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Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing 面向半导体制造先进设备控制的关键设备偏移预警制造智能
Pub Date : 2012-07-01 DOI: 10.1080/10170669.2012.702135
Chia-Yu Hsu, Chen-Fu Chien, Pei-Nong Chen
As feature sizes of integrated circuits are continuously shrinking in nanotechnologies, mining potentially useful information to extract manufacturing intelligence from big data automatically collected in the wafer fabrication facilities to assist in real time decisions for yield enhancement has become practically crucial to maintain competitive advantages and support intelligent manufacturing for operational excellence. Motivated by real needs, this study aims to develop an effective approach to extract manufacturing intelligence for early detection of key equipment excursion for advanced equipment control to enhance yield and reduce potential loss. For validation, an empirical study was conducted in a leading semiconductor manufacturing company to validate the proposed approach in the developed “early warning system” of newly released equipment to reduce tool excursion and abnormal yield loss. The results have demonstrated practical viability of the proposed approach. Indeed, the developed solution has been implemented in this company.
随着纳米技术中集成电路的特征尺寸不断缩小,从晶圆制造设施自动收集的大数据中挖掘潜在有用的信息来提取制造智能,以帮助实时决策以提高产量,这对于保持竞争优势和支持智能制造以实现卓越运营至关重要。从实际需求出发,本研究旨在开发一种有效的制造智能提取方法,用于关键设备偏移的早期检测,以实现先进设备控制,提高产量,减少潜在损失。为了验证,在一家领先的半导体制造公司进行了一项实证研究,以验证所提出的方法在开发的新发布设备的“预警系统”中,以减少刀具偏移和异常产量损失。结果证明了所提出方法的实际可行性。实际上,开发的解决方案已经在该公司实施。
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引用次数: 13
Evaluation of system reliability of electronic transaction in commercial banks 商业银行电子交易系统可靠性评价
Pub Date : 2012-07-01 DOI: 10.1080/10170669.2012.702689
Yi-Kuei Lin, Hsien-Chang Chou, Sheng-Chiang Chen
This article is mainly to utilize the flow network analysis to calculate the system reliability, so as to assess the service quality of electronic transactions conducted by commercial banks. Banks rely on telecommunication networks leased from telecommunication companies for electronic transaction services. The telecommunication company offers the steady telecommunication network, which is one of the key factors of influencing the electronic transaction service of the bank. In this article, one of the top three banks in Taiwan is taken for case study. The multi-state flow network and the recursive sum of disjoint product algorithm are used to calculate the system reliability, and explore its relationship with the remote branches’ demand. The use of multi-state flow network for system reliability analysis to assess the service quality of commercial banks’ electronic transactions can make the important reference indicator of network structure of serving for planning the commercial bank in the future.
本文主要是利用流量网络分析来计算系统可靠性,从而评估商业银行电子交易的服务质量。银行依靠从电信公司租用的电信网络提供电子交易服务。电信公司能否提供稳定的电信网络,是影响银行电子交易业务的关键因素之一。本文以台湾前三大银行之一为个案研究对象。采用多状态流网络和不相交积递推和算法计算系统可靠性,并探讨其与远程支路需求的关系。利用多状态流网络进行系统可靠性分析来评价商业银行电子交易服务质量,可以为商业银行未来规划服务网络结构提供重要参考指标。
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引用次数: 0
Prediction of surface roughness in turning of PEEK cf30 by using an artificial neural network 基于人工神经网络的PEEK cf30车削表面粗糙度预测
Pub Date : 2012-07-01 DOI: 10.1080/10170669.2012.702690
I. Hanafi, A. Khamlichi, F. M. Cabrera, P. J. Núñez López
Surface roughness parameters Ra and Rt are mostly used as an index to determine the surface finish quality in the process of machining. Because of the strong nonlinear character of relationships between the process inputs and outputs, it is difficult to accurately estimate roughness characteristics by using traditional modeling techniques. In this work, accurate prediction of the Ra and Rt values during machining of reinforced poly ether ether ketone (PEEK) CF30 with TiN coated tools is achieved. The modeling is performed by using artificial neural network approach to represent the complex relationships between cutting conditions and surface roughness parameters. The input cutting parameters include cutting speed, depth of cut and feed rate. The network was trained with pairs of inputs and outputs datasets generated by machining experimental results that were obtained according to a full factorial design of experiment table. Predictions of the ANN based model were found to fit experimental data very well with a correlation coefficient as high as 99%. Complementary results that were not used during derivation of the ANN model have enabled one to assess the validity of the obtained predictions.
在机械加工过程中,表面粗糙度参数Ra和Rt多作为确定表面光洁度的指标。由于过程输入和输出之间的关系具有很强的非线性特征,传统的建模技术难以准确地估计粗糙度特性。在这项工作中,实现了用TiN涂层刀具加工增强聚醚醚酮(PEEK) CF30时Ra和Rt值的准确预测。采用人工神经网络方法对切削条件与表面粗糙度参数之间的复杂关系进行建模。输入的切削参数包括切削速度、切削深度和进给速度。根据实验表的全因子设计,利用加工实验结果生成的成对输入输出数据集对网络进行训练。基于人工神经网络的模型预测与实验数据拟合非常好,相关系数高达99%。在推导人工神经网络模型期间未使用的补充结果使人们能够评估所获得的预测的有效性。
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引用次数: 14
Automated quality inspection of surface defects on touch panels 触摸屏表面缺陷的自动质量检测
Pub Date : 2012-07-01 DOI: 10.1080/10170669.2012.700528
Hong-Dar Lin, Huan-Hua Tsai
Capacitive touch panels (CTPs) with advantages of water-proof, stain-proof, scratch-proof, and fast response are widely used in various electronic products built in touch technology functions. It is a difficult inspection task when defects imbedded on surfaces of CTPs with structural textures. This research proposes a Fourier transform-based approach to inspect surface defects of CTPs. When a CTP image with four directional and periodic lines of texture is transformed to Fourier domain, four principal bands with high-energy frequency components crisscross at the center of Fourier spectrum. A multi-crisscross filter is designed to filter out the frequency components of the principal band regions. The filtered image is then transformed back to spatial domain. Finally, the restored image is segmented by a simple threshold method and defects are located. Experimental results show the proposed method achieves a high defect detection rate and a low false alarm rate on defect inspection of touch panels.
电容式触控面板(ctp)具有防水、防污、防刮、快速响应等优点,广泛应用于各种内置触控技术功能的电子产品中。具有结构纹理的ctp表面缺陷的检测是一项困难的任务。本研究提出了一种基于傅里叶变换的ctp表面缺陷检测方法。将具有4条定向周期性纹理线的CTP图像变换到傅里叶域中,在傅里叶谱中心有4条具有高能量频率成分的主带交叉。设计了一种多重交叉滤波器来滤除主带区域的频率分量。然后将过滤后的图像转换回空间域。最后,用简单的阈值法对恢复后的图像进行分割,定位缺陷。实验结果表明,该方法在触摸屏缺陷检测中具有较高的缺陷检出率和较低的虚警率。
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引用次数: 17
Decision support system for rehabilitation scheduling to enhance the service quality and the effectiveness of hospital resource management 康复调度决策支持系统,提高服务质量和医院资源管理的有效性
Pub Date : 2012-07-01 DOI: 10.1080/10170669.2012.703249
Yi-Chao Huang, Jia-Nian Zheng, Chen-Fu Chien
In hospitals, rehabilitation inpatients often complain about long waiting time between the therapeutic processes. Due to the partial precedence constraints of rehabilitation therapies, the rehabilitation scheduling problem is a hybrid shop scheduling problem. This article aims to construct a decision support system for rehabilitation scheduling. Equipped with the developed genetic algorithm, this system can generate the optimal schedules for rehabilitation patients to minimize waiting time and thus enhance service quality and overall resource effectiveness of rehabilitation facilities. The developed system is also equipped with GUI (graphical user interfaces) to provide scheduling information including Gantt charts and scheduling lists to support various users including therapists and inpatients. We conducted an empirical study in a general hospital for validation. The results showed that the waiting time of each inpatient is reduced significantly and thus demonstrated the practical viability of the proposed solution to enhance the effectiveness of hospital resource management. The developed system has been implemented online in the hospital.
在医院,康复住院病人经常抱怨治疗过程之间的等待时间过长。由于康复治疗的部分优先约束,康复调度问题是一个混合车间调度问题。本文旨在构建一个康复调度决策支持系统。该系统利用所开发的遗传算法,生成康复患者的最优排期,最大限度地减少患者的等待时间,从而提高康复机构的服务质量和整体资源效率。开发的系统还配备了GUI(图形用户界面),以提供包括甘特图和调度列表在内的调度信息,以支持包括治疗师和住院患者在内的各种用户。我们在一家综合医院进行了实证研究。结果表明,每位住院患者的候诊时间明显减少,从而证明了所提出的解决方案在提高医院资源管理有效性方面的实际可行性。所开发的系统已在该院在线实施。
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引用次数: 10
A two-stage mechanism as a decision support for marketing via customer satisfaction measures 一个两阶段的机制,作为通过客户满意度测量的营销决策支持
Pub Date : 2012-05-29 DOI: 10.1080/10170669.2012.691118
H. Fazlollahtabar, E. Aghasi
In this article, we propose a two stage decision model to aid the marketing team of a company. The decision is based on customers’ satisfaction measures. These measures are related to the different services the company offers to its customers. Thus, they constitute a multi criteria evaluation of the company's performances. The first stage of our proposed mechanism is to purify the services with respect to the criteria. A stochastic multi-criteria acceptability analysis is employed to purify the services. Then a multi-objective mathematical model is utilized to determine the services with more profits. A fuzzy goal programming is applied to solve the multi-objective model. The applicability and validity of the proposed mechanism is illustrated in a case study.
在本文中,我们提出了一个两阶段决策模型,以帮助公司的营销团队。这个决定是基于顾客的满意程度。这些措施与公司向客户提供的不同服务有关。因此,它们构成了对公司绩效的多标准评价。我们提出的机制的第一阶段是根据标准对服务进行净化。采用随机多准则可接受性分析对服务进行净化。然后利用多目标数学模型确定利润较高的服务。采用模糊目标规划方法求解多目标模型。通过实例分析说明了该机制的适用性和有效性。
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引用次数: 1
Subsidy and penalty strategy for a green industry sector by bi-level mixed integer nonlinear programming 基于双层次混合整数非线性规划的绿色工业部门补贴与惩罚策略
Pub Date : 2012-05-29 DOI: 10.1080/10170669.2012.684408
Yu Tsou, Hsiao-Fan Wang
To achieve worldwide environmental protection, each government and enterprise must work out policies to reduce carbon emissions and to increase recycle products. This study proposes a bi-level mixed-integer nonlinear programming (BL-MINLP) model to develop subsidy and penalty strategies for governments and enterprises engaged in the collection and recovery operations of environmental protection. The government is the leader who intends to reduce environmental impacts and seek the financial balance in environmental subsidy and penalty policies for the recovery and carbon emission. The enterprise is the follower who wants to minimize its costs of recycling and refunding subject to the unit subsidy and unit penalty decisions of the government. This study applies the Karush–Kuhn–Tucker approach to solve the trade-off problem between the government and the enterprise. Sensitivity analysis was carried out on parameters related to the recovery rate and the carbon emission from transportation to facilitate the effective control and management.
为了实现世界范围内的环境保护,各国政府和企业必须制定减少碳排放和增加回收产品的政策。本文提出了一个双层混合整数非线性规划(BL-MINLP)模型,用于制定政府和企业在环境保护的收集和回收业务中的补贴和处罚策略。政府是领导者,旨在减少对环境的影响,并寻求财政平衡的环境补贴和惩罚政策,以回收和碳排放。企业是跟随者,在政府的单位补贴和单位处罚决策下,企业希望将其回收和退款成本最小化。本研究运用Karush-Kuhn-Tucker方法来解决政府与企业之间的权衡问题。对回收率和运输碳排放相关参数进行敏感性分析,便于有效控制和管理。
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引用次数: 4
Wafer probe mark area estimation via digital image processing approach 基于数字图像处理方法的晶圆探头标记面积估计
Pub Date : 2012-05-29 DOI: 10.1080/10170669.2012.684409
Chau‐Shing Wang, Wen-Liang Chang
This article presents a digital image processing approach applied to estimate the probe mark area on semiconductor wafer pads. The value of mark area can be used to judge the acceptance of the wafer. Before wire bonding to the wafer, a probing needle contacts each pad to test the electrical characteristics of the chip. However, this contact leaves probe marks on the pad. A large probe mark area results in poor adhesion forces at the bond ball of the pad, thus leading to undesirable products. Traditionally, given the difficulty of calculating the area of the irregular probe mark, probe mark area calculations were substituted by calculating the area of the oval that is manually drawn to cover the probe mark area. Nevertheless, this method is inaccurate, and the results varied from person to person. In this article, we present an imaging processing approach to calculate the probe mark area utilizing high-magnification microscopes to capture probe mark images. Our approach is faster and more accurate compared to the traditional method.
本文提出了一种用于估计半导体晶圆片上探针标记面积的数字图像处理方法。标记面积的大小可以用来判断晶圆片的接受程度。在将导线连接到晶圆片之前,探针接触每个衬垫以测试芯片的电气特性。然而,这种接触会在焊盘上留下探针痕迹。较大的探针标记面积会导致焊盘粘结球处的附着力差,从而导致不良产品。传统上,考虑到计算不规则探测标记面积的困难,用计算人工绘制的覆盖探测标记区域的椭圆形面积来代替探测标记面积的计算。然而,这种方法是不准确的,结果因人而异。在本文中,我们提出了一种成像处理方法来计算探针标记面积利用高倍率显微镜捕获探针标记图像。与传统方法相比,我们的方法更快,更准确。
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引用次数: 1
Improved solution process for inventory model with ramp-type demand under stock-dependent consumption rate 基于库存依赖消费率的斜坡型需求库存模型的改进求解过程
Pub Date : 2012-05-29 DOI: 10.1080/10170669.2012.683822
J. Lin, H. Chao, P. Julian
We use the smoothly connected property to simplify the solution process for inventory model with ramp-type demand under stock-dependent consumption rate. This article is a response to a complicated solution process of Wu et al. [“Retailer's optimal ordering policy for deteriorating items with ramp-type demand under stock-dependent consumption rate,” International Journal of Information and Management Sciences, 19, 245–262 (2008)]. They extended a minimum cost inventory model to a maximized profit problem and presented a detailed analysis for the solution procedure. However, their solution process may be too lengthy to involve many right but unnecessary results. In this article, we use the smooth connected property to dramatically simplify their solution structure. Our approach is also applied to minimum cost inventory models that were demonstrated by simplifying the paper of Deng et al. [“A note on the inventory models for deteriorating items with ramp type demand rate,” European Journal of Operational Research, 178, 112–120 (2007)]. Our findings will help ordinary readers to understand their important inventory models.
利用平滑连接的性质,简化了在库存依赖消耗率条件下具有斜坡型需求的库存模型的求解过程。本文是对Wu等人的一个复杂求解过程的回应[库存依赖消费率下匝道型需求的零售商最优订货策略,国际信息与管理科学学报,19,245-262(2008)]。他们将最小成本库存模型扩展到利润最大化问题,并详细分析了求解过程。然而,它们的解决过程可能太长,无法包含许多正确但不必要的结果。在这篇文章中,我们使用光滑连通的性质来极大地简化它们的解结构。我们的方法也适用于最小成本库存模型,该模型通过简化Deng等人的论文得到了证明。[“关于具有斜坡型需求率的变质物品库存模型的说明,”欧洲运筹学杂志,178,112-120(2007)]。我们的发现将有助于普通读者理解他们的重要库存模型。
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引用次数: 7
Bayesian estimation of the mixture of generalized exponential distribution: a versatile lifetime model in industrial processes 混合广义指数分布的贝叶斯估计:工业过程的通用寿命模型
Pub Date : 2012-05-29 DOI: 10.1080/10170669.2012.684803
Sajid Ali, M. Aslam, D. Kundu, Syed Mohsin Ali Kazmi
Constructing a flexible parametric classes of probability distributions is most popular approach in Bayesian analysis for the last few decades. This study is planned in the same direction for two components’ mixture of generalized exponential (GE) probability distribution by considering heterogeneous population from industry. We have considered censored sample environment due to its popularity in reliability theory. In addition, we have worked out expressions for the maximum likelihood estimates along with their variances and constructed components of the information matrix. To examine the performance of these estimators, we have evaluated their properties for different sample sizes, censoring rates, proportions of the component of mixture, and a variety of loss functions (LFs). The Bayes estimates are evaluated under squared error, entropy, squared logarithmic, and precautionary LFs. Hazard rate of GE distribution graphically and numerically compared with mixture of other life-time distributions. To highlight the practical significance, we have included an illustrative application example based on a real-life data.
构造一个灵活的参数类概率分布是近几十年来贝叶斯分析中最流行的方法。本研究在考虑工业异质人口的情况下,对广义指数(GE)概率分布的两组分混合进行了相同方向的规划。由于截尾样本环境在可靠性理论中的流行,我们考虑了截尾样本环境。此外,我们还计算出了最大似然估计及其方差的表达式,并构建了信息矩阵的组成部分。为了检验这些估计器的性能,我们评估了它们在不同样本量、审查率、混合物成分比例和各种损失函数(LFs)下的性能。贝叶斯估计在平方误差、熵、平方对数和预防性LFs下进行评估。GE分布的危险率与其他混合寿命分布的危险率进行了图解和数值比较。为了强调其实际意义,我们包含了一个基于实际数据的说明性应用程序示例。
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引用次数: 16
期刊
Journal of The Chinese Institute of Industrial Engineers
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