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2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)最新文献

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Reliability of UHF RFID tags in humid environments 超高频RFID标签在潮湿环境中的可靠性
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507074
K. Saarinen, L. Frisk
Radio frequency identification (RFID) is an emerging technology in the field of identification and security. With RFID tags it is possible to identify objects individually and reliably using radio waves. However, due to numerous applications, RFID tags are exposed to various environmental conditions which may impair their reliability. Long-term reliability is generally studied using accelerated environmental tests. In earlier studies a combination of high humidity and high temperature has been found to be very harmful to RFID tags. Consequently, in this study failure times and mechanisms between three accelerated humidity tests were compared to find a test which is most suitable for RFID tags. A passive ultra high frequency (UHF) RFID tag with a polyethylene terephthalate (PET) substrate was tested using two constant humidity tests and a humidity cycling test. According to this study, the selection of test conditions for reliability studies in humid environments should be carefully considered. PET substrate is susceptible to hydrolysis when a combination of high humidity and high temperature is present. Consequently, a standard 85°C/85% test is very harsh for RFID tags with PET substrate. On the other hand if a cycling test is used instead of a constant test to acclerate the test, the failure mechanism may alter. Therefore it is important to investigate the effects of changing humidity, but a constant humidity test cannot be directly replaced by the faster humidity cycling test due to the different stresses caused by the tests.
射频识别(RFID)是身份识别和安全领域的一项新兴技术。有了RFID标签,就可以利用无线电波单独可靠地识别物体。然而,由于众多的应用,RFID标签暴露在各种环境条件下,这可能会损害其可靠性。长期可靠性研究一般采用加速环境试验。在早期的研究中,高湿和高温的结合已经发现对RFID标签非常有害。因此,在本研究中,三个加速湿度测试之间的失败时间和机制进行了比较,以找到最适合RFID标签的测试。采用恒湿试验和湿循环试验对采用聚对苯二甲酸乙二醇酯(PET)衬底的无源超高频(UHF) RFID标签进行了测试。根据本研究,在潮湿环境下进行可靠性研究时,应慎重考虑试验条件的选择。当存在高湿度和高温的组合时,PET基材容易水解。因此,标准85°C/85%测试对于PET基板的RFID标签非常苛刻。另一方面,如果使用循环试验而不是恒定试验来加速试验,则失效机制可能会改变。因此,研究湿度变化的影响是很重要的,但由于试验产生的应力不同,恒湿试验不能直接被更快的湿度循环试验所取代。
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引用次数: 6
Development of new TSV structure composing of intermetallic compounds 新型TSV结构金属间化合物组成的研究进展
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507108
Daquan Yu, Xiaoyang Liu, R. He, X. Jing, Chongshen Song, Fengwei Dai, Yu Sun, L. Wan
TSV was regarded as the core technology enabling 3D IC integration. For volume production, the requirement of low-cost TSV fabrication process was a big challenge. In order to find a fast filling method, new Cu plating solutions are desirable and some new filling method using solder, Cu cored solder ball were studied. A new TSV structure composed of intermetallic compounds (IMCs) was proposed in present paper and the manufacturing process was introduced. To form such a TSV structure, it needs to fill liquid solder into the vias and accelerate the inter-diffusion of solder and metal on the sidewall of the vias by annealing. The feasibility of the formation of IMC TSVs was studied using SnPb solder. The solder was filled into the vias in which partial annular Cu layer was plated. Successful voids free filling with thin protrusion of solder material on the top of the vias was achieved. Finite element analysis (FEA) of TSV filling with Cu, solder and Sn-based IMC were carried out and the results showed that the IMC filled TSVs can get comparable or even lower stress depending on the CTE of the IMCs. According to present results, it can be concluded that the IMC TSVs have the following merits: fast and low cost forming process, good high temperature stability and the lower stress.
TSV被认为是实现3D集成电路的核心技术。对于批量生产,低成本的TSV制造工艺是一个很大的挑战。为了寻找一种快速填充的方法,需要新的镀铜溶液,并研究了一种新的填充方法——含铜球焊料。本文提出了一种由金属间化合物(IMCs)组成的新型TSV结构,并介绍了其制备工艺。为了形成这样的TSV结构,需要将液态焊料填充到孔中,并通过退火加速焊料与孔侧壁金属的相互扩散。研究了用SnPb焊料制备IMC tsv的可行性。焊料被填充到孔中,其中部分环形铜层被镀上。通过在通孔顶部的薄的突出的焊料材料,成功地实现了空隙自由填充。对铜基、焊料基和锡基IMC填充TSV进行了有限元分析,结果表明,IMC填充TSV可以获得相当甚至更低的应力,这取决于IMC的CTE。根据目前的研究结果,可以得出IMC tsv具有以下优点:成形速度快,成本低,高温稳定性好,应力小。
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引用次数: 2
Roll-to-roll (R2R) hot embossing for structuring 3D microstructures on polymer films 卷对卷(R2R)热压成型用于聚合物薄膜上的三维微结构
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507146
X. Shan, M. B. Mohahidin, A. Lu
Large area polymer films with patterned microstructures are expected to be widely used in various areas, such as functional optical films for flexible displays, lighting devices as well as structured films for microfluidic components. Large area embossing is a promising method for patterning microstructures on polymer substrates. We have investigated the process feasibility of roll-to-roll hot embossing as well as roll-to-plate hot embossing for large area, high-volume fabrication of microstructures on polymer substrates. Micro pillar (with diameter of 50μm) arrays were formed on polypropylene films via both roll-to-roll and roll-to-plate hot embossing. In this paper, we will report our achievement in roll-to-roll process study and explore potential industrial applications.
具有图像化微结构的大面积聚合物薄膜有望广泛应用于各种领域,如柔性显示器的功能光学薄膜、照明器件以及微流控元件的结构薄膜。大面积压印是一种很有前途的聚合物基板上微结构图案绘制方法。我们研究了卷对卷热压印和卷对板热压印在聚合物基板上大面积、大批量制造微结构的工艺可行性。采用卷对卷热压和卷对板热压两种方法在聚丙烯薄膜上形成直径为50μm的微柱阵列。在本文中,我们将报告我们在卷对卷工艺研究方面的成就,并探索潜在的工业应用。
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引用次数: 2
Study on creep fatigue behaviour of soft solders die attach for power package applications 电源封装用软焊料接头蠕变疲劳性能研究
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507055
Dandong Ge, F. Che, Yik Siong Tay, S. L. Gan, M. Yazid
Soft solder die attach is a widely used process for power and high-reliability automotive devices because soft solder has excellent heat-dissipation properties and outstanding robustness against delamination compared to traditional epoxy die attach. However, the creep-fatigue failure is one typical failure mechanism for solder material under thermal cycling. So it is essential to to understand the solder failure due to soft solder creep fatigue behavior. In this work, tensile creep tests for two soft solders, solder A and B, have been conducted at various temperatures and stress levels using a Dynamic Mechanical Analyzer (DMA). Creep constitutive models were developed and the material constants of the model were determined based on experimental results for both solders. The creep constitutive models were implemented in finite element analysis (FEA) to investigate the creep behavior of solder in the power packages for the evaluation of package reliability. Results show that solder A has better creep resistance than solder B, which indicates that the package with using solder A should have higher creep fatigue reliability than package with using solder B when subjected to thermal cycling. The storage modulus, liquidus temperature/solidus temperature for two types of solders were also measured by DMA and Differential Scanning Calorimetry (DSC), respectively.
由于软焊料与传统的环氧树脂焊料相比具有优异的散热性能和抗分层的鲁棒性,因此软焊料贴装是一种广泛应用于电力和高可靠性汽车器件的工艺。而蠕变疲劳失效是焊料在热循环作用下的一种典型失效机制。因此,了解软焊料蠕变疲劳行为导致的焊料失效是十分必要的。在这项工作中,使用动态机械分析仪(DMA)在不同温度和应力水平下对两种软焊料(焊料A和焊料B)进行了拉伸蠕变测试。建立了两种钎料的蠕变本构模型,并根据试验结果确定了模型的材料常数。采用蠕变本构模型进行有限元分析,研究电源封装中焊料的蠕变行为,以评估封装的可靠性。结果表明,A焊料的抗蠕变性能优于B焊料,说明在热循环过程中,A焊料的蠕变疲劳可靠性应高于B焊料。分别用DMA和差示扫描量热法(DSC)测定了两种焊料的储存模量、液温/固温。
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引用次数: 5
Design and implementation of magnetically coupled current probe for monitoring simultaneous switching current in package 用于监测封装中同步开关电流的磁耦合电流探头的设计与实现
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507060
Changhyun Cho, Jonghyun Cho, Jonghoon J. Kim, Joungho Kim, J. Pak
In this paper, we present a new embedded current probe that can support measurement-based approach for extracting switching current waveform that was injected into power distribution network (PDN). The proposed embedded current probing structure utilizes magnetic coupling behavior between primary conducting via and secondary toroidal coil structure surrounding and it can be used as a sensor which relates the induced voltage across toroidal coil to the switching current of conducting via. This paper will present characterization of magnetic coupling behavior of proposed embedded current probing structure, demonstration of proposed current extraction method by implementing the current probing structure in a board level PDN and validation of SSN analysis by applying the extracted current waveform through the simulation and measurement result.
在本文中,我们提出了一种新的嵌入式电流探头,它可以支持基于测量的方法来提取注入配电网络(PDN)的开关电流波形。所提出的嵌入式电流探测结构利用了一次导通孔与周围二次环形线圈结构之间的磁耦合特性,可以作为将环形线圈两端的感应电压与导通孔的开关电流联系起来的传感器。本文将介绍所提出的嵌入式电流探测结构的磁耦合特性,通过在板级PDN中实现电流探测结构来演示所提出的电流提取方法,并通过仿真和测量结果应用所提取的电流波形来验证SSN分析。
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引用次数: 0
Substrateless sensor packaging using wafer level fan-out technology 采用晶圆级扇出技术的无衬底传感器封装
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507124
M. Briindel, U. Scholz, F. Haag, E. Graf, T. Braun, K. Becker
In this paper, we present the application of a substrateless packaging technology consisting of sub sequential molding of ASIC and MEMS dice und forming redistribution layers (RDL) on the molding compound. Acceleration sensors and pressure sensors were packaged, each sensor type presenting its own challenges. For pressure sensors it is crucial to ensure the access of the surrounding media to the pressure sensitive membrane. This was achieved by structuring the redistribution layer without changing the process, making the application of standard equipment and materials relatively easy. The acceleration sensors needed to be modified by trough silicon vias to fit the packaging process. For the redistribution layer, a novel approach was evaluated in parallel to the standard thin-film technology for the acceleration sensor package. All sensor packages fabricated by the process have been found to be within the specifications of standard packages using the same MEMS dice.
在本文中,我们提出了一种无衬底封装技术的应用,该技术由ASIC和MEMS芯片的次顺序成型以及在成型化合物上形成再分布层(RDL)组成。加速度传感器和压力传感器是封装的,每种传感器类型都有自己的挑战。对于压力传感器来说,确保周围介质进入压敏膜是至关重要的。这是通过在不改变工艺的情况下构建再分配层来实现的,这使得标准设备和材料的应用相对容易。加速度传感器需要通过硅槽孔进行修改,以适应封装过程。对于重分布层,本文提出了一种与标准薄膜技术并行的加速度传感器封装新方法。通过该工艺制造的所有传感器封装均符合使用相同MEMS dice的标准封装的规格。
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引用次数: 5
Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD) 基于物理气相沉积(PVD)的MEMS真空晶圆级封装(WLE)
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507104
B. Soon, Navab Singh, J. Tsai, Chengkuo Lee
In this paper, we demonstrate wafer level encapsulation of MEMS using physical vapor deposition of aluminum (Al). A cavity area, which simulates the area of a MEMS device, is fully encapsulated by dual layer of amorphous silicon and Al. The encapsulation process takes place in the PVD chamber, thus the vacuum level in the sealed cavity is assumed to be high. The proposed processes are entirely CMOS compatible and readily deployed into any standard CMOS foundry and semiconductor wafer fabrication.
在本文中,我们演示了利用铝(Al)的物理气相沉积的MEMS晶圆级封装。模拟MEMS器件面积的空腔区域由非晶硅和铝双层完全封装。封装过程在PVD腔室中进行,因此假定密封腔内的真空度很高。所提出的工艺完全与CMOS兼容,并且易于部署到任何标准的CMOS铸造厂和半导体晶圆制造中。
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引用次数: 2
LED thermal management of an automotive electronic control module with display 带显示屏的汽车电子控制模块的LED热管理
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507187
S. Sushanth Kumar, Satishchandra C Warn, Roland Lee
In automobiles, an ECM (Electronic Control Module) is used for controlling internal ambient temperature of vehicles to enhance comfort level of passengers. It typically contains a display module to show various operational modes such as cooling air temperature, ON/OFF for blower, AC, de-fogger etc. The display module uses LEDs as source of illumination. Adequate illumination requires packaging of several LEDs m a compact/constrained space. Also LEDs must operate at very high ambient temperature of 85°C that leads to significant thermal management challenges. This paper describes parametric studies using various thermal management techniques such as heat spreader, increased PCB copper layer thickness, increased copper pad size for LED, high conductive plastic back cover along with pedestals, thermal via for LEDs and vent holes for the enclosure; to bring down LED temperatures within its safe operating limit. LEDs are modeled in detail (using contact resistance between the die and lead frame) in order to improve the accuracy of junction temperature prediction. A combination of thermal management solutions/techniques are used to mitigate heat from LEDs with significant bearing on cost competitiveness.
在汽车中,ECM (Electronic Control Module)用于控制车辆内部环境温度,以提高乘客的舒适度。它通常包含一个显示模块,以显示各种操作模式,如冷却空气温度,开/关鼓风机,交流,除雾器等。显示模块使用led作为照明光源。充足的照明需要在一个紧凑/受限的空间内封装几个led。此外,led必须在85°C的高环境温度下工作,这导致了重大的热管理挑战。本文描述了使用各种热管理技术的参数化研究,例如散热器,增加PCB铜层厚度,增加LED铜垫尺寸,高导电性塑料后盖以及基座,LED的热通孔和外壳的通风口;将LED温度降低到安全工作范围内。为了提高结温预测的准确性,对led进行了详细的建模(使用芯片和引线框架之间的接触电阻)。热管理解决方案/技术的组合用于减少led的热量,这对成本竞争力有重要影响。
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引用次数: 3
High-temperature endurable encapsulation material 耐高温封装材料
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507052
V. Chidambaram, Ho Beng Yeung, C. Sing, Daniel Rhee Min Woo
The accomplishment of fully functional high-pressure high-temperature (HPHT) well is possible only, when the packaging and interconnections in the well logging equipments can survive at higher temperatures. Currently, there are numerous choices for substrate materials and interconnection materials. However, there are hardly any encapsulation materials that can endure at 300°C. Thus, the limiting factor for the evaluation and monitoring of HPHT wells is; the availability of high-temperature endurable encapsulation material. In this paper, the endurability of three prospective candidates for high-temperature encapsulation have been characterized and reported. The three prospective candidates are benzocyclobutene (BCB), ceramic filled cyanate ester and quartz filled cyanate ester. The high-temperature endurability has been evaluated in this work by high-temperature storage at 300°C up to 500 hours. Adhesion strength of these prospective candidates with the alumina ceramic substrate and the Si die was verified by room shear testing and hot shear testing. It has been determined that the quartz filled cyanate ester could comply with the minimum indispensable requirement for this application, when sandwiched between alumina ceramic substrates, despite the loss of strength during long-term thermal aging at 300°C. The material degradation has been studied in this work, using thermo-gravimetric analysis.
只有当测井设备中的封装和互连能够在更高的温度下工作时,才有可能完成功能齐全的高压高温井。目前,对于衬底材料和互连材料有许多选择。然而,几乎没有任何封装材料可以承受300°C的高温。因此,高温高压井评价与监测的限制因素是;可获得耐高温的封装材料。本文对三种候选高温封装材料的耐久性进行了表征和报道。三种候选材料分别是苯并环丁烯、陶瓷填充氰酸酯和石英填充氰酸酯。在这项工作中,通过在300°C高温储存长达500小时来评估高温耐久性。通过室内剪切测试和热剪切测试验证了这些候选材料与氧化铝陶瓷衬底和Si模具的粘附强度。已经确定,石英填充的氰酸酯可以满足这种应用的最低不可缺少的要求,当夹在氧化铝陶瓷衬底之间时,尽管在300°C的长期热老化过程中强度会损失。本文采用热重分析法对材料的降解进行了研究。
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引用次数: 6
Wire bond and molding factors influencing bare Cu wire surface conditions 影响裸铜线表面状况的线材粘结和成型因素
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507134
Chan Wai Kok, Tham Veng Leong, W. Yong
Bare copper (Cu) wire is one of the promising materials used in assembly packaging to replace gold wire. As copper is harder compared to gold, the formation of the looping during wire bonding is a concern and challenge especially to ball neck surface condition. Thus, the objective of this paper is to identify the key parameters that are having significant impact on the ball neck surface condition at wire bond and molding process. Evaluations are performed and the result do identified key factors that are having impact to the ball neck surface condition.
裸铜线是一种很有前途的替代金线的组装封装材料。由于铜比金更硬,在金属丝键合过程中形成环是一个问题和挑战,特别是对球颈表面状况。因此,本文的目的是确定在钢丝结合和成型过程中对球颈表面状况有重大影响的关键参数。进行了评估,结果确定了影响球颈表面状况的关键因素。
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引用次数: 0
期刊
2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)
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