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2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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A 4 mm toroidal microtransformer built with wire bonding and MCM technologies 一个4毫米环形微变压器建立与线键合和MCM技术
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919297
F. Nascimento, A. Telles, M. M. Rocha, R. C. Teixeira
Manufacturing of small-scale magnetic devices is a subject that is not yet fully consolidated. Then the development process – design, fabrication and characterization – of microtransformers continues as object of studies for several applications. In this work it is presented the development and characterization steps of a four mm diameter toroidal microtransformer built using wire bonding and MultiChip Module (MCM) technologies. The device has a 19:1 turn ratio, with $31 mu mathrm{m}$ diameter aluminum wire bond around the top of a MnZn ferrite core. The wire bonds are connected to thin film gold tracks with $sim 3.5 mu mathrm{m}$ thickness at the bottom in order to complete the windings. The main parameters measured were the inductances and resistances of primary and secondary windings, and also the series-aiding and series-opposing inductances, all of them in the frequency range from 10 kHz to 2 MHz. With the results from those measurements the quality factors, mutual inductance and coupling coefficients were obtained. The inductance values of both windings are in agreement with expected ones. The device shows a good coupling coefficient and acceptable quality factors. The results show that it is feasible to build microtransformers with wire bonding onto an MCM substrate.
小型磁性装置的制造是一门尚未完全巩固的学科。然后,微变压器的开发过程-设计,制造和表征-继续作为几个应用的研究对象。在这项工作中,它提出了利用线键合和多芯片模块(MCM)技术构建的直径为4毫米的环形微变压器的开发和表征步骤。该器件的匝比为19:1,在MnZn铁氧体铁芯的顶部粘接$31 mu mathrm{m}$直径的铝线。导线键连接到底部厚度为$sim 3.5 mu mathrm{m}$的薄膜金轨道上,以完成绕组。测量的主要参数是一次绕组和二次绕组的电感和电阻,以及串联辅助和串联反电感,频率范围为10 kHz至2 MHz。根据这些测量结果,得到了质量系数、互感系数和耦合系数。两个绕组的电感值与预期值一致。该装置具有良好的耦合系数和可接受的质量因数。研究结果表明,在MCM基板上建立导线键合微变压器是可行的。
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引用次数: 3
SBMicro 2019 Sponsors
Pub Date : 2019-08-01 DOI: 10.1109/sbmicro.2019.8919422
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引用次数: 0
Multi-layers Lateral SOI PIN Photodiodes for Solar Cells Applications 用于太阳能电池的多层横向SOI PIN光电二极管
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919314
F. A. da Silva, R. Doria, M. G. C. de Andrade
In this paper, a lateral PIN photodiode based on a SOI wafer has been studied through numerical simulations. This device can be used as a solar cell embedded in a CMOS circuit in order to propose autonomous ultralow-power circuits (ULP). Efficiency behavior has been analyzed for different semiconductor materials and configurations in order to reach the best performance. The results indicate that a layer with a different semiconductor, with different characteristics such as forbidden band, mobility and light absorption, improves the generated power in the device, suggesting that the cell can feed circuits that need larger power.
本文通过数值模拟研究了一种基于SOI晶圆的横向PIN光电二极管。该器件可作为太阳能电池嵌入到CMOS电路中,从而提出自主超低功耗电路(ULP)。为了达到最佳性能,分析了不同半导体材料和结构下的效率行为。结果表明,不同的半导体层,具有不同的禁带、迁移率和光吸收等特性,可以提高器件的产生功率,表明该电池可以为需要更大功率的电路供电。
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引用次数: 0
Analysis of the substrate effect by the capacitive coupling in SOI UTBB Transistors SOI UTBB晶体管电容耦合对衬底效应的分析
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919305
F. Costa, R. Trevisoli, R. Doria
The goal of this work is to present the behavior of the substrate effect in Ultra-Thin Body and Buried Oxide (UTBB) SOI MOSFETs with the application of a selected set of back gate biases (VSUB) through DC and AC simulations. A set of different ground planes (GP) arrangements has been considered. It has been shown that the degradation due to the substrate effects increases as the substrate bias is reduced. According to the analysis, it could be observed the GP type influences the capacitive coupling of the structure as the back gate bias is varied. Additionally, it has been shown that the presence of the GP below the source and drain regions contributes significantly to the overall capacitive coupling of the device.
这项工作的目的是通过直流和交流模拟,在一组选定的后极偏置(VSUB)的应用下,展示超薄体和埋藏氧化物(UTBB) SOI mosfet中衬底效应的行为。考虑了一组不同的地平面(GP)布置。研究表明,随着衬底偏压的减小,由衬底效应引起的降解会增加。通过分析可以看出,随着后门偏压的变化,GP类型对结构的电容耦合有影响。此外,已经表明,源极和漏极区域下方GP的存在对器件的整体电容耦合有重要贡献。
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引用次数: 1
Suspended Slow-Wave transmission lines for mm-wave applications 用于毫米波应用的悬挂慢波传输线
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919327
L. Gomes, Serrano Ariana L. C., P. Ferrari, G. Rehder
This paper presents and validate the concept of a suspended, slow-wave microstrip transmission line that uses air as a substrate. The lines are fabricated on a low-cost interposer technology, the metallic nanowire membrane (MnM), that allows selective growth of copper nanowires, enabling transmission lines with a wide range of Zc. Lines with widths of $35 mu mathrm{m}, 25mu mathrm{m}$ and $15mu mathrm{m}$ were designed and fabricated with 1, 2 or 4 suspended segments of $250mu mathrm{m}$ or $500mu mathrm{m}$ of length. Parametric extraction from the measured S-parameters showed $varepsilon_{eff}$ ranging from 5 to 7.5, $alpha$ smaller than 0.8 dB/mm at 70 GHz and Q as high as 55. Z c varied between $65 Omega$ and $90 Omega$.
本文提出并验证了以空气为基板的悬浮式慢波微带传输线的概念。这些线路采用一种低成本的中间体技术——金属纳米线膜(MnM)制造,这种技术允许铜纳米线的选择性生长,使传输线具有广泛的Zc范围。用长度为$250mu mathrm{m}$或$500mu mathrm{m}$的1、2或4个悬段设计和制作宽度为$35 mu mathrm{m}, 25mu mathrm{m}$和$15mu mathrm{m}$的线。实测s参数的参数提取结果表明:$varepsilon_{eff}$取值范围为5 ~ 7.5,$alpha$在70 GHz时小于0.8 dB/mm, Q值高达55。zc在$65 Omega$和$90 Omega$之间变化。
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引用次数: 2
Development of MEMS microsensors, aiming at the application in the study of muscle fatigue in vivo 开发MEMS微传感器,旨在将其应用于体内肌肉疲劳的研究
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919262
Kaique F. Sanches, Selva Jéssica S. G., D. D. Purificação, M. Bertotti, Carreño Marcelo N. P.
Many studies have been conducted in order to better understand the role of the pH in muscle fatigue. However, measuring in vivo pH concentration, in the muscular environment during anaerobic exercise, cannot be conducted through regular methods. Thus, in this work, we design and fabricate a siliconbased implantable microelectrode array (MEA) utilizing microelectronics and MEMS techniques. The probe consists of a microneedle with three pairs of electrodes, each containing one Ag-AgCl reference electrode and one Au-IrOx working electrode. The Au and Au/IrOx electrodes were tested in a potassium ferricyanide solution and, in order to verify the device sensitivity to pH, open circuit potential (OCP) measurements were carried out in 0.1 mol L-1 phosphate buffer solution (PBS) with different pH values. The results show a linear response to the solution pH in the studied range, proving that the probe is a promising sensor.
为了更好地了解pH值在肌肉疲劳中的作用,已经进行了许多研究。然而,在无氧运动时的肌肉环境中,体内pH浓度的测量无法通过常规方法进行。因此,在这项工作中,我们利用微电子和MEMS技术设计和制造了硅基可植入微电极阵列(MEA)。探针由带有三对电极的微针组成,每对电极包含一个Ag-AgCl参比电极和一个Au-IrOx工作电极。在铁氰化钾溶液中测试Au和Au/IrOx电极,为了验证器件对pH的灵敏度,在0.1 mol L-1的不同pH值的磷酸盐缓冲溶液(PBS)中进行开路电位(OCP)测量。结果表明,该探头在研究范围内对溶液pH值呈线性响应,是一种很有前途的传感器。
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引用次数: 0
Development of MEMS based microCVD technique for new materials thin films deposition 基于MEMS的微cvd新材料薄膜沉积技术的发展
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919253
R.A.R. Oliveira, I. Pereyra, M. Carreño
In this work a new approach for deposition of new materials is proposed. In this approach, a CVD (Chemical Vapor Deposition) process is implemented in a micro heater fabricated by MEMS technology, which presents as main appeals (a) short heating and cooling times, (b) the possibility of grown spatially localized films, in well defined regions of a substrate, and (c) to allow the growth of different materials in a single deposition process. Due to its conception, this approach also allows to grow the materials in a device integrated way, in structures where they can be characterized or in the final devices where they are going to be used. As it will be shown, a wide range of temperatures is attainable, from room temperature to well over 1000°C. The microCVD deposition is obtained when the MEMS micro heater is placed inside a vacuum chamber with the precursor gases and the micro heater is electrically polarized to attain the desire temperature. Computer simulation in Ansys Software was performed to estimate the final temperature of the heaters and the fabricated microCVD devices were tested in CH4 atmosphere, to obtain carbon and graphene films.
本文提出了一种沉积新材料的新方法。在这种方法中,CVD(化学气相沉积)工艺是在MEMS技术制造的微加热器中实现的,其主要吸引力在于(a)加热和冷却时间短,(b)在衬底的明确区域生长空间局部膜的可能性,以及(c)允许在单一沉积过程中生长不同的材料。由于它的概念,这种方法也允许以设备集成的方式生长材料,在结构中,它们可以被表征,或者在最终的设备中,它们将被使用。如图所示,温度范围很广,从室温到远高于1000°C。将MEMS微加热器与前驱体气体置于真空室中,并对微加热器进行电极化以达到所需温度,从而获得微cvd沉积。在Ansys软件中进行了计算机模拟,估计了加热器的最终温度,并在CH4气氛中对制备的微cvd器件进行了测试,获得了碳和石墨烯薄膜。
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引用次数: 1
Boosting the Ionizing Radiation Tolerance in the Mosfets Matching by Using Diamond Layout Style 利用菱形布局提高mosfet匹配中的电离辐射容忍度
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919344
V. V. Peruzzi, W. Cruz, Gabriel Augusto da Silva, R. C. Teixeira, Luis Eduardo Seixas Junior, S. Gimenez
There are a lot of initiatives to improve the devices matching (dog bone layout, common centroid layout, dummy devices, etc.). Another layout technique, not yet used by integrated circuits (ICs) companies, is the utilization of non-conventional layout styles (hexagonal, octagonal, ellipsoidal, etc.) for MOSFETs, thanks to the Longitudinal Corner Effect (LCE), Parallel Connection of MOSFETs with different channel Lengths Effect (PAMDLE) and Deactivation of Parasitic MOSFETs in Bird’s Beaks Regions (DEMPAMBBRE). In this context, this paper describes an experimental comparative study of the devices matching of Metal-Oxide-Semiconductor Field Effect Transistors (130 nm Silicon-Germanium Bulk), n-type (nMOSFETs) implemented with Diamond (hexagonal) and standard rectangular layout styles, regarding a sample of 189 transistors which were exposure to different X-rays ionizing radiations. Considering some relevant electrical parameters considered in this work, the results indicate that the Diamond layout style with $alpha$ angle equal to 90° is capable of boosting by at least 40% the device matching in relation to one observed with standard (rectangular) MOSFET counterparts in irradiation environment, considering they present the same gate areas, channel widths and bias conditions. Therefore, the Diamond layout style can be considered another hardness-by-design (HBD) layout strategy to boost the electrical performance and ionizing radiation tolerance of MOSFETs.
有很多改进设备匹配的举措(狗骨布局,公共质心布局,假人设备等)。另一种尚未被集成电路(ic)公司使用的布局技术是利用mosfet的非传统布局风格(六角形,八角形,椭圆形等),这得益于纵向角效应(LCE),具有不同沟道长度效应的mosfet并联(PAMDLE)和鸟喙区寄生mosfet的失活(DEMPAMBBRE)。在此背景下,本文对189个不同x射线电离辐射下的金属氧化物半导体场效应晶体管(130 nm硅锗块体)、金刚石(六边形)和标准矩形布局的n型(nmosfet)器件匹配进行了实验比较研究。考虑到本工作中考虑的一些相关电气参数,结果表明,考虑到它们具有相同的栅极面积、沟道宽度和偏置条件,与辐照环境中观察到的标准(矩形)MOSFET相比,$alpha$角等于90°的Diamond布局样式能够将器件匹配度提高至少40%。因此,金刚石布局风格可以被认为是另一种硬度设计(HBD)布局策略,以提高mosfet的电性能和电离辐射耐受性。
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引用次数: 3
Analysis of the Scattering Mechanisms in the Accumulation Layer of Junctionless Nanowire Transistors at High Temperature 无结纳米线晶体管堆积层高温散射机理分析
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919428
T. A. Ribeiro, M. Pavanello
This work studies the effects of high temperature on the scattering mechanisms of Junctionless Nanowire Transistors with several fin width from nanowire to quasi-planar devices. With the variation of the temperature it was possible to analyze the impact of the scattering mechanisms on the devices. For nanowire devices at room temperature a degradation of up to 19% was seen from the maximum mobility to the mobility at higher gate bias to around 15% at 500K, while quasi-planar devices show a degradation of around 12% for all temperatures. Further analysis shows that the impact of the surface roughness for nanowires increase the degradation of these devices, where a reduction of its degradation at higher temperature shows the phonon scattering as the main scattering mechanism.
本文研究了高温对不同翅片宽度的无结纳米线晶体管从纳米线到准平面器件的散射机制的影响。随着温度的变化,可以分析散射机制对器件的影响。对于室温下的纳米线器件,从最大迁移率到较高栅极偏压下的迁移率,可以看到高达19%的退化,到500K时的迁移率约为15%,而准平面器件在所有温度下的退化约为12%。进一步分析表明,表面粗糙度对纳米线的影响增加了这些器件的降解,其中在较高温度下其降解的减少表明声子散射是主要的散射机制。
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引用次数: 1
Realistic Simulations and Design of GaAs Solar Cells produced by Molecular Beam Epitaxy 分子束外延制备砷化镓太阳能电池的仿真与设计
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919412
T. Borrely, A. Quivy
Numerical simulations were used to assess the relevance of the parameters involved in producing GaAs solar cells (SCs). Optical characteristics of SCs were calculated via OpenFilters software, while device performances were calculated via SCAPS software. Junction thickness, doping level, surface-field layer composition and anti-reflective coating thickness were found to be extremely important parameters, meaning that a small variation of their values may lead to a substantial efficiency reduction. These results indicate that researchers must be very careful when comparing different new-concepts SCs, because small lapses or fluctuations in production processes may enshroud the new-concept related changes.
数值模拟用于评估生产砷化镓太阳能电池(SCs)所涉及的参数的相关性。通过OpenFilters软件计算SCs的光学特性,通过SCAPS软件计算器件性能。结厚、掺杂水平、表面场层组成和抗反射涂层厚度是非常重要的参数,这意味着它们的值的微小变化可能导致效率的大幅降低。这些结果表明,研究人员在比较不同的新概念SCs时必须非常小心,因为生产过程中的小失误或波动可能掩盖与新概念相关的变化。
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引用次数: 0
期刊
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)
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