In this study, a Cu-doped ZnO/TiO₂ film capable of detecting NO gas at room temperature of 25 ℃ was fabricated using a dry deposition process, the nanoparticle deposition system (NPDS). Cu-doped ZnO nanopowders were synthesized via the wet impregnation method and mixed with TiO₂ to improve their adhesion to the substrate. The fabricated Cu-doped ZnO/TiO₂ film exhibited responses of 19.60 % to 240 ppm NO gas and 6.91 % to 10 ppm NO gas at 25 ℃. Gas-sensing performances were compared with those of an undoped ZnO/TiO₂ film. The Cu-doped ZnO/TiO₂ film demonstrated 3.2 times higher response at 50 °C and 8.3 times higher response at 200 °C than the undoped film. Notably, while the undoped ZnO/TiO₂ film did not respond at 25 ℃, the Cu-doped ZnO/TiO₂ film maintained stable sensing capability under the same conditions. These results indicate that Cu doping induces electron redistribution near oxygen vacancy sites in ZnO, enhancing reactivity at 50 °C and enabling NO gas ionization even at 25 ℃, thus playing a critical role in ensuring stable operation at low temperatures. Furthermore, the room temperature-operable Cu-doped ZnO/TiO₂ sensor was integrated with a viologen-based electrochromic device controlled by an Arduino, enabling a visual gas-sensing system that displayed real-time color changes in response to gas exposure. In conclusion, Cu-doped ZnO nanopowders synthesized via wet impregnation were successfully deposited onto substrates using NPDS. Cu doping was found to be essential at 25 ℃ operation and improved sensing reactivity.
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