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2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)最新文献

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Flow modeling of die attach process and the optimization of process parameters in advance packaging 预封装贴装工艺流程建模与工艺参数优化
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507111
L. Ji, L. Wai, Min Woo Daniel Rhee
This paper presents a new numerical model to characterize the die attach process in the advance packaging. With its successful application on a 5 mm by 5 mm with 70um thickness die attached to the substrate, final fillet shape of the die attach material is predicted for various process conditions. Focuses have been given on the die attach material over flow on the die top surface. The contamination on the die top surface may cause failures in the subsequent processes. The simulation results were compared with the experiment. Good match was obtained. Moreover, process window for a given amount die attach material was established through the simulation and the corresponding bonding force that will not cause die attach material over flow was predicted. Key advantage of this numerical study is to give the insights into process parameters and provide initial process window to prevent die attach over flow.
本文提出了一种新的数值模型来描述预封装中的贴模过程。该方法成功地应用于附着在基板上的厚度为5mm × 5mm、厚度为70um的模具上,预测了各种工艺条件下附着模材料的最终圆角形状。重点讨论了模具附着物在模具顶面上的过流问题。模具上表面的污染可能会导致后续工序失效。仿真结果与实验结果进行了比较。得到了良好的匹配。通过仿真建立了一定数量模贴材料的工艺窗口,并预测了相应的不引起模贴材料过流的结合力。该数值研究的主要优点是提供了对工艺参数的深入了解,并提供了初始工艺窗口,以防止模具过流。
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引用次数: 1
Reliability of isotropic electrically conductive adhesives under condensing humidity testing 各向同性导电胶粘剂在冷凝湿度试验下的可靠性
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507073
L. Frisk, S. Lahokallio, M. Mostofizadeh, J. Kiilunen, K. Saarinen
Electrically conductive adhesives (ECA) are considered to be one of the future technologies due to their potential for low cost, high reliability, and simple processing. Additionally, an important advantage with ECA materials is the possibility for low bonding temperature. Therefore, they are especially well suited for low cost applications. ECA materials are prepared by mixing polymer matrix with electrically conductive particles. In isotropic conductive adhesives (ICA) concentration of the conductive particles is high and they conduct in all directions. Several materials can be used to manufacture ICAs. The most widely used ICAs in the electronics industry are silver-filled epoxies, which also provide a high level of thermal conductivity. However, other polymers can also be used. All polymer materials used in ICAs absorb moisture, which affects their mechanical behavior. Additionally, the electrical properties of the ICA may change. Therefore it is important to study how different ICA materials behave under humid conditions. Especially, if the humidity levels are high, these changes may occur very rapidly. In this work 14 different commercial ICA materials were studied under condensing humidity conditions. To study the behavior of the ICAs they were used to attach zero ohm resistors onto FR-4 test boards. To study the effect of glob top on the behavior of the ICAs, two additional test series were assembled with two epoxy ICAs using a glop top material to protect the components and the interconnections. Marked changes were seen in the resistance values of the test samples during the test. Additionally, considerable variation was seen between the ICAs. Some ICAs showed increased resistance values very quickly after the testing was started. The two ICAs not shown did not show failures during testing.
导电性胶粘剂(ECA)由于其低成本、高可靠性和简单加工的潜力,被认为是未来的技术之一。此外,ECA材料的一个重要优势是可以实现低粘合温度。因此,它们特别适合低成本应用。ECA材料是由聚合物基体与导电颗粒混合制备的。在各向同性导电胶粘剂(ICA)中,导电颗粒的浓度高,且各向异性导电。有几种材料可用于制造ica。电子工业中最广泛使用的ica是银填充环氧树脂,它也提供高水平的导热性。然而,也可以使用其他聚合物。所有用于ica的聚合物材料都会吸收水分,从而影响其机械性能。此外,ICA的电学性质可能会发生变化。因此,研究不同ICA材料在潮湿条件下的表现是很重要的。特别是,如果湿度水平很高,这些变化可能会非常迅速地发生。本文对14种不同的商用ICA材料在冷凝湿度条件下进行了研究。为了研究ica的行为,他们被用来将零欧姆电阻连接到FR-4测试板上。为了研究球形顶对ICAs性能的影响,两个额外的测试系列与两个环氧ICAs一起使用球形顶材料来保护组件和互连。在测试过程中,测试样品的电阻值发生了明显的变化。此外,在ICAs之间可以看到相当大的差异。一些ica在测试开始后很快显示出电阻值的增加。没有显示的两个ica在测试期间没有显示故障。
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引用次数: 1
Processing of ultrathin wafers for power chip applications 用于功率芯片应用的超薄晶圆的加工
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507162
Amarjit Dhadda, Robert M. Montgomery, P. Jones, Jason Heirene, Rachel Kuthakis, F. Bieck
Providing thinner and thinner Silicon is one of the key challenges in today's semiconductor manufacturing. The thinner the wafer and thus the die, the thinner the package can be designed. Getting thinner devices is also a necessary precondition for Trough Silicon Via (TSV) technology, in which a thin wafer is needed in order to create through-contacts in the die. While for standard wafer applications the driver for thinner Silicon wafers may be considered as “geometrical”, this is not the case for power chip application. Here, the main driver for using thinner Silicon in powerchip applications is directly linked to device performance. As the Rds(on) is primarily a function of the device thickness and thus the wafer thickness, producing thinner Silicon provides not only geometrical advantages in the packaging process, but especially better performing devices. In order to fullill the demand for thinner and thus improved devices, International Rectifier (IR) has recently installed a 200 mm line for ultrathin wafers. In this paper, we will describe and discuss the thinning process that is implemented at IR.
提供越来越薄的硅是当今半导体制造的关键挑战之一。晶圆和晶片越薄,封装就可以设计得越薄。更薄的器件也是槽式硅通孔(TSV)技术的必要先决条件,在TSV技术中,为了在芯片中创建穿过接触,需要更薄的晶圆。虽然对于标准晶圆应用,更薄硅晶圆的驱动可能被认为是“几何”的,但对于功率芯片应用,情况并非如此。在这里,在功率芯片应用中使用更薄硅的主要驱动因素与器件性能直接相关。由于Rds(on)主要是器件厚度和晶圆厚度的函数,因此生产更薄的硅不仅在封装过程中具有几何优势,而且特别是性能更好的器件。为了满足对更薄和改进器件的需求,国际整流器公司(IR)最近安装了一条200毫米的超薄晶圆生产线。在本文中,我们将描述和讨论在IR中实现的细化过程。
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引用次数: 6
Wafer level packaging of RF MEMS devices using TSV interposer technology 采用TSV中间层技术的RF MEMS器件的晶圆级封装
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507083
V. N. Sekhar, J. Toh, Jin Cheng, J. Sharma, S. Fernando, Chen Bangtao
This paper presents the design, fabrication and characterization of MEMS wafer level packaging (WLP) with TSV based silicon interposer as cap wafer. High resistivity Si wafers have been used for TSV interposer fabrication mainly to minimize the intrinsic loss of RF MEMS device due to packaging. During development of this RF MEMS WLP, many key challenging processes have been developed such as, high aspect ratio TSV fabrication, double side RDL fabrication, thin wafer handling of TSV interposer and optimization of Au-Sn based TLP bonding. There are several fabrication steps involved in the actual process flow as, a) TSV fabrication and front side RDL patterning and passivation, b) Wafer thinning and backside RDL patterning and passivation c) UBM/ seal ring solder deposition and cavity formation, and d) TLP based wafer bonding of cap TSV interposer wafer with MEMS CPW wafer. Different CPW designs with three passivation schemes have been fabricated mainly to study the effect of passivation on insertion loss and ultimately quantify the packaging insertion loss. In pre-bonding testing, effect of passivation on insertion loss is thoroughly studied. After successful fabrication of the WLP, loss of RF device characteristics due to packaging has been studied. Before and after packaging, S-parameter measurements performed on coplanar waveguides (CPW). Amongst different passivation schemes, CPW structures with poly-silicon passivation have shown better performance.
本文介绍了以TSV基硅中间体为封盖晶圆的MEMS晶圆级封装(WLP)的设计、制造和表征。高电阻率硅片已被用于TSV中间层的制造,主要是为了尽量减少射频MEMS器件由于封装而造成的固有损耗。在此RF MEMS WLP的开发过程中,开发了许多具有挑战性的关键工艺,如高纵横比TSV制造,双面RDL制造,TSV中间层的薄晶片处理以及Au-Sn基TLP键合的优化。在实际的工艺流程中,有几个制造步骤涉及到,a) TSV制造和正面RDL图案和钝化,b)晶圆减薄和背面RDL图案和钝化,c) UBM/密封圈焊料沉积和空腔形成,d)基于TLP的TSV中间晶圆与MEMS CPW晶圆的晶圆键合。采用三种钝化方案设计了不同的CPW,主要研究了钝化对插入损耗的影响,并最终量化了封装插入损耗。在预粘接试验中,深入研究了钝化对插入损失的影响。在成功制造WLP后,研究了封装对射频器件特性的影响。在封装前后,对共面波导(CPW)进行了s参数测量。在不同的钝化方案中,采用多晶硅钝化的CPW结构表现出更好的性能。
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引用次数: 9
Microstructure and plating thickness analysis of different surface finished plated printed circuit boards 不同表面镀层印刷电路板的微结构及镀层厚度分析
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507039
Tama Fouzder, Y. Chan, Daniel K. Chan
Different surface finished lead-free electroplated Cu substrates were prepared using an electrolytic process jointly developed for special applications. The surface morphology and plated layer thicknesses were investigated using atomic force microscope (AFM) and seanning electron microscope (SEM). From SEM micrographs, it was confirmed that the plated layers i.e., Au/Ni and Ag/Ni were well deposited on Cu substrates uniformly. In addition, the plated layer thicknesses were increased with an increasing processing temperature. The average Au/Ni p lated layers thicknesses atplated temperatures of30°C, 40°C and 5 0°C were about 0.67μm, 0.71μm and 0.77 μm, respectively. On the other hand, the average Ag/Ni plated layers thicknesses at plated temperatures of 10°C, 20°C and 30°C were about 6.5μm, 7.7μm and 8.4μm, respectively. From AFM observations, it was confirmed that the plated layer appeared to have a very smooth surface without any defects such as cra cks, delamination etc., confirming the successful application of the specially developed electrolytic process.
采用联合开发的特殊用途电解工艺制备了不同表面无铅电镀铜基板。采用原子力显微镜(AFM)和扫描电镜(SEM)研究了表面形貌和镀层厚度。SEM显微图证实,镀层即Au/Ni和Ag/Ni均匀地沉积在Cu衬底上。镀层厚度随加工温度的升高而增加。在30°C、40°C和50°C时,Au/Ni镀层的平均厚度分别为0.67μm、0.71μm和0.77 μm。另一方面,镀温度为10℃、20℃和30℃时,Ag/Ni镀层的平均厚度分别为6.5μm、7.7μm和8.4μm。从原子力显微镜观察证实,镀层表面非常光滑,没有任何裂纹、分层等缺陷,证实了专门开发的电解工艺的成功应用。
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引用次数: 0
Substrateless sensor packaging using wafer level fan-out technology 采用晶圆级扇出技术的无衬底传感器封装
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507124
M. Briindel, U. Scholz, F. Haag, E. Graf, T. Braun, K. Becker
In this paper, we present the application of a substrateless packaging technology consisting of sub sequential molding of ASIC and MEMS dice und forming redistribution layers (RDL) on the molding compound. Acceleration sensors and pressure sensors were packaged, each sensor type presenting its own challenges. For pressure sensors it is crucial to ensure the access of the surrounding media to the pressure sensitive membrane. This was achieved by structuring the redistribution layer without changing the process, making the application of standard equipment and materials relatively easy. The acceleration sensors needed to be modified by trough silicon vias to fit the packaging process. For the redistribution layer, a novel approach was evaluated in parallel to the standard thin-film technology for the acceleration sensor package. All sensor packages fabricated by the process have been found to be within the specifications of standard packages using the same MEMS dice.
在本文中,我们提出了一种无衬底封装技术的应用,该技术由ASIC和MEMS芯片的次顺序成型以及在成型化合物上形成再分布层(RDL)组成。加速度传感器和压力传感器是封装的,每种传感器类型都有自己的挑战。对于压力传感器来说,确保周围介质进入压敏膜是至关重要的。这是通过在不改变工艺的情况下构建再分配层来实现的,这使得标准设备和材料的应用相对容易。加速度传感器需要通过硅槽孔进行修改,以适应封装过程。对于重分布层,本文提出了一种与标准薄膜技术并行的加速度传感器封装新方法。通过该工艺制造的所有传感器封装均符合使用相同MEMS dice的标准封装的规格。
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引用次数: 5
Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD) 基于物理气相沉积(PVD)的MEMS真空晶圆级封装(WLE)
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507104
B. Soon, Navab Singh, J. Tsai, Chengkuo Lee
In this paper, we demonstrate wafer level encapsulation of MEMS using physical vapor deposition of aluminum (Al). A cavity area, which simulates the area of a MEMS device, is fully encapsulated by dual layer of amorphous silicon and Al. The encapsulation process takes place in the PVD chamber, thus the vacuum level in the sealed cavity is assumed to be high. The proposed processes are entirely CMOS compatible and readily deployed into any standard CMOS foundry and semiconductor wafer fabrication.
在本文中,我们演示了利用铝(Al)的物理气相沉积的MEMS晶圆级封装。模拟MEMS器件面积的空腔区域由非晶硅和铝双层完全封装。封装过程在PVD腔室中进行,因此假定密封腔内的真空度很高。所提出的工艺完全与CMOS兼容,并且易于部署到任何标准的CMOS铸造厂和半导体晶圆制造中。
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引用次数: 2
LED thermal management of an automotive electronic control module with display 带显示屏的汽车电子控制模块的LED热管理
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507187
S. Sushanth Kumar, Satishchandra C Warn, Roland Lee
In automobiles, an ECM (Electronic Control Module) is used for controlling internal ambient temperature of vehicles to enhance comfort level of passengers. It typically contains a display module to show various operational modes such as cooling air temperature, ON/OFF for blower, AC, de-fogger etc. The display module uses LEDs as source of illumination. Adequate illumination requires packaging of several LEDs m a compact/constrained space. Also LEDs must operate at very high ambient temperature of 85°C that leads to significant thermal management challenges. This paper describes parametric studies using various thermal management techniques such as heat spreader, increased PCB copper layer thickness, increased copper pad size for LED, high conductive plastic back cover along with pedestals, thermal via for LEDs and vent holes for the enclosure; to bring down LED temperatures within its safe operating limit. LEDs are modeled in detail (using contact resistance between the die and lead frame) in order to improve the accuracy of junction temperature prediction. A combination of thermal management solutions/techniques are used to mitigate heat from LEDs with significant bearing on cost competitiveness.
在汽车中,ECM (Electronic Control Module)用于控制车辆内部环境温度,以提高乘客的舒适度。它通常包含一个显示模块,以显示各种操作模式,如冷却空气温度,开/关鼓风机,交流,除雾器等。显示模块使用led作为照明光源。充足的照明需要在一个紧凑/受限的空间内封装几个led。此外,led必须在85°C的高环境温度下工作,这导致了重大的热管理挑战。本文描述了使用各种热管理技术的参数化研究,例如散热器,增加PCB铜层厚度,增加LED铜垫尺寸,高导电性塑料后盖以及基座,LED的热通孔和外壳的通风口;将LED温度降低到安全工作范围内。为了提高结温预测的准确性,对led进行了详细的建模(使用芯片和引线框架之间的接触电阻)。热管理解决方案/技术的组合用于减少led的热量,这对成本竞争力有重要影响。
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引用次数: 3
High-temperature endurable encapsulation material 耐高温封装材料
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507052
V. Chidambaram, Ho Beng Yeung, C. Sing, Daniel Rhee Min Woo
The accomplishment of fully functional high-pressure high-temperature (HPHT) well is possible only, when the packaging and interconnections in the well logging equipments can survive at higher temperatures. Currently, there are numerous choices for substrate materials and interconnection materials. However, there are hardly any encapsulation materials that can endure at 300°C. Thus, the limiting factor for the evaluation and monitoring of HPHT wells is; the availability of high-temperature endurable encapsulation material. In this paper, the endurability of three prospective candidates for high-temperature encapsulation have been characterized and reported. The three prospective candidates are benzocyclobutene (BCB), ceramic filled cyanate ester and quartz filled cyanate ester. The high-temperature endurability has been evaluated in this work by high-temperature storage at 300°C up to 500 hours. Adhesion strength of these prospective candidates with the alumina ceramic substrate and the Si die was verified by room shear testing and hot shear testing. It has been determined that the quartz filled cyanate ester could comply with the minimum indispensable requirement for this application, when sandwiched between alumina ceramic substrates, despite the loss of strength during long-term thermal aging at 300°C. The material degradation has been studied in this work, using thermo-gravimetric analysis.
只有当测井设备中的封装和互连能够在更高的温度下工作时,才有可能完成功能齐全的高压高温井。目前,对于衬底材料和互连材料有许多选择。然而,几乎没有任何封装材料可以承受300°C的高温。因此,高温高压井评价与监测的限制因素是;可获得耐高温的封装材料。本文对三种候选高温封装材料的耐久性进行了表征和报道。三种候选材料分别是苯并环丁烯、陶瓷填充氰酸酯和石英填充氰酸酯。在这项工作中,通过在300°C高温储存长达500小时来评估高温耐久性。通过室内剪切测试和热剪切测试验证了这些候选材料与氧化铝陶瓷衬底和Si模具的粘附强度。已经确定,石英填充的氰酸酯可以满足这种应用的最低不可缺少的要求,当夹在氧化铝陶瓷衬底之间时,尽管在300°C的长期热老化过程中强度会损失。本文采用热重分析法对材料的降解进行了研究。
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引用次数: 6
Wire bond and molding factors influencing bare Cu wire surface conditions 影响裸铜线表面状况的线材粘结和成型因素
Pub Date : 2012-12-01 DOI: 10.1109/EPTC.2012.6507134
Chan Wai Kok, Tham Veng Leong, W. Yong
Bare copper (Cu) wire is one of the promising materials used in assembly packaging to replace gold wire. As copper is harder compared to gold, the formation of the looping during wire bonding is a concern and challenge especially to ball neck surface condition. Thus, the objective of this paper is to identify the key parameters that are having significant impact on the ball neck surface condition at wire bond and molding process. Evaluations are performed and the result do identified key factors that are having impact to the ball neck surface condition.
裸铜线是一种很有前途的替代金线的组装封装材料。由于铜比金更硬,在金属丝键合过程中形成环是一个问题和挑战,特别是对球颈表面状况。因此,本文的目的是确定在钢丝结合和成型过程中对球颈表面状况有重大影响的关键参数。进行了评估,结果确定了影响球颈表面状况的关键因素。
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引用次数: 0
期刊
2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)
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