Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672188
J. Zehnpfennig, M. Tomes, T. Carmon
We analyze circumferentially circulating mechanical whispering-gallery modes [WGM] resonating in a micron scaled silica sphere. We recently showed that such modes can be excited optically [1]. A variety of modes are calculated in which the deformation is polar, radial or azimuthal. Additionally, we calculate Rayleigh WGMs for which points on the surface follow a circular path.
{"title":"Surface optomechanics: Mechanical whispering-gallery modes in microspheres","authors":"J. Zehnpfennig, M. Tomes, T. Carmon","doi":"10.1109/OMEMS.2010.5672188","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672188","url":null,"abstract":"We analyze circumferentially circulating mechanical whispering-gallery modes [WGM] resonating in a micron scaled silica sphere. We recently showed that such modes can be excited optically [1]. A variety of modes are calculated in which the deformation is polar, radial or azimuthal. Additionally, we calculate Rayleigh WGMs for which points on the surface follow a circular path.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"210 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132195236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672161
S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, H. Toshiyoshi
We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.
{"title":"A mixed-signal analysis for tilted MEMS torsion mirror devices","authors":"S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, H. Toshiyoshi","doi":"10.1109/OMEMS.2010.5672161","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672161","url":null,"abstract":"We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117177605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672184
S. Weber, J. Extermann, W. Noell, F. Jutzi, S. Lani, D. Kiselev, L. Bonacina, N. D. de Rooij, J. Wolf
We report our progress and the first optical application on the high-aspect ratio micromirror array for UV-NIR femtosecond (fs) broadband pulse shaping [1]. It is a bulk-micromachined device. capable of individually addressing 100 mirrors with a stroke of up to 3 μm using vertical comb drives in a novel. symmetrical double-spring design. The device was successfully implemented in a fs pulse shaper setup at λ0=795 nm.
{"title":"Linear MEMS micromirror array for UV-NIR femtosecond pulse shaping","authors":"S. Weber, J. Extermann, W. Noell, F. Jutzi, S. Lani, D. Kiselev, L. Bonacina, N. D. de Rooij, J. Wolf","doi":"10.1109/OMEMS.2010.5672184","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672184","url":null,"abstract":"We report our progress and the first optical application on the high-aspect ratio micromirror array for UV-NIR femtosecond (fs) broadband pulse shaping [1]. It is a bulk-micromachined device. capable of individually addressing 100 mirrors with a stroke of up to 3 μm using vertical comb drives in a novel. symmetrical double-spring design. The device was successfully implemented in a fs pulse shaper setup at λ0=795 nm.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121923845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672181
Xiongyeu Chew, Guangya Zhou, F. Chau, Jie Deng, Xiaosong Tang, Y. C. Loke
We report a MEMS-integrated on-chip tunable resonator consisting of two coupled one-dimensional (1D) Photonic Crystal nanocavities capable of achieving a relatively large tuning range with no significant deterioration of quality factor and sufficiently large transmissions.
{"title":"Mechanically tunable coupled photonic crystal nanocavities","authors":"Xiongyeu Chew, Guangya Zhou, F. Chau, Jie Deng, Xiaosong Tang, Y. C. Loke","doi":"10.1109/OMEMS.2010.5672181","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672181","url":null,"abstract":"We report a MEMS-integrated on-chip tunable resonator consisting of two coupled one-dimensional (1D) Photonic Crystal nanocavities capable of achieving a relatively large tuning range with no significant deterioration of quality factor and sufficiently large transmissions.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126422931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672146
S. Chalasani, Y. Xie, Y. Zeng, C. Mastrangelo
The batch fabrication and test of artificial optical resonator slab-type micro particles (14 µm diameter, 0.7 µm gap) is presented as a means to map absolute pressure within microscopic environments. The pressure-sensing particles consist of a semi-transparent elastic polysilicon shell enclosing a reference vacuum cavity. The optical resonance frequency and the corresponding external pressure can hence be interrogated optically via reflectivity measurements. We demonstrate the measurement of internal pressures between 0−20 psi within microfluidic environments.
{"title":"Batch fabrication of flowable colorimetric pressure sensing particles via surface micromachining","authors":"S. Chalasani, Y. Xie, Y. Zeng, C. Mastrangelo","doi":"10.1109/OMEMS.2010.5672146","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672146","url":null,"abstract":"The batch fabrication and test of artificial optical resonator slab-type micro particles (14 µm diameter, 0.7 µm gap) is presented as a means to map absolute pressure within microscopic environments. The pressure-sensing particles consist of a semi-transparent elastic polysilicon shell enclosing a reference vacuum cavity. The optical resonance frequency and the corresponding external pressure can hence be interrogated optically via reflectivity measurements. We demonstrate the measurement of internal pressures between 0−20 psi within microfluidic environments.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125272142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672147
K. Masuno, S. Kumagai, K. Tashiro, M. Hori, M. Sasaki
New methods to integrate wavelength selective filter into a thermopile detector using absorbance spectrum of a polymer material and to deposit the absorber selectively onto hot junctions of the thermopile detector are proposed. Hydrophilic absorber solution is selectively deposited on hydrophilic region on the detector. The fabricated detector shows +100% increases from baseline at λpeak of the absorber. Use of molecular absorption is considered effective to accomplish stable SNR against temperature change.
{"title":"Enhanced contrast of wavelength selective Mid-IR detector stable against temperature change","authors":"K. Masuno, S. Kumagai, K. Tashiro, M. Hori, M. Sasaki","doi":"10.1109/OMEMS.2010.5672147","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672147","url":null,"abstract":"New methods to integrate wavelength selective filter into a thermopile detector using absorbance spectrum of a polymer material and to deposit the absorber selectively onto hot junctions of the thermopile detector are proposed. Hydrophilic absorber solution is selectively deposited on hydrophilic region on the detector. The fabricated detector shows +100% increases from baseline at λpeak of the absorber. Use of molecular absorption is considered effective to accomplish stable SNR against temperature change.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131923000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672175
Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau
This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant frequency tuning was achieved. The resonant frequency of one diffraction grating gradually dropped from 19870 Hz to 19588 Hz with its tuning voltages increased from 0V to 5V. Finally, synchronized laser scanning of multiple beams was demonstrated using stroboscopic method.
{"title":"Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms","authors":"Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau","doi":"10.1109/OMEMS.2010.5672175","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672175","url":null,"abstract":"This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant frequency tuning was achieved. The resonant frequency of one diffraction grating gradually dropped from 19870 Hz to 19588 Hz with its tuning voltages increased from 0V to 5V. Finally, synchronized laser scanning of multiple beams was demonstrated using stroboscopic method.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114434637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672200
D. Dao, S. Amaya, S. Sugiyama
This paper presents a novel fabrication of a monolithic PMMA torsional mirror utilizing hot embossing, surface-activated direct bonding, and the elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Monolithic PMMA torsional mirror actuated by vertical comb actuator has been fabricated and tested successfully. Since the Young's modulus is 50 times lower than that of Si, the driving voltage of the PMMA actuator should be 7 times lower than that of silicon counterpart.
{"title":"Polymer-MEMS torsion mirror with large rotation angle and low driving voltage","authors":"D. Dao, S. Amaya, S. Sugiyama","doi":"10.1109/OMEMS.2010.5672200","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672200","url":null,"abstract":"This paper presents a novel fabrication of a monolithic PMMA torsional mirror utilizing hot embossing, surface-activated direct bonding, and the elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Monolithic PMMA torsional mirror actuated by vertical comb actuator has been fabricated and tested successfully. Since the Young's modulus is 50 times lower than that of Si, the driving voltage of the PMMA actuator should be 7 times lower than that of silicon counterpart.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124431320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672207
Jaeyong An, Jisung Hur, Sung-Kil Lee, Jong-Hyun Lee
An eye-shaped coplanar liquid lens was fabricated using spherical polymer encapsulation to enhance the focusing power. For the spherical encapsulation, a thin film polymer layer was deposited by chemical vapor deposition on an outer surface of the top liquid. Polymer thin film (parylene) encapsulation with coplanar structure provides a unique advantage of wafer level packaging of liquid lens and convenient accessibility of the electrical signal. The fabricated variable liquid lens with an initial focal length of 35mm was tuned up to 12mm at Vrms 70 V.
{"title":"Eye-shaped coplanar variable liquid lens using spherical polymer encapsulation","authors":"Jaeyong An, Jisung Hur, Sung-Kil Lee, Jong-Hyun Lee","doi":"10.1109/OMEMS.2010.5672207","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672207","url":null,"abstract":"An eye-shaped coplanar liquid lens was fabricated using spherical polymer encapsulation to enhance the focusing power. For the spherical encapsulation, a thin film polymer layer was deposited by chemical vapor deposition on an outer surface of the top liquid. Polymer thin film (parylene) encapsulation with coplanar structure provides a unique advantage of wafer level packaging of liquid lens and convenient accessibility of the electrical signal. The fabricated variable liquid lens with an initial focal length of 35mm was tuned up to 12mm at Vrms 70 V.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116751231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A translatory MOEMS actuator with extraordinary large stroke — especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers — is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.
{"title":"Translatory MEMS actuator with extraordinary large stroke for optical path length modulation","authors":"T. Sandner, T. Grasshoff, H. Schenk","doi":"10.1117/12.879069","DOIUrl":"https://doi.org/10.1117/12.879069","url":null,"abstract":"A translatory MOEMS actuator with extraordinary large stroke — especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers — is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128562601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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