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2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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Miniaturized Gas Sensor Platform for Selective Vapors Detection at Room Temperature 用于室温下选择性蒸汽检测的小型气体传感器平台
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919257
H. Peres, E. Galeazzo, M. Dantas, M. Sparvoli, Francislei S. A. Santos, M. P. H. Falla
Gas sensors are usually made of metallic oxides and need to operate at relatively high temperatures (about hundreds of Celsius degrees). Besides, they generally present drawbacks: low selectivity, elevated response time, and degradation. Novel nanostructured materials such as carbon nanotubes and graphene, among others, have been proposed to overcome these problems due to their unique electronic properties. However, these materials also present low selectivity for many gas species. In order to take advantage of the benefits of using carbon materials for gas sensing at room temperature, this work presents a proposal of humidity and volatile organic compounds (VOCs) sensing based on a miniaturized platform composed of four sensors. The lack of selectivity of individual materials is compensated by crossing the responses of each sensor. Results showed very fast response and recovery times (just few seconds), as well as good sensitivity (response variation up to four orders of magnitude). With this approach, the selectivity to discriminate the vapors can be improved, since each substance has an individual response pattern in the gas sensor array.
气体传感器通常由金属氧化物制成,需要在相对较高的温度(约数百摄氏度)下工作。此外,它们通常也存在缺点:选择性低、响应时间长和性能降低。新型纳米结构材料,如碳纳米管和石墨烯等,由于其独特的电子特性,已经被提出来克服这些问题。然而,这些材料对许多气体的选择性也很低。为了充分利用在室温下使用碳材料进行气体传感的优势,本工作提出了一种基于由四个传感器组成的小型化平台的湿度和挥发性有机化合物(VOCs)传感的建议。单个材料选择性的缺乏可以通过交叉每个传感器的响应来补偿。结果表明,该方法的响应速度和恢复时间非常快(仅几秒钟),灵敏度高(响应变化可达4个数量级)。通过这种方法,可以提高区分蒸汽的选择性,因为每种物质在气体传感器阵列中都有单独的响应模式。
{"title":"Miniaturized Gas Sensor Platform for Selective Vapors Detection at Room Temperature","authors":"H. Peres, E. Galeazzo, M. Dantas, M. Sparvoli, Francislei S. A. Santos, M. P. H. Falla","doi":"10.1109/SBMicro.2019.8919257","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919257","url":null,"abstract":"Gas sensors are usually made of metallic oxides and need to operate at relatively high temperatures (about hundreds of Celsius degrees). Besides, they generally present drawbacks: low selectivity, elevated response time, and degradation. Novel nanostructured materials such as carbon nanotubes and graphene, among others, have been proposed to overcome these problems due to their unique electronic properties. However, these materials also present low selectivity for many gas species. In order to take advantage of the benefits of using carbon materials for gas sensing at room temperature, this work presents a proposal of humidity and volatile organic compounds (VOCs) sensing based on a miniaturized platform composed of four sensors. The lack of selectivity of individual materials is compensated by crossing the responses of each sensor. Results showed very fast response and recovery times (just few seconds), as well as good sensitivity (response variation up to four orders of magnitude). With this approach, the selectivity to discriminate the vapors can be improved, since each substance has an individual response pattern in the gas sensor array.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128667559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transition Energy Calculations of Type II In(As)P/InGaP Quantum Dots for Intermediate Band Solar Cells 中波段太阳能电池II型In(As)P/InGaP量子点的跃迁能量计算
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919441
B. V. Rocha, R. Jakomin, R. Kawabata, L. Dornelas, M. Pires, P. L. Souza
In this work, we perform computational simulations of InAsP type II quantum dots for an intermediate band solar cell. We have varied parameters such as height, width and percentage of P of the quantum dots alloy to determine their influence on the optical transitionsˋ energies and electronic confinement within the quantum dots.
在这项工作中,我们对中间波段太阳能电池的InAsP II型量子点进行了计算模拟。我们采用不同的参数,如量子点合金的高度、宽度和P的百分比,来确定它们对量子点内的光学跃迁、能量和电子约束的影响。
{"title":"Transition Energy Calculations of Type II In(As)P/InGaP Quantum Dots for Intermediate Band Solar Cells","authors":"B. V. Rocha, R. Jakomin, R. Kawabata, L. Dornelas, M. Pires, P. L. Souza","doi":"10.1109/SBMicro.2019.8919441","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919441","url":null,"abstract":"In this work, we perform computational simulations of InAsP type II quantum dots for an intermediate band solar cell. We have varied parameters such as height, width and percentage of P of the quantum dots alloy to determine their influence on the optical transitionsˋ energies and electronic confinement within the quantum dots.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121727947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Bifacial Tandem Solar Panels with MOS Cells on the Backside for Applications in Deserts 背面MOS电池的双面串联太阳能电池板在沙漠中的应用
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919381
F. L. N. Santos, M. Watanabe, William Chiappim Júnior, S. G. S. Filho, J. Martino
This work proposes bifacial tandem solar panels with MOS cells on the backside aiming at applications in deserts. MOS solar cells were fabricated using Al(200nm)/ Mg(30nm)/SiO2 (1.73nm)/Si-p structures. The gate oxide was grown by rapid thermal processing (RTP) and the main parameters studied were extracted by means of electric characterization through IxV curves of the MOS solar cells. For the operation temperature of the MOS cell varying from 25°C to 70°C, it was shown that the loss of the conversion efficiency ($eta$) was at least 25% lower compared to conventional solar modules based on PN junctions and multi-crystalline-Si [9, 12]. As a result, the use of MOS solar cell on the backside of two different generations of CdS_CdTe cells with different conversion efficiencies at 25° C (15.8% and 21.0%), operating at the typical temperature of 70°C in deserts, promotes the increase of the conversion efficiency of 10.0% for CdS_CdTe1 (15.8%) and 6.0% for CdS_CdTe2 (21.0%).
本研究提出了背面带有MOS电池的双面串联太阳能电池板,旨在在沙漠中应用。采用Al(200nm)/ Mg(30nm)/SiO2 (1.73nm)/Si-p结构制备MOS太阳能电池。采用快速热处理(RTP)法生长栅极氧化物,并通过电池的IxV曲线提取其主要参数。当MOS电池的工作温度从25°C变化到70°C时,研究表明,与基于PN结和多晶硅的传统太阳能组件相比,转换效率的损失($eta$)至少降低了25%[9,12]。结果表明,在沙漠典型温度为70℃的条件下,将MOS太阳能电池应用于具有不同转换效率的两代CdS_CdTe电池背面,可使CdS_CdTe1电池的转换效率提高10.0% (15.8%),CdS_CdTe2电池的转换效率提高6.0%(21.0%)。
{"title":"Bifacial Tandem Solar Panels with MOS Cells on the Backside for Applications in Deserts","authors":"F. L. N. Santos, M. Watanabe, William Chiappim Júnior, S. G. S. Filho, J. Martino","doi":"10.1109/SBMicro.2019.8919381","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919381","url":null,"abstract":"This work proposes bifacial tandem solar panels with MOS cells on the backside aiming at applications in deserts. MOS solar cells were fabricated using Al(200nm)/ Mg(30nm)/SiO2 (1.73nm)/Si-p structures. The gate oxide was grown by rapid thermal processing (RTP) and the main parameters studied were extracted by means of electric characterization through IxV curves of the MOS solar cells. For the operation temperature of the MOS cell varying from 25°C to 70°C, it was shown that the loss of the conversion efficiency ($eta$) was at least 25% lower compared to conventional solar modules based on PN junctions and multi-crystalline-Si [9, 12]. As a result, the use of MOS solar cell on the backside of two different generations of CdS_CdTe cells with different conversion efficiencies at 25° C (15.8% and 21.0%), operating at the typical temperature of 70°C in deserts, promotes the increase of the conversion efficiency of 10.0% for CdS_CdTe1 (15.8%) and 6.0% for CdS_CdTe2 (21.0%).","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125174772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Correlation Between the Electric Field and the Negative Temperature Bias Instabilities Degradation in Junctionless Nanowire Transistors 电场与无结纳米线晶体管负温偏稳定性退化的关系
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919273
N. Graziano, F. J. da Costa, R. Trevisoli, R. Doria
In this work, we have correlated the degradation by Negative Bias Temperature Instability (NBTI) in MOS Junctionless Nanowire Transistors (JNTs) to the electric field inside the devices. We have measured samples with doping concentrations of $1times 10^{19} cm^{-3}$, biased at two different drain voltages, with several channel lengths (L) and widths (W). To extend the analysis, aiming at the understanding the physical behavior of the devices, we performed simulations of NBTI considering devices with similar characteristics. As a result, a higher degradation by the NBTI effect was obtained for the JNTs with lower doping concentration and shorter channel. The behavior of the NBTI has been correlated to the electric field of the devices and it is shown that the electric field becomes important mainly in accumulation regime.
在这项工作中,我们将MOS无结纳米线晶体管(JNTs)的负偏置温度不稳定性(NBTI)的退化与器件内部的电场联系起来。我们测量了掺杂浓度为$1乘以10^{19}cm^{-3}$的样品,偏置在两个不同的漏极电压下,具有多个通道长度(L)和宽度(W)。为了扩展分析,旨在理解器件的物理行为,我们考虑具有相似特性的器件进行了NBTI模拟。结果表明,较低掺杂浓度和较短通道的JNTs具有较高的NBTI降解率。NBTI的行为与器件的电场有关,并表明电场主要在积累状态下起重要作用。
{"title":"Correlation Between the Electric Field and the Negative Temperature Bias Instabilities Degradation in Junctionless Nanowire Transistors","authors":"N. Graziano, F. J. da Costa, R. Trevisoli, R. Doria","doi":"10.1109/SBMicro.2019.8919273","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919273","url":null,"abstract":"In this work, we have correlated the degradation by Negative Bias Temperature Instability (NBTI) in MOS Junctionless Nanowire Transistors (JNTs) to the electric field inside the devices. We have measured samples with doping concentrations of $1times 10^{19} cm^{-3}$, biased at two different drain voltages, with several channel lengths (L) and widths (W). To extend the analysis, aiming at the understanding the physical behavior of the devices, we performed simulations of NBTI considering devices with similar characteristics. As a result, a higher degradation by the NBTI effect was obtained for the JNTs with lower doping concentration and shorter channel. The behavior of the NBTI has been correlated to the electric field of the devices and it is shown that the electric field becomes important mainly in accumulation regime.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125175268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thin film conductive composites based on graphite nanoplatelets for heating applications 加热用石墨纳米片薄膜导电复合材料
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919307
S. Nista, J. Tsukamoto, S. Moshkalev
The studies of graphene and nanographite in the in different forms during last decade open ways for practical applications of these materials. Here we report the first results of experiments aiming at development of composites consisting of nanographite powders and polymeric matrixes showing the possibility to fabricate low-cost flexible conducive composites based on highly abundant natural products with variety of potential applications in particular for flexible heaters.
近十年来,人们对不同形式的石墨烯和纳米石墨烯的研究为这些材料的实际应用开辟了道路。在这里,我们报告了旨在开发由纳米石墨粉和聚合物基质组成的复合材料的实验的第一个结果,显示了基于丰富的天然产物制造低成本柔性有益复合材料的可能性,这种复合材料具有各种潜在的应用,特别是柔性加热器。
{"title":"Thin film conductive composites based on graphite nanoplatelets for heating applications","authors":"S. Nista, J. Tsukamoto, S. Moshkalev","doi":"10.1109/SBMicro.2019.8919307","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919307","url":null,"abstract":"The studies of graphene and nanographite in the in different forms during last decade open ways for practical applications of these materials. Here we report the first results of experiments aiming at development of composites consisting of nanographite powders and polymeric matrixes showing the possibility to fabricate low-cost flexible conducive composites based on highly abundant natural products with variety of potential applications in particular for flexible heaters.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"33 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132785390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of the quantum confinement anisotropy in a submonolayer quantum dot infrared photodetector 亚单层量子点红外探测器中量子约束各向异性的研究
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919349
A. Alzeidan, T. Cantalice, Ailton Garcia, C. Deneke, A. Quivy
A submonolayer quantum dot infrared photodetector (SML-QDIP) was grown on a GaAs(001) substrate by molecular beam epitaxy and processed using conventional optical lithography, wet etching and electronbeam metallization. Additionally, a side of the device was polished at 45 degrees in order to allow optical measurements with s- and p-polarized light. The electro-optical properties of the device were investigated both in normal incidence and at 45 degrees in order to study the quantum confinement of the SMLQD along the lateral and vertical directions. The s-to-p photocurrent ratio was found to be between 0.10 and 0.43, showing that, in this new type of quantum dot, the lateral confinement is still weaker than along the vertical direction, but is better than the one of conventional QDs fabricated in the Stranski-Krastanov growth mode. The maximum specific detectivity in normal incidence was $1.3 times 10^{11}$ cm Hz1/2/W at 30 K and 0.9V.
采用分子束外延技术在GaAs(001)衬底上生长了亚单层量子点红外光电探测器(SML-QDIP),并采用常规光学光刻、湿法蚀刻和电子束金属化工艺对其进行了加工。此外,该装置的一面被抛光成45度,以便使用s和p偏振光进行光学测量。为了研究SMLQD在横向和垂直方向上的量子约束,研究了该器件在正入射和45度入射下的电光特性。s-to-p光电流比在0.10 ~ 0.43之间,表明在这种新型量子点中,横向约束仍然弱于沿垂直方向,但优于传统的stranski - krstanov生长模式下制备的量子点。在30 K, 0.9V下,正常入射下的最大比检出率为1.3 × 10^{11}$ cm Hz1/2/W。
{"title":"Investigation of the quantum confinement anisotropy in a submonolayer quantum dot infrared photodetector","authors":"A. Alzeidan, T. Cantalice, Ailton Garcia, C. Deneke, A. Quivy","doi":"10.1109/SBMicro.2019.8919349","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919349","url":null,"abstract":"A submonolayer quantum dot infrared photodetector (SML-QDIP) was grown on a GaAs(001) substrate by molecular beam epitaxy and processed using conventional optical lithography, wet etching and electronbeam metallization. Additionally, a side of the device was polished at 45 degrees in order to allow optical measurements with s- and p-polarized light. The electro-optical properties of the device were investigated both in normal incidence and at 45 degrees in order to study the quantum confinement of the SMLQD along the lateral and vertical directions. The s-to-p photocurrent ratio was found to be between 0.10 and 0.43, showing that, in this new type of quantum dot, the lateral confinement is still weaker than along the vertical direction, but is better than the one of conventional QDs fabricated in the Stranski-Krastanov growth mode. The maximum specific detectivity in normal incidence was $1.3 times 10^{11}$ cm Hz1/2/W at 30 K and 0.9V.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124728055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
2D Nano Materials for CMOS compatible Gas Sensors 用于CMOS兼容气体传感器的二维纳米材料
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919352
R. Jha, N. Sakhuja, N. Bhat
Among the 2D materials family, the Transition Metal Dichalcogenides (TMD) offer interesting opportunities for application in chemi-resistive gas sensors. Along with high surface to volume ratio, an ideal characteristic for surface adsorption driven gas sensing phenomenon, TMDs lend themselves for wide range of tunability of other important parameters such as bandgap and conductivity. In order to build CMOS compatible gas sensors for system-on-chip applications, it is also important to develop low temperature processes for the integration of sensing materials at the back end of the CMOS line. In this context liquid exfoliation of 2D TMD materials can be exploited for room temperature synthesis of sensing material on top of CMOS platform. We present high performance gas sensors realized using few layer WS2 and MoSe22 for NH3 and H2S gases respectively.
在二维材料家族中,过渡金属二硫族化合物(TMD)为化学电阻气体传感器的应用提供了有趣的机会。除了具有高表面体积比(表面吸附驱动的气体传感现象的理想特性)外,TMDs还具有其他重要参数(如带隙和电导率)的大范围可调性。为了构建兼容CMOS的片上系统气体传感器,在CMOS线的后端开发集成传感材料的低温工艺也很重要。在这种情况下,二维TMD材料的液体剥离可以用于CMOS平台上的室温合成传感材料。本文提出了一种基于WS2和MoSe22的高性能气体传感器,分别用于NH3和H2S气体。
{"title":"2D Nano Materials for CMOS compatible Gas Sensors","authors":"R. Jha, N. Sakhuja, N. Bhat","doi":"10.1109/SBMicro.2019.8919352","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919352","url":null,"abstract":"Among the 2D materials family, the Transition Metal Dichalcogenides (TMD) offer interesting opportunities for application in chemi-resistive gas sensors. Along with high surface to volume ratio, an ideal characteristic for surface adsorption driven gas sensing phenomenon, TMDs lend themselves for wide range of tunability of other important parameters such as bandgap and conductivity. In order to build CMOS compatible gas sensors for system-on-chip applications, it is also important to develop low temperature processes for the integration of sensing materials at the back end of the CMOS line. In this context liquid exfoliation of 2D TMD materials can be exploited for room temperature synthesis of sensing material on top of CMOS platform. We present high performance gas sensors realized using few layer WS2 and MoSe22 for NH3 and H2S gases respectively.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126172266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
SBMicro 2019 Author's Index SBMicro 2019作者索引
Pub Date : 2019-08-01 DOI: 10.1109/sbmicro.2019.8919447
The SBMicro symposium is an international forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS. The SBMicro2019 will be located in São Paulo, the economic center and most important metropolis in Brazil. This international conference offers a unique blend of microelectronics and serves as a major conference for the discussion of interdisciplinary research around the world through a variety of formats, such as oral presentations, poster sessions, exhibits, panel discussions, and tutorial sessions. All approved papers will be published at the IEEEXplore. The best papers presented at the symposium will be invited to resubmit an extended version that will be considered for publication at the JICS – Journal of Integrated Circuits and Systems.
SBMicro研讨会是一个致力于微系统、集成电路和器件制造和建模的国际论坛,每年在巴西举行。研讨会的目标是将集成电路、微传感器、微致动器和MEMS的加工、材料、表征、建模和TCAD领域的研究人员聚集在一起。SBMicro2019将在巴西经济中心和最重要的大都市圣保罗举行。这次国际会议提供了微电子学的独特融合,并通过各种形式,如口头报告、海报会议、展览、小组讨论和辅导课,作为讨论世界各地跨学科研究的主要会议。所有通过的论文将在IEEEXplore上发表。在研讨会上发表的最佳论文将被邀请重新提交一个扩展版本,将被考虑在JICS -集成电路与系统杂志上发表。
{"title":"SBMicro 2019 Author's Index","authors":"","doi":"10.1109/sbmicro.2019.8919447","DOIUrl":"https://doi.org/10.1109/sbmicro.2019.8919447","url":null,"abstract":"The SBMicro symposium is an international forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS. The SBMicro2019 will be located in São Paulo, the economic center and most important metropolis in Brazil. This international conference offers a unique blend of microelectronics and serves as a major conference for the discussion of interdisciplinary research around the world through a variety of formats, such as oral presentations, poster sessions, exhibits, panel discussions, and tutorial sessions. All approved papers will be published at the IEEEXplore. The best papers presented at the symposium will be invited to resubmit an extended version that will be considered for publication at the JICS – Journal of Integrated Circuits and Systems.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"122 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131487238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microelectronics at the heart of the digital society: technological and training challenges 微电子在数字社会的核心:技术和培训的挑战
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919405
O. Bonnaud, L. Fesquet
The desire to develop the all-digital society at the global level implies the development of connected objects and the Internet of Things at a large scale. These objects require a physical implementation based on microelectronic devices, circuits and systems. The exponential growth of these objects leads to major needs in all the microelectronic sectors, in terms of basic devices, circuits and systems, which require today to be energy efficient. Many challenges are emerging for designing new low-power techniques that ensure quality, reliability and security. This paper deals on the one hand with the presentation of the context, limitations and potential solutions, and on the other hand with the need for skills that must be taught by adapting the training of specialists to the most advanced technologies.
在全球范围内发展全数字社会的愿望意味着在大范围内发展物联网和物联网。这些对象需要基于微电子器件、电路和系统的物理实现。这些对象的指数级增长导致了所有微电子部门在基本设备,电路和系统方面的主要需求,这些需求今天要求节能。在设计保证质量、可靠性和安全性的新型低功耗技术时,出现了许多挑战。本文一方面讨论了背景、限制和潜在解决方案的介绍,另一方面讨论了必须通过使专家培训适应最先进技术来教授的技能的需求。
{"title":"Microelectronics at the heart of the digital society: technological and training challenges","authors":"O. Bonnaud, L. Fesquet","doi":"10.1109/SBMicro.2019.8919405","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919405","url":null,"abstract":"The desire to develop the all-digital society at the global level implies the development of connected objects and the Internet of Things at a large scale. These objects require a physical implementation based on microelectronic devices, circuits and systems. The exponential growth of these objects leads to major needs in all the microelectronic sectors, in terms of basic devices, circuits and systems, which require today to be energy efficient. Many challenges are emerging for designing new low-power techniques that ensure quality, reliability and security. This paper deals on the one hand with the presentation of the context, limitations and potential solutions, and on the other hand with the need for skills that must be taught by adapting the training of specialists to the most advanced technologies.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134282756","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Analysis and measurement of the non-linear refractive index of SiOx Ny using pedestal waveguides 基于基座波导的SiOx - Ny非线性折射率分析与测量
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919392
Julián H. Sierra, D. O. Carvalho, R. Samad, R. Rangel, M. I. Alayo
In this work, the non-linear refractive index (n2) of silicon oxynitride (SiOx Ny) is determined, obtaining a value for this material of n2 = 2.11×10-19 m2/W. The results demonstrate that this material has interesting properties for the development of non-linear optical devices. The paper presents in detail the waveguide fabrication process using the pedestal technique, which allows using different materials since it does not require etching to define the sidewalls of the waveguides. We show the results of the measurement of the n2 employing the non-linear optical phenomena of Self-Phase Modulation (SPM).
在这项工作中,测定了氮化硅(SiOx Ny)的非线性折射率(n2),得到了该材料的值n2 = 2.11×10-19 m2/W。结果表明,该材料具有开发非线性光学器件的有趣性质。本文详细介绍了使用基座技术的波导制造过程,该技术允许使用不同的材料,因为它不需要蚀刻来定义波导的侧壁。我们展示了利用自相位调制(SPM)的非线性光学现象测量n2的结果。
{"title":"Analysis and measurement of the non-linear refractive index of SiOx Ny using pedestal waveguides","authors":"Julián H. Sierra, D. O. Carvalho, R. Samad, R. Rangel, M. I. Alayo","doi":"10.1109/SBMicro.2019.8919392","DOIUrl":"https://doi.org/10.1109/SBMicro.2019.8919392","url":null,"abstract":"In this work, the non-linear refractive index (n2) of silicon oxynitride (SiOx Ny) is determined, obtaining a value for this material of n2 = 2.11×10-19 m2/W. The results demonstrate that this material has interesting properties for the development of non-linear optical devices. The paper presents in detail the waveguide fabrication process using the pedestal technique, which allows using different materials since it does not require etching to define the sidewalls of the waveguides. We show the results of the measurement of the n2 employing the non-linear optical phenomena of Self-Phase Modulation (SPM).","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133323145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
期刊
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)
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