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Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)最新文献

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Frequency temperature behavior of bi-mesa shaped at cut quartz resonators 切割石英谐振器双台面的频率温度特性
S. Goka, H. Sekimoto, Y. Watanabe, T. Sato
To confirm the effect of bi-mesa structures on the decoupling of thickness-shear (TS) and thickness-flexure (TF) modes, we measured the frequency-temperature behavior of bi-mesa shaped AT cut quartz resonators. The TF mode couples with the TS mode because the same displacement component is contained within the TS mode. This strong coupling cannot be eliminated as long as the plates have boundaries. Therefore, the temperature characteristics of the fundamental TS mode are clearly affected by the TF components. Bi-mesa structures have an energy trapping effect large enough to spatially separate the vibrational modes, so bi-mesa structures can decrease the effect of TF components. Therefore, the frequency-temperature behavior of a bi-mesa resonator is close to that of an infinite plate, which has no TF component effect. The bi-mesa resonators used in this study were fabricated using a wet etching process, and the fundamental TS frequency was 8.3 MHz. The frequency-temperature behavior was measured using a network analyzer. Results showed that bi-mesa resonators have temperature characteristics four times better than those of flat resonators, ranging from -20 to 85/spl deg/C. These results confirm the energy trapping effect of bi-mesa structures and their effectiveness in separating vibrational modes.
为了证实双台面结构对厚度-剪切(TS)和厚度-弯曲(TF)模式去耦的影响,我们测量了双台面形AT切割石英谐振器的频率-温度行为。TF模式与TS模式耦合,因为TS模式中包含相同的位移分量。只要板有边界,这种强耦合就不能消除。因此,TS基模的温度特性明显受到TF分量的影响。双台面结构具有足够大的能量捕获效应,足以在空间上分离振动模式,因此双台面结构可以降低TF分量的影响。因此,双台面谐振腔的频率-温度特性接近于无限大板,不存在TF分量效应。采用湿法蚀刻工艺制备双台面谐振器,其TS基频为8.3 MHz。使用网络分析仪测量频率-温度行为。结果表明,双台面谐振器的温度特性比平面谐振器好4倍,范围在-20 ~ 85/spl℃之间。这些结果证实了双台面结构的能量捕获效应及其在分离振动模式方面的有效性。
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引用次数: 8
Analysis of frequency-temperature behavior of X-cut LiTaO/sub 3/ strip resonators X-cut LiTaO/sub - 3/ strip谐振器频率-温度特性分析
H. Sekimoto, Xun Gong, S. Goka, Y. Watanabe
We numerically studied the f-T behavior of the fundamental TS fast mode in a partially plated X-cut LiTaO/sub 3/ strip resonator. Using the material constants measured by Smith and Welsh [1971], the f-T curves were calculated as a function of the electrode-length and the plate-length direction /spl psi/. The results confirmed that the turnover temperature of f-T curve decreases with increasing the electrode length. Furthermore we found out that the turnover temperature changes according to the coupling between TS and TF modes through c/sub 56/, and that it therefore depends on the plate-length direction /spl psi/. An angle /spl psi/=40/spl deg/ that yields the turnover temperature in the range of 33/spl sim/6.5/spl deg/C is optimal for the material constants of Smith and Welsh because c/sub 56/ is zero. We also showed that the external loading of both series and parallel capacitances can make the adjustment of turnover temperature very flexible.
我们数值研究了部分镀x切割LiTaO/sub - 3/ strip谐振腔中基本TS快模的f-T行为。利用Smith和Welsh[1971]测量的材料常数,计算了f-T曲线作为电极长度和板长度方向/spl psi/的函数。结果表明,随着电极长度的增加,f-T曲线的翻转温度降低。此外,我们发现翻转温度的变化是根据TS和TF模式之间的耦合通过c/sub / 56/,因此它取决于板长方向/spl psi/。角度/spl psi/=40/spl°/产生的周转温度范围为33/spl sim/6.5/spl°/C,这是Smith和Welsh的材料常数的最佳选择,因为C /sub 56/为零。我们还表明,串联和并联电容的外部负载都可以使翻转温度的调节非常灵活。
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引用次数: 0
Thin film shear modulus determination with quartz crystal resonators: a review 石英晶体谐振器测定薄膜剪切模量的研究进展
R. Lucklum, P. Hauptmann
An important application of quartz crystal resonators is the quartz crystal microbalance (QCM). It is well established as thickness monitor in vacuum deposition units or as chemical sensor, e.g., in an electronic nose or electronic tongue. As QCM the high sensitivity of the mechanical eigenfrequency to surface mass changes is exploited. QCMs obtain their chemical sensitivity and selectivity from a chemically active coating, which interacts with the surrounding environment. Analyte sorption in the sensitive layer results in a change of the surface mass and hence in the resonator's frequency. A new fascinating application is the determination of material properties of thin viscoelastic films. The recently developed methods will be reviewed.
石英晶体谐振器的一个重要应用是石英晶体微天平。它在真空沉积装置中作为厚度监测器或作为化学传感器,例如电子鼻或电子舌中。作为QCM,利用了机械特征频率对表面质量变化的高灵敏度。qcm通过化学活性涂层获得其化学敏感性和选择性,该涂层与周围环境相互作用。分析物在敏感层的吸附会导致表面质量的变化,从而导致谐振器频率的变化。粘弹性薄膜材料性能的测定是一种新的令人着迷的应用。本文将对最近开发的方法进行综述。
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引用次数: 13
Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors AT-Cut石英湿度传感器的滞后特性与相对湿度的关系
M. Kuroiwa, Y. Shimamoto, Y. Yasuda, S. Wakamoto, M. Nakazawa
This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors.
本文介绍了at型石英湿度传感器相对湿度滞回特性的实验研究。本研究主要探讨上述湿度传感器在频率变化等方面的机理(包括阻抗变化和等效电路常数波动)。
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引用次数: 2
All quartz surface mount resonators 所有石英表面安装谐振器
W. D. Beaver
This paper presents the electrical and mechanical characteristics of high frequency "all-quartz" surface mount resonators. All-quartz surface mount resonators are fabricated using a suitably electroded quartz crystal base plate and a cover plate of quartz which are bonded to a specially formed, electroded AT-cut quartz resonator plate with epoxy resin to create a hermetic seal. Methods of production have been developed which allow for the manufacture of this type of resonators having fundamental mode frequencies in the range from 3.5 MHz to more than 50 MHz. The paper presents the results of aging and environmental studies, that show that the frequency stability, equivalent series resistance and other electrical properties of the all-quartz surface mount resonators are equivalent to the values of the same parameters of quartz resonators which are encapsulated in SMT ceramic enclosures. However, the dimensions of the all-quartz surface mount resonators have a much lower height and smaller volume and they exhibit substantially greater resistance to shock and vibration than the ceramic enclosed resonators of the same frequency.
本文介绍了高频“全石英”表面贴装谐振器的电学和力学特性。全石英表面贴装谐振器是使用适当的电镀石英晶体基板和石英盖板制造的,石英盖板与特殊形成的电镀at切割石英谐振器板结合,并用环氧树脂形成密封密封。已经开发了生产方法,允许制造这种类型的谐振器,其基模频率在3.5 MHz到50 MHz以上的范围内。本文介绍了老化和环境研究的结果,表明全石英表面贴装谐振器的频率稳定性、等效串联电阻等电学性能与封装在SMT陶瓷外壳中的石英谐振器相同参数的值相当。然而,全石英表面安装谐振器的尺寸具有更低的高度和更小的体积,并且与相同频率的陶瓷封闭谐振器相比,它们具有更大的抗冲击和振动能力。
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引用次数: 3
Improvement of frequency drift of at-cut resonators using an unelectroded resonant region 利用非电极谐振区改进at-cut谐振器的频率漂移
K. Hirama, H. Konno, K. Asao, K. Nakamura
We propose a new type quartz resonator using an unelectroded resonant region. In this resonator unelectroded resonant regions and electroded resonant regions are acoustically coupled to each other. We examined a transmission type structure resonator using a lumped constant equivalent circuit and confirmed its performance by experiments. The resonance frequency drift observed through electric terminals was improved by one-tenth of the drift at the electroded resonant regions. The insertion loss of the resonator is typically 15 dB, and therefore steady oscillation can be sustained using an ordinary single stage amplifier.
我们提出了一种利用无电极谐振区的新型石英谐振器。在该谐振器中,未通电谐振区和通电谐振区在声学上相互耦合。采用集总常数等效电路对透射型结构谐振器进行了测试,并通过实验验证了其性能。通过电终端观察到的谐振频率漂移比在电极谐振区域的漂移提高了十分之一。谐振器的插入损耗通常为15db,因此可以使用普通的单级放大器维持稳定的振荡。
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引用次数: 1
A bulk acoustic wave resonator for sensing liquid electrical property changes 一种用于检测液体电性能变化的体声波谐振器
C. Zhang, J. Vetelino
A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.
提出了一种测量液体电导率和介电常数的厚度剪切型体声波传感器。该传感器配置为谐振器结构,采用传感电极几何形状,可以精确测量液体电性能。测量了传感器在导电(NaCl)和非导电(2-丙基)溶液中的频率响应。建立了一个描述传感器在液体中工作的理论模型,计算的阻抗与测量的阻抗吻合良好。测定了该传感器对液体介电常数变化的灵敏度。与其他传感技术相比,该传感器可为在线监测液体电性能变化提供更可靠、便携和低成本的解决方案。
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引用次数: 14
A derivation of two-dimensional equations for the vibration of electroded piezoelectric plates using an unrestricted thickness expansion of the electric potential 利用不受限制的电势厚度展开,推导出电致压电片振动的二维方程
H. Tiersten
In the derivation of two-dimensional equations for the vibration of piezoelectric plates from variational equations, expansions of the mechanical and electrical variables in the thickness coordinate are employed. If the major surfaces of the plate are electroded and the electric potential is expanded in functions of the thickness coordinate which do not vanish at the electrodes, the variations of the different orders of the expansion potentials are not independent because the electric potential must satisfy constraint conditions at the electrodes where it is independent of position. In this work the electric potential is expanded in functions of the thickness coordinate which do not vanish at the surface electrodes and the constraint conditions are included by means of the method of Lagrange multipliers. The resulting piezoelectric plate equations are obtained along with an integral condition on the Lagrange multipliers over the electrodes, which results in the equation for the current through the electrodes. It is shown that the elimination of the Lagrange multipliers results in a reduced system of electrostatic plate equations and associated edge conditions, which is easier to use.
在由变分方程推导压电板振动的二维方程时,采用了厚度坐标中力学和电学变量的展开式。如果板的主要表面被电镀,并且电势以厚度坐标的函数展开,并且在电极处不消失,那么电势的不同阶次的变化不是独立的,因为电势必须满足电极处的约束条件,而电极处的电势与位置无关。本文采用拉格朗日乘子法,将电势展开为厚度坐标的函数,使之在表面电极处不消失,并包含约束条件。所得的压电板方程与电极上拉格朗日乘子的积分条件一起得到,从而得到通过电极的电流方程。结果表明,拉格朗日乘子的消除可以简化静电板方程和相关边缘条件的系统,从而更易于使用。
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引用次数: 5
Design of a cryogenic dual-mode resonator for a fly-wheel oscillator for a cesium frequency standard 铯频率标准飞轮振荡器低温双模谐振器的设计
M. Tobar, J. Hartnett, E. Ivanov, D. Cros, P. Bilski
A dual-mode Sapphire Loaded Cavity (SLC) resonator has been designed and optimized with the aid of finite element software. The resonance frequency was designed to be near the frequency of a Cs atomic frequency standard. Experimental tests are shown to agree very well with calculations. The difference frequency of two differently polarized modes is shown to be a highly sensitive temperature sensor in the 50 to 80 K temperature range. We show that an oscillator based on this resonator has the potential to operate with fractional frequency instability below 10/sup -14/ for measurement times of 1 to 1000 seconds. This is sufficient to operate an atomic clock at the quantum projection noise limit.
利用有限元软件对蓝宝石加载腔(SLC)双模谐振器进行了设计和优化。共振频率被设计为接近Cs原子频率标准的频率。实验结果与计算结果吻合较好。在50 ~ 80k温度范围内,两种不同极化模式的差频显示为高度敏感的温度传感器。我们表明,基于该谐振器的振荡器具有在1到1000秒的测量时间内以低于10/sup -14/的分数频率不稳定性工作的潜力。这足以在量子投影噪声极限下操作原子钟。
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引用次数: 4
An MCXO test system and its function in MCXO performances MCXO 测试系统及其在 MCXO 性能中的作用
Wei Zhou, Yamin Wang, L. Bai, Hui Zhou, Changsend Liu, Jie Li, Jing Jia
Describes an MCXO test system used mainly for MCXOs based on AT cut crystals. This system is composed of a temperature chamber, several switch groups, a PC, a high-resolution frequency meter, a frequency standard, a control system including a simulator and a controller. It can be used to produce the MCXOs with AT cut crystals and in the different temperature range /spl plusmn/1/spl sim/3/spl times/10/sup -7/ frequency-temperature stability can be obtained. In the test procedure for MCXOs, the system supplies MCXO standard temperature conditions, measures the frequency-temperature characteristics of the uncompensated MCXOs, obtains control signal (voltage, pulse width or digital code signal)-temperature sensed, signal data for the compensated MCXOs. According to the test data, the compensation table or equations for the completed MCXOs can be obtained. In the test system, high precision and fast speed frequency measurement combined with suitable computer control can be used instead of a complicated frequency synthesizer and is useful for MCXO production with different frequencies.
介绍一种 MCXO 测试系统,主要用于基于 AT 切割晶体的 MCXO。该系统由一个温度室、多个开关组、一台 PC、一个高分辨率频率计、一个频率标准、一个控制系统(包括一个模拟器和一个控制器)组成。该系统可用于生产带有 AT 切割晶体的 MCXO,并可在不同的温度范围内获得频率-温度稳定性。在 MCXO 的测试程序中,系统提供 MCXO 的标准温度条件,测量未补偿 MCXO 的频率-温度特性,获得控制信号(电压、脉宽或数字代码信号)-温度感应,以及已补偿 MCXO 的信号数据。根据测试数据,可得出已补偿 MCXO 的补偿表或补偿方程。在测试系统中,高精度、高速度的频率测量与适当的计算机控制相结合,可取代复杂的频率合成器,适用于不同频率的 MCXO 生产。
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引用次数: 7
期刊
Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)
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