Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672158
M. Mita, T. Mizuno, M. Ataka, H. Toshiyoshi
We have developed a novel 2-axis MEMS scanner of the small laser radar for landing to the planet. The scanner has to overcome launching vibration and impact and can be used in harsh environment of the space.
{"title":"A 2-axis MEMS scanner for the landing laser radar of the space explorer","authors":"M. Mita, T. Mizuno, M. Ataka, H. Toshiyoshi","doi":"10.1109/OMEMS.2010.5672158","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672158","url":null,"abstract":"We have developed a novel 2-axis MEMS scanner of the small laser radar for landing to the planet. The scanner has to overcome launching vibration and impact and can be used in harsh environment of the space.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"180 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131803747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672193
Sung-Yong Park, Ting-Hsiang Wu, Yue Chen, P. Chiou
We report on an ultra-fast, pulse laser-driven droplet generation (PLDG) mechanism that enables on-demand droplet generation up to 10,000 droplets/sec, and continuous tuning of injected droplet volume ranging from 1pL to 150pL with precise volume control (0.26% volume variation) in a microfluidic device. On-demand droplet generation in PLDG is realized by focusing intense laser pulses into water to induce rapid bubble expansion and perturbing an oil-water interface for droplet formation. Device reliability testing of continuous excitation for 3.6 million laser pulsing cycles is also achieved without any damages.
{"title":"A laser driven optofluidic device for high-speed and precise volume-controlled droplet generation on demand","authors":"Sung-Yong Park, Ting-Hsiang Wu, Yue Chen, P. Chiou","doi":"10.1109/OMEMS.2010.5672193","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672193","url":null,"abstract":"We report on an ultra-fast, pulse laser-driven droplet generation (PLDG) mechanism that enables on-demand droplet generation up to 10,000 droplets/sec, and continuous tuning of injected droplet volume ranging from 1pL to 150pL with precise volume control (0.26% volume variation) in a microfluidic device. On-demand droplet generation in PLDG is realized by focusing intense laser pulses into water to induce rapid bubble expansion and perturbing an oil-water interface for droplet formation. Device reliability testing of continuous excitation for 3.6 million laser pulsing cycles is also achieved without any damages.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130169533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672195
Y. Baba
The lecture will describe new synthetic method for quantum dots (QDs) and their applications to the single molecular real-time imaging of enzymatic reaction, single cancer cell and cancer stem cell imaging, stem cell in vivo imaging, imaging of single QD tracking in a single living cell for cancer diagnosis, stem cell therapy, and gene delivery therapy [1–14].
{"title":"Nanobiodevice based single cell imaging for cancer diagnosis and in vivo imaging for stem cell therapy","authors":"Y. Baba","doi":"10.1109/OMEMS.2010.5672195","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672195","url":null,"abstract":"The lecture will describe new synthetic method for quantum dots (QDs) and their applications to the single molecular real-time imaging of enzymatic reaction, single cancer cell and cancer stem cell imaging, stem cell in vivo imaging, imaging of single QD tracking in a single living cell for cancer diagnosis, stem cell therapy, and gene delivery therapy [1–14].","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132243650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672189
P. Lo, D. Kwong
Copper interconnect is unlikely to be the ultimate solution to support the growing functionalities of next generation microprocessor due to its information latency and power consumption. Converging EPIC on a single chip platform to enable functional diversification emerges as one promising approach to be realized by taking the advantage of low energy and huge data capacity of optical interconnects. In this presentation, we present an overview on the current status of this critical technology development and provide an outlook and strategies for the integration of Si micro- and nano-photonics to meet the bandwidth and energy requirements of data communication in future technology nodes.
{"title":"Silicon integrated electronic-photonic ICs","authors":"P. Lo, D. Kwong","doi":"10.1109/OMEMS.2010.5672189","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672189","url":null,"abstract":"Copper interconnect is unlikely to be the ultimate solution to support the growing functionalities of next generation microprocessor due to its information latency and power consumption. Converging EPIC on a single chip platform to enable functional diversification emerges as one promising approach to be realized by taking the advantage of low energy and huge data capacity of optical interconnects. In this presentation, we present an overview on the current status of this critical technology development and provide an outlook and strategies for the integration of Si micro- and nano-photonics to meet the bandwidth and energy requirements of data communication in future technology nodes.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"170 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132311449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672152
B. T. Chia, Cheng-Wen Ma, B. Liao, Sun-Chih Shih, Y. Yang
This paper presents the development of a 2×2 optical switch which consists of a MEMS-based silicon micro-mirror structure and two bi-stable solenoid-based actuators. The silicon micro-mirror structure is realized by using a proposed simple single-step anisotropic silicon etching process. Bi-stable solenoid-based actuators are designed and developed. The proposed device, which adapts the split-cross bar (SCB) design as the optical-path configuration, has many advantages such as low power consumption, easy fiber alignment, simple manufacturing process, and simple actuation scheme. The measured insertion loss of the device is about −0.9 ∼ −1.1 dB. The long-term reliability test shows that the deviations of the insertion losses are less than 0.03 dB after 10,000 switching cycles. Also, the measured cross-talk is about −60 dB, and the measured switching time is less than 10 ms.
{"title":"Development of a 2×2 optical switch using bi-stable solenoid-based actuators","authors":"B. T. Chia, Cheng-Wen Ma, B. Liao, Sun-Chih Shih, Y. Yang","doi":"10.1109/OMEMS.2010.5672152","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672152","url":null,"abstract":"This paper presents the development of a 2×2 optical switch which consists of a MEMS-based silicon micro-mirror structure and two bi-stable solenoid-based actuators. The silicon micro-mirror structure is realized by using a proposed simple single-step anisotropic silicon etching process. Bi-stable solenoid-based actuators are designed and developed. The proposed device, which adapts the split-cross bar (SCB) design as the optical-path configuration, has many advantages such as low power consumption, easy fiber alignment, simple manufacturing process, and simple actuation scheme. The measured insertion loss of the device is about −0.9 ∼ −1.1 dB. The long-term reliability test shows that the deviations of the insertion losses are less than 0.03 dB after 10,000 switching cycles. Also, the measured cross-talk is about −60 dB, and the measured switching time is less than 10 ms.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125645301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672182
H. Altug, A. Yanik, R. Adato, S. Aksu, A. Artar, Min A. Huang
Plasmonics, by localizing light to the sub-wavelength volumes and dramatically enhancing local fields, is enabling myriad of exciting possibilities in bio-detection field [1]. In this talk, first I will demonstrate an ultra-sensitive surface-enhanced infrared spectroscopy enabling direct detection of molecular specific signatures of proteins from monolayer thick films. Our method exploits engineering of diffractive couplings among plasmonic nano-antenna arrays. I will then present a low-cost fabrication method for high-throughput fabrication of these engineered antenna arrays. Finally, I will show an integrated nanoplasmonic-nanofluidic sensor platform leading to targeted analyte delivery and dramatically improved sensor response time.
{"title":"Plasmonics for ultrasensitive biomolecular nanospectroscopy","authors":"H. Altug, A. Yanik, R. Adato, S. Aksu, A. Artar, Min A. Huang","doi":"10.1109/OMEMS.2010.5672182","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672182","url":null,"abstract":"Plasmonics, by localizing light to the sub-wavelength volumes and dramatically enhancing local fields, is enabling myriad of exciting possibilities in bio-detection field [1]. In this talk, first I will demonstrate an ultra-sensitive surface-enhanced infrared spectroscopy enabling direct detection of molecular specific signatures of proteins from monolayer thick films. Our method exploits engineering of diffractive couplings among plasmonic nano-antenna arrays. I will then present a low-cost fabrication method for high-throughput fabrication of these engineered antenna arrays. Finally, I will show an integrated nanoplasmonic-nanofluidic sensor platform leading to targeted analyte delivery and dramatically improved sensor response time.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125500750","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672183
C. Lo, Chensha Li, Hongrui Jiang
Solar energy harvesting and storage are important topics of renewable energy. Current solid-state photovoltaic cells and conventional photoelectrochemical cells cannot harvest and directly store the converted energy within one single structure. We report on a photocapacitor that can convert and store solar energy based on a bio-inspired mechanism. The photocapacitor converts the solar energy through photovoltaic effect, and stores the converted energy by maintaining the concentration difference across a membrane upon light irradiation. Results have shown that the device can be charged photovoltaically and hold the voltage of 0.47V with a capacity of 40.63 mC/cm2 for more than 24 hours.
{"title":"A photoelectrophyscial capacitor with direct solar energy harvesting and storage capability","authors":"C. Lo, Chensha Li, Hongrui Jiang","doi":"10.1109/OMEMS.2010.5672183","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672183","url":null,"abstract":"Solar energy harvesting and storage are important topics of renewable energy. Current solid-state photovoltaic cells and conventional photoelectrochemical cells cannot harvest and directly store the converted energy within one single structure. We report on a photocapacitor that can convert and store solar energy based on a bio-inspired mechanism. The photocapacitor converts the solar energy through photovoltaic effect, and stores the converted energy by maintaining the concentration difference across a membrane upon light irradiation. Results have shown that the device can be charged photovoltaically and hold the voltage of 0.47V with a capacity of 40.63 mC/cm2 for more than 24 hours.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125924507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672159
H. M. Chu, K. Hane
We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal frame, respectively. The scanner can be actuated simultaneously and independently in the two orthogonal axes using a slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges. The dependence of quality factor on pressure for the inner mirror and gimbal frame was also experimentally investigated and compared with the theoretical calculation based on air-friction models.
{"title":"Vacuum operation characteristics of two-dimensional micro-mirror","authors":"H. M. Chu, K. Hane","doi":"10.1109/OMEMS.2010.5672159","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672159","url":null,"abstract":"We present design, fabrication and characteristics of two-dimensional micro-machined scanner. The resonant frequencies of horizontal and vertical axes are 40 kHz and 162 Hz for the inner mirror and gimbal frame, respectively. The optical scanning angles are obtained to be 11.5 and 14 degrees at the low driving voltages of 12 and 10 V in 1 Pa vacuum for the horizontal inner mirror and vertical gimbal frame, respectively. The scanner can be actuated simultaneously and independently in the two orthogonal axes using a slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges. The dependence of quality factor on pressure for the inner mirror and gimbal frame was also experimentally investigated and compared with the theoretical calculation based on air-friction models.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126897681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672123
Yi-Hao Chen, A. Kaplan, L. Guo
Split ring resonators (SRRs) have been widely studied as fundamental elements of metamaterials showing magnetic response. In order to search for metamaterials with negative refractive index, we studied the electromagnetic properties of structures with modified SRRs. We proposed a structure composed of continuous SRRs showing both negative µ and negative ε. Experimental results are supported by numerical results to show negative refractive index at visible frequencies.
{"title":"Magnetic response of continuous split ring structures at visible frequencies","authors":"Yi-Hao Chen, A. Kaplan, L. Guo","doi":"10.1109/OMEMS.2010.5672123","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672123","url":null,"abstract":"Split ring resonators (SRRs) have been widely studied as fundamental elements of metamaterials showing magnetic response. In order to search for metamaterials with negative refractive index, we studied the electromagnetic properties of structures with modified SRRs. We proposed a structure composed of continuous SRRs showing both negative µ and negative ε. Experimental results are supported by numerical results to show negative refractive index at visible frequencies.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127010410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-17DOI: 10.1109/OMEMS.2010.5672131
Robert Boeck, N. Jaeger, L. Chrostowski
We demonstrate the design and performance of series-coupled racetrack resonators in silicon-on-insulator. The device was modeled and optimized by tuning various parameters such as power coupling factors and resonator dimensions. The Vernier effect is experimentally verified with an extended free spectral range of 36.2 nm and an interstitial resonance suppression of more than 11 dB. To the best of our knowledge, we have shown the closest match between experimental and theoretical results for the Vernier effect. Devices exhibiting similar performance to the one reported on here should be useful in applications such as wavelength division multiplexers and optical sensors.
{"title":"Experimental demonstration of the Vernier effect using series-coupled racetrack resonators","authors":"Robert Boeck, N. Jaeger, L. Chrostowski","doi":"10.1109/OMEMS.2010.5672131","DOIUrl":"https://doi.org/10.1109/OMEMS.2010.5672131","url":null,"abstract":"We demonstrate the design and performance of series-coupled racetrack resonators in silicon-on-insulator. The device was modeled and optimized by tuning various parameters such as power coupling factors and resonator dimensions. The Vernier effect is experimentally verified with an extended free spectral range of 36.2 nm and an interstitial resonance suppression of more than 11 dB. To the best of our knowledge, we have shown the closest match between experimental and theoretical results for the Vernier effect. Devices exhibiting similar performance to the one reported on here should be useful in applications such as wavelength division multiplexers and optical sensors.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129002534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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