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Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)最新文献

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Mounting and metallic brazing of crystal units, design history 安装和金属钎焊晶体单位,设计历史
C. A. Adams
In the early 1960's while working in the Crystal Design Laboratory at Hewlett-Packard, Don Hammond, the manager, and the author began to look into a new mounting system for quartz crystals. Their goal was to design a package that could be cleaned by H/sub 2/ firing at elevated temperatures, baked at temperatures greater than 300/spl deg/C, sealed while in vacuum with leak rates that were less than any container available at that time and be impervious to He diffusion. Cost was of secondary concern. The first crystal unit that they were to design the system for was for their LC cut temperature sensor operating over the range -50/spl deg/C to +250/spl deg/C. The unit was a 28 MHz 3rd OT unit that was required to fit into a package no larger than a TO-5 configuration and maintain its He integrity for the life of the product. The brazed mounting system described in this paper was a manageable process. Both HP and later Agilent Technologies put nearly 500,000 units in the field with this design. Its MTBF was greater than 1,000,000 hours with specifications that were always at the leading edge.
20世纪60年代初,在惠普水晶设计实验室工作时,经理唐·哈蒙德和作者开始研究一种新的石英晶体安装系统。他们的目标是设计一种包装,可以在高温下通过H/sub / 2/烧灼清洗,在高于300/spl℃的温度下烘烤,在真空中密封,泄漏率低于当时可用的任何容器,并且不受He扩散的影响。费用是次要的问题。他们设计系统的第一个晶体单元是他们的LC切割温度传感器,工作范围为-50/spl°C至+250/spl°C。该单元是一个28 MHz的第三OT单元,需要安装在不大于to -5配置的封装中,并在产品的生命周期内保持其He完整性。本文描述的钎焊安装系统是一个易于管理的过程。惠普和后来的安捷伦技术公司都将这种设计投入了近50万台。其MTBF大于1,000,000小时,规格始终处于领先地位。
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引用次数: 2
Bulk acoustic wave attenuation in langatate 语言体声波衰减
G. Mansfeld, S. Alekseev, I. Kotelyansky
The report is devoted to the study of the attenuation of bulk acoustic waves in crystals of LGT (La/sub 3/Ga/sub 5/ /sub .5/TaO/sub 0.5/O/sub 14/) - one of the most perspective materials for bulk acoustic wave piezoelectric resonators. Two methods of the experimental study and measurements of attenuation coefficient were used. The first method used was a modified bulk acoustic wave composite resonator spectroscopy method previously applied to the study of langasite. A composite resonator structure is a multifrequency bulk acoustic wave resonator. The resonances in the structure were spaced in frequency domain by few MHz and were observed in a wide frequency region from half up to a few GHz. So it was possible to find total acoustic losses in the structure from the data on resonant peaks width in a wide frequency domain. The new modified version of HBAR spectroscopy is based on the measurements of only parallel resonance bandwidth of composite resonator structures at each resonance frequency. Losses in transducers and those due to surface roughness were evaluated and either neglected or (if necessary) subtracted from the total losses. It was found that the frequency dependences in the whole band for most BAW polarizations are not ideally square (as it is required in Akhiezer theory), but at high frequencies limit their behavior is very close to the square law. The second method used in the work was a traditional echo-pulse method. For most experiments the acoustic losses obtained by two methods at high frequency region were close to each other. Here we concentrate our attention on modified HBAR spectroscopy method and on the discussion of the attenuation in LGT. All the peculiarities observed experimentally are discussed, attenuation constants data and Qf product values for most interesting directions are presented.
本文研究了体声波压电谐振器中最有前景的材料之一LGT (La/sub 3/Ga/sub 5/ /sub .5/TaO/sub 0.5/O/sub 14/)晶体对体声波的衰减。采用了实验研究和衰减系数测量两种方法。使用的第一种方法是先前用于研究langasite的改进体声波复合谐振器光谱方法。复合谐振器结构是一种多频体声波谐振器。结构中的共振在频域上间隔几MHz,并且在半GHz到几GHz的宽频率范围内观察到。因此,从宽频域谐振峰宽度的数据可以得到结构的总声损失。改进后的HBAR光谱仅基于复合谐振器结构在每个共振频率下的平行共振带宽的测量。对传感器的损耗和由于表面粗糙度造成的损耗进行了评估,要么忽略不计,要么(如有必要)从总损耗中减去。研究发现,在整个频带中,大多数BAW极化的频率依赖关系不是理想的平方(正如Akhiezer理论所要求的那样),但在高频限制下,它们的行为非常接近平方定律。第二种方法是传统的回波脉冲法。在大多数实验中,两种方法在高频区域的声损失接近。本文主要讨论了改进的HBAR光谱方法,并对LGT中的衰减进行了讨论。讨论了实验观察到的所有特性,给出了最感兴趣方向的衰减常数数据和Qf积值。
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引用次数: 4
Effect of electric twins on acoustic waves in a quartz resonator 石英谐振器中电孪晶对声波的影响
E. Kamiyama, T. Itoh, Y. Murakami, Y. Ueoka, T. Uno
Effects of the electric twins in quartz crystal resonators were investigated theoretically and experimentally. In the theoretical study a simple one-dimensional model predicted drastic changes in amplitude distribution, center value of serial resonant frequency (Fs) and its temperature dependence. In the experimental study, electric twins were formed artificially in the usual AT-cut quartz crystal resonators. The twin formation was confirmed by HF etching. Using the X-ray topograph method, we observed vibrating quartz resonators and saw that vibration generated at electrodes propagated into the outside region isotropically, but did not propagate into the region of the electric twin. When we compared Fs values measured before and after forming the twins, we found a clear dependence of Fs shift on the distance between the electrodes and the twins. We also found that twins significantly changed the temperature dependence of Fs. These effects can be useful in new applications.
从理论上和实验上研究了石英晶体谐振腔中电孪晶的影响。在理论研究中,一个简单的一维模型预测了振幅分布、串联谐振频率中心值(Fs)及其温度依赖性的剧烈变化。在实验研究中,在常用的at切割石英晶体谐振器中人工形成了电孪晶。通过HF蚀刻证实了孪晶的形成。利用x射线形貌法,我们观察了振动的石英谐振器,发现电极处产生的振动向外区域各向同性传播,但没有向电孪晶区域传播。当我们比较形成孪晶前后测量的Fs值时,我们发现Fs位移明显依赖于电极与孪晶之间的距离。我们还发现双胞胎显著改变了f的温度依赖性。这些效果在新的应用程序中很有用。
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引用次数: 0
Langasite and langatate nonuniform material properties correlated to the performance of SAW devices Langasite和langatate非均匀材料的性质与SAW器件的性能相关
R. Fachberger, T. Holzheu, E. Riha, E. Born, P. Pongratz, H. Cerva
Material properties of Langasite (LGS) and its homologous compounds, e.g., Langatate (LGT) have been investigated employing lattice constants measurements revealing that the micro structured growth striations affect the a and c-parameter of the unit cell. Thus deviations off the congruent melt composition of the crystal are assumed. Transmission electron microscopy (TEM) combined with energy dispersive X-ray spectroscopy (EDX) exhibit amorphous inclusions having a nearly identical chemical composition as the surrounding crystal. X-ray topography (XRT) has been applied to correlate the crystal quality of 3" LGS and LGT wafers including defects and transverse growth banding (TGB) with SAW frequency shifts. Evaluation of the RF-signal of SAW test devices showed frequency deviations of about 1000 ppm even within one wafer. The pattern of the frequency shifts is related to the orientation of the TGB. Local accumulations of defects, e.g., dislocations, however, did not cause observable interference with the SAW frequency.
利用晶格常数测量研究了Langasite (LGS)及其同类化合物Langatate (LGT)的材料性质,揭示了微结构生长条纹影响单元胞的a和c参数。因此,假定晶体的熔体组成偏离一致。透射电子显微镜(TEM)结合能量色散x射线光谱(EDX)显示出与周围晶体具有几乎相同化学成分的非晶夹杂物。利用x射线形貌(XRT)分析了3" LGS和LGT晶圆的晶体质量,包括缺陷和横向生长带(TGB)与SAW频移之间的关系。对声表面波测试设备的射频信号的评估显示,即使在一个晶圆内,频率偏差也约为1000ppm。频移的模式与TGB的方向有关。然而,缺陷的局部累积,例如位错,不会对声表面波频率造成可观察到的干扰。
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引用次数: 7
Proposed high performance source for the generation of high stability THz signals 提出了用于产生高稳定性太赫兹信号的高性能信号源
L. Maleki, V. Iltchenko
We describe a new method for the generation of terahertz radiation with low linewidth and high stability, over virtually any desired span of this region of the spectrum. The technique is based on the use of a high-Q optical microresonator with whispering gallery modes. The resonator has a special geometry that allows well separated modes. The proposed device has the added features of small size with low power requirements, and thus is suitable for space and mobile platform applications.
我们描述了一种产生太赫兹辐射的新方法,具有低线宽和高稳定性,几乎可以在该光谱区域的任何期望范围内实现。该技术是基于使用高q光学微谐振器与窃窃私语画廊模式。谐振器具有特殊的几何形状,可以很好地分离模式。所提出的器件具有小尺寸和低功耗要求的附加特性,因此适用于空间和移动平台应用。
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引用次数: 2
Long-term stability (aging) of evacuated hybrid OCXO 真空混合OCXO的长期稳定性(老化)
I. Abramzon, R. Boroditsky
The work is devoted to research in frequency stability of miniature integrated OCXO packaged in TO-8 vacuum holder. Since a number of electronic components and materials are involved in the unit design such investigations are of primary interest. The paper describes results of a long-term stability (aging) test of the OCXO during the period of about 2 years. Besides aging, various experiments including retrace and frequency hysteresis measurements are described. Experiments proved that the hybrid technology is suitable for fabrication of high stability miniature OCXO.
研究了to -8真空瓶封装的微型集成OCXO的频率稳定性。由于单元设计中涉及许多电子元件和材料,因此这些调查是主要的兴趣。本文介绍了一项为期约2年的OCXO长期稳定性(老化)试验的结果。除老化外,还介绍了各种实验,包括回溯和频率滞回测量。实验证明,该混合技术适用于制造高稳定性的微型OCXO。
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引用次数: 2
Noise in sensor crystals: hermetically sealed and unsealed 传感器晶体中的噪声:密封和非密封
Yoonkee Kim, J. Vig
Noise limits the accuracy with which the frequency of an oscillator can be determined. Similarly, in a resonant sensor, noise limits the measurement resolution, i.e., it limits the minimum quantity of a measurand that can be measured with a specified uncertainty. In some sensor applications, such as in quartz crystal microbalances (e.g., chemical sensors), the sensor crystals are not hermetically sealed. The noise [/spl sigma//sub y/(/spl tau/) at several /spl tau/] of hermetically sealed 5 MHz fundamental mode AT-cut quartz resonators was measured at laboratory ambient temperature, and in an oven near the turnover temperatures (83/spl deg/C). Then the hermetic seals were broken and the resonators were measured again at ambient and turnover temperatures. As one would expect, breaking the hermetic seal increased the equivalent series resistance and the aging of the resonators. When the resonators were in the oven near their turnover temperatures, the unsealed resonators' (drift-removed) short-term stability was not significantly different from that of the sealed ones. In fact, in some cases, the unsealed resonators exhibited better short term stability. The noise due to temperature fluctuations at laboratory ambient temperatures dominated the effects of breaking the hermetic seal.
噪声限制了确定振荡器频率的准确性。同样,在谐振传感器中,噪声限制了测量分辨率,即,它限制了在规定的不确定度下可以测量的最小被测量量。在一些传感器应用中,如石英晶体微天平(如化学传感器),传感器晶体不是密封的。在实验室环境温度和接近翻转温度(83/spl℃)的烤箱中,测量了密封的5 MHz基模at切割石英谐振器的噪声[/spl sigma//sub y/(/spl tau/) at几/spl tau/]。然后打破密封件,在环境温度和周转温度下再次测量谐振器。正如人们所预料的那样,打破密封增加了等效串联电阻和谐振器的老化。当谐振器在接近周转温度时,未密封谐振器的短期稳定性与密封谐振器的短期稳定性无显著差异。事实上,在某些情况下,未密封的谐振器表现出更好的短期稳定性。在实验室环境温度下,由于温度波动引起的噪声是破坏密封的主要影响因素。
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引用次数: 0
Understanding limitations of GPS carrier phase frequency transfer on a transatlantic baseline 了解跨大西洋基线上GPS载波相位频率传输的局限性
L. Nelson, J. Levine
This work is made in an effort to determine and understand the limitations of GPS carrier-phase frequency transfer between the National Institute of Standards and Technology (NIST) in Boulder, Colorado and the Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig, Germany. We compare two analytical software packages and report on possible reasons for differences in results. Specifically we look at bias fixing, merging routines, data outages, and sampling and analysis period effects. We hope to determine and reduce the contributions of these effects and lower the overall error budget of the carrier-phase GPS comparison technique.
这项工作是为了确定和理解位于科罗拉多州博尔德的国家标准与技术研究所(NIST)和位于德国不伦瑞克的物理技术联邦研究所(PTB)之间的GPS载波相位频率传输的局限性。我们比较了两种分析软件包,并报告了结果差异的可能原因。具体来说,我们着眼于偏差修复、合并例程、数据中断以及采样和分析周期效应。我们希望确定和减少这些影响的贡献,降低载波相位GPS比较技术的总体误差预算。
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引用次数: 1
MEMS resonators that are robust to process-induced feature width variations 对工艺诱导的特征宽度变化具有鲁棒性的MEMS谐振器
Rong Liu, B. Paden, K. Turner
In this paper, a frequency stability analysis and design method for MEMS resonators is presented. The frequency characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on the sidewall of the structure being considered, the first and second order frequency sensitivities to the fabrication error are derived. A simple relationship between the proof mass area and perimeter, and the beam width, is developed for single material structures, which expresses that the proof mass perimeter times the beam width should equal six times the area of the proof mass. Design examples are given for the single material and multi-layer structures. The results and principles presented in the paper can be used to analyze and design other MEMS resonators.
本文提出了一种MEMS谐振器的频率稳定性分析和设计方法。分析了横向振动谐振器的频率特性。考虑结构侧壁的制造误差,推导了一阶和二阶频率对制造误差的灵敏度。对于单一材料结构,建立了证明质量面积、周长和梁宽之间的简单关系,表示证明质量周长乘以梁宽应等于证明质量面积的6倍。给出了单材料和多层结构的设计实例。本文的研究结果和原理可用于其他MEMS谐振器的分析和设计。
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引用次数: 69
An experimental study of OCXO based on a new temperature control method 基于温度控制新方法的OCXO实验研究
Wei Zhou, L. Bai, Z. Xuan, Hui Zhou, C. Wen
In OCXO an accurate and stable temperature control to the crystal is very important. Constant boiling points of some substances can be used to supply a constant temperature condition to the crystal. Compared with the conventional OCXO, the same or better specifications can be obtained. This new method is suitable for a wider environment of temperature.
在OCXO中,对晶体进行精确稳定的温度控制是非常重要的。某些物质的恒定沸点可以用来为晶体提供恒定的温度条件。与传统的OCXO相比,可以获得相同或更好的规格。这种新方法适用于较宽的温度环境。
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引用次数: 0
期刊
Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)
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