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Replicated Mirrors for High Fluence Laser Application 用于高通量激光的复制反射镜
Pub Date : 1900-01-01 DOI: 10.1364/oft.1990.owb3
M. Novaro, M. Berger, H. Floch, A. Roussel
Molded metallic mirrors manufactured by the so-called Optic-Replication Technique (ORT) are developed since a quite long time (ref 1-2-3) for various applications. Such mirrors are particularly attractive when attempt are made to consider large number of identical components associated with a low cost investment.
通过所谓的光学复制技术(ORT)制造的模制金属反射镜已经发展了很长时间(参考1-2-3),用于各种应用。当试图考虑与低成本投资相关的大量相同组件时,这种镜子特别有吸引力。
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引用次数: 0
Preliminary performance data from a high spatial frequency resolution 24-inch interferometer 高空间频率分辨率24英寸干涉仪的初步性能数据
Pub Date : 1900-01-01 DOI: 10.1364/oft.1998.owc.3
P. Wilkins, M. McBurney, E. Novak
The National Ignition Facility is a next generation inertial confinement laser which will need approximately 7,000 large, square aperture optics with a clear aperture of approximately 430 mm on a side. The optics utilized in the laser required a unique set of wavefront specifications because of the extremely high fluences and nonlinear processes that affect the wavefront intensity evolution at these extreme power densities. The optical wavefront specification for these large optics is subdivided into specific spatial frequency regions, the lowest part defined in terms of a RMS wavefront gradient and the higher spatial frequencies limited to not exceed a maximum Power Spectral Density (PSD) defined in greater detail elsewhere.1 In order to verify that these spatial frequency wavefront specifications have been met, the NIF Program has contracted to Veeco Process Metrology (formerly Wyko) a 24-inch phase modulating interferometer capable of extremely high spatial frequency resolution to measure PSD over an operational range of 0.03 to 1.25 mm-1.2 This instrument is a standard Fizeau configuration interferometer with a linearly polarized 650-nm DFB diode laser source and a 1024 x 1024 pixel CCD detector. The optical imaging system has two fixed zoom settings, the lowest corresponding to a spatial viewing area of 431 x 431 mm square centered within the 24-inch diameter fused silica transmission sphere. The high spatial frequency zoom setting provides a 100 mm x 100 mm square aperture with a diffraction limited imaging lens designed to have an MTF > 0.9 at 0.4 mm-1 and MTF > 0.6 at 1.25 mm-1.
国家点火装置是下一代惯性约束激光器,它将需要大约7000个大的方形孔径光学器件,单侧的清晰孔径约为430毫米。由于在这些极端功率密度下,极高的影响和非线性过程会影响波前强度演变,因此激光器中使用的光学器件需要一套独特的波前规格。这些大型光学器件的光波前规格被细分为特定的空间频率区域,最低的部分根据RMS波前梯度定义,而较高的空间频率限制在不超过最大功率谱密度(PSD),在其他地方有更详细的定义为了验证这些空间频率波前规范已得到满足,NIF计划已与Veeco Process Metrology(原Wyko)签订了一个24英寸相位调制干涉仪的合同,该干涉仪具有极高的空间频率分辨率,能够在0.03至1.25 mm-1.2的工作范围内测量PSD。该仪器是一个标准的菲索配置干涉仪,具有线偏振650 nm DFB二极管激光源和1024 x 1024像素CCD探测器。光学成像系统有两个固定的变焦设置,最低对应于一个431 × 431毫米正方形的空间观看区域,中心在24英寸直径熔融石英传输球。高空间频率变焦设置提供了一个100mm × 100mm的方形孔径和衍射限制成像镜头,设计为在0.4 mm-1时MTF > 0.9,在1.25 mm-1时MTF > 0.6。
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引用次数: 0
Diamond Turning of Optical Glass - New Technologies for the Machining of Micro-Optical Elements 光学玻璃的金刚石车削——微光学元件加工的新技术
Pub Date : 1900-01-01 DOI: 10.1364/oft.1998.otue.3
F. Klocke, O. Rübenach
Optical products will continue to be particularly interesting from an economic point of view. However, in addition to the established markets, solutions in the field of micro-technology will increase in importance. The use of complex micro-lenses in laser technology (high-performance diode lasers), in information technology (fibre couplers) and in medical technology (endoscopy) are examples of such applications.
从经济角度来看,光学产品将继续特别有趣。然而,除了已建立的市场之外,微技术领域的解决办法将变得越来越重要。在激光技术(高性能二极管激光器)、信息技术(光纤耦合器)和医疗技术(内窥镜检查)中使用复杂微透镜就是这种应用的例子。
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引用次数: 0
Computer Integrated Optical Fabrication Cells 计算机集成光学制造单元
Pub Date : 1900-01-01 DOI: 10.1364/oft.1988.wb3
W. Czajkowski, Jim Cirasuolo
Computer integrated manufacturing and flexible machining cells are making big inroads in the enthusiastic revival of american industry. Improved productivity, efficiency and costs along with an increased awareness of quality and ownership are key ingredients associated with marriage and implementation of the CIM/product cell concept.
计算机集成制造和柔性加工单元正在美国工业的热情复兴中取得重大进展。生产力、效率和成本的提高以及对质量和所有权意识的提高是CIM/产品单元概念的结合和实现的关键因素。
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引用次数: 0
Modern Production Methods for Complex Surfaces 复杂表面的现代生产方法
Pub Date : 1900-01-01 DOI: 10.1364/oft.1998.owa.1
H. Karow
Over the past five years, several optical production methods have been perfected to the point where they can now be reliably used for cost effective production of complex optical surfaces. Most of the improvements were made in production machines that now rely heavily on the use of CNC controllers. Concurrent improvements in metrology complemented these developments.
在过去的五年中,几种光学生产方法已经完善到现在可以可靠地用于经济有效地生产复杂光学表面的程度。大多数改进都是在生产机器上进行的,这些机器现在严重依赖于CNC控制器的使用。计量学的同步改进补充了这些发展。
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引用次数: 0
Sapphire Grinding Study 蓝宝石磨削研究
Pub Date : 1900-01-01 DOI: 10.1364/oft.1996.ofa.4
D. Golini, J. Lambropoulos, M. Atwood, Maynard B. Smith, F. Schmid, C. Khattak
Sapphire missile domes and plane parallel optical windows have had important military applications for many years, yet have been plagued by high manufacturing costs, primarily due to the material’s extreme fracture toughness, microhardness, abrasion resistance and critical load. Simply put, the attributes that make sapphire an attractive window material, also make it quite difficult to grind. In addition to its useful mechanical properties, sapphire has excellent thermal shock resistance, chemical stability at high temperature, a melting point in excess of 2000 degrees C, and good transmission from the UV through 3-5 microns. Studies to optimize precision microgrinding of sapphire will not only lead to more affordable tough durable multi-spectral military windows, but also will aid in an improved understanding of the grinding process for all optical materials.
蓝宝石导弹圆顶和平面平行光学窗多年来一直具有重要的军事应用,但一直受到制造成本高的困扰,主要是由于材料的极端断裂韧性、显微硬度、耐磨性和临界载荷。简单地说,使蓝宝石成为有吸引力的窗户材料的属性也使其很难研磨。除了其有用的机械性能外,蓝宝石还具有优异的抗热震性,高温下的化学稳定性,熔点超过2000摄氏度,以及从紫外线透过3-5微米的良好透射性。对蓝宝石精密微磨削工艺的优化研究,不仅有助于制造出更经济、耐用的多光谱军用窗口,而且有助于提高对所有光学材料磨削工艺的理解。
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引用次数: 0
Chemo-Mechanical Polishing of Phosphate Glass as a Pretreatment to Rapid Final Polishing 磷酸盐玻璃化学机械抛光作为快速抛光的前处理
Pub Date : 1900-01-01 DOI: 10.1364/oft.1988.wc5
A. Lindquist, S. Jacobs, V. Plotsker
It is well known that the use of one or more chemical etching steps during the fabrication cycle of glass-like materials reduces the subsurface damage introduced by loose and bound abrasive grinding. The etchant removes the outermost layer which consists of subsurface cracks and residual elastic strain. We are interested in applying this technique to a commercial phosphate laser glass as a means of increasing its thermal fracture resistance and reducing the time required for final polishing.
众所周知,在类玻璃材料的制造周期中,使用一个或多个化学蚀刻步骤可以减少由松散和结合磨料研磨引起的亚表面损伤。蚀刻剂去除由次表面裂纹和残余弹性应变组成的最外层。我们有兴趣将这项技术应用于商用磷酸盐激光玻璃,作为增加其耐热断裂性和减少最终抛光所需时间的手段。
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引用次数: 0
High Precision Optical Profilometer Using the Differential Method 差分法高精度光学轮廓仪
Pub Date : 1900-01-01 DOI: 10.1364/oft.1988.tha3
H. Miki, N. Suzuki, M. Adachi, Y. Nakai, I. Kawaguchi
A scanning type optical precision profilometer is proposed. By Calculating the difference of the measured height at a point and its surrounding areas, it gives the roughness profile nearly independent of vertical vibrations. The height variation of a point and areas are measured from the interfered light intensity variation using a photomultiplier tube and three Si photo diodes arranged on the image plane of the interference microscope. The performance of the profilometer is checked from the roughness measurements of the aluminum substrate for hard disc, the aluminized optical flat, a Si-wafer, and the step standard calibrated by a stylus instrument. As a result, the reproducibility of 0.5nm was verified and the step height at the grain boundary of diamond-turned aluminum disc was measured as about 2.0nm. The errors, caused by the distribution of the slight reflectivity, were reduced by using the dual polarized light interference method. The filtering effect on the profile determined by the sensor arrangement is calculated and corrected by the digital signal processing. By this correction, not only the precise roughness profile but also, the figure profile can be measured independently of vertical vibrations.
提出了一种扫描式光学精密轮廓仪。通过计算一个点的测量高度与其周围区域的差,它给出了几乎不受垂直振动影响的粗糙度剖面。利用安装在干涉显微镜成像面上的光电倍增管和三个硅光电二极管,测量了干涉光强变化后点和区域的高度变化。通过对硬盘铝基板、镀铝光学平板、硅晶片的粗糙度测量,以及用触笔仪器校准的步进标准,对该轮廓仪的性能进行了检验。结果验证了0.5nm的再现性,测得金刚石转铝盘晶界处的台阶高度约为2.0nm。采用双偏振光干涉法,减小了由微反射率分布引起的误差。计算了传感器布置对轮廓的滤波效应,并通过数字信号处理进行了校正。通过这种校正,不仅可以测量精确的粗糙度轮廓,而且可以独立于垂直振动测量图形轮廓。
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引用次数: 0
Ultraprecision Smooth Surface Finishing with ELID-Iap Grinding using Metal-Resin Bonded Wheels 使用金属-树脂结合轮进行ELID-Iap磨削的超精密光滑表面处理
Pub Date : 1900-01-01 DOI: 10.1364/oft.1998.otuc.4
Nobuhide Itoh, H. Ohmori, T. Kasai, T. Karaki-Doy
As our society becomes increasingly information-oriented, various high-tech devices are developed to support its growth. As these high-tech devices become more and more advanced and compact in the recent years, the optical and electronic part, which make up these devices also need to be more accurate and smaller. These parts are commonly ground by loose abrasive lapping and polishing, but these methods have such disadvantages as wastewater processing problem, mechanical damages, wear by scatting abrasives, dirty workplace, and difficulty in using different grains on the same machine. For these reasons, new grinding methods are required as alternatives to the finishing method using loose abrasives. To answer to such needs, the authors have proposed a lap grinding method applying the electrically in-process dressing1) (ELID-lap grinding2)) and are carrying out studies to realize efficient and highly accurate machining. The latest bonding system which is composed of metal and resin was investigated for the ELID-lap grinding in order to improve the grinding quality by addition of the vibration absorbing function during grinding operation3). In this paper, Si which is typical material for X-ray mirror, was ground using metal-resin bonded wheels with different grain sizes, and the grinding characteristics were investigated.
随着我们的社会越来越以信息为导向,各种高科技设备被开发出来支持它的发展。近年来,随着这些高科技设备越来越先进和紧凑,构成这些设备的光学和电子部分也需要更精确和更小。这些部件通常采用松散磨料研磨和抛光的方法进行研磨,但这些方法存在废水处理问题,机械损伤,磨料分散磨损,工作场所肮脏,难以在同一台机器上使用不同颗粒。由于这些原因,需要新的研磨方法来替代使用松散磨料的精加工方法。为了满足这一需求,作者提出了一种采用电在加工修整的搭接磨削方法(elid -搭接磨削),并正在进行研究,以实现高效、高精度的加工。为了提高elid搭接磨削的磨削质量,研究了一种新型的由金属和树脂组成的粘接系统。以x射线反射镜的典型材料硅为研究对象,采用不同粒度的金属-树脂结合砂轮对其进行磨削,并对其磨削特性进行了研究。
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引用次数: 0
Polishing with a Stressed Lap 用压力圈抛光
Pub Date : 1900-01-01 DOI: 10.1364/oft.1990.jtub1
H. Martin, J. R. Angel
We describe an actively stressed lap for polishing fast aspheric mirrors to high accuracy. The lap is being used to polish a 1.8-m f/1 paraboloid.
介绍了一种用于快速非球面镜面高精度抛光的主动应力圈。该lap被用来抛光一个1.8米的f/1抛物面。
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引用次数: 0
期刊
Optical Fabrication and Testing
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