking makes it important to have a quantitative assessment of dielectric quality for both yield and ongoing reliability management purposes. The adoption of micro-Cu pillars on 2.5D and 3D devices provides an opportunity for direct measurement of integration quality. If shear testing can be performed on individual micro-Cu pillars, responses from such testing can be analyzed and quantified as a direct measurement of integration quality. Furthermore, such testing can be performed on a specific device of interest and on specific locations on a die, which makes it possible to use this technique as a product quality control method. In this paper we will report results from shear testing on sub-30 micron micro-Cu pillars. Data from multiple wafers, dies, and bump locations will be reported. Responses such as load-distance curves and maximum fracture load are analyzed. In addition, multi-level finite element models are developed to simulate the shear test. Locations of stress concentration will be identified and compared with fracture interfaces from the shear test. Responses to changes in properties of the dielectric layers will also be investigated, which provides insight into the variations in shear strength observed in real-life shar testing.
对于使用先进硅节点的器件来说,低k介电薄膜的机械完整性仍然是一个质量和可靠性方面的挑战。在晶圆厂,虽然在控制和监控单个加工步骤方面付出了巨大的努力,但通常无法有效地监控特定设备的整体机械质量。界面分层等缺陷可能仅在系统组装过程中或现场操作中出现,对生产和产品质量造成重大干扰和影响。随着硅尺寸和封装尺寸的不断增长,芯片封装相互作用变得更加重要,因此低k相关故障的风险也随之增加。特别是对于3D和2.5D器件,芯片堆叠的复杂性使得对介电质量进行定量评估对于良率和持续可靠性管理都很重要。在2.5D和3D器件上采用微铜柱为直接测量集成质量提供了机会。如果可以对单个微铜柱进行剪切测试,则可以对此类测试的响应进行分析和量化,作为集成质量的直接测量。此外,这样的测试可以在感兴趣的特定设备和模具上的特定位置进行,这使得有可能使用这种技术作为产品质量控制方法。本文将报道亚30微米微铜柱的剪切试验结果。将报告来自多个晶圆、晶片和凸点位置的数据。分析了载荷-距离曲线和最大断裂载荷等响应。此外,还建立了多级有限元模型来模拟剪切试验。应力集中的位置将被识别,并与剪切试验中的断裂界面进行比较。还将研究介电层特性变化的响应,从而深入了解在实际share测试中观察到的剪切强度变化。
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引用次数: 0
IEEE 71st Electronic Components and Technology Conference [Title page] IEEE第71届电子元件与技术会议[标题页]
Pub Date : 2021-06-01 DOI: 10.1109/ectc32696.2021.00002
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引用次数: 0
期刊
2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
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