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2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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Advanced CMOS Integration Technologies for Future Mobile Applications 面向未来移动应用的先进CMOS集成技术
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919478
C. Claeys, E. Simoen
Future mobile communication systems and 5G base stations are relying on the availability of a variety of high-speed high-performing semiconductor technologies. Not only advanced CMOS technologies will form the cornerstone but also innovative heterogeneous technologies manufactured on a Si platform will be needed for future System-on-Chip applications. III-nitrides will play an important role in the RF and power parts. While increased system functionality and density can be achieved by 3D integration based on Through Silicon Vias, a strong focus is nowadays going to the monolithic or 3D sequential integration on a Si substrate. Several of these different technologies are reviewed and discussed.
未来的移动通信系统和5G基站依赖于各种高速高性能半导体技术的可用性。未来的片上系统应用不仅需要先进的CMOS技术,还需要在Si平台上制造的创新异构技术。氮化物将在射频和功率器件中发挥重要作用。虽然基于硅通孔的3D集成可以提高系统的功能和密度,但目前的重点是在硅衬底上进行单片或3D顺序集成。对其中几种不同的技术进行了回顾和讨论。
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引用次数: 1
Application of Love Wave Sensing With Mesoporous Thin Film 介孔薄膜在爱波传感中的应用
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919282
O. Tamarin, J. Lachaud, H. Hallil, C. Dejous, D. Rebière
Acoustic wave sensors are given special attention since a few decades as they offer a good sensitivity for detection applications. Their ability to operate in liquid and gas media make them a very interesting device. Nevertheless, to further improve their sensitivity in term of “mass loading effect”, the increasing of the surface to volume ratio of the associated sensitive layer is a promising strategy which could overcome many of the challenges faced by the in situ detection of low mass biomolecules. This paper presents an overview of the latest works carried out on the association of Love wave transducers with SiO2 and TiO2 porous layers at the IMS Laboratory. The principal results are developed, and the current investigations and perspective are exposed.
由于声波传感器在探测应用中具有良好的灵敏度,几十年来一直受到人们的特别关注。它们在液体和气体介质中工作的能力使它们成为一种非常有趣的设备。然而,为了进一步提高其在“质量负载效应”方面的灵敏度,增加相关敏感层的表面体积比是一种很有前途的策略,可以克服原位检测低质量生物分子所面临的许多挑战。本文概述了IMS实验室在Love波换能器与SiO2和TiO2多孔层的关联方面的最新工作。总结了主要研究结果,并对目前的研究现状和前景进行了展望。
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引用次数: 1
Assessment of Ionizing Radiation Hardness of a GaN Field-Effect Transistor 氮化镓场效应晶体管电离辐射硬度的评估
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919340
A. Bôas, M. D. de Melo, R. Santos, R. Giacomini, N. Medina, L. Seixas, F. R. Palomo, M. Guazzelli
This work addresses the effects of Total Ionizing Dose (TID) on a Gallium Nitride (GaN) transistor before, during and after exposing to radiation, and also the comparison between biasing or not, during radiation exposition. These High Electron Mobility Transistors (HEMTs) were exposed to 10-keV X-rays effective energy and tested in a controlled temperature environment. Radiation doses varied in a wide range up to 350 krad. The results show that the devices analyzed, the commercial off-the-shelf (COTs) GaN - GS61008T, suffer few effects of ionizing radiation, and recover their electrical characteristics, especially when in on-state mode, indicating they are good candidates for use in harsh environments.
本文研究了总电离剂量(TID)对氮化镓(GaN)晶体管在暴露于辐射之前、期间和之后的影响,以及在辐射暴露期间偏置与不偏置之间的比较。这些高电子迁移率晶体管(hemt)暴露在10 kev x射线有效能量下,并在受控温度环境中进行测试。辐射剂量变化很大,可达350克拉。结果表明,所分析的器件(商用现成(COTs) GaN - GS61008T)受电离辐射的影响很小,并且可以恢复其电气特性,特别是在导通模式下,这表明它们是恶劣环境下使用的良好候选器件。
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引用次数: 3
Third Generation BESOI (Back-Enhanced SOI) pMOSFET fabricated on UTBB Wafer UTBB晶圆上制备的第三代背增强SOI pMOSFET
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919335
R. A. Katia Sasaki, R. Rangel, L. Yojo, J. Martino
The third generation BESOI MOSFET (Back-Enhanced Silicon-On-Insulator Metal-Oxide-Semiconductor Field-Effect-transistor) on UTBB (Ultra-Thin Body and Buried Oxide) was fabricated, analyzed and compared to the BESOI with thick buried oxide (first generation). The stronger coupling between front and back interfaces for UTBB BESOI devices improves most of the parameters analyzed. Its higher drain current (67%), maximum transconductance (122%) and body factor (217%) with seven times lower back gate bias make the UTBB BESOI MOSFET more compatible with standard SOI CMOS (Complementary MOS) technology than the BESOI with thick buried oxide.
制作了第三代基于超薄体和埋地氧化物的BESOI MOSFET(背增强绝缘体上硅金属氧化物半导体场效应晶体管),并与第一代厚埋地氧化物的BESOI进行了分析和比较。UTBB BESOI器件前后接口之间的强耦合改善了所分析的大部分参数。其更高的漏极电流(67%),最大跨导(122%)和体因子(217%)与低7倍的反向偏置使得UTBB BESOI MOSFET比具有厚埋氧化物的BESOI更兼容标准SOI CMOS(互补MOS)技术。
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引用次数: 4
pH sensors with TiO2 Nanotubes fabricated with photoresist layer 带光刻胶层的二氧化钛纳米管pH传感器
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919333
T. Cortiz, J. F. Almeida, I. Pereyra, K. F. Albertin
Optimized TiO2 nanotubes arrays were obtained by the deposition of photoresist layers on the Ti foil prior to the anodization process. In this way the initial current during the anodization process decreases significantly, avoiding or diminishing the formation of the initial compact TiO2 layer, also for long process times nanograss formation is avoided. TiO2 nanotubes were obtained with the conventional process and with the addition of the photoresist layer different anodization voltages and times. TiO2 nanotubes pH electrodes were fabricated to study the effect of this optimized process in sensors response. The nanostructures morphology was analyzed through scanning electron microscopy (SEM) technique. A total removal of the undesirable layer and a complete release of the nanotubes mouth were obtained. The pH electrodes where characterized utilizing a buffer solution, PH sensibility improved and absence of hysteresis effects were observed for the devices fabricated with TiO2 nanotubes obtained with the optimized process.
在阳极氧化之前,在Ti箔上沉积光刻胶层,得到了优化的TiO2纳米管阵列。通过这种方式,阳极氧化过程中的初始电流显著降低,避免或减少了初始致密TiO2层的形成,并且在较长的工艺时间内避免了纳米草的形成。采用常规工艺和添加不同阳极氧化电压和时间的光刻胶层制备TiO2纳米管。制备了TiO2纳米管pH电极,研究了该优化工艺对传感器响应的影响。通过扫描电子显微镜(SEM)分析了纳米结构的形貌。得到了不需要的层的完全去除和纳米管口的完全释放。采用缓冲溶液对pH电极进行了表征,结果表明,优化后的工艺制备的TiO2纳米管器件的pH敏感性得到提高,且没有迟滞效应。
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引用次数: 0
Variable Interference Filter (VIF) for biological and Chemical sensors 用于生物和化学传感器的可变干涉滤光片(VIF)
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919303
Celso M. Silva, Daniel A. Spegiorin, Tiago F. Silva, R. Onmori
A high-resolution and compact wavelength detector capable of resolving very small changes in the spectral information of the incident light is highly desirable for many applications such as Lab-on-Chip systems, biosensors, chip-sized detectors, on-chip fluorescence spectrometry, wavelength shift detectors, interrogations system, and more. In this work is present the project, simulations, fabrications and calibration of a variable interference filter (VIF) constituted by a wedgeshaped Fabry-Perot cavity placed between two stacks of thin films, forming dielectric reflectors. This device constitutes an optical filter that converts the spectral information in a position dependent signal that can be measured by a photo detector array (PDA). We have investigated the performance of the designed VIF depending on its optical properties in order to optimize its geometrical configuration. With the results obtained we fabricated a multi-channel spectral detector that can be used in environmental analysis. To demonstrate this viability, it is proposed a basic system composed of a VIF mounted on top of a matrix of sensors connected to a dedicated electronic module, to measure and store the intensity of the incident radiation data and the absorption spectra of molecules present in a detection chamber of a microfluidic system. This prototype is aimed to analyze biological fluids, human urine, and results will be compared with results obtained using standard commercial instruments.
高分辨率和紧凑的波长探测器能够分辨入射光光谱信息的非常小的变化,是许多应用非常需要的,如片上实验室系统,生物传感器,芯片大小的探测器,片上荧光光谱,波长移位探测器,询问系统等。在这项工作中,介绍了一个可变干涉滤光器(VIF)的模拟,制造和校准,该滤光器由放置在两层薄膜之间的楔形法布里-珀罗腔构成,形成介电反射器。该装置构成一个滤光器,该滤光器将光谱信息转换为可由光电探测器阵列(PDA)测量的位置相关信号。为了优化其几何结构,我们研究了所设计的VIF根据其光学特性的性能。在此基础上,研制了一种可用于环境分析的多通道光谱探测器。为了证明这种可行性,提出了一种基本系统,该系统由安装在连接到专用电子模块的传感器矩阵顶部的VIF组成,用于测量和存储入射辐射数据的强度以及存在于微流体系统检测室中的分子的吸收光谱。该原型旨在分析生物液体、人类尿液,并将结果与使用标准商用仪器获得的结果进行比较。
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引用次数: 0
A Negative-Bias-Temperature-Instability Study on Omega-Gate Silicon Nanowire SOI pMOSFETs ω栅极硅纳米线SOI pmosfet负偏置温度不稳定性研究
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919276
V. Silva, G. Wirth, J. Martino, P. Agopian
The Negative-Bias-Temperature-Instability (NBTI) is an important reliability parameter for advanced technology nodes. This work presents an experimental study of NBTI in omega-gate nanowire (NW) pMOSFET. The 3D-numerical simulations were performed in order to better understand the NBTI effect in NW transistors. The results shows that NBTI in NW is high ($Delta$ V $approx200 -300$mV – for W = 10nm) due to the higher gate oxide electric field accelerating the NBTI effect providing a higher degradation. This study was performed for different channel widths and lengths.
负偏置温度不稳定性(NBTI)是先进技术节点的重要可靠性参数。本文提出了一种在ω栅极纳米线(NW) pMOSFET中进行NBTI的实验研究。为了更好地理解NW晶体管中的NBTI效应,进行了三维数值模拟。结果表明,NW中NBTI的性能高($Delta$ V $approx200 -300$ mV -对于W = 10nm),这是由于较高的栅极氧化物电场加速了NBTI效应,提供了较高的降解效果。本研究针对不同的通道宽度和长度进行。
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引用次数: 2
Effect of silver nanoparticles on the optical amplification of lead germanium oxide glasses doped with Nd3+ 纳米银对掺Nd3+氧化铅锗玻璃光学放大的影响
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919465
C. Bordon, R. Gunji, D. Silva, M. M. Martins, L. Kassab
The effect of silver nanoparticles on the optical amplification of lead germanium oxide glasses (PbO-GeO2) doped with Nd3+ is presented in this work. Infrared photoluminescence at 1064 nm is investigated with the excitation made with a continuous-wave diode laser operating at 808 nm, in resonance with the Nd3+ transition (4 I9/2/4 F5/2). Growth of $sim 100$% in the photoluminescence intensity is observed in comparison with the reference sample without silver nanoparticles. Optical gain measurements using 2 mm thick samples are performed with a probe beam at 1064 nm and the pump beam at 808 nm. Gain of 2.5 dB/cm in the presence of metallic nanoparticles was measured when the pump laser power was of 1.0 W. The contribution of silver nanoparticles to the gain enhancement was of 100% and was correlated to the photoluminescence enhancement attributed to the increased local field produced by the metallic nanoparticles. The present study shows that PbO-GeO2 glasses containing Nd3+ and silver nanoparticles are potential candidates to be used in optical amplifiers at 1064 nm. Moreover, it demonstrates the possibility to perform light guiding and evaluate the optical gain performance before the construction of the photonic device using glasses fabricated with the melt quenching technique which is simple and cheap.
本文研究了纳米银对掺杂Nd3+的氧化铅锗玻璃(PbO-GeO2)光学放大的影响。用工作波长为808 nm的连续波二极管激光器,与Nd3+跃迁(4 I9/2/4 F5/2)共振,研究了1064 nm的红外光致发光。与不含银纳米粒子的参比样品相比,观察到光致发光强度增长了100 %。光学增益测量使用2毫米厚的样品进行探针光束在1064 nm和泵浦光束在808 nm。当泵浦激光功率为1.0 W时,测量到金属纳米颗粒存在时的增益为2.5 dB/cm。银纳米粒子对增益增强的贡献为100%,并且与金属纳米粒子产生的局部场增加引起的光致发光增强有关。本研究表明,含Nd3+和银纳米粒子的PbO-GeO2玻璃是用于1064 nm光放大器的潜在候选材料。此外,它还证明了用熔体淬火技术制作的玻璃在构建光子器件之前进行光引导和光学增益性能评估的可能性,该技术简单而廉价。
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引用次数: 2
Application of UTBBBE SOI Tunnel-FET as a Dual-Technology Transistor UTBBBE SOI隧道场效应管作为双技术晶体管的应用
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919316
A. B. Carlos Mori, G. D. Paula Agopian, J. Martino
In this work we propose for the first time the use of the recently introduced UTBBBE SOI TFET (Ultra-Thin Body and Box Back Enhanced Silicon-On-Insulator Tunnel-FET) operating as a MOSFET device only by changing its bias condition. The principle is based on the carrier type generated by the back gate electric field. For negative back gate and drain biases applied in the device studied in this work, it works like a pTFET, while for positive ones it operates as an nMOS. TCAD device simulation was used for the proof of concept.
在这项工作中,我们首次提出使用最近推出的UTBBBE SOI TFET(超薄体和盒背增强绝缘体上硅隧道fet)作为MOSFET器件,仅通过改变其偏置条件来工作。其原理是基于后门电场产生的载流子类型。对于负的后门和漏极偏置应用于本工作中研究的器件,它像pTFET一样工作,而对于正的偏置,它像nMOS一样工作。采用TCAD装置仿真进行概念验证。
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引用次数: 1
Trends and challenges in Tunnel-FETs for low power electronics 用于低功耗电子器件的隧道场效应管的发展趋势和挑战
Pub Date : 2019-08-01 DOI: 10.1109/SBMicro.2019.8919391
R. Rooyackers
The quest for low power electronics has driven extensive research on alternative device architectures. To maintain a sufficiently large ION/IOFF current ratio, devices with a subthreshold swing (SS) below the 60mV/decade limit as for MOSFETs are needed. Tunnel-FETs (TFET) promise a SS smaller than 60mV/dec and are therefore considered as interesting candidates to replace MOSFETs for low-power applications. However, the small band-to-band-tunneling efficiency due to the large indirect bandgap of silicon results in low on-currents of all-silicon TFETs. Therefore, new materials such as III-V compounds or germanium, featuring lower bandgaps and smaller effective mass to improve the tunneling efficiency, heterogeneous integration and different TFET device architectures are discussed. 2D semiconductors materials are also investigated for possible application in TFETs.
对低功耗电子器件的追求推动了对替代器件架构的广泛研究。为了保持足够大的ION/IOFF电流比,需要像mosfet那样具有低于60mV/ 10年限制的亚阈值摆幅(SS)的器件。隧道场效应管(TFET)承诺SS小于60mV/dec,因此被认为是替代mosfet的低功率应用的有趣候选者。然而,由于硅的间接带隙大,导致全硅tfet的带间隧道效率小,导致导通电流低。因此,为了提高隧道效率、异质集成和不同的ttfet器件结构,我们讨论了III-V化合物或锗等具有更小带隙和更小有效质量的新材料。二维半导体材料也在研究tfet的可能应用。
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引用次数: 1
期刊
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)
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