首页 > 最新文献

2021 IEEE 71st Electronic Components and Technology Conference (ECTC)最新文献

英文 中文
2.2D Die last Integrated Substrate for High Performance Applications 用于高性能应用的2d最后集成基板
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00036
D. Hu, E. Chen, J. Lee, Chia-Peng Sun, Chih Chung Hsu
In this work, a new integrated substrate structure “2.2D” is demonstrated. 2.2D substrate is a true die last solution. This solution used thin film RDL directly bonded to the substrate. This simplifies the 2.5D structure and further reduces the cost and improves the product cycle time. In this work, the 2.2D test vehicle is demonstrated with two metal layers of thin film that is bonded to a ceramic substrate. Serpentine lines run from thin film RDL to the substrate were evaluated. The process developed in this study demonstrates good registration between thin film RDL and substrate. The 2.2D TV demonstrates good warpage behavior up to the solder reflow temperature. The 2.2D structure shows good potential to be used for high performance computing substrate.
在这项工作中,展示了一种新的集成衬底结构“2.2D”。2.2D衬底是真正的最后一种解决方案。该解决方案采用薄膜RDL直接粘合到衬底上。这简化了2.5D结构,进一步降低了成本,提高了产品周期时间。在这项工作中,2.2D测试车辆展示了与陶瓷基板结合的两层金属薄膜。对从薄膜RDL到衬底的蛇形线进行了评价。本研究开发的工艺表明薄膜RDL与衬底之间具有良好的配准性。2.2D电视显示良好的翘曲行为,直至焊料回流温度。这种2.2D结构在高性能计算基板上显示出良好的应用潜力。
{"title":"2.2D Die last Integrated Substrate for High Performance Applications","authors":"D. Hu, E. Chen, J. Lee, Chia-Peng Sun, Chih Chung Hsu","doi":"10.1109/ECTC32696.2021.00036","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00036","url":null,"abstract":"In this work, a new integrated substrate structure “2.2D” is demonstrated. 2.2D substrate is a true die last solution. This solution used thin film RDL directly bonded to the substrate. This simplifies the 2.5D structure and further reduces the cost and improves the product cycle time. In this work, the 2.2D test vehicle is demonstrated with two metal layers of thin film that is bonded to a ceramic substrate. Serpentine lines run from thin film RDL to the substrate were evaluated. The process developed in this study demonstrates good registration between thin film RDL and substrate. The 2.2D TV demonstrates good warpage behavior up to the solder reflow temperature. The 2.2D structure shows good potential to be used for high performance computing substrate.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129561991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Early microstructural indicators of crack initiation in lead-free solder joints under thermal cycling 热循环作用下无铅焊点裂纹萌生的早期显微组织指标
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00359
E. Ben Romdhane, P. Roumanille, A. Guédon-Gracia, S. Pin, P. Nguyen, H. Frémont
The microstructural analysis of as-reflowed SAC305 solder joints showed a highly textured microstructure. During thermal cycling tests, the as-solidified microstructure gradually transformed into a less textured structure with a high population of misoriented grain boundaries through a recrystallization process. Ag3Sn IMCs coalescence is also another strong phenomenon of lead-free solder microstructure evolution since the bigger and the more spaced they are, the less dislocation pinning can prevent recrystallization from occurring. The main observation is that recrystallization accompanied by Ag3Sn IMCs coalescence are preliminary leading to intergranular propagation in the high strain regions. This work presents the Sn3.0Ag0.5Cu (SAC305) solder joints microstructural evolution at different thermal cycling levels. Electron Back Scattered Diffraction (EBSD) analysis was conducted to assess the SAC305 microstructure corresponding to a specific number of thermal cycles. Microstructural properties as $beta$-Sn grain size and crystallographic orientation, grain boundary angles and the size of Ag3Sn intermetallic compounds (IMC) are investigated to characterize the different stages of microstructural changes under thermal cycling. Results show that crack initiation in chip resistors solder joints starts very early and precedes recrystallization process. However, solder joint lifetime is controlled by recrystallization and Ag3Sn IMCs coalescence which are the most important phenomena leading to the intergranular crack propagation.
再流态SAC305焊点的显微组织分析表明,其组织具有高度织构性。在热循环试验中,凝固态组织通过再结晶过程逐渐转变为织构较少、取向错误晶界分布较多的组织。Ag3Sn IMCs聚结也是无铅焊料组织演变的另一个重要现象,因为它们越大,间距越大,位错钉住越少,从而防止再结晶的发生。主要观察结果是,在高应变区,再结晶伴随Ag3Sn IMCs聚结是导致晶间扩展的初步因素。研究了Sn3.0Ag0.5Cu (SAC305)焊点在不同热循环水平下的组织演变。利用电子背散射衍射(EBSD)分析了SAC305在特定热循环次数下的微观结构。研究了Ag3Sn金属间化合物(IMC)的晶粒尺寸、晶粒取向、晶界角和晶粒尺寸等显微组织性能,以表征热循环作用下不同阶段的显微组织变化。结果表明,片式电阻焊点裂纹萌生较早,且先于再结晶过程。而再结晶和Ag3Sn IMCs的结合是导致裂纹扩展的最重要因素。
{"title":"Early microstructural indicators of crack initiation in lead-free solder joints under thermal cycling","authors":"E. Ben Romdhane, P. Roumanille, A. Guédon-Gracia, S. Pin, P. Nguyen, H. Frémont","doi":"10.1109/ECTC32696.2021.00359","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00359","url":null,"abstract":"The microstructural analysis of as-reflowed SAC305 solder joints showed a highly textured microstructure. During thermal cycling tests, the as-solidified microstructure gradually transformed into a less textured structure with a high population of misoriented grain boundaries through a recrystallization process. Ag3Sn IMCs coalescence is also another strong phenomenon of lead-free solder microstructure evolution since the bigger and the more spaced they are, the less dislocation pinning can prevent recrystallization from occurring. The main observation is that recrystallization accompanied by Ag3Sn IMCs coalescence are preliminary leading to intergranular propagation in the high strain regions. This work presents the Sn3.0Ag0.5Cu (SAC305) solder joints microstructural evolution at different thermal cycling levels. Electron Back Scattered Diffraction (EBSD) analysis was conducted to assess the SAC305 microstructure corresponding to a specific number of thermal cycles. Microstructural properties as $beta$-Sn grain size and crystallographic orientation, grain boundary angles and the size of Ag3Sn intermetallic compounds (IMC) are investigated to characterize the different stages of microstructural changes under thermal cycling. Results show that crack initiation in chip resistors solder joints starts very early and precedes recrystallization process. However, solder joint lifetime is controlled by recrystallization and Ag3Sn IMCs coalescence which are the most important phenomena leading to the intergranular crack propagation.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127397880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Addressing Warpage Issue and Reliability Challenge of Fan-out Wafer-Level Packaging (FOWLP) 解决扇形圆片级封装翘曲问题和可靠性挑战(FOWLP)
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00313
Xiaowu Zhang, B. L. Lau, Yong Han, Haoran Chen, M. C. Jong, S. Lim, S. Lim, Xiaobai Wang, Y. Andriani, Songlin Liu
In this paper, we present the design and fabrication of a mold-1st FOWLP that seeks to solve potential warpage and reliability issues. We examined three different mold-1st FOWLP options that are designed and developed for this work. We have created viscoelastic constitutive models and parameters for both the dielectric materials and epoxy molding compounds (EMCs) which have been used for the design of FOWLP. Measurement of the volumetric cure shrinkage of EMCs has been done using a newly developed method. Advanced modelling capability on wafer warpage has been successfully established after full material characterization and the predicted wafer warpage results are verified with experimental results. Based on advanced modeling results, new design metrics for FOWLP process flow useful for the packaging industry have been developed. Calibrated micro-stress sensors, that were designed and fabricated internally, are used monitor stress during the FOWLP process. The experimental stress measurements have been used to validate the predictions of the advanced stress model. Finally, board level solder joint reliability has been designed, simulated and enhanced leading to the establishment of a successful life prediction model for FOWLP that will prove useful to the packaging industry.
在本文中,我们提出了设计和制造一个模具-1 FOWLP,旨在解决潜在的翘曲和可靠性问题。我们检查了为这项工作设计和开发的三种不同的mold-1 FOWLP选项。我们建立了介电材料和环氧成型化合物(EMCs)的粘弹性本构模型和参数,并将其用于FOWLP的设计。本文采用一种新方法对EMCs的体积固化收缩率进行了测量。通过对材料进行全面表征,成功建立了先进的晶圆翘曲建模能力,并与实验结果进行了验证。基于先进的建模结果,开发了适用于包装工业的FOWLP工艺流程的新设计指标。内部设计和制造的校准微应力传感器用于监测FOWLP过程中的应力。实验应力测量结果验证了先进应力模型的预测结果。最后,对板级焊点可靠性进行了设计、模拟和增强,从而建立了一个成功的FOWLP寿命预测模型,该模型将对封装行业有用。
{"title":"Addressing Warpage Issue and Reliability Challenge of Fan-out Wafer-Level Packaging (FOWLP)","authors":"Xiaowu Zhang, B. L. Lau, Yong Han, Haoran Chen, M. C. Jong, S. Lim, S. Lim, Xiaobai Wang, Y. Andriani, Songlin Liu","doi":"10.1109/ECTC32696.2021.00313","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00313","url":null,"abstract":"In this paper, we present the design and fabrication of a mold-1st FOWLP that seeks to solve potential warpage and reliability issues. We examined three different mold-1st FOWLP options that are designed and developed for this work. We have created viscoelastic constitutive models and parameters for both the dielectric materials and epoxy molding compounds (EMCs) which have been used for the design of FOWLP. Measurement of the volumetric cure shrinkage of EMCs has been done using a newly developed method. Advanced modelling capability on wafer warpage has been successfully established after full material characterization and the predicted wafer warpage results are verified with experimental results. Based on advanced modeling results, new design metrics for FOWLP process flow useful for the packaging industry have been developed. Calibrated micro-stress sensors, that were designed and fabricated internally, are used monitor stress during the FOWLP process. The experimental stress measurements have been used to validate the predictions of the advanced stress model. Finally, board level solder joint reliability has been designed, simulated and enhanced leading to the establishment of a successful life prediction model for FOWLP that will prove useful to the packaging industry.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127175645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability Considerations for Wafer Scale Systems 晶圆级系统的可靠性考虑
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00025
N. S. Chase, R. Irwin, Yu-Tao Yang, Haoxiang Ren, S. Iyer
With the ever-increasing complexity of wafer scale systems as well as higher computing power requirement, reliability of these systems have become a major point of concern. The wide range of organic and inorganic materials used results in large CTE mismatch and ultimately high thermomechanical stresses. Moreover, failure due to moisture ingress in harsh environments and challenges of developing novel encapsulations with high step coverage, high throughput and robust barrier properties is another issue that is receiving a lot of emphasis. To improve the performance of the wafer scale systems, we have developed silicon interconnect fabric (Si-IF) which is a heterogeneous integration platform that utilizes metal-metal thermocompression boding to integrate dielets on a Si wafer as substrate. We have shown the advantages of Si-IF compared to conventional platforms in terms of performance, power consumption and heat dissipation [2], [3]. Replacing solder joints with metal-metal joints and limited number of materials used in Si-IF, result in low thermomechanical stresses and elimination of intermetallic compound formation during operation and fabrication and thus, improving the reliability and lifetime of the system. Currently, we are developing a sophisticated wafer scale system where Si-IF is at the heart of the platform and is connected to a two-phase thermal management unit and power platform, moreover flexible connectors are used to make the connection between Si-IF and the outside world. In this wafer scale system, solder joints are used to make connections between Si-IF and power platform as well as flexible connectors, thus it is important to investigate stresses within the joints due to temperature variation and vibration. In this paper, we investigate use of elastomer buffer layer as stress relaxer to improve the reliability of this large wafer scale system. Finite element analysis (FEA) modeling was utilized to understand the change in the thermomechanical stresses arising during temperature cycling for a system with the buffer layer when compared to a system with no buffer layer as well as a system where PCB pieces are embedded in the buffer layer. We present the simulation results for temperature cycling of the Si-IF attached to a substrate for all three scenarios. Temperature was varied between 125°C and −40°C and the maximum Von Mises stresses in the solder joints were extracted. FEA results show that maximum stress level is significantly lower when an elastomer layer is used as a buffer layer and embedding the PCB pieces in the buffer layer further reduces the stress levels. Moreover, we investigated use of elastomer buffer layer as stress relaxer to improve the reliability of this large wafer scale systems. FEA simulations show the effectiveness of an elastomeric buffer layer in damping the random vibration. The analysis shows that addition of the elastomer to the system effectively damps the input random acceleration and consequently,
随着晶圆级系统复杂性的不断增加以及对计算能力的要求越来越高,这些系统的可靠性已成为人们关注的重点。广泛使用的有机和无机材料导致较大的CTE不匹配和最终的高热机械应力。此外,由于在恶劣环境中受潮而导致的失效,以及开发具有高台阶覆盖、高通量和坚固阻隔性能的新型封装的挑战,是另一个受到重视的问题。为了提高晶圆级系统的性能,我们开发了硅互连结构(Si- if),这是一种异质集成平台,利用金属-金属热压粘合在作为衬底的硅晶圆上集成薄片。我们已经展示了Si-IF与传统平台相比在性能、功耗和散热方面的优势[2],[3]。用金属-金属接头和有限数量的Si-IF材料代替焊点,可以在操作和制造过程中降低热机械应力,消除金属间化合物的形成,从而提高系统的可靠性和使用寿命。目前,我们正在开发一个复杂的晶圆级系统,其中Si-IF是平台的核心,连接到两相热管理单元和电源平台,并使用柔性连接器将Si-IF与外界连接。在该晶圆级系统中,焊点用于Si-IF与电源平台以及柔性连接器之间的连接,因此研究由于温度变化和振动引起的接缝内应力非常重要。在本文中,我们研究了使用弹性体缓冲层作为应力松弛剂来提高这种大型晶圆规模系统的可靠性。利用有限元分析(FEA)建模来了解有缓冲层的系统与没有缓冲层的系统以及PCB片嵌入缓冲层的系统在温度循环过程中产生的热机械应力的变化。我们给出了所有三种情况下Si-IF附着在衬底上的温度循环的模拟结果。温度在125°C和- 40°C之间变化,提取焊点的最大Von Mises应力。有限元分析结果表明,采用弹性体层作为缓冲层时,最大应力水平明显降低,并且在缓冲层中嵌入PCB片进一步降低了应力水平。此外,我们还研究了使用弹性体缓冲层作为应力松弛剂来提高这种大晶圆规模系统的可靠性。有限元仿真结果表明了弹性缓冲层对随机振动的抑制效果。分析表明,在系统中加入弹性体可以有效地抑制输入随机加速度,从而降低焊点承受的应力,提高系统的使用寿命。
{"title":"Reliability Considerations for Wafer Scale Systems","authors":"N. S. Chase, R. Irwin, Yu-Tao Yang, Haoxiang Ren, S. Iyer","doi":"10.1109/ECTC32696.2021.00025","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00025","url":null,"abstract":"With the ever-increasing complexity of wafer scale systems as well as higher computing power requirement, reliability of these systems have become a major point of concern. The wide range of organic and inorganic materials used results in large CTE mismatch and ultimately high thermomechanical stresses. Moreover, failure due to moisture ingress in harsh environments and challenges of developing novel encapsulations with high step coverage, high throughput and robust barrier properties is another issue that is receiving a lot of emphasis. To improve the performance of the wafer scale systems, we have developed silicon interconnect fabric (Si-IF) which is a heterogeneous integration platform that utilizes metal-metal thermocompression boding to integrate dielets on a Si wafer as substrate. We have shown the advantages of Si-IF compared to conventional platforms in terms of performance, power consumption and heat dissipation [2], [3]. Replacing solder joints with metal-metal joints and limited number of materials used in Si-IF, result in low thermomechanical stresses and elimination of intermetallic compound formation during operation and fabrication and thus, improving the reliability and lifetime of the system. Currently, we are developing a sophisticated wafer scale system where Si-IF is at the heart of the platform and is connected to a two-phase thermal management unit and power platform, moreover flexible connectors are used to make the connection between Si-IF and the outside world. In this wafer scale system, solder joints are used to make connections between Si-IF and power platform as well as flexible connectors, thus it is important to investigate stresses within the joints due to temperature variation and vibration. In this paper, we investigate use of elastomer buffer layer as stress relaxer to improve the reliability of this large wafer scale system. Finite element analysis (FEA) modeling was utilized to understand the change in the thermomechanical stresses arising during temperature cycling for a system with the buffer layer when compared to a system with no buffer layer as well as a system where PCB pieces are embedded in the buffer layer. We present the simulation results for temperature cycling of the Si-IF attached to a substrate for all three scenarios. Temperature was varied between 125°C and −40°C and the maximum Von Mises stresses in the solder joints were extracted. FEA results show that maximum stress level is significantly lower when an elastomer layer is used as a buffer layer and embedding the PCB pieces in the buffer layer further reduces the stress levels. Moreover, we investigated use of elastomer buffer layer as stress relaxer to improve the reliability of this large wafer scale systems. FEA simulations show the effectiveness of an elastomeric buffer layer in damping the random vibration. The analysis shows that addition of the elastomer to the system effectively damps the input random acceleration and consequently, ","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127186188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Development of Finite Element Analysis Model of 3DIC TSV Package Warpage Considering Cure Dependent Viscoelasticity with Heat Generation 考虑热致粘弹性的3DIC TSV封装翘曲有限元分析模型的建立
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00235
M. Han, Y. Shin, K. Lim, D. Rhee
In this study, a numerical methodology to predict package warpage considering viscoelasticity with cure-kinetics during thermal process was proposed. When a package undergoes thermal condition, residual stress between layers occurs. The residual stress is caused by different coefficient of thermal expansion (CTE) and chemical reaction of materials. And it causes package warpage. Because package warpage can affect driven performance, reliability and alignment issues, it is important to predict and control package warpage for designing process and improving a performance of package. For a prediction of package warpage, a finite element method (FEM) is commonly used. With FEM it is able to calculate the warpage caused by different CTE between layers. However, because properties of materials, which have curing characteristic, evolves with curing, if cure-kinetics are not considered, it is difficult to predict package warpage properly. So a numerical approach for considering cure-kinetics of materials was developed to predict package warpage during thermal process. Using user subroutine function in ABAQUS commercial FEM software, we build generalized Maxwell material model which can represent viscoelastic material response. And we calculated degree of curing with Kamal-Sourour cure kinetic equation for each time increment. Then we made parameters for the Maxwell material model as function of degree of curing. As a result, the developed analysis model explains heat generation during curing process and change of material properties depending on degree of curing. With our analysis model, it is expected that more accurate prediction of warpage can be conducted and it leads to improvement of package performance.
本文提出了一种考虑热过程粘弹性和固化动力学的包装翘曲预测数值方法。当封装经历热状态时,层之间会产生残余应力。残余应力是由材料的不同热膨胀系数(CTE)和化学反应引起的。它会导致包装翘曲。由于封装翘曲会影响驱动性能、可靠性和对准问题,因此预测和控制封装翘曲对于设计过程和提高封装性能具有重要意义。对于包装翘曲的预测,通常采用有限元法。用有限元法可以计算出层间CTE不同引起的翘曲。然而,由于具有固化特性的材料的性能是随着固化而变化的,如果不考虑固化动力学,就很难正确地预测包装翘曲。为此,提出了一种考虑材料固化动力学的热变形预测方法。利用ABAQUS商用有限元软件中的用户子程序函数,建立了能表示粘弹性材料响应的广义Maxwell材料模型。用kamal - sour固化动力学方程计算了各时间增量的固化程度。然后建立了麦克斯韦材料模型参数与固化程度的关系。因此,所建立的分析模型解释了固化过程中的热量产生和材料性能随固化程度的变化。利用我们的分析模型,可以更准确地预测翘曲,从而提高封装性能。
{"title":"A Development of Finite Element Analysis Model of 3DIC TSV Package Warpage Considering Cure Dependent Viscoelasticity with Heat Generation","authors":"M. Han, Y. Shin, K. Lim, D. Rhee","doi":"10.1109/ECTC32696.2021.00235","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00235","url":null,"abstract":"In this study, a numerical methodology to predict package warpage considering viscoelasticity with cure-kinetics during thermal process was proposed. When a package undergoes thermal condition, residual stress between layers occurs. The residual stress is caused by different coefficient of thermal expansion (CTE) and chemical reaction of materials. And it causes package warpage. Because package warpage can affect driven performance, reliability and alignment issues, it is important to predict and control package warpage for designing process and improving a performance of package. For a prediction of package warpage, a finite element method (FEM) is commonly used. With FEM it is able to calculate the warpage caused by different CTE between layers. However, because properties of materials, which have curing characteristic, evolves with curing, if cure-kinetics are not considered, it is difficult to predict package warpage properly. So a numerical approach for considering cure-kinetics of materials was developed to predict package warpage during thermal process. Using user subroutine function in ABAQUS commercial FEM software, we build generalized Maxwell material model which can represent viscoelastic material response. And we calculated degree of curing with Kamal-Sourour cure kinetic equation for each time increment. Then we made parameters for the Maxwell material model as function of degree of curing. As a result, the developed analysis model explains heat generation during curing process and change of material properties depending on degree of curing. With our analysis model, it is expected that more accurate prediction of warpage can be conducted and it leads to improvement of package performance.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129918034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ultra-High Q-factor Through Fused-silica Via (TFV) Integrated 3D Solenoid Inductor for Millimeter Wave Applications 用于毫米波应用的超高q因子熔融硅通孔(TFV)集成3D电磁电感器
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00194
Hae-in Kim, Renuka Bowrothu, Woosol Lee, Y. Yoon
In this work, a substrate integrated 3D solenoid inductor with an ultra-high quality factor (Q-factor) is demonstrated using the combination of Through Fused-silica Vias (TFVs) for low substrate loss and Copper (Cu) / Cobalt (Co) metaconductors for low conductor loss for millimeter wave (mmWave) applications. Especially, a Cu/Co metaconductor based 1 turn 3D solenoid inductor is integrated on a $300 mumathrm{m}$ thick fused-silica substrate with a small form factor of $170 mumathrm{m}times 200 mumathrm{m}$. The Cu/Co inductor shows a peak Q-factor of 204 while a solid Cu counterpart does a Q-factor of 88.9 at 28.4 GHz, showing 130% Q-factor improvement. Modeling and optimization of the inductors has been performed using a lumped element circuit model and High Frequency Structure Simulator (HFSS) simulation. Design, fabrication, and characterization of the inductors is detailed.
在这项工作中,展示了一种具有超高质量因子(q因子)的基片集成3D电磁电感器,该电感器使用低基片损耗的熔融硅通孔(TFVs)和用于毫米波(mmWave)应用的低导体损耗的铜(Cu) /钴(Co)元导体的组合。特别是,基于Cu/Co元导体的1匝三维电磁电感集成在300 mu mathm {m}$厚的熔融硅衬底上,其尺寸很小,仅为170 mu mathm {m}$乘以200 mu mathm {m}$。Cu/Co电感在28.4 GHz时的峰值q因子为204,而固体Cu电感的峰值q因子为88.9,q因子提高了130%。利用集总元件电路模型和高频结构模拟器(HFSS)进行了电感器的建模和优化。详细介绍了电感器的设计、制造和特性。
{"title":"Ultra-High Q-factor Through Fused-silica Via (TFV) Integrated 3D Solenoid Inductor for Millimeter Wave Applications","authors":"Hae-in Kim, Renuka Bowrothu, Woosol Lee, Y. Yoon","doi":"10.1109/ECTC32696.2021.00194","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00194","url":null,"abstract":"In this work, a substrate integrated 3D solenoid inductor with an ultra-high quality factor (Q-factor) is demonstrated using the combination of Through Fused-silica Vias (TFVs) for low substrate loss and Copper (Cu) / Cobalt (Co) metaconductors for low conductor loss for millimeter wave (mmWave) applications. Especially, a Cu/Co metaconductor based 1 turn 3D solenoid inductor is integrated on a $300 mumathrm{m}$ thick fused-silica substrate with a small form factor of $170 mumathrm{m}times 200 mumathrm{m}$. The Cu/Co inductor shows a peak Q-factor of 204 while a solid Cu counterpart does a Q-factor of 88.9 at 28.4 GHz, showing 130% Q-factor improvement. Modeling and optimization of the inductors has been performed using a lumped element circuit model and High Frequency Structure Simulator (HFSS) simulation. Design, fabrication, and characterization of the inductors is detailed.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129975576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication of Flexible Ionic-Liquid Thin Film Battery Matrix on FlexTrate™ for Powering Wearable Devices 柔性离子-液体薄膜电池矩阵在FlexTrate™上的制备,为可穿戴设备供电
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00257
Guangqi Ouyang, Grace Whang, Emily MacInnis, S. Iyer
To improve the flexibility of Li-ion batteries for powering wearables, we develop a simple battery interconnection method on FlexTrate™ to fabricate a thin-film flexible Li-ion battery matrix by using ionic liquid electrolyte, commercial lithium iron phosphate (LFP) cathode, and Li-metal anode. The mechanical fatigue process of the Li-ion cathode materials during is analyzed. The thin-film battery achieves 1.33 mAh/cm2 energy density at C/10 charging/discharging rate after 1000 times bending cycles at 5 mm bending radius.
为了提高锂离子电池为可穿戴设备供电的灵活性,我们在FlexTrate™上开发了一种简单的电池互连方法,通过使用离子液体电解质、商用磷酸铁锂(LFP)阴极和锂金属阳极来制造薄膜柔性锂离子电池基质。对锂离子正极材料的机械疲劳过程进行了分析。在弯曲半径为5mm的条件下,经过1000次弯曲循环后,薄膜电池在C/10充放电速率下的能量密度达到1.33 mAh/cm2。
{"title":"Fabrication of Flexible Ionic-Liquid Thin Film Battery Matrix on FlexTrate™ for Powering Wearable Devices","authors":"Guangqi Ouyang, Grace Whang, Emily MacInnis, S. Iyer","doi":"10.1109/ECTC32696.2021.00257","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00257","url":null,"abstract":"To improve the flexibility of Li-ion batteries for powering wearables, we develop a simple battery interconnection method on FlexTrate™ to fabricate a thin-film flexible Li-ion battery matrix by using ionic liquid electrolyte, commercial lithium iron phosphate (LFP) cathode, and Li-metal anode. The mechanical fatigue process of the Li-ion cathode materials during is analyzed. The thin-film battery achieves 1.33 mAh/cm2 energy density at C/10 charging/discharging rate after 1000 times bending cycles at 5 mm bending radius.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130072535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High-Density Small Form-Factor Package with Polygon-Shaped Capacitor Based on Silicon Technology 基于硅技术的多边形电容器高密度小尺寸封装
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00324
Junghwa Kim, James Jeong, Heejung Choi, Jisoo Hwang, J. Pak, Heeseok Lee
This paper suggests a unique silicon capacitor shape to provide a very competitive package form-factor with limited height condition. To locate a discrete capacitor on the BGA side of package, some solder balls must be depopulated to secure capacitor mounting space. Also to implement silicon based multi terminal capacitor with fine pitch bumped format, a conventional capillary underfill dispensing keep out zone should be considered. The removed solder balls may affect the system PDN with the decreased power connection or overall X-Y dimension expansion with the increased SOC functionality. To find an optimized shape and size against various BGA arrangement option, it is very important to have a successful product solution. A comparative study of various design concept of normal rectangular and polygonal shape of capacitor on BGA side with respect to area usage efficiency, maximum ball usage, and power integrity performance enhancement for high-density small form-factor package is described in this paper. The number of depopulated solder balls will be increased according to the use of multiple capacitors with rectangular shape. But, it can be optimized with one big polygonal shape and multiterminal of silicon capacitor. Interposer POP package for mobile device will be used as a target package type and the latest structure of substrate and ball pitch will be used for the study to reflect a realistic scenario.
本文提出了一种独特的硅电容器形状,在有限的高度条件下提供非常有竞争力的封装形状因素。为了在封装的BGA侧定位分立电容器,必须减少一些焊料球以确保电容器安装空间。此外,为了实现硅基多端电容器的小间距碰撞格式,还应考虑传统的毛细管下填充点胶隔离区。移除的焊球可能会影响系统PDN,导致电源连接减少,或随着SOC功能的增加而影响整体X-Y尺寸的扩展。为了针对各种BGA排列选择找到最优的形状和尺寸,有一个成功的产品解决方案非常重要。本文比较研究了BGA侧法向矩形和多边形电容的不同设计理念对高密度小尺寸封装的面积利用率、最大球利用率和功率完整性性能提升的影响。根据使用多个矩形电容器的情况,减少焊料球的数量将会增加。但是,硅电容器可以采用一个大的多边形形状和多端子来优化。移动设备的中间商POP封装将被用作目标封装类型,最新的基板结构和球间距将被用于研究,以反映一个现实的场景。
{"title":"High-Density Small Form-Factor Package with Polygon-Shaped Capacitor Based on Silicon Technology","authors":"Junghwa Kim, James Jeong, Heejung Choi, Jisoo Hwang, J. Pak, Heeseok Lee","doi":"10.1109/ECTC32696.2021.00324","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00324","url":null,"abstract":"This paper suggests a unique silicon capacitor shape to provide a very competitive package form-factor with limited height condition. To locate a discrete capacitor on the BGA side of package, some solder balls must be depopulated to secure capacitor mounting space. Also to implement silicon based multi terminal capacitor with fine pitch bumped format, a conventional capillary underfill dispensing keep out zone should be considered. The removed solder balls may affect the system PDN with the decreased power connection or overall X-Y dimension expansion with the increased SOC functionality. To find an optimized shape and size against various BGA arrangement option, it is very important to have a successful product solution. A comparative study of various design concept of normal rectangular and polygonal shape of capacitor on BGA side with respect to area usage efficiency, maximum ball usage, and power integrity performance enhancement for high-density small form-factor package is described in this paper. The number of depopulated solder balls will be increased according to the use of multiple capacitors with rectangular shape. But, it can be optimized with one big polygonal shape and multiterminal of silicon capacitor. Interposer POP package for mobile device will be used as a target package type and the latest structure of substrate and ball pitch will be used for the study to reflect a realistic scenario.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130091223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Simulation of mm-Wave Diplexer on Substrate and Fan-Out Structure 基于基片和扇出结构的毫米波双工器设计与仿真
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00270
Yu-Chang Hsieh, Pao-Nan Lee, Chen-Chao Wang
Inter-digital and hairpin mmWave diplexer design and simulation based on two types technology: fan-out structure and build-up substrate for n257/n258 and n260 bands in 5G new radio (NR) are demonstrated in this paper. Fan-out structure has advantage of thin profile and smaller process variation. However, high loss dielectric material is a big concern that will increase the loss, especially in mm-wave band. On the other hand, conventional packaging substrate is believed to have smaller insertion loss due to various low loss material options, but the disadvantage is large process tolerance that probably results in significant RF performance variation. The objective of this paper is to study the pros and cons of conventional packaging substrate and advanced fan-out substrate from electrical point of view.
本文介绍了5G新无线电(NR)中n257/n258和n260频段基于扇出结构和构筑基板两种技术的数字间和发夹毫米波双工器的设计和仿真。扇形结构具有外形薄、工艺变化小的优点。然而,高损耗介质材料是一个很大的问题,它会增加损耗,特别是在毫米波波段。另一方面,由于各种低损耗材料的选择,传统封装基板被认为具有较小的插入损耗,但缺点是工艺公差大,可能导致显著的射频性能变化。本文的目的是从电学角度研究传统封装基板和先进扇出封装基板的优缺点。
{"title":"Design and Simulation of mm-Wave Diplexer on Substrate and Fan-Out Structure","authors":"Yu-Chang Hsieh, Pao-Nan Lee, Chen-Chao Wang","doi":"10.1109/ECTC32696.2021.00270","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00270","url":null,"abstract":"Inter-digital and hairpin mmWave diplexer design and simulation based on two types technology: fan-out structure and build-up substrate for n257/n258 and n260 bands in 5G new radio (NR) are demonstrated in this paper. Fan-out structure has advantage of thin profile and smaller process variation. However, high loss dielectric material is a big concern that will increase the loss, especially in mm-wave band. On the other hand, conventional packaging substrate is believed to have smaller insertion loss due to various low loss material options, but the disadvantage is large process tolerance that probably results in significant RF performance variation. The objective of this paper is to study the pros and cons of conventional packaging substrate and advanced fan-out substrate from electrical point of view.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130102022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Signal Integrity(SI) aware HBM2e/3 interposer design approach considering y-axis offset between logic and HBM die for HPC/AI/Network applications 考虑HPC/AI/网络应用中逻辑与HBM芯片之间y轴偏移的信号完整性(SI)感知HBM2e/3中间层设计方法
Pub Date : 2021-06-01 DOI: 10.1109/ECTC32696.2021.00206
Taeyun Kim, Chanmin Jo, S. Moon
This work demonstrates an efficient signal integrity (SI) aware routing design method considering system-level SI characteristics floor-planning for 2.5D interposer for the AI/HPC/Network solutions in early stage. The proposed method, system-level SI aware interposer design methodology (SSIDM) can accurately estimate the SI characteristics based on limited design information in early stage and even derive a design guideline for efficient SI aware post-layout design process. Using the novel design guidelines provided in this work can help the designer to smoothly transition designs from HBM2e to HBM3 with sufficient SI margins.
这项工作展示了一种有效的信号完整性(SI)感知路由设计方法,考虑系统级SI特性,在早期阶段为AI/HPC/网络解决方案的2.5D中间器进行地板规划。所提出的系统级集成电路感知中介设计方法(SSIDM)可以在早期基于有限的设计信息准确地估计集成电路特性,甚至可以为高效的集成电路感知后布局设计过程提供设计指南。使用本工作中提供的新颖设计指南可以帮助设计师顺利地将设计从HBM2e过渡到HBM3,并具有足够的SI余量。
{"title":"Signal Integrity(SI) aware HBM2e/3 interposer design approach considering y-axis offset between logic and HBM die for HPC/AI/Network applications","authors":"Taeyun Kim, Chanmin Jo, S. Moon","doi":"10.1109/ECTC32696.2021.00206","DOIUrl":"https://doi.org/10.1109/ECTC32696.2021.00206","url":null,"abstract":"This work demonstrates an efficient signal integrity (SI) aware routing design method considering system-level SI characteristics floor-planning for 2.5D interposer for the AI/HPC/Network solutions in early stage. The proposed method, system-level SI aware interposer design methodology (SSIDM) can accurately estimate the SI characteristics based on limited design information in early stage and even derive a design guideline for efficient SI aware post-layout design process. Using the novel design guidelines provided in this work can help the designer to smoothly transition designs from HBM2e to HBM3 with sufficient SI margins.","PeriodicalId":351817,"journal":{"name":"2021 IEEE 71st Electronic Components and Technology Conference (ECTC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131047522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
期刊
2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1