Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956355
S. Goka, H. Sekimoto, Y. Watanabe, T. Sato
To confirm the effect of bi-mesa structures on the decoupling of thickness-shear (TS) and thickness-flexure (TF) modes, we measured the frequency-temperature behavior of bi-mesa shaped AT cut quartz resonators. The TF mode couples with the TS mode because the same displacement component is contained within the TS mode. This strong coupling cannot be eliminated as long as the plates have boundaries. Therefore, the temperature characteristics of the fundamental TS mode are clearly affected by the TF components. Bi-mesa structures have an energy trapping effect large enough to spatially separate the vibrational modes, so bi-mesa structures can decrease the effect of TF components. Therefore, the frequency-temperature behavior of a bi-mesa resonator is close to that of an infinite plate, which has no TF component effect. The bi-mesa resonators used in this study were fabricated using a wet etching process, and the fundamental TS frequency was 8.3 MHz. The frequency-temperature behavior was measured using a network analyzer. Results showed that bi-mesa resonators have temperature characteristics four times better than those of flat resonators, ranging from -20 to 85/spl deg/C. These results confirm the energy trapping effect of bi-mesa structures and their effectiveness in separating vibrational modes.
{"title":"Frequency temperature behavior of bi-mesa shaped at cut quartz resonators","authors":"S. Goka, H. Sekimoto, Y. Watanabe, T. Sato","doi":"10.1109/FREQ.2001.956355","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956355","url":null,"abstract":"To confirm the effect of bi-mesa structures on the decoupling of thickness-shear (TS) and thickness-flexure (TF) modes, we measured the frequency-temperature behavior of bi-mesa shaped AT cut quartz resonators. The TF mode couples with the TS mode because the same displacement component is contained within the TS mode. This strong coupling cannot be eliminated as long as the plates have boundaries. Therefore, the temperature characteristics of the fundamental TS mode are clearly affected by the TF components. Bi-mesa structures have an energy trapping effect large enough to spatially separate the vibrational modes, so bi-mesa structures can decrease the effect of TF components. Therefore, the frequency-temperature behavior of a bi-mesa resonator is close to that of an infinite plate, which has no TF component effect. The bi-mesa resonators used in this study were fabricated using a wet etching process, and the fundamental TS frequency was 8.3 MHz. The frequency-temperature behavior was measured using a network analyzer. Results showed that bi-mesa resonators have temperature characteristics four times better than those of flat resonators, ranging from -20 to 85/spl deg/C. These results confirm the energy trapping effect of bi-mesa structures and their effectiveness in separating vibrational modes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"2017 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132993509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956196
S. Sakharov, O. Buzanov, A. Medvedev, S. Kondratiev, E. Girardet, T. Thorvaldsson
The research results of the influence of different technology parameters of crystal growth and device manufacturing process on SAW velocity variation on langasite (LGS) wafers O 3" are presented. The wafers were made from crystals grown by the Czochralski method along <00.1> and <01.1> directions. The paper also gives a technology process description of langasite crystal growth along <01.1> direction and of making O 3" wafers. SAW velocity measurements were performed utilizing specially developed test structures. The test structures were also used to estimate the device sensitivity due to electrode thickness and electrode width variations of the manufacturing process.. Advantages of LGS wafers for possible SAW device applications are discussed. Due to good temperature stability and a moderately high electromechanical coupling coefficient, langasite is known as a promising material for SAW devices. The filters on LGS have exhibited better electrical parameters than their analogues on quartz and lithium tantalate. In order to demonstrate a practical filter application on LGS, a SAW filter at the center frequency of 114.99 MHz was designed and realized. The chip fits into a 3.8/spl times/3.8 mm/sup 2/ SMD package. Measured performance is in excellent agreement with the predicted response and the chip size was dramatically reduced compared to the state-of-the-art for this kind of filter.
{"title":"The analysis of non-homogeneity of SAW velocity in langasite","authors":"S. Sakharov, O. Buzanov, A. Medvedev, S. Kondratiev, E. Girardet, T. Thorvaldsson","doi":"10.1109/FREQ.2001.956196","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956196","url":null,"abstract":"The research results of the influence of different technology parameters of crystal growth and device manufacturing process on SAW velocity variation on langasite (LGS) wafers O 3\" are presented. The wafers were made from crystals grown by the Czochralski method along <00.1> and <01.1> directions. The paper also gives a technology process description of langasite crystal growth along <01.1> direction and of making O 3\" wafers. SAW velocity measurements were performed utilizing specially developed test structures. The test structures were also used to estimate the device sensitivity due to electrode thickness and electrode width variations of the manufacturing process.. Advantages of LGS wafers for possible SAW device applications are discussed. Due to good temperature stability and a moderately high electromechanical coupling coefficient, langasite is known as a promising material for SAW devices. The filters on LGS have exhibited better electrical parameters than their analogues on quartz and lithium tantalate. In order to demonstrate a practical filter application on LGS, a SAW filter at the center frequency of 114.99 MHz was designed and realized. The chip fits into a 3.8/spl times/3.8 mm/sup 2/ SMD package. Measured performance is in excellent agreement with the predicted response and the chip size was dramatically reduced compared to the state-of-the-art for this kind of filter.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130937546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956341
H. Tiersten
In the derivation of two-dimensional equations for the vibration of piezoelectric plates from variational equations, expansions of the mechanical and electrical variables in the thickness coordinate are employed. If the major surfaces of the plate are electroded and the electric potential is expanded in functions of the thickness coordinate which do not vanish at the electrodes, the variations of the different orders of the expansion potentials are not independent because the electric potential must satisfy constraint conditions at the electrodes where it is independent of position. In this work the electric potential is expanded in functions of the thickness coordinate which do not vanish at the surface electrodes and the constraint conditions are included by means of the method of Lagrange multipliers. The resulting piezoelectric plate equations are obtained along with an integral condition on the Lagrange multipliers over the electrodes, which results in the equation for the current through the electrodes. It is shown that the elimination of the Lagrange multipliers results in a reduced system of electrostatic plate equations and associated edge conditions, which is easier to use.
{"title":"A derivation of two-dimensional equations for the vibration of electroded piezoelectric plates using an unrestricted thickness expansion of the electric potential","authors":"H. Tiersten","doi":"10.1109/FREQ.2001.956341","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956341","url":null,"abstract":"In the derivation of two-dimensional equations for the vibration of piezoelectric plates from variational equations, expansions of the mechanical and electrical variables in the thickness coordinate are employed. If the major surfaces of the plate are electroded and the electric potential is expanded in functions of the thickness coordinate which do not vanish at the electrodes, the variations of the different orders of the expansion potentials are not independent because the electric potential must satisfy constraint conditions at the electrodes where it is independent of position. In this work the electric potential is expanded in functions of the thickness coordinate which do not vanish at the surface electrodes and the constraint conditions are included by means of the method of Lagrange multipliers. The resulting piezoelectric plate equations are obtained along with an integral condition on the Lagrange multipliers over the electrodes, which results in the equation for the current through the electrodes. It is shown that the elimination of the Lagrange multipliers results in a reduced system of electrostatic plate equations and associated edge conditions, which is easier to use.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125218638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956336
C. Zhang, J. Vetelino
A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.
{"title":"A bulk acoustic wave resonator for sensing liquid electrical property changes","authors":"C. Zhang, J. Vetelino","doi":"10.1109/FREQ.2001.956336","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956336","url":null,"abstract":"A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"12 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126777705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956245
W. D. Beaver
This paper presents the electrical and mechanical characteristics of high frequency "all-quartz" surface mount resonators. All-quartz surface mount resonators are fabricated using a suitably electroded quartz crystal base plate and a cover plate of quartz which are bonded to a specially formed, electroded AT-cut quartz resonator plate with epoxy resin to create a hermetic seal. Methods of production have been developed which allow for the manufacture of this type of resonators having fundamental mode frequencies in the range from 3.5 MHz to more than 50 MHz. The paper presents the results of aging and environmental studies, that show that the frequency stability, equivalent series resistance and other electrical properties of the all-quartz surface mount resonators are equivalent to the values of the same parameters of quartz resonators which are encapsulated in SMT ceramic enclosures. However, the dimensions of the all-quartz surface mount resonators have a much lower height and smaller volume and they exhibit substantially greater resistance to shock and vibration than the ceramic enclosed resonators of the same frequency.
{"title":"All quartz surface mount resonators","authors":"W. D. Beaver","doi":"10.1109/FREQ.2001.956245","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956245","url":null,"abstract":"This paper presents the electrical and mechanical characteristics of high frequency \"all-quartz\" surface mount resonators. All-quartz surface mount resonators are fabricated using a suitably electroded quartz crystal base plate and a cover plate of quartz which are bonded to a specially formed, electroded AT-cut quartz resonator plate with epoxy resin to create a hermetic seal. Methods of production have been developed which allow for the manufacture of this type of resonators having fundamental mode frequencies in the range from 3.5 MHz to more than 50 MHz. The paper presents the results of aging and environmental studies, that show that the frequency stability, equivalent series resistance and other electrical properties of the all-quartz surface mount resonators are equivalent to the values of the same parameters of quartz resonators which are encapsulated in SMT ceramic enclosures. However, the dimensions of the all-quartz surface mount resonators have a much lower height and smaller volume and they exhibit substantially greater resistance to shock and vibration than the ceramic enclosed resonators of the same frequency.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"448 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116758168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956262
R. Lucklum, P. Hauptmann
An important application of quartz crystal resonators is the quartz crystal microbalance (QCM). It is well established as thickness monitor in vacuum deposition units or as chemical sensor, e.g., in an electronic nose or electronic tongue. As QCM the high sensitivity of the mechanical eigenfrequency to surface mass changes is exploited. QCMs obtain their chemical sensitivity and selectivity from a chemically active coating, which interacts with the surrounding environment. Analyte sorption in the sensitive layer results in a change of the surface mass and hence in the resonator's frequency. A new fascinating application is the determination of material properties of thin viscoelastic films. The recently developed methods will be reviewed.
{"title":"Thin film shear modulus determination with quartz crystal resonators: a review","authors":"R. Lucklum, P. Hauptmann","doi":"10.1109/FREQ.2001.956262","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956262","url":null,"abstract":"An important application of quartz crystal resonators is the quartz crystal microbalance (QCM). It is well established as thickness monitor in vacuum deposition units or as chemical sensor, e.g., in an electronic nose or electronic tongue. As QCM the high sensitivity of the mechanical eigenfrequency to surface mass changes is exploited. QCMs obtain their chemical sensitivity and selectivity from a chemically active coating, which interacts with the surrounding environment. Analyte sorption in the sensitive layer results in a change of the surface mass and hence in the resonator's frequency. A new fascinating application is the determination of material properties of thin viscoelastic films. The recently developed methods will be reviewed.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116778752","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956357
V. Laude, S. Ballandras
The characteristics of surface acoustic waves (SAW) propagating obliquely in electrode gratings are investigated, with the mass-loading effect taken into account. The velocity of the surface waves, as well as the attenuation, piezoelectric coupling and beam-steering are obtained as a function of the propagation angle with respect to the grating axis. The slowness curves for SAW propagating under periodic electrode gratings are compared with slowness curves for the same SAW propagating on free or shorted homogeneous surfaces as well as under a thick homogeneous metallic layer. Examples are presented for the SAW of 42.75/spl deg/YX quartz and the leaky-SAW of 36/spl deg/YX lithium tantalate.
{"title":"Characteristics of surface acoustic waves propagating obliquely in periodic electrode gratings","authors":"V. Laude, S. Ballandras","doi":"10.1109/FREQ.2001.956357","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956357","url":null,"abstract":"The characteristics of surface acoustic waves (SAW) propagating obliquely in electrode gratings are investigated, with the mass-loading effect taken into account. The velocity of the surface waves, as well as the attenuation, piezoelectric coupling and beam-steering are obtained as a function of the propagation angle with respect to the grating axis. The slowness curves for SAW propagating under periodic electrode gratings are compared with slowness curves for the same SAW propagating on free or shorted homogeneous surfaces as well as under a thick homogeneous metallic layer. Examples are presented for the SAW of 42.75/spl deg/YX quartz and the leaky-SAW of 36/spl deg/YX lithium tantalate.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130109165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956369
M. Tobar, J. Hartnett, E. Ivanov, D. Cros, P. Bilski
A dual-mode Sapphire Loaded Cavity (SLC) resonator has been designed and optimized with the aid of finite element software. The resonance frequency was designed to be near the frequency of a Cs atomic frequency standard. Experimental tests are shown to agree very well with calculations. The difference frequency of two differently polarized modes is shown to be a highly sensitive temperature sensor in the 50 to 80 K temperature range. We show that an oscillator based on this resonator has the potential to operate with fractional frequency instability below 10/sup -14/ for measurement times of 1 to 1000 seconds. This is sufficient to operate an atomic clock at the quantum projection noise limit.
{"title":"Design of a cryogenic dual-mode resonator for a fly-wheel oscillator for a cesium frequency standard","authors":"M. Tobar, J. Hartnett, E. Ivanov, D. Cros, P. Bilski","doi":"10.1109/FREQ.2001.956369","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956369","url":null,"abstract":"A dual-mode Sapphire Loaded Cavity (SLC) resonator has been designed and optimized with the aid of finite element software. The resonance frequency was designed to be near the frequency of a Cs atomic frequency standard. Experimental tests are shown to agree very well with calculations. The difference frequency of two differently polarized modes is shown to be a highly sensitive temperature sensor in the 50 to 80 K temperature range. We show that an oscillator based on this resonator has the potential to operate with fractional frequency instability below 10/sup -14/ for measurement times of 1 to 1000 seconds. This is sufficient to operate an atomic clock at the quantum projection noise limit.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125312129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956351
K. Hirama, H. Konno, K. Asao, K. Nakamura
We propose a new type quartz resonator using an unelectroded resonant region. In this resonator unelectroded resonant regions and electroded resonant regions are acoustically coupled to each other. We examined a transmission type structure resonator using a lumped constant equivalent circuit and confirmed its performance by experiments. The resonance frequency drift observed through electric terminals was improved by one-tenth of the drift at the electroded resonant regions. The insertion loss of the resonator is typically 15 dB, and therefore steady oscillation can be sustained using an ordinary single stage amplifier.
{"title":"Improvement of frequency drift of at-cut resonators using an unelectroded resonant region","authors":"K. Hirama, H. Konno, K. Asao, K. Nakamura","doi":"10.1109/FREQ.2001.956351","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956351","url":null,"abstract":"We propose a new type quartz resonator using an unelectroded resonant region. In this resonator unelectroded resonant regions and electroded resonant regions are acoustically coupled to each other. We examined a transmission type structure resonator using a lumped constant equivalent circuit and confirmed its performance by experiments. The resonance frequency drift observed through electric terminals was improved by one-tenth of the drift at the electroded resonant regions. The insertion loss of the resonator is typically 15 dB, and therefore steady oscillation can be sustained using an ordinary single stage amplifier.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117115349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2001-06-06DOI: 10.1109/FREQ.2001.956283
M. Kuroiwa, Y. Shimamoto, Y. Yasuda, S. Wakamoto, M. Nakazawa
This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors.
{"title":"Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors","authors":"M. Kuroiwa, Y. Shimamoto, Y. Yasuda, S. Wakamoto, M. Nakazawa","doi":"10.1109/FREQ.2001.956283","DOIUrl":"https://doi.org/10.1109/FREQ.2001.956283","url":null,"abstract":"This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115044969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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