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2022 International Conference on Electronics Packaging (ICEP)最新文献

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Orange-Red Electrogenerated Chemiluminescence Cells Using Titanium Dioxide Nanoparticles Annealed at Different Temperatures 用二氧化钛纳米粒子在不同温度下退火的橘红色电致化学发光细胞
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795391
R. Kawasaki, R. Ishimatsu, K. Okada, J. Mizuno, T. Kasahara
We investigated an effect of the annealing temperature of titanium dioxide nanoparticles (TiO2 NPs) on luminescent performances of solution-based electrogenerated chemiluminescence (ECL) cells. The TiO2 NPs were spin-coated on a fluorine-doped tin oxide (FTO) cathode as an electron injection layer and then annealed at different temperatures of 250 °C and 450 °C. An orange-red ECL solution was prepared by dissolving a ruthenium complex in propylene carbonate. The ECL cell was fabricated by sandwiching the solution between the FTO anode and the TiO2 NPs-coated FTO cathode and evaluated under direct current (DC) voltages. The 450 °C-annealed cell was found to exhibit significant improvements in the luminance and the lifetime in comparison with the 250 °C-annealed cell.
研究了二氧化钛纳米颗粒(TiO2 NPs)的退火温度对溶液基电致化学发光(ECL)电池发光性能的影响。将TiO2纳米粒子自旋涂覆在掺氟氧化锡(FTO)阴极上作为电子注入层,然后在250°C和450°C的不同温度下退火。通过在碳酸丙烯酯中溶解钌络合物制备了橙红色的ECL溶液。通过将溶液夹在FTO阳极和TiO2 nps涂层的FTO阴极之间制备ECL电池,并在直流电压下进行评估。与250°c退火电池相比,450°c退火电池在亮度和寿命方面表现出显着改善。
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引用次数: 0
A Differentially Fed Dual-polarized Antenna-in-Package Based on Stacked TGV Interposers for 5G Application 一种基于堆叠式TGV中间体的差分馈电双极化封装天线
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795370
Gengtao Zhang, Haojie Chen, Yang Yang, Shengli Ma, Yufeng Jin
Based on stacked through glass via (TGV) interposers, a dual-polarized antenna-in-package is proposed for 5G application. The antenna element shows a 4.3 GHz (25.8 - 30.1 GHz) bandwidth, fully covering the n257 band (26.5 - 29.5 GHz), and good radiation performance with a 5.2 dBi gain and cross-polarization suppression higher than 35 dB at 28 GHz. Owing to the differential feeding networks, it displays high port isolation of more than 35 dB within the bandwidth. A 2 × 2 antenna subarray with an embedded IC in mirroring configuration is demonstrated to improve cross-polarization suppression by 12 dB compared with regular configuration.
提出了一种基于堆叠玻璃通孔(TGV)中间体的5G双极化封装天线。该天线单元具有4.3 GHz (25.8 ~ 30.1 GHz)带宽,完全覆盖n257频段(26.5 ~ 29.5 GHz),具有良好的辐射性能,增益为5.2 dBi, 28 GHz时交叉极化抑制高于35 dB。由于差分馈电网络,它在带宽内显示出超过35 dB的高端口隔离。采用嵌入式集成电路的2 × 2天线子阵列与常规结构相比,对交叉极化的抑制能力提高了12 dB。
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引用次数: 0
Manufacture of high-strength differential pressure sensor using SiCer technology 采用SiCer技术制造高强度差压传感器
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795558
C. Kleinholz, A. Cyriax, M. Hintz, J. Müller, T. Ortlepp
Commonly pressure sensors are often fabricated using silicon direct bonding or anodic bonding processes. Because of that additional preparation steps must be carried out and the achieved results of a high-strength bonding interface is not always sufficient. For this reason, the SiCer technology is a great advantage due to the combination of silicon and ceramics in a common sintering process and impress with good compatibility and high bonding strength.
通常,压力传感器通常采用硅直接键合或阳极键合工艺制造。因此,必须进行额外的制备步骤,并且获得的高强度粘合界面并不总是足够的。因此,SiCer技术具有很大的优势,因为硅和陶瓷在普通烧结工艺中结合,并且具有良好的相容性和高结合强度。
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引用次数: 0
Improved Inkjet Printing of Polydimethylsiloxane Droplets 改进的聚二甲基硅氧烷液滴喷墨打印技术
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795441
N. Tu, J. Lo, S.W. Ricky Lee
Inkjet printing polydimethylsiloxane (PDMS) has received wide interest in the field of additive manufacturing for printing flexible wearable electronics. Before depositing the PDMS on the target substrate with desired pattern, the PDMS ink must be ejected in a stable manner. One of the problems that affects the jetting quality is the satellite droplet coming with the dominate droplet during the printing process, which is known as the satellite effect. In this paper, we investigated the possibility of stable jetting of PDMS ink without the satellite effect. The cartridges with 10pl (FUJI Dimatix DMP-2850) were used to jet PDMS ink. The solvent for the preparation of PDMS ink was decane combined with toluene as a co-solvent for adjusting the physical properties of the PDMS ink. The generation of stable PDMS ink droplets was achieved by optimizing the mixture solvent of PDMS ink and the adjustment of the printing voltage waveform, which indicated the inkjet printing of PDMS is a promising method for fabricating flexible wearable electronics.
喷墨打印聚二甲基硅氧烷(PDMS)在打印柔性可穿戴电子产品的增材制造领域受到了广泛的关注。在将PDMS沉积在具有所需图案的目标基材上之前,PDMS油墨必须以稳定的方式喷射。影响喷墨质量的问题之一是在打印过程中随主导液滴而来的卫星液滴,即卫星效应。本文研究了不受卫星效应影响的PDMS油墨稳定喷射的可能性。使用10pl (FUJI Dimatix DMP-2850)墨盒喷射PDMS油墨。制备PDMS油墨的溶剂是癸烷与甲苯结合,作为调节PDMS油墨物理性能的助溶剂。通过优化PDMS墨水的混合溶剂和调整打印电压波形,实现了稳定的PDMS墨滴的生成,表明PDMS喷墨打印是一种很有前途的柔性可穿戴电子产品制造方法。
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引用次数: 1
Terminal Reaction Behaviors in Micro Bumps: Comparison of Ti and Cr Adhesion Layers 微凸起中的末端反应行为:Ti和Cr粘附层的比较
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795638
Chen-Wei Kao, P. Kung, Chih-Chia Chang, C. Kao
In this research, the terminal reaction of the Ti adhesion layer with Sn/Cu IMCs is discussed through thermal aging, which Ti is fully attached to Sn/Cu IMCs. The samples are first fabricated by electroplating Cu and Sn sequentially on the Ti adhesion layer to form micro bumps and then underwent thermal aging at 200 °C to observe the evolution between layers. After thermal aging from 0 h to 72 h, the micro bumps all transform into intermetallic structures (IMCs), yet they all attach well with the Ti adhesion layer. Moreover, the difference in diffusion rate between Cu and Sn will lead to some voids during aging. These voids will progress to the center of the bump through the depletion of the Cu layer, but they do not affect the attachment between the IMCs and the adhesion layer. To conclude, using Ti as an adhesion layer shows better adhesive behavior with IMCs than using Cr.
本研究通过热时效的方法探讨了Ti与Sn/Cu IMCs的末端反应,即Ti完全附着在Sn/Cu IMCs上。首先在Ti附着层上依次电镀Cu和Sn,形成微凸起,然后在200℃下进行热时效,观察层间的演变。热时效0 ~ 72 h后,微凸起均转变为金属间结构(IMCs),且均与Ti附着层有良好的结合。此外,Cu和Sn在时效过程中扩散速率的差异也会导致气孔的产生。这些空洞将通过Cu层的耗尽向凸起的中心移动,但它们不影响IMCs与粘附层之间的附着。综上所述,使用Ti作为粘接层比使用Cr具有更好的粘接性能。
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引用次数: 0
Advanced Low Dk and High-Density Photo- Imageable Dielectrics for RDL Interposer 用于RDL中间体的先进低Dk和高密度光成像介电材料
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795456
Tetsuya Nemoto, Junichi Ooto, Hirokazu Ito, Koichi Hasegawa
Future Redistribution Layer (RDL) interposer requires low dielectric constant (Dk) and high density RDL layers to improve signal and power integrity in high- performance computing (HPC) application. This paper proposes alkali-developable photo-imageable dielectrics (PID), FG-Series with low Dk of 2.9 at 10GHz, which enable 2μm-via patterning and provide biased high accelerated stress test (b- HAST) resistance on 2μm-L/S Cu traces. FG-series is promising candidates to enable low signal delay, high density and good reliability for RDL interposer.
未来的再分配层(RDL)中间层需要低介电常数(Dk)和高密度的RDL层,以提高高性能计算(HPC)应用中的信号和功率完整性。本文提出了碱显影光成像电介质fg系列(PID),其在10GHz下的Dk低至2.9,可实现2μm-via图像化,并在2μm-L/S Cu走线上提供偏置高加速应力测试(b- HAST)电阻。fg系列是实现低信号延迟、高密度和高可靠性的RDL中介器的有希望的候选者。
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引用次数: 0
Characteristic Analysis of a Multi-chip Embedded Interposer Carrier using a Wafer-Level Fan-Out Process 基于晶圆级扇出工艺的多芯片嵌入式中介载波特性分析
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795583
C. Lee, Wen-Hung Liu, Shu-Yi Chang, Ren-Shin Cheng, Yu-Min Lin, Hsiang-En Ding, W. Chiu, T. Chang, Chia-Hsin Lee, Chang-Chun Lee
In this paper, we investigated the structural analysis and electrical characteristics of EIC(Embedded Interposer Carrier) structure. The multi-chip EIC structure including a fan-out RDL process has been evaluated and developed. Key technologies including embedded interposers, molding process, temporary bonding, and RDL formation have been developed and integrated with good performance. The results indicate that the EIC carrier can be integrated, and there are data showing the feasibility of the chiplet in electronics applications. The electrical analysis will show not only frequency- and time-domain measurements under different lengths of interconnects but also the correlation between model and verification. In this new packaging structure, it is compatible with fan-out packaging technology and is easy to combine different chips to achieve performance close to 3D IC under a limited cost structure.
本文对EIC(Embedded Interposer Carrier)结构进行了结构分析和电学特性研究。对包括扇出RDL工艺在内的多芯片EIC结构进行了评估和开发。嵌入式中间体、成型工艺、临时粘接、RDL形成等关键技术得到了开发和集成,并取得了良好的性能。结果表明,EIC载波是可以集成的,并且有数据表明该芯片在电子应用中的可行性。电学分析不仅显示了不同互连长度下的频域和时域测量结果,而且还显示了模型和验证之间的相关性。在这种新的封装结构中,它与扇出封装技术兼容,并且易于组合不同的芯片,在有限的成本结构下实现接近3D IC的性能。
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引用次数: 0
Dual Referencing Simulation Approach on High Speed Interconnects USB3.2 (10Gbps) 高速互连USB3.2 (10Gbps)双参考仿真方法
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795442
Li Wern Chew, Paik Wen Ong
Despite our computing technology and platform design are trending toward higher speeds for better performance, on the contrary, the printed circuit board (PCB) form factor needs to scale smaller and thinner to allow for bigger battery for battery life improvement. Due to this, layout design with dual referenced (SIG-PWR or GND-SIG-PWR) stack-up could not be avoided at all due to the limitation that we have on routing spaces or routing layers. In this paper, signal and power integrity (SIPI) co-simulation approach on USB3.2 with dual referencing is described and discussed. The co-sim approach is carried out using Advanced Design System (ADS) tool in time-domain where the power noise is directly injected to the power plane and its noise coupling impact on USB3.2 eye opening at the receiver end is then observed.
尽管我们的计算技术和平台设计趋向于更高的速度以获得更好的性能,但相反,印刷电路板(PCB)的外形因素需要更小更薄,以允许更大的电池以提高电池寿命。因此,由于我们在路由空间或路由层上的限制,无法避免使用双引用(SIG-PWR或GND-SIG-PWR)堆叠的布局设计。本文描述并讨论了双参考USB3.2的信号与功率完整性(SIPI)联合仿真方法。采用时域高级设计系统(ADS)工具进行co-sim方法,将功率噪声直接注入功率平面,然后观察其噪声耦合对接收端USB3.2睁眼的影响。
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引用次数: 1
Joining Dissimilar Materials Using Three-Dimensional Electrodeposited Film 用三维电沉积膜连接不同材料
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795513
T. Kobayashi, K. Yamazaki, I. Shohji
In this study, the effect of the shape of Ni-Cu alloy electrodeposited films, which was changed by using different concentrations of Ni amidosulfate in a plating bath, on the joint strength of stainless steel/CFRTP and aluminum alloy/CFRTP lap joint specimens was investigated. A lap joint specimen with the stainless steel and CFRTP joined using the Ni-Cu alloy electrodeposited film made of 450 g/L Ni amidosulfate showed an average joint strength of 18.4 MPa, which is higher than any of the other conditions. The average joint strength of the aluminum alloy/CFRTP ranged from 7 to 10 MPa.
本文研究了不同浓度的氨基硫酸镍对镍铜合金电沉积膜形状对不锈钢/CFRTP和铝合金/CFRTP搭接试样接头强度的影响。用450 g/L氨基硫酸镍制备镍铜合金电沉积膜连接不锈钢与CFRTP搭接接头,接头平均强度为18.4 MPa,高于其他任何条件。铝合金/CFRTP的平均接头强度为7 ~ 10 MPa。
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引用次数: 0
Cost and Yield Analysis of Die-to-Wafer Hybrid Bonding 晶圆-晶圆复合键合的成本与成品率分析
Pub Date : 2022-05-11 DOI: 10.23919/ICEP55381.2022.9795476
A. Lujan
Copper hybrid bonding has been a topic in microelectronics packaging for years now, as it enables connections that provide more bandwidth at lower power. Although wafer-to-wafer hybrid bonding has been in use in the CMOS industry since 2016, wafer-to-wafer bonding is limited to creating stacks where the top and bottom die are the same size. With die-to-wafer (D2W) hybrid bonding, heterogeneous integration of different-sized chips is enabled. However, questions remain about the cost of implementing this process, where precise placement of each chip is necessary for high yields. This paper discusses the D2W hybrid bonding process and explore the cost and yield in various scenarios.
铜混合键合多年来一直是微电子封装领域的一个话题,因为它可以在更低的功耗下提供更多的带宽。尽管自2016年以来,晶圆对晶圆混合键合一直在CMOS行业中使用,但晶圆对晶圆键合仅限于制造顶部和底部芯片尺寸相同的堆栈。采用芯片到晶圆(D2W)混合键合,可以实现不同尺寸芯片的异构集成。然而,实施该工艺的成本问题仍然存在,因为每个芯片的精确放置是高产量所必需的。本文讨论了D2W杂化键合工艺,并探讨了各种情况下的成本和成品率。
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引用次数: 1
期刊
2022 International Conference on Electronics Packaging (ICEP)
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